MAS MAS6512

DA6512.000
11 July, 2012
MAS6512
This is preliminary information on a new
product under development. Micro Analog
Systems Oy reserves the right to make any
changes without notice.
Capacitive Sensor Signal Interface IC
Single or Dual Capacitance Sensors
Low Voltage Operation
Low Power Consumption
On Chip Temperature Sensor
Internal Clock Oscillator
16-Bit Ratiometric ∆Σ CDC
EEPROM Calibration Memory
Serial Interface
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DESCRIPTION
MAS6512 capacitive sensor signal Interface IC can
interface both single and dual capacitance sensors.
It uses a 16-bit Capacitance-to-Digital
Converter (CDC), which employs a delta-sigma
(∆Σ) conversion technique. The output data from
the ∆Σ-modulator is processed by an on-chip
decimator filter, producing a high resolution
conversion result. The converter is run by an
internal clock oscillator making an external
converter clock unnecessary.
The converter input range is programmable
to meet various sensor offset and changing
capacitance values. Maximum sensor capacitance
is 40pF but higher maximum value can be reached
by using slower conversion speed or scaling the
signal by using an external series capacitor.
The measurement resolution depends on
the programmed capacitance range and over
sampling ratio (OSR) selections.
MAS6512 supports two capacitance
measurement modes. The output can be
FEATURES
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Single and Differential Capacitive Sensors
Sensor Offset and Gain Adjustment
• Changing Capacitance Range 2pF…30pF
• Internal Offset Capacitance Matrix 0pF…22pF
• External Capacitance up to 40pF (or higher
using external clock)
Resolution 14 bit (OSR=4096, ∆C=20pF)
Internal Clock Oscillator
On Chip Temperature Sensor -40°C...+85°C
Low Voltage Operation 1.8 V…3.6 V
Low Supply Current: 1.9 µA...28 µA
Conversion Time 5.8ms...82.6ms (12Hz...173Hz)
16-bit Ratiometric ∆Σ CDC
Internal 256-bit EEPROM Calibration Memory
I2C is a registered trademark of NXP.
proportional either to capacitance difference (CS-CR)
or to capacitance ratio (CS-CR)/CS.
The IC is designed especially to meet the
requirement for low power consumption, thus
making it an ideal choice for battery powered
systems. Current consumption values of 28 µA with
high resolution or 1.9 µA with low resolution, at a
conversion rate of one conversion per second, can
be achieved.
In addition to measuring capacitance the
device has an internal temperature sensor for
temperature measurement and temperature
compensation purposes. The 256-bit EEPROM
memory stores trimming and calibration coefficients
on chip.
A serial interface, compatible with a bi2
directional 2-wire I C bus and 4-wire SPI bus, is
used for conversion setup, starting a conversion
and reading the conversion result.
APPLICATIONS
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2
I C and SPI Compatible Serial Interface
QFN-16 Package
Capacitive Pressure Sensors
Humidity Sensors
Medical Devices
Flow Meters
Sport Watches
Altimeter and Barometer Systems
Mobile and Battery Powered Systems
Low Frequency Measurement applications
Current/Power Consumption Critical Systems
Industrial and Process Control applications in
noisy environments
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DA6512.000
11 July, 2012
BLOCK DIAGRAM
VDD
OSCOUT
VDD
MISO
MUX
CS
CLK
OSC
I2C /
SDA/MOSI
SCL/SCLK
SPI
CC
CONTROL
XCS
XSPI
CR
EOC
∆Σ
XCLR
VREG
TEMP
EEPROM
VREG
TEST1
TEST
TEST2
GND
GND
Figure 1. MAS6512 block diagram
FUNCTIONAL DESCRIPTION
MAS6512 can interface both single and dual
capacitance sensors. Single capacitance sensors
should be connected between the CS and the CC
inputs. The second capacitor of a dual capacitance
sensor should be connected between the CR and
the CC inputs.
the EEPROM memory in the beginning of each
conversion. To avoid modification of the EEPROM
by mistake there is an EEPROM write enable
register which needs to be set to %01010101
(55HEX) before any changes can be done to the
EEPROM.
A Capacitance-to-Digital Converter (CDC) converts
the input capacitances into a 16-bit output word
(code). The converter front-end can be configured
either for capacitance difference (CS-CR) or
capacitance ratio (CS-CR)/CS measurement mode.
Converter resolution is selected by the over
sampling ratio (OSR) setting. Higher OSR
corresponds to higher resolution but also longer
conversion time.
MAS6512 has an internal clock oscillator making an
external clock unnecessary. To save power it’s
turned on only when a conversion is running. The
frequency is trimmed to 200kHz using a 6-bit
register. An external clock, connected to the
OSCOUT pin, can however be used when a specific
test mode is chosen. This might be necessary when
measuring large capacitance since a slower clock
frequency is needed in this case.
There are two internal 22pF capacitance matrices
connected to the CS and the CR inputs. These
matrices are used for sensor offset calibration and
are programmable in 8-bit steps (86fF/step).
The gain is programmable with 8-bits resolution and
sets the range for how much the measured
capacitance can change.
MAS6512 includes an internal temperature sensor
for temperature compensation purposes. A
multiplexer in the front-end is used to select either
the external capacitive sensor or the internal
temperature sensor.
Trim and calibration coefficients can be stored in
the 256-bit EEPROM memory. The stored trim
values for the oscillator frequency, offset
capacitance and gain are automatically read from
I2C is a registered trademark of NXP.
MAS6512 includes a 1.8V regulator that can be
disabled in capacitance measurement mode. In
temperature measurement mode the regulator is
always used. The regulator is turned off between
conversions.
Communication with MAS6512 is handled by the
serial interface compatible with either a bi2
directional 2-wire I C bus or a 4-wire SPI bus. The
XSPI pin is for selecting which bus type is used.
The XCLR pin can be used to reset the device
including the serial communication.
The EOC pin indicates if a conversion has finished
and the result is ready to be read from the memory
via the serial interface.
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DA6512.000
11 July, 2012
ABSOLUTE MAXIMUM RATINGS
All Voltages with Respect to Ground
Parameter
Symbol
Supply Voltage
Voltage Range for All Pins
Latchup Current Limit
VDD
Junction Temperature
Storage Temperature
TJmax
TS
ILUT
Conditions
For all pins, test according to
JESD78A.
Note 1
Min
Max
Unit
-0.3
-0.3
-100
5.0
VDD + 0.3
+100
V
V
mA
- 55
+ 150
+125
°C
°C
Note 1: See EEPROM memory data retention at hot temperature. Storage or bake at hot temperatures will reduce the wafer level trimming
and calibration data retention time.
Note: The absolute maximum rating values are stress ratings only. Functional operation of the device at conditions between maximum
operating conditions and absolute maximum ratings is not implied and EEPROM contents may be corrupted. Exposure to these conditions
for extended periods may affect device reliability (e.g. hot carrier degradation, oxide breakdown). Applying conditions above absolute
maximum ratings may be destructive to the devices.
