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CONTENTS
PHOTODETECTORS .......................................................................................................................... 1
MICRO PMT ASSEMBLY AND MICRO PMT MODULE ................................................................................. 1
UBA (Ultra Bialkali) AND SBA (Super Bialkali) PHOTOMULTIPLIER TUBE SERIES ..................................................... 3
LAMPS ................................................................................................................................................... 5
NEW MINI EXCIMER LAMP (EX-mini) L12530 .......................................................................................................... 5
NEW UVCL (UV Cathode emitting Light source) L12848-305 ................................................................................... 6
PHOTODETECTORS .......................................................................................................................... 7
PHOTOMULTIPLIER TUBE MODULES ................................................................................................................. 7
NEW
NEW
NEW
Photosensor module H11706 series, Photon counting head H11870, H12525 series
FLUORESCENCE DETECTOR SERIES .................................................................................................................. 9
NEW
NEW
NEW
Linear array multianode PMT module with filters H12730, H12731, H12732
Linear array multianode PMT module with GaAsP photocathode H12310, H12311
Photosensor with GaAsP / GaAs photocathode
28 mm (1-1/8") side-on PMT R12829
Cooled side-on PMT R9182-01, R11715-01
Thermoelectric cooler for PMT C12473
RUGGEDIZED, HIGH-TEMPERATURE PMT SERIES ............................................................................................... 13
PMTs FOR DARK MATTER DETECTION R11065, R11410 ................................................................................... 13
METAL PACKAGE PHOTOMULTIPLIER TUBE R9880U SERIES ................................................................................ 14
UV REGION .............................................................................................................................................. 15
Devlp.
UV sensor module H12412, H12413
VISIBLE REGION........................................................................................................................................ 15
NEW
NEW
Head-on PMT with extended green bialkali photocathode R7600U-300, R7600U-300-M4, H8711-300, H7546B-300
Multianode PMT assembly H9500, H12445-100/-200, H12428-100/-200
Multianode PMT assembly H12700
UV to NEAR INFRARED (NIR) REGION ............................................................................................................. 17
NEW
NEW
28 mm (1-1/8") side-on PMT R11540, R10699
28 mm (1-1/8") side-on PMT R12896
Near infrared (NIR) detector unit series H10330B-25/-45/-75, H12694-25/-45/-75, H12397-75, R5509-43/-73
FAST TIME RESPONSE SERIES ..................................................................................................................... 19
NEW
Devlp.
High speed compact HPD (hybrid photodetector) series R11322U-40, R10467U-06/-40/-50
High speed PMT R9800, R12844, R12845
ION / ELECTRON DETECTOR ......................................................................................................................... 20
NEW
Compact MCP assembly series F12334-11, F12395-11, F12396-11
FLAME SENSOR ....................................................................................................................................... 20
UVTRON® R9533, R9454
PMT PERIPHERAL PRODUCTS ...................................................................................................................... 21
NEW
Devlp.
Devlp.
Accessories
Amplifier unit C6438-02
High voltage power supply modules
High voltage power supply module C12733-01
Stabilized light sources for PMT L12367, L11416, L11494 series
POINT-OF-CARE TEST .................................................................................................................... 24
Devlp.
Immunochromato-reader C11787 series
BIOMEDICAL PRODUCT................................................................................................................. 24
Devlp.
Flow cell assembly for flow cytometry J12800-000-101
IMAGING DEVICE ............................................................................................................................ 25
Devlp.
Devlp.
Proximity focused image intensifiers
Image intensifier with auto gate function
ICCD camera with InGaAs photocathode C10054-07/-17/-27
CCD camera with fiber optic window C12550
LAMPS ................................................................................................................................................. 27
NEW
NEW
Devlp.
Compact UV-VIS S2D2 fiber light source (UV enhanced type) L12515
Compact 2 W xenon flash lamp modules L12336 series
20 W xenon flash lamp L1193x/L1194x/L1195x/L1196x series
Flash light source
LF2
RF discharge type excimer lamp
Opto-spectrum generator (OSG) L12194-00-39070/-43079/-70130
75 W / 150 W high brightness xenon lamp
UV APPLIED PRODUCTS ............................................................................................................... 33
UV-LED spot light source
Spot light source
Linear irradiation type UV-LED unit
LC-L1V3
LC8
LC-L5
X-RAY RELATED PRODUCTS ....................................................................................................... 35
NEW
NEW
Microfocus X-ray Source
X-ray scintillator ACS™ / ALS™ / FOS™ / GPXS™
X-ray image intensifier digital camera unit C7336-03/-05/-52
ELECTROSTATIC REMOVER ........................................................................................................ 37
NEW
Electrostatic remover PhotoIonizer series L12535, L12645, L11754
VUV Ionizer series L10706, L10366, L11798, L12542
LASER APPLICATION ..................................................................................................................... 39
STEALTH DICING™ technology
FAC lens (fast-axis collimating lens) J10919
TECHNICAL INFORMATION ......................................................................................................... 40
Low energy electron beam irradiation source
Specifications shown in this brochure are typical values unless otherwise specified.
