FUNCTIONAL CAPILLARY PLATE plate with holes a few micrometers in size arrayed MATERIAL Glass two-dimensionally at regular intervals OVERVIEW Capillary plates are essentially circular or rectangular glass plates on which tiny glass capillaries or tubes are arrayed in two-dimensions at regular spaced intervals. The capillaries are produced in different hole diameters and lengths (thickness) as well as outer dimensions according to the application. Capillaries have superb linearity and high accuracy. Standard open area ratios of capillary plates are as large as 55 % or more. Material in standard capillary products uses lead glass containing 40 % to 50 % lead. Hamamatsu accepts special orders for capillaries with super-tiny holes diameters ranging from one to several hundred micrometers. Hamamatsu also offers capillary plates that were anti-statically treated on the plate front, rear and inner wall surfaces. FEATURES AND CUTAWAY VIEW ■Uniform hole sizes 0.2 mm to several mm Hole diameter: 1 µm to several hundred µm APPLICATIONS ●Liquid and gas filters ●Differential pumping window material ●Orifices for mass spectrometry ●Optical and X-ray collimators ▲Enlarged view of capillaries ■Open area ratio of 55 % or more ■Capable of giving directivity to charged particles or molecules ■Capable of collimating light ■Highly heat resistant up to 430 °C TMCPC0083EA SIZE VARIATIONS Outer Type No. Dimension A (mm) J5022-01 J5022-09 J5022-11 J5022-16 J5022-21 J5022-19 5 25 25 33 87 60 × 60 Effective Area B Hole Diameter Length (Thickness) L 0.8 20 20 27 77 53 × 53 12 6 10 10 25 20 1.0 1.0 0.4 1.0 1.0 1.0 (mm) (µm) (mm) Note: The above J5022 series does not have anti-static treatment. The J5112 series is an anti-statically treated type. For other information such as dimensional tolerances, please contact us. Feel free to consult with us if you require special order products. B A L [CIRCULAR TYPE] B A [RECTANGULAR TYPE] TMCPA0039EA APPLICATION DESCRIPTION Application Application Description OBJECT TO MOVE Suction Conveying CONVEY CAPILLARY PLATE SUCTION TMCPC0087EA CAPILLARY PLATE Features • Smooth surface allows stable conveying of object • Capillaries are arrayed at a fine uniform pitch and so can suck flat objects at a uniform force Application example • Conveying small products and thin profile items such as semiconductor wafers • Induces laminar flow of fluid • Particle selection capability • Filters • Flow rate meters • Capillary plate having tiny diameter holes and adequate thickness (high aspect ratio) doesn’t easily allow gas to pass but lets light and X-rays pass through freely. So this can be utilized as window material between air and vacuum. • Capable of withstanding temperatures to a maximum of 430 °C • Window material for vacuum UV light sources and soft X-ray sources • Capillary plate passes just light input in parallel to the capillaries. • Capable of orienting the direction of beams of various types including atoms, molecules, charged particles, and X-rays • Ion energy analyzers • Spectrometers • 2D imaging X-ray spectrometers • Capable of maintaining a constant ultra-slow leak state • Ultra-slow leak valves • Semiconductor film forming devices Filters SUBSTANCES SMALLER THAN HOLE DIAMETER TMCPC0084EA Differential Pumping Window Material AIR VACUUM CAPILLARY PLATE TMCPC0085EA POINT BEAM SOURCE Collimators CAPILLARY PLATE PLANE BEAM SOURCE SLIT TMCPC0086EA Others CUSTOM-DESIGN PRODUCTS ●Blacking treatment (Cuts light passing through hole wall surfaces) ●Deposition of electrode material onto front and rear of plate ●Soda lime glass as lead free products ●Original dimensions, effective area, and no rims Guide to combinations of capillary hole diameter, plate thickness, and outer dimension combinations Capillary hole diameter (µm) 1 4 6 10 25 50 100 Plate thickness (mm) 0.2 to 1 0.2 to 2 0.2 to 3 0.2 to 3 0.2 to 3 0.2 to 5 0.2 to 5 Outer plate diameter (mm) 5 to 50 5 to 114 Note: We may be unable to meet customer specifications due to aspect ratios for a particular hole thickness and diameter, so consult with us beforehand on product feasibility. Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2011 Hamamatsu Photonics K.K. HAMAMATSU PHOTONICS K.K. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P. O. Box 6910, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected] Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected] France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected] United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road Welwyn Garden City Hertfordshire AL7 1BW, United Kingdom, Telephone: 44-(0)1707-294888, Fax: 44(0)1707-325777 E-mail: [email protected] North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171-41 SOLNA, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected] TMCP1017E02 Italy: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741 E-mail: [email protected] MAR. 2011 IP