Note: This is a CMOS device and therefore it should be handled carefully to avoid any damage by static voltages (ESD).
RECOMMENDED OPERATION CONDITIONS
Parameter
Symbol
Conditions
Min
Typ
Max
Unit
Supply Voltage
VDD
VDD
1.8
1.9
3.0
2.7
2.7
3.3
3.6
3.6
3.6
V
Supply Voltage at EEPROM
Programming
Operating Temperature
Internal regulator disabled
Internal regulator enabled
T=+25°C. Note 1.
V
-40
+25
+85
°C
TA
Note 1. The recommended condition for EEPROM programming is room temperature.
ELECTRICAL CHARACTERISTICS
Operating Conditions: VDD = 2.7 V, TA = -40°C to +85°C, typical values at TA = +27°C, unless otherwise specified.
Parameter
Internal regulator voltage
Quiescent current
Conversion current
consumption
Average current
consumption
Conversion time
VDD rise time for proper
power on reset (POR)
Internal system clock
oscillator frequency
Sensor excitation
frequency
Symbol
VREG
IQ
IDD_CONV
IDD_AVE
tCONV
tVDD_RISE
Conditions
Regulator enabled
All inputs at VDD, no
load. Note 1.
During conversion
1 conversion/s
OSR=4096
OSR=2048
OSR=1024
OSR=512
OSR=256
OSR=4096
OSR=2048
OSR=1024
OSR=512
OSR=256
Note 2.
OSCOUT
MCLK
No internal clock division
Internal clock division
Min
Typ
Max
1.8
Unit
V
0.1
µA
390
µA
28
14.1
7.1
3.7
1.9
82.6
41.6
21.1
10.9
5.8
µA
ms
400
ns
200
kHz
50
25
kHz
Note 1. Setting XCS low activates the EEPROM memory regardless of the XSPI setting and the device consumes 20µA …30µA current. To
minimize current consumption XCS should be set low only during time periods when the device is used during SPI communication.
Note 2. Resetting the device using the XCLR pin is necessary in case the VDD rise time is longer than specified here.
3 (26)
DA6512.000
11 July, 2012
ELECTRICAL CHARACTERISTICS
Operating Conditions: VDD = 2.7 V, TA = -40°C to +85°C, typical values at TA = +27°C, unless otherwise specified.
Parameter
Internal offset capacitor
matrix selection
Changing capacitance
range in capacitance
difference mode
Maximum allowed sensor
capacitance in capacitance
difference mode
Changing capacitance
range in capacitance ratio
mode
Maximum allowed sensor
capacitance in capacitance
ratio mode
Integral nonlinearity
Symbol
CR_OS, CS_OS
COS_STEP
∆CDIFF
CS_MAX
∆CRATIO
Min
Typ
Max
Unit
22
pF
2
2
20
30
pF
pF
2
20
40
Note 1.
20
20
>20
pF
0
0.086
No internal clock division
Internal clock / 2
Internal clock
Internal clock / 2
External clock
Note 2.
CS_MAX
Note 2.
INL
RMS resolution
RMS resolution
Internal temperature
sensor
Conditions
OSR=256, capacitance
difference mode
Difference mode
CODEDIFF~(CS-CR)
∆C=20pF
OSR=4096
Ratio mode
CODERATIO~(CS-CR)/CS
∆C=20pF
OSR=4096
Linearity
Gain
Offset
OSR=4096
OSR=2048
OSR=1024
OSR=512
OSR=256
Non-calibrated, note 3.
Non-calibrated, note 3.
0.012
% of
∆C
14
bit
14
±0.35
bit
°C
±0.5
267,8
267,6
267,3
33,3
4,1
-4.5
pF
LSB/
°C
+3.5
%
±11
°C
Note 1. In capacitance difference mode the maximum allowed sensor and reference capacitor values can be extended using lower external
oscillator frequency; CS_MAX=20pF*200kHz/f OSC_EXT.
Note 2. In capacitance ratio mode also larger capacitances are possible depending on sensor characteristics. Please contact Micro Analog
Systems to check sensor suitability.
Note 3. By calibrating the temperature measurement and compensating offset and gain errors an overall accuracy close to the linearity
accuracy can be achieved.
4 (26)
DA6512.000
11 July, 2012
ELECTRICAL CHARACTERISTICS
Operating Conditions: VDD = 2.7 V, TA = -40°C to +85°C, typical values at TA = +27°C, unless otherwise specified.
Parameter
Symbol
Conditions
Min
Typ
EEPROM size
EEPROM data retention
TA = +85 °C
TA = +125 °C
10
Output data word length
Linear output code
range
(10%...90% of full
output code range)
CODEDIFF
CODERATIO
Full output code range
CODEDIFF
CODERATIO
Difference mode
Cs_min=8pF,
Cs_max=12pF, Cr=10pF,
gain setting 6Dhex
OSR=256
OSR=512
OSR=1024
OSR=2048
OSR=4096
Ratio mode
Cs_min=8pF,
Cs_max=12pF,
Cr=7.68pF,
gain setting 4Dhex
OSR=256
OSR=512
OSR=1024
OSR=2048
OSR=4096
OSR=256
OSR=512
OSR=1024
OSR=2048
OSR=4096
OSR=256
OSR=512
OSR=1024
OSR=2048
OSR=4096
Max
Unit
256
bit
24
1
16
years
bit
89
71
5721
5727
5731
799
6422
51494
51552
51580
102
769
5944
5839
5786
0
0
0
0
0
0
0
0
0
0
790
6389
51362
51486
51547
892
7152
57280
57312
57328
888
7136
57216
57280
57312
Digital inputs
Parameter
Symbol
Conditions
Min
Input High Voltage
VIH
VDD = 1.8…3.6V
Input Low Voltage
VIL
VDD = 1.8…3.6V
80%
VDD
0%
VDD
Serial Bus Clock
Frequency
Typ
fSCL_SCLK
Max
Unit
100%
VDD
20%
VDD
400
V
V
kHz
Digital outputs
PARAMETER
SYMBOL
CONDITIONS
MIN
Output high voltage
VOH
ISource=0.6mA
Output low voltage
VOL
ISink=0.6mA
80%
VDD
0%
VDD
Signal rise time
Signal fall time
tr
tf
TYP
200
200
MAX
UNIT
100%
VDD
20%
VDD
V
V
ns
ns
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DA6512.000
11 July, 2012
OPERATING MODES
MAS6512 has two capacitance measurement
modes and one temperature measurement mode.
In capacitance measurement mode the output is
proportional to either capacitance difference (CS-CR)
or to capacitance ratio (CS-CR)/CS. In temperature
measurement mode the output is proportional to the
absolute temperature.
Measurement mode configuration and start of
conversion is done by writing 8-bit configuration
data to the Measurement control register (address
E2HEX). See further details in the Measurement
control register chapter.
