Catalog - Hamamatsu

VUV HIGH BRIGHTNESS
LIGHT VUV LIGHT SOURCE UNIT
SOURCE L10366 SERIES
OVERVIEW
The L10366 series are newly developed VUV (vacuum UV) light source units.
This product uses a "high-brightness deuterium lamp
with MgF2 window" that produces a high radiant intensity 4 times higher than conventional model.
This product is now a lot easier to handle due to use
of an air-cooled structure and vacuum flange mount.
Left: Power supply, Right: Light source
FEATURES
APPLICATIONS
●High Radiant Intensity: 4 Times
(compared to conventional model)
●High VUV Intensity Down to 115 nm
●Air Cooling (needs no cooling water)
●External Control
(lamp ON/OFF, lamp ON status signal)
●No Optical Axis Alignment Required
ARC DISTRIBUTION (at 230 nm)
L10366 series
(Aperture size: 0.5 mm)
TLSZF0004
●Spectrophotometer, Fluorophotometer
●Electrostatic Removal of Semiconductor*
Wafer, LCD Panel, etc.
●Photoionization Detector (PID)
●UV Resistance Testing of Various Material
●Optical Chemical Vapor Deposition
(optical CVD)
●Excitation Light Source
Conventional type
High Radiant Intensity
x4
(compared to conventional model)
(Aperture size: 1 mm)
PACKAGE CONTENTS
Type No.
L10366
L10366-10
L10366-11
L10366-12
Vacuum Flange 1
—
(E3444)
(E3444-01)
(E3444-02)
Light Source
Power Supply Light Source to Power Supply Cable
AC Cable
1 The vacuum flange E3444 series can be sold separately from the unit L10366 series.
SPECIFICATIONS
●GENERAL RATINGS
Parameter
Spectral Distribution
Window Material
Aperture Size (Arc Point)
Cooling Method
Operating Temperature Range
Operating Humidity Range
Description/Value
115 to 400
MgF2
0.5
Air-cooled
+10 to +35
Below 80 % (No Condensation)
Unit
nm
—
mm
—
°C
—
●RECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C)
Parameter
Warm-up Time
Fluctuation (p-p)
Drift (Max.)
at 230 nm
at 160 nm
Output Stability
Light Source Life 2
Input Voltage (AC)
Power Consumption
Description/Value
25 ± 5
0.05
±0.3
2000 (Guaranteed)
500 (Expected)
100 V to 240 V (100 V / 200 V Auto Switching), Single Phase 50 Hz to 60 Hz
140
Unit
s
%
%/h
h
—
VA
2 The life end is defined as the time when the radiant output falls to 50 % of its initial value. Operating life depends on environmental conditions
(vacuum atmosphere).
●VACUUM FLANGE
Parameter
Seeling Method
Flange
Mount Flange
Seeling Force Retention
E3444
Regular
—
1.33 × 10-4
SPECTRAL DISTRIBUTION
E3444-01
E3444-02
O-Ring
JIS VF50
ICF114
JIS VG50
ICF114
Pa L/s or Less (1 × 10-6 Torr L/s)
REPLACE LAMP SOURCE
(VUV region; for reference only)
RELATIVE OUTPUT (%)
100
Type No.
L10388
L10388-10
L10388-11
L10388-12
TLSOB0079EB
80
60
40
20
0
100
120
140
160
180
200
WAVELENGTH (nm)
220
240
400
Light Source
Vacuum Flange
—
(E3444)
(E3444-01)
(E3444-02)
DIMENSIONAL OUTLINES (Unit: mm)
LIGHT SOURCE
(Weight: Approx. 1 kg)
122
77
COOLING FAN
TOP VIEW
VACUUM
FLANGE
MOUNT
ARC POINT
0.3 A
81.5 ± 0.5
ARC POINT
30
62
115
48 h7
A
77
94
METAL CONNECTOR
(CONNECTION TO
POWER SUPPLY)
FRONT VIEW
METAL CONNECTOR
(CONNECTION TO
POWER SUPPLY)
SIDE VIEW
TLSOA0094EC
POWER SUPPLY
(Weight: Approx. 2.8 kg)
EXTERNAL
CONTROL TERMINALS
(D-SUB CONNECTOR)
LAMP STATUS SIGNAL +
LAMP STATUS SIGNAL –
+5 V dc(+)
+5 V dc RETURN(–)
TOP VIEW
CONT
145
POWER
LINE INPUT
OUTPUT
110
310
FRONT VIEW
SIDE VIEW
METAL CONNECTOR
(CONNECTION TO LIGHT SOURCE)
REAR VIEW
CABLE LENGTH: 2000 ± 50
TLSOA0095EB
DIMENSIONAL OUTLINES (Unit: mm)
VACUUM FLANGE
E3444
40
4- 8.4
10
O-RING
70.0 ± 0.3
P.C.D. 106
40
120
7
20
TLSOA0097EA
E3444-01
40
4- 10
10
O-RING
70.0 ± 0.3
P.C.D. 100
40
120
7
20
TLSOA0098EA
E3444-02
47.5
17.5
8- 8.4
O-RING
70 ± 0.3
114
P.C.D. 92.2
40
7
20
TLSOA0053EB
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are
subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2014 Hamamatsu Photonics K.K.
HAMAMATSU PHOTONICS K.K.
www.hamamatsu.com
HAMAMATSU PHOTONICS K.K., Electron Tube Division
314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: usa@hamamatsu.com
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: info@hamamatsu.de
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: infos@hamamatsu.fr
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: info@hamamatsu.co.uk
North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 SE-164 40 Kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: info@hamamatsu.se
Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93581733, Fax: (39)02-93581741 E-mail: info@hamamatsu.it
TLSZ1011E02
China: Hamamatsu Photonics (China) Co., Ltd.: B1201 Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: hpc@hamamatsu.com.cn
MAR. 2014 IP