FAB Environment Control

FAB Environment Control
Contents
1
Cleanroom Specification
2
Monitoring System
1
SK hynix
Cleanroom Specification
M8 Cleanroom Specification
Monitoring System
Detailed Spec for Clean room
Control Item
Cleanliness
Cleanroom
(Process Area)
Unit
Spec
Measuring
Frequency
ea/ft³
< 1 (0.1 um)
Real time
(On-Line)
Process Area
23±1
°C
Temperature
Photo Area
23±0.5
Process Area
45±5
Humidity
RH%
Photo Area
40±3
2
Real time
(On-Line)
Real time
(On-Line)
SK hynix
Monitoring System
M8 Cleanroom Specification
Monitoring System
Environment Data [FMS]
Temperature
(Etch Bay)
Humidity
(Etch Bay)
Particle
(Etch Bay)
※ In the On-line system : < 3 (0.1 um) because of data hunting
3
SK hynix
Monitoring System
M8 Cleanroom Specification
Monitoring System
FMS system [Line]
3F Monitoring
1F Monitoring
4
SK hynix
Monitoring System
M8 Cleanroom Specification
Monitoring System
Monitoring Procedure
Utility Operation
(CMS monitoring)
Monitoring
Check a process issue
No
OOS
Request to Re-Check
Request to concerned
team
Work
Yes
Flow
Corrective Action
Facility Team
JOB
R&R
CAR (Alarm)
Confirm of action
Report/Save Data
(Sheet)
Processing
Quality Engineering Team
Manufacturing/Technology Team
 Operation SPEC
 Operation SPEC
 Process Control
 Resist an Operation SPEC
 Monitoring (On, Off Line)
 Facility Control & Operation
 Corrective Action Request
 Inform to QE and Facility Team about
abnormal situation
 Corrective action
 Report
 Assist to solve a problem
5
SK hynix
Monitoring System
M8 Cleanroom Specification
Monitoring System
Corrective Action Data [Example]
6
SK hynix
Thank you
7
SK hynix