MAS6512 includes a 256-bit EEPROM memory for
storing trim and calibration data on chip. Four bytes
(32 bits) of EEPROM are reserved for trim values
but the remaining 28 bytes (224 bits) are free for
calibration and other data.
The stored trim data consists of measurement
configuration settings that are automatically read
from EEPROM memory in the beginning of each
conversion.
The calibration data should comprise of calibration
and temperature compensation coefficients that can
be used to calculate accurate calibrated sensor and
temperature measurement results from the noncalibrated measurement reading. All calculations
need to be done in an external micro controller unit
(MCU).
A calibrated MAS6512 sensor system should be
operated as illustrated in figure 2. The calibration
and compensation coefficients need to be read to
the MCU memory only once. From each pair of
sensor and temperature measurement readings the
accurate sensor and temperature values can then
be calculated by using an external MCU.
All communication with MAS6512 is done using
2
either the I C bus or the SPI bus. Starting an A/D
conversion, reading the conversion result and
reading and writing data from and to the EEPROM
memory are all accomplished via serial bus
communication.
In addition to the serial buses the digital interface
includes also end-of-conversion (EOC) and master
reset (XCLR) pins. See A/D Conversion in the Serial
2
Data Interface (I C Bus) Control chapter.
START
READ EEPROM
CALIBRATION DATA
MEASURE SENSOR
MEASURE TEMPERATURE
CALCULATE CALIBRATED
TEMPERATURE
CALCULATE TEMPERATURE
COMPENSATED SENSOR VALUE
Figure 2. Flow chart for a calibrated MAS6512 sensor system
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11 July, 2012
REGISTER AND EEPROM DATA ADDRESSES
Table 1. Register and EEPROM data addresses
A7
A6
A5
A4
A3
A2
A1
A0
I2C
BUS
HEX
SPI BUS
HEX
W=write
R=read
W: 40…41
R: C0…C1
W: 42
R: C2
W: 43
R: C3
W: 44
R: C4
W: 45
R: C5
W: 46
R: C6
W: 47
R: C7
W: 48…4F
R: C8…CF
W: 50…5F
R: D0…DF
W: 60
R: E0
W: 61
R: E1
W: 62
R: E2
W: 63
R: E3
W: 64
R: E4
W: 65
R: E5
W: 66
R: E6
W: 6A
R: EA
W: 6B
R: EB
W: 6D
R: ED
W: 6E
R: EE
A7
1
0
0
0
0
0
X
C0…C1
A7
1
0
0
0
0
1
0
C2
A7
1
0
0
0
0
1
1
C3
A7
1
0
0
0
1
0
0
C4
A7
1
0
0
0
1
0
1
C5
A7
1
0
0
0
1
1
0
C6
A7
1
0
0
0
1
1
1
C7
A7
1
0
0
1
X
X
X
C8…CF
A7
1
0
1
X
X
X
X
D0…DF
A7
1
1
0
0
0
0
0
E0
A7
1
1
0
0
0
0
1
E1
A7
1
1
0
0
0
1
0
E2
A7
1
1
0
0
0
1
1
E3
A7
1
1
0
0
1
0
0
E4
A7
1
1
0
0
1
0
1
E5
A7
1
1
0
0
1
1
0
E6
A7
1
1
0
1
0
1
0
EA
A7
1
1
0
1
0
1
1
EB
A7
1
1
0
1
1
0
1
ED
A7
1
1
0
1
1
1
0
EE
Description
EEPROM; free for any
data
EEPROM; free for any
data
EEPROM; CS capacitor
matrix trim data
EEPROM; CR capacitor
matrix trim data
EEPROM; Gain trim
data
EEPROM; Oscillator
frequency trim data
EEPROM; free for any
data
EEPROM; free for any
data
EEPROM; free for any
data
Reset register; no data,
only addressed for reset
Test register
Measurement control
register
CS capacitor matrix
register
CR capacitor matrix
register
Gain register
Oscillator frequency
control register
1st (MSB) byte of the
conversion result
2nd (LSB) byte of the
conversion result
Status register for
EEPROM
Trimming control
register
Note
E
E
E+T
E+T
E+T
E+T
E
E
E
R
R
R
R+T
R+T
R+T
R+T
R
R
R
R
X = Don’t care, E = EEPROM, R= Register, T = Trim data
Note: When using the SPI serial interface the register address bit A7 is also used for selecting write (A7= 0) or read (A7=1) operation. For
the I2C interface address bit A7 = 1.
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DA6512.000
11 July, 2012
REGISTER AND EEPROM DATA ADDRESSES
MAS6512 includes a 32 bytes (256 bits) EEPROM
data memory and eleven registers. Four bytes (32
bits) of EEPROM are reserved for trim values but
the remaining 28 bytes (224 bits) are free for storing
sensor calibration and other data. See table 1 on
the previous page for register and EEPROM data
addresses.
In the SPI serial bus the address bit A7 selects
between write (A7=0) and read (A7=1) operation. In
2
the I C serial bus A7 is always high (A7=1) and
selection between write and read operation is done
2
with the LSB bit of the I C device address. See table
6 in chapter 2-WIRE SERIAL DATA INTERFACE
2
(I C® BUS).
MAS6512 has four trim registers: CS capacitor
matrix register (E3/63HEX), CR capacitor matrix
register (E4/64HEX), Gain register (E5/65HEX) and
Oscillator frequency register (E6/66HEX). These are
marked with “R+T” in table 1. Each of these
registers has a corresponding EEPROM byte where
trim values can be permanently stored. These are
marked with “E+T” in table 1. Trim values are
automatically read from EEPROM in the beginning
of each conversion when this feature is enabled in
the trimming control register (EE/6EHEX). When
disabled it is possible to test different trim data in
the trim registers before final trimming values are
found and stored in the EEPROM.
Reset register (E0/60HEX) does not contain any data.
Any dummy data written to this register forces a
reset. A reset initializes all control registers
(addresses E1HEX…EEHEX) to a zero value.
Test register (E1/61HEX) is mainly used for testing
and trimming purposes. See table 2 in chapter
TEST REGISTER. If an external clock signal is
used the test register is needed for selecting the
external clock signal.
The CS (E3/63HEX) and the CR (E4/64HEX) capacitor
matrix registers contain a capacitor value between 0
and 22pF in 86fF steps.
The Gain register (E5/65HEX) controls the gain of the
CDC front-end. Together with the CS and CR
values it determines the input capacitance
conversion range.
The Oscillator frequency control register (E6/66HEX)
is used only during internal clock oscillator trimming.
During trimming this register value is iterated to give
the desired 200kHz oscillator frequency. When the
best value is found it can be written to the internal
clock oscillator frequency trimming EEPROM
address (C6/46HEX). In normal operation the trim
value is automatically read from the EEPROM
memory in the beginning of each conversion. The
clock frequency is trimmed by MAS during wafer
level testing and there should be no need to modify
it.
The 16-bit A/D conversion result (capacitance or
temperature) is stored into two registers EAHEX
(MSB, most significant byte) and EBHEX (LSB, least
significant byte).
The EEPROM status register (ED/6DHEX) reflects
the EEPROM error correction status. This register
can be used to verify that the EEPROM operation
has finished without errors.
The Trimming control register (E9/69HEX) defines if
the trim data in the EEPROM or in the registers are
used during operation. The Trimming control
register is also used for enabling EEPROM write.
The default setting is that all trim data is
automatically read from the EEPROM memory in
the beginning of each conversion and that the
EEPROM write is disabled. See the Trimming
control register description for details.
The Measurement control register (E2/62HEX) is
used for configuring and starting an A/D conversion.
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11 July, 2012
RESET REGISTER (E0/60HEX)
This register is used to reset all control registers
(addresses E1H…EEH) to a zero value. There are
no data bits in this register. However it is necessary
to write dummy data to this register to make a reset.
The reset will take place immediately after any data
2
has been written to the address E1/61HEX via the I C
or SPI interface.
TEST REGISTER (E1/61HEX)
In normal operation the Test register value is 00HEX
and the internal clock oscillator is used for all the
measurements.
The SEL_EXTCLK bit enables the use of an
external clock signal connected to the OSCOUT
pin. This may come necessary if the sensor
capacitance is too high to be used with the internal
200kHz clock signal. Sensor capacitances up to
around 20pF can be measured with the internal
200kHz oscillator, or up to 40pF if the internal clock
frequency is divided by two (see SOSCOUT below).
By setting the SOSCOUT bit it is possible to divide
the internal clock oscillator frequency by two, giving
a 100kHz frequency. This lower clock frequency can
be used for measuring up to about 40pF
capacitances. For measuring larger than 40pF
Table 2. MAS6512 test register (E1/61HEX) description
Bit
Bit Name
Description
Number
7-6
5
SEL_EXTCLK
Not used
Selects external clock
4-2
STEST[2:0]
TEST1 and TEST2 signal
selection
∆Σ-ADC inputs connected to
TEST1 and TEST2 pins
1
SOSCOUT
Select OSCOUT frequency
0
FOSC
Forces the oscillator on
without conversion
sensor capacitances (CS) it is necessary to use an
external clock frequency having a frequency of
around fEXT=200kHz*20pF/Cs or less. Note that the
frequency division selection SOSCOUT applies only
to the internal clock signal.
The STEST bits are used for connecting different
internal signals to the TEST1 and TEST2 pins. In
STEST[2:0]=101 test setup TEST1 and TEST2
operate as voltage inputs which are connected to
the differential input of the ∆Σ-ADC. VTESTP is the
positive input and VTESTN is the negative input of
the ∆Σ-ADC.
FOSC can be used to force the internal oscillator to
be on all the time. Normally the internal oscillator is
turned on only during the measurements to save
power.
Value
Function
0
1
Normal mode
An external clock can be
connected to OSCOUT and the
internal oscillator is disabled
000…100
Reserved for internal testing
purpose (TEST1 and TEST2
are outputs)
101
VTESTP => TEST1 (input)
VTESTN => TEST2 (input)
110…111
No function
0
1
0
OSCOUT = 200 kHz
OSCOUT = 100 kHz
OSC is on only during
conversion
OSC is forced on
1
X = Don’t care, SDM = Sigma delta modulator
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MEASUREMENT CONTROL REGISTER (E2/62HEX)
This register is used to configure and initiate a
measurement. See table 3 below. A new conversion
is started simply by writing 8-bit configuration data
to the measurement control register (E2/62HEX).
Table 3. Measurement control register (E2/62HEX) description
Bit Number
Bit Name
Description
Value
7-5
OSRS
Over Sampling Ratio
(OSR) Selection
4
REGEN
Regulator Enable
3
SCO
Start Conversion
2
XETS
Sensor Selection
1
0
XRC
Not used
Front end function
selector
The OSRS over sampling ratio selection bits
choose between five different OSR values. High
OSR value corresponds to high resolution but also
longer
conversion
time.
See
Electrical
characteristics for further details.
The REGEN bit enables/disables the internal
voltage regulator. When enabled the regulator is
turned on during conversions and automatically
turned off after each conversion to save power.
During temperature measurements the regulator is
always enabled regardless of the REGEN bit
setting. Note that if Test register FOSC=1 and if
REGEN=1 the regulator is forced on all the time
independently of measurements.
000
001
010
011
100
0
1
0
1
0
1
0
1
Function
OSR = 256
OSR = 512
OSR = 1024
OSR = 2048
OSR = 4096
Voltage regulator disabled
Voltage regulator enabled
No conversion
Start conversion
External capacitive sensor
Internal temperature sensor
Ratio converter
Difference converter
The SCO Start conversion bit needs to be set 1 for
every new measurement. It is automatically reset to
0 after each measurement.
The XETS Sensor selection bit controls the frontend multiplexer and connects either the external
capacitive sensor (XETS=0) or the internal
temperature sensor (XETS=1) to the ∆Σ-converter.
The XRC bit selects between two external
capacitive sensor measurement modes. It does not
have any effect on temperature measurement. In
Ratio converter mode the measured value will be
proportional to capacitance ratio (CS-CR)/CS. In
Difference converter mode the measurement will be
proportional to capacitance difference (CS-CR).
10 (26)
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11 July, 2012
CS AND CR CAPACITOR MATRIX REGISTERS (E3/63HEX AND E4/64HEX)
There are two internal capacitor matrices that add
capacitance in parallel to the sensor capacitor (CS)
and the reference capacitor (CR). These offset
capacitances are used to adjust the sensor signal to
an optimal range. Each capacitor matrix has a
selectable capacitance from 0pF up to 22pF in
typical 86fF steps. The three sigma process
variation of the capacitor matrix capacitance is
±10%.The CS capacitor matrix register (E3/63HEX)
has a corresponding EEPROM byte (C3/43HEX) for
storing the trim value. Also the CR capacitor matrix
register (E4/64HEX) has corresponding EEPROM
byte (C4/44HEX) for storing the trim value. After
finding suitable CS and CR capacitor matrix register
values the trim values can be stored in the nonvolatile EEPROM.
In normal operating mode these trim values are
automatically read from the EEPROM during each
conversion start. See also table 9 Trimming control
Register (EE/6EHEX) for other operating modes.
Table 4. CS capacitor matrix register (E3/63HEX), EEPROM (C3/43HEX)
Bit Number
Bit Name
Description
Value
7-0
OCDACS
CDAC control bits
0HEX…FFHEX
Table5. CR capacitor matrix register (E4/64HEX), EEPROM (C4/44HEX)
Bit Number
Bit Name
Description
Value
7-0
OCDACR
CDAC control bits
0HEX…FFHEX
Function
CS offset trimming
Function
CR offset trimming
GAIN REGISTER (E5/65HEX)
The gain register sets the excitation signal level for
the capacitive sensor. The eight bits (GRDAC) can
be programmed to values between 0 and 255.
Together with the CS and the CR capacitor matrix
trim parameters it’s used to adjust the sensor signal
to an optimal range. The goal is to get a maximum
dynamic range and keep the signal within linear
input range of the ∆Σ-modulator. This condition is
met when the signal minimum and maximum
covers the whole linear input range.
The output of MAS6512 has the
relationship to the ∆Σ-modulator output:
following
CODEOUT = QAVE ⋅ CODERANGE
QAVE is the average measurement result (from the
over sampling) of the ∆Σ-modulator and varies from
0 to 1. The CODERANGE is the maximum output code
which depends on OSR and measurement mode
selections. See page 5 Full output code range
specification in the Electrical characteristics table.
The linear signal range of the modulator is from
QAVE=10% to QAVE =90%.
In case of capacitance difference measurement
mode;
QAVE =
In this mode the gain register value GRDAC sets
the VS level.
VS= (VDD/1.8V)*(33mV+GRDAC*2.88mV)
VR = (VDD/1.8V)*144mV
CS = External sensor + CS matrix capacitance
CR = External reference + CR capacitance
CREF = 6pF, three sigma variation ±10%
In case of capacitance ratio measurement mode;
 C  V
QAVE = 1 − R  ∗ R
 CS  VS
In this mode the gain register value GRDAC sets
the VS level.
VS = (VDD/1.8V)*GRDAC*0.52mV
VR= (VDD/1.8V)*100.8mV
CS = External sensor + CS matrix capacitance
CR = External reference + CR capacitance
The gain register (E5/65HEX) has a corresponding
EEPROM byte (C5/45HEX). After finding a suitable
gain register value it can be stored in the EEPROM
memory. In normal operating mode the gain trim
value is read automatically from the EEPROM
during each conversion start.
Table 6. Gain register (E5/65HEX), EEPROM (C5/45HEX)
Bit Number
Bit Name
Description
Value
7-0
GRDAC
RDAC control bits
1 CS − C R
V
+
∗ S
2
CREF
2 ∗ VR
0HEX…FFHEX
Function
Gain control by sensor excitation signal
level control
11 (26)
DA6512.000
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OSCILLATOR FREQUENCY CONTROL REGISTER (E6/66HEX)
Note that the internal clock oscillator frequency has
been factory trimmed and the trim value has been
stored in the EEPROM (C6/46HEX). It is
recommended not to change the factory
programmed value!
The oscillator frequency control register (E6/66HEX)
is for trimming the internal clock oscillator to 200
kHz frequency. This 200kHz (or 100kHz if
Table 7. Oscillator frequency control register (E6/66HEX)
Bit Number
Bit Name
Description
5-0
OSCF
Oscillator frequency
control bits
SOSCOUT=1) can be measured at the OSCOUT
pin. The six LSB bits adjust the oscillator period in
104ns steps. The period increases when the trim
value increases. Typically a register value of 28HEX
corresponds to the nominal 200kHz clock oscillator
frequency.
After finding a suitable trim value it can be stored to
the EEPROM (C6/46HEX).
Value
Function
0HEX…3FHEX
Oscillator frequency control
EEPROM STATUS REGISTER (ED/6DHEX)
The EEPROM status register (ED/6DHEX) indicates
if the stored EEPROM byte is corrupted. The
register is updated after each EEPROM data byte
read command. See table 8 below. The ERROR bit
tells whether an data error has been detected or
not. The DED bit tells whether two or more bit errors
have been detected. The EEPROM can correct
internally only single bit errors i.e. when ERROR=1
and DED=0. The read EEPROM data byte is
corrupted if ERROR=DED=1.
Table 8. MAS6512 EEPROM status register (ED/6DHEX). Only bits (7:6) are used.
Bit Number
Bit Name
Description
Value
7
ERROR
6
DED
5-0
EEPROM error
detection
EEPROM double
error detection
0
1
0
1
0
Function
No errors
Error detected
No errors
2 (or more) data errors
-
X = Don’t care
12 (26)
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CONVERSION RESULT REGISTERS (EA…EBHEX)
After measuring capacitance or temperature the 16bit conversion result is stored into two register
addresses EAHEX and EBHEX. The MSB (most
significant byte) is at EAHEX and LSB (least
significant byte) at EBHEX.
TRIMMING CONTROL REGISTER (EE/6EHEX)
The Trimming control register (EE/6EHEX) is used to
select between different trimming operating modes
and enabling EEPROM write. See table 9 showing
the functions of the Trimming control register.
After a power-up reset, master reset via XCLR or a
software reset the Trimming control register
(EE/6EHEX) gets the value %00000000 (00HEX). This
is the normal operating mode for a trimmed
MAS6512 device. In this mode the capacitive frontend trim values to use (CS, CR and Gain) are
automatically read from the EEPROM memory in
the beginning of each conversion start.
The EEPROM is normally write protected. To
disable the write protection the Trimming control
register should be set to %01010101 (55HEX).
Table 9. Trimming control Register (EE/6EHEX)
Bit
Bit Name
Description
Number
7-0
REGEE<7:0>
EEPROM control bits
When calibrating a sensor there is an operating
mode in which only the factory calibrated internal
oscillator (OSC) clock trim data is read from the
EEPROM memory. This mode is selected by writing
%10101010 (AAHEX) to the Trimming control
register. In this mode it is possible to run conversion
tests for different front-end trim register values
before suitable values are found and programmed
to the EEPROM.
There is also a trimming mode in which all trim data
including the internal oscillator trim data is taken
from the trim registers rather than from the
EEPROM. This mode is selected by writing
%11111111 (FFHEX) to the Trimming control
register.
Value
Function
00000000
All trim data from EEPROM
(normal operating mode)
EEPROM write enabled
Only OSC from EEPROM
All trim data from registers
All trim data from EEPROM
01010101
10101010
11111111
OTHER
13 (26)
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EEPROM WRITE PROCEDURE
START
POWER UP DEVICE
Connect supply voltage VDD
INITIAL CONDITIONS
Optional: Reset device by XCLR or
by writing any data to the reset register 30HEX
ENABLE EEPROM WRITEWrite 55HEX to the Trimming control register
EE/6EHEX
WRITE DATA TO EEPROM
Write data byte (8-bit) to selected EEPROM memory address
WAIT
Wait minimum 16ms after writing byte (8-bit) to EEPROM
VERIFY WRITTEN DATA
Read the written data byte (8-bit) from the EEPROM memory address
yes
Write more data?
no
DISABLE EEPROM WRITE
Write 00HEX to the Trimming control register EE/6EHEX
STOP
Figure 3. Flow chart for MAS6512 EEPROM write
14 (26)
DA6512.000
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EEPROM WRITE PROCEDURE
This chapter gives instructions for writing data to the
EEPROM memory.
The MAS6512 16-bit Capacitance to Digital
Converter (CDC) has a 256 bit (32 bytes) EEPROM
memory. 8 bits (1 byte) has been reserved for
storing internal clock oscillator trimming data. 24
other bits (3 bytes) are for trimming the capacitive
sensor front-end. The remaining 232 bits (28 bytes)
are free for other use.
See figure 3 on previous page showing the
EEPROM write procedure.
Make sure in the beginning of the EEPROM write
procedure that the MAS6512 initial conditions are
met. Connecting VDD triggers power-on-reset
(POR) but to make sure the device is reset an
additional reset can be given using the XCLR pin or
writing any data on the reset register E0/60HEX via
the serial bus.
EEPROM write is enabled by writing value 55HEX to
the Trimming control Register (EE/6EHEX). The
default register value after power on is 00HEX.
Next the data can be written to the EEPROM
memory one byte (8-bit) at a time. It is necessary to
have a delay of minimum 16ms after programming
each byte (8-bit). The success of each write can be
verified by reading back the data (8-bit) and
comparing it to the original byte (8-bit). Additionally
it is also possible to check the EEPROM status
register (ED/6DHEX) value after each read back. The
EEPROM status register value should be 00HEX
when the read EEPROM data byte is free of errors.
After all data bytes are written the EEPROM
memory can be protected from write by writing
00HEX to the Trimming control Register (EE/6EHEX).
See table 1 showing the MAS6512 register and
EEPROM data addresses.
15 (26)
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11 July, 2012
2-WIRE SERIAL DATA INTERFACE (I C BUS)
2
Serial Interface
MAS6512 has an I C bus compatible two wire
serial data interface comprising of serial clock
(SCL) and bi-directional serial data (SDA) pins. In
2
the I C bus both SCL & SDA lines are of opendrain design, thus, external pull-up resistors are
needed.
2
The serial data interface is used to configure and
start the A/D conversion and read the measurement
result when the A/D conversion has finished.
The digital interface includes also end of conversion
(EOC) and master reset (XCLR) pins. The EOC
goes high when the A/D conversion has finished.
The XCLR is used to reset the A/D converter. A
reset initializes internal registers, counters and the
serial communication bus. After connecting the
supply voltage to MAS6512, and before starting
operating the device via the serial bus, it is required
to reset the device with the XCLR reset pin if the
supply voltage rise time has been longer than 400
ns (typ). If the supply voltage rise time is shorter
than this making an external reset with the XCLR
pin is not necessary since the device is
automatically reset by the power on reset (POR)
circuitry. It is however recommended to use the
XCLR reset feature to solve unexpected error state
conditions.
Device Address
The I C bus definition allows several I C bus
devices to be connected to the same bus. The
devices are distinguished from each other by unique
device address codes. MAS6512 device address is
2
2
shown in table 10. The LSB bit of the device
address defines whether the bus is configured for
Read (1) or Write (0) operation. ECHEX= Write,
EDHEX= Read.
Table 10. MAS6512 device address (EC/EDHEX)
A7 A6 A5 A4 A3 A2 A1
W/R
1
1
1
0
1
1
0
0/1
I C Bus Protocol Definitions
2
Data transfer is initiated with a Start bit (S) when
SDA is pulled low while SCL stays high. Then, SDA
sets the transferred bit while SCL is low and the
data is sampled (received) when SCL rises. When
the transfer is complete, a Stop bit (P) is sent by
releasing the data line to allow it to be pulled up
while SCL is constantly high.
when SCL is high. Data at the SDA pin can change
value only when SCL is low.
Each SDA line byte transfer must contain 8-bits
where the most significant bit (MSB) always comes
first. Each byte has to be followed by an
acknowledge bit (see further below). The number of
bytes transmitted per transfer is unrestricted.
Figure 4 shows the start (S) and stop (P) bits and a
data bit. Data must be held stable at the SDA pin
S
SDA
SCL
1
0
P
Figure 4. I C bus protocol definitions
2
Bus communication includes Acknowledge (A) and
not Acknowledge (N) messages. To send an
acknowledge the receiver device pulls the SDA low
for one SCL clock cycle. For not acknowledge (N)
the receiver device leaves the SDA high for one
SCL clock cycle in which case the master can then
generate either a Stop (P) bit to abort the transfer,
or a repeated Start (Sr) bit to start a new transfer.
Abbreviations:
A= Acknowledge by Receiver
N = Not Acknowledge by Receiver
S = Start
Sr = Repeated Start
P = Stop
= from Master (MCU) to Slave (MAS6512)
= from Slave (MAS6512) to Master (MCU)
16 (26)
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2-WIRE SERIAL DATA INTERFACE (I C BUS)
2
Conversion Starting – Write Sequence
Conversion is started by writing configuration bits
into the Measurement control register (address
E2HEX). The write sequence is illustrated in Table
11.
Table 11. MAS6512 I2C bus write sequence bits
S
AW
A
MC A
DC
A
P
Abbreviations:
AW = Device Write Address (%1110 1100)
AR = Device Read Address (%1110 1101)
MC = Measurement control register (%1110 0010)
Ax = Conversion Result Registers; MSB (x=M,
%1110 1010) or LSB (x=L, %1110 1011)
Each serial bus operation, like write, starts with the
start (S) bit (see figure 4). After start (S) the
MAS6512 device address with write bit (AW, see
table 10) is sent followed by an Acknowledge (A).
After this the Measurement control register address
(see table 1) is sent and followed by an
DC = Measurement Control Register Data
Dx = Conversion Result Register Data; MSB (x=M),
ISB (x=I) or LSB (x=L)
Acknowledge (A). Next the Measurement control
register data (DC, see table 3) is written and
followed by an Acknowledge (A). Finally the serial
bus operation is ended with stop (P) command (see
figure 4).
A/D Conversion
After power on reset or external reset (XCLR) the
EOC output is high. After an A/D conversion is
started the EOC output is set low until the
conversion is finished and the EOC goes back high,
indicating that the conversion is done and data is
ready for reading. The EOC is set low only by
starting a new conversion. To save power the
internal oscillator runs only during conversion.
During an A/D conversion the input signal is
sampled continuously leading to an output
conversion result that is a weighted average of the
samples taken.
Conversion Result – Read Sequence
Table 12 presents a general control sequence for a
single register data read.
Table 12. MAS6512 I2C bus single register (address Ax) read sequence bits
S
AW
A
Ax
A
Sr AR
A
Dx
N
P
Table 13 shows the control sequence for reading
the 16-bit A/D conversion result from the
Conversion result registers. The LSB (DL) register
data read can follow right after the MSB register
data (DM) read since if the read sequence is
continued (not ended by a Stop bit P) the register
address is automatically incremented to point to the
next register.
Table 13. MAS6512 I2C bus MSB (first) and LSB (second) A/D conversion result read sequence
S AW
A AM A Sr
AR A DM A DL
N
P
17 (26)
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11 July, 2012
4-WIRE SERIAL DATA INTERFACE (SPI BUS)
SPI bus communication is selected by setting XSPI
pin low.
access bit A7 cleared (0) and in read access it is set
(1).
SPI communication differs from I2C bus in the
following way. It requires four wires for bi-directional
communication since each line operates in one
direction only. Device selection is done by using
separate chip select XCS control lines instead of
using device address. Each SPI bus device has its
own XCS control line and a device is selected by
pulling its XCS line low (see figure 5 below). The
fourth wire in the SPI bus is the serial clock line,
SCLK. Data is transferred at rising edges of the
serial clock during which the data line should be
stable.
Figure 5 illustrates write access communication.
MAS6512 has an auto increment function which
means that if there are more than one data byte
transferred the additional data bytes are delivered to
following
register
addresses.
In
write
communication the MISO line is high impedance.
In SPI bus communication it is good to note that
setting XCS low activates the EEPROM memory
regardless of the XSPI setting and the device
consumes 20µA …30µA current. To minimize
current consumption XCS should be set low only
during time periods when the device is used during
SPI communication.
The selection between write or read access is done
by register address MSB bit A7 (see table 1
“Register and EEPROM data addresses”). In write
XCS
SCLK
SCK
MOSI
SDA
MSB Register Address Byte
MSB
LSB
Data Byte
LSB
High Z
MISO
Figure 5. SPI Protocol – Write Access (register address MSB bit A7=0)
Figure 6 illustrates read access communication.
The auto increment function can be utilized also in
read access and if there are more than one data
byte read the additional data bytes are delivered
from following register addresses.
XCS
SCK
SCLK
SDA
MOSI
MISO
MSB Register Address Byte
High Z
Ignored
LSB
MSB
Data Byte
LSB
Figure 6. SPI Protocol – Read Access (register address MSB bit A7=1)
18 (26)
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TRIMMING FOR SENSOR CAPACITANCE
MAS6512 has two capacitance measurement
modes and a temperature measurement mode. In
capacitance measurement mode the output can be
proportional either to capacitance difference (CS-CR)
or to capacitance ratio (CS-CR)/CS. In temperature
measurement mode the output is proportional to
absolute temperature.
trimming is based on selecting the minimum linear
range capacitance same as CS MIN and maximum
linear range capacitance same as CS MAX. At the
linear range minimum and maximum limits the
average of the ∆Σ-modulator output is 10% and
90% respectively. In the following trimming
equations we denote these by
For trimming it is necessary to know the sensor
capacitance CS range CS MIN…CS MAX. For optimal
utilization of the MAS6512AA1 input range the
DMIN = 0.1
DMAX = 0.9
MAS6512 in capacitance difference mode
The reference capacitor value CR is calculated from
CR = [CS MIN*(DMAX-0.5)-CS MAX*(DMIN-0.5)] / (DMAX-DMIN)
If an external CR is used, it is connected between pins CR and CC. If an internal CR is used, the trim code for CR
is calculated from
REGE4HEX = (CR/CR MAX)*255
where CR MAX is nominally 22pF, but subject to ±10 % (±3 sigma) process variation.
The reference voltage, VS, can be calculated using the following equation:
VS = [144mV*(DMAX-DMIN)*2*CREF] / (CS MAX-CS MIN)
where CREF is nominally 6 pF, but also has ±10 % variation.
The gain register trim value is calculated from
REGE5HEX = [(VS-33 mV) / 734mV]*255
REGE4HEX and REGE5HEX are 8-bit values, so they range from 0 to 255. When their values are found, the same
values can be written to corresponding EEPROM addresses C4HEX and C5HEX. However, with SPI bus, the
address MSB in write operation is 0, so the addresses are actually 44HEX and 45HEX.
Example: Single capacitance sensor
CS MIN=8pF
CS MAX=12pF
CR = [8pF*(0.9-0.5)-12pF*(0.1-0.5)]/(0.9-0.1) = 10pF
REGE4HEX = (10pF/22pF)*255 = 115.9 ~ 116
VS = [144mV*(0.9-0.1)*2*6pF] / (12pF-8pF) = 345.6mV
REGE5HEX = [(345.6-33 mV) / 734mV]*255 = 108.6 ~109
REGE3HEX = 0 (no internal CS capacitor matrix used)
19 (26)
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TRIMMING FOR SENSOR CAPACITANCE
MAS6512 in capacitance ratio mode
The reference capacitor CR is calculated from
CR = [CS MIN*CS MAX*(DMAX-DMIN)] / (CS MAX*DMAX-CS MIN*DMIN)
If an external CR is used, it is connected between pins CR and CC. If an internal CR is used, the trim code for CR
is calculated from
REGE4HEX = (CR/CR MAX)*255
where CR MAX is nominally 22pF, but subject to ±10 % (±3 sigma) process variation.
The reference voltage, VS, can be calculated using the following equation:
VS = 100.8mV * (CS MAX-CS MIN) / (CS MAX*DMAX-CS MIN*DMIN)
The gain register trim value is calculated from
REGE5HEX = (VS / 133.3mV)*255
REGE4HEX and REGE5HEX are 8-bit values, so they range from 0 to 255. When their values are found, the same
values can be written to corresponding EEPROM addresses C4HEX and C5HEX. However, with SPI bus, the
address MSB in write operation is 0, so the addresses are actually 44HEX and 45HEX.
Example: Single capacitance sensor
CS MIN=8pF
CS MAX=12pF
CR = [8pF*12pF*(0.9-0.1)] / (12pF*0.9-8pF*0.1) = 7.68pF
REGE4HEX = (7.68pF/22pF)*255 = 89.0 ~ 89
VS = 100.8mV*)/(12pF-8pF)/(12pF*0.9-8pF*0.1)=40.32mV
REGE5HEX = (40.32mV/133.3mV)*255 = 77.1 ~ 77
REGE3HEX = 0 (no internal CS capacitor matrix used)
20 (26)
DA6512.000
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APPLICATION INFORMATION
VDD 100n
VDD
GND
VDD
OSCOUT
MUX
CS
4k7
MISO
CLK
OSC
I2C /
MCU
SCL/SCLK
Cs
SPI
CC
XCS
CONTROL
VDD
XSPI
Cr
optional
4k7
SDA/MOSI
CR
∆Σ
VREG
TEMP
EEPROM
EOC
optional
XCLR
optional
VREG
TEST1
TEST
TEST2
GND
GND
GND
NOTE: It is recommended to use the XCLR reset feature to solve unexpected error state
conditions. The XCLR pin can be left unconnected if not used. It has internal pull up to VDD.
2
Figure 7. MAS6512 configured for I C bus communication
Note: MAS6512 has an effective ESD clamp protection structure that can be triggered if the VDD rises too fast.
For this reason it’s recommended to use a supply decoupling capacitor having a value of 100nF or higher to slow
down the VDD rise time.
Accuracy Improvement – Averaging
An averaging technique can be used to remove
conversion errors caused by noise and thus improve
measurement accuracy. By doing several A/D
conversions and calculating the average result it’s
possible to average out noise. Theoretically the
noise is reduced by a factor N where N is the
number of averaged samples. A/D converter
nonlinearities cannot be removed by averaging.
21 (26)
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9 CR
10 CC
11 CS
12 GND
MAS6512 IN QFN-16 4x4x0.75 PACKAGE
TEST1 15
XCS 1
EOC 16
8 VREG
7 XCLR
6 SCL_SCLK
5 SDA_MOSI
VDD 4
TEST2 14
MISO 3
OSCOUT 13
XSPI 2
MAS6512
AA1
YYWW
XXXXX
Top Marking Information:
MAS6512 = Product Number,
AA1 = Version Number
YYWW = Year Week
XXXXX = Lot Number
QFN-16 4x4x0.75 PIN DESCRIPTION
Pin Name
Pin
Type
XCS
XSPI
1
2
DI
DI
MISO
VDD
SDA_MOSI
3
4
5
DO
P
DI/O
SCL_SCLK
XCLR
VREG
CR
CC
CS
GND
OSCOUT
TEST2
TEST1
EOC
6
7
8
9
10
11
12
13
14
15
16
DI
DI
AO
AI
AI
AI
G
DI/DO
AI/O
DO
DO
Function
Chip Select (SPI)
SPI / I2C Bus Selection
SPI: XSPI=low
I2C: XSPI=high
Master Input Slave Output (SPI)
Power Supply Voltage
Serial Bus Data (I2C)
Master Output Salve Input (SPI)
Serial Bus Clock (I2C / SPI)
Master Reset
Voltage Regulator Output 1.8V
Reference Capacitance Pin
Common Capacitance Pin
Sensing Capacitance Pin
Power Supply Ground
Oscillator Output
Test pin 2
Test pin 1
End of Conversion
P = Power, G = Ground, DO = Digital Output, , DI = Digital Input, AO = Analog Output, AI = Analog Input
22 (26)
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PACKAGE (QFN-16 4X4x0.75) OUTLINE
D
D/2
E/2
TOP VIEW
A3
A
PIN 1 MARK AREA
SIDE VIEW
DETAIL A
A1
SEATING
PLANE
Package Center Line X or Y
D2
b
D2/2
L
e
BOTTOM VIEW
EXPOSED PAD
DETAIL A
Symbol
Terminal Tip
e/2
E2
E2/2
SHAPE OF PIN #1
IDENTIFICATION
IS OPTIONAL
Min
Nom
Max
PACKAGE DIMENSIONS
A
0.700
0.750
0.800
A1
0.000
0.020
0.050
A3
0.203 REF
b
0.250
--0.350
D
3.950
4.000
4.050
D2 (Exposed.pad)
2.700
--2.900
E
3.950
4.000
4.050
E2 (Exposed.pad)
2.700
--2.900
e
0.650 BSC
L
0.350
--0.450
Dimensions do not include mold or interlead flash, protrusions or gate burrs.
Unit
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
23 (26)
DA6512.000
11 July, 2012
SOLDERING INFORMATION
◆ For Lead-Free / Green QFN 4mm x 4mm
Resistance to Soldering Heat
Maximum Temperature
Maximum Number of Reflow Cycles
Reflow profile
According to RSH test IEC 68-2-58/20
260°C
3
Thermal profile parameters stated in IPC/JEDEC J-STD-020
should not be exceeded. http://www.jedec.org
Solder plate 7.62 - 25.4 µm, material Matte Tin
Lead Finish
EMBOSSED TAPE SPECIFICATIONS
P2
PO
P1
D0
T
X
E
F
W
B0
R 0.25 typ
K0
X
A0
User Direction of Feed
Orientation on tape
Dimension
Ao
Bo
Do
E
F
Ko
Po
P1
P2
T
W
Min/Max
4.30 ±0.10
4.30 ±0.10
1.50 +0.1/-0.0
1.75
5.50 ±0.05
1.10 ±0.10
4.0
8.0
±0.10
2.0
±0.05
0.3
±0.05
12.00 ±0.3
All dimensions in millimeters
Unit
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
24 (26)
DA6512.000
11 July, 2012
REEL SPECIFICATIONS
W2
A
D
C
Tape Slot for Tape Start
N
B
W1
Carrier Tape
Cover Tape
End
Start
Trailer
Dimension
A
B
C
D
N
W 1 (measured at hub)
W 2 (measured at hub)
Trailer
Leader
Components
Min
Leader
Max
330
1.5
12.80
20.2
100
12.4
13.50
14.4
18.4
160
390,
of which minimum 160 mm of
empty carrier tape sealed with
cover tape
Unit
mm
mm
mm
mm
mm
mm
mm
mm
mm
Reel Material: Conductive, Plastic Antistatic or Static Dissipative
Carrier Tape Material: Conductive
Cover Tape Material: Static Dissipative
25 (26)
DA6512.000
11 July, 2012
ORDERING INFORMATION
Product Code
Product
Description
MAS6512AA1WAD00
Capacitive Sensor
Signal Interface IC
Capacitive Sensor
Signal Interface IC
Capacitive Sensor
Signal Interface IC
EWS-tested wafer, thickness 370 µm
MAS6512AA1WAD05
MAS6512AA1Q1706
Dies on waffle pack, thickness 370 µm
QFN-16 4x4x0.75 Package, Pb-free, RoHS compliant,
Tape & Reel, 1000 / 3000 pcs components on reel
Contact Micro Analog Systems Oy for other wafer thickness options.
LOCAL DISTRIBUTOR
MICRO ANALOG SYSTEMS OY CONTACTS
Micro Analog Systems Oy
Kutomotie 16
FI-00380 Helsinki, FINLAND
Tel. +358 10 835 1100
Fax +358 10 835 1119
http://www.mas-oy.com
NOTICE
Micro Analog Systems Oy (MAS) reserves the right to make changes to the products contained in this data sheet in order to improve the
design or performance and to supply the best possible products. MAS assumes no responsibility for the use of any circuits shown in this data
sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits
are free from patent infringement. Applications for any devices shown in this data sheet are for illustration only and MAS makes no claim or
warranty that such applications will be suitable for the use specified without further testing or modification.
MAS products are not authorized for use in safety-critical applications (such as life support) where a failure of the MAS product would
reasonably be expected to cause severe personal injury or death. Buyers represent that they have all necessary expertise in the safety and
regulatory ramifications of their applications, and acknowledge and agree that they are solely responsible for all legal, regulatory and safetyrelated requirements concerning their products and any use of MAS products in such safety-critical applications, notwithstanding any
applications-related information or support that may be provided by MAS. Further, Buyers must fully indemnify MAS and its representatives
against any damages arising out of the use of MAS products in such safety-critical applications.
MAS products are neither designed nor intended for use in military/aerospace applications or environments. Buyers acknowledge and agree
that any such use of MAS products which MAS has not designated as military-grade is solely at the Buyer's risk, and that they are solely
responsible for compliance with all legal and regulatory requirements in connection with such use.
MAS products are neither designed nor intended for use in automotive applications or environments. Buyers acknowledge and agree that, if
they use any non-designated products in automotive applications, MAS will not be responsible for any failure to meet such requirements.
26 (26)