Specifications are subject to change without notice.
PHOTODETECTORS
NEW
MICRO PMT ASSEMBLY
AND MICRO PMT MODULE
• Small and thin size with conventional PMT high sensitivity
• Multialkali photocathode introduced to lineup to for a wider range of applications
• Product lineup including a new photosensor module made up of a µPMT, a voltage
divider circuit, and a high-voltage power supply, as well as a photosensor assembly
with a built-in µPMT and voltage divider circuit
•Helps
• Helps downsizing measurement devices and boosting their performance
MICRO PMT ASSEMBLY
H12400 SERIES
MICRO PMT MODULE
H12402 SERIES
MICRO PMT
MICRO PMT MODULE
H12403 SERIES
µPMT is effective for developing
high-performance handheld
measurement devices may allow:
• Smaller size
• Less sample
• Less expensive
• Easy and general use
1
Making on-site measurements easy and more effective
Environment
Pollution
measurement
on individual
or area basis
Medical care
Health
checkup at
bedside in
the hospital
or at home
PHOTODETECTORS
■SPECIFICATIONS
PRODUCT VARIATIONS
Type No.
H12400-00-01 / H12402 / H12403
H12400-01-01 / H12402-01 / H12403-01
Spectral Response
300 nm to 650 nm
300 nm to 850 nm
Photocathode Material
Bialkali
Multialkali
Features
for visible range
for visible to near IR range
CHARACTERISTICS (Supply voltage: 900 V, at 25 °C)
Parameter
Min.
Typ.
Cathode
Blue Sensitivity Index
Typ.
Red / White Ratio
Typ.
Radiant Sensitivity (Wavelength of Maximum Response) Typ.
Min.
Luminous Sensitivity
Typ.
Radiant Sensitivity (Wavelength of Maximum Response) Typ.
Typ.
Anode
Dark Current
Max.
Rise Time
Typ.
Transit Time
Typ.
Time Response
T.T.S. 1
Typ.
Gain
Typ.
Effective Area
H12400 Series (Assembly type)
Between Anode and Cathode
Supply Voltage
Maximum
Divider Current
Ratings
Average Output Signal Current
H12402/H12403 Series (Module type)
Input Voltage
Maximum Input Current 2
Maximum Average Output Signal Current 3
Recommended Control Voltage Adjustment Range *
Peak Sensitivity Wavelength
Ripple Noise 34 (peak to peak)
Max.
Settling Time 5
Max.
Luminous Sensitivity
H12400-00-01 /
H12402 / H12403
50
80
8.0
—
80
30
160
1.6 × 105
H12400-01-01 /
H12402-01 / H12403-01
100
200
—
0.2
62
15
70
2.1 × 104
0.3
3
1.2
8.0
1.3
2 × 106
3 (X) × 1 (Y)
Unit
µA/lm
—
—
mA/W
A/lm
A/W
nA
ns
3.5 × 105
—
mm
1150
126
5
V dc
µA
µA
+4.5 to +5.5
20
5
V
mA
µA
V
nm
mV
s
+0.5 to +1.0
+0.5 to +1.1
420
0.3
10
1T.T.S.=Transit Time Spread (FWHM)
2At +5 V input voltage, +0.9 V control voltage, and output current equal to dark current
3+0.9 V control voltage
4Cable RG-174/U, Cable length 450 mm, Load resistance=1 MΩ, Load capacitance=13 pF
5The time required for the output to reach a stable level following a change in the control voltage from +1.0 V to +0.5 V.
* "Control voltage" × 1000 = "Supply voltage" of PMT
■Spectral Response
100
■Gain
TPMHB0884EA
107
TPMHB0885EA
BIALKALI
PHOTOCATHODE
106
10
105
GAIN
CATHODE RADIANT SENSITIVITY (mA/W)
MULTIALKALI
PHOTOCATHODE
1
MULTIALKALI
PHOTOCATHODE
104
BIALKALI
PHOTOCATHODE
0.1
103
0
200
300
400
500
600
700
800
WAVELENGTH (nm)
900
1000
102
500
600
800
1000
1150
SUPPLY VOLTAGE (V)
2
PHOTODETECTORS
UBA (Ultra Bialkali) AND SBA (Super Bialkali) PHOTOMULTIPLIER TUBE SERIES
■Spectral Response (R7600U-100/-200 Series)
50
45
TPMHB0775EA
Ultra Bialkali
Ultra Bialkali
QUANTUM EFFICIENCY (%)
40
35
Super Bialkali
Super Bialkali
30
Current Bialkali
25
20
15
10
5
0
200 250 300 350 400 450 500 550 600 650 700
WAVELENGTH (nm)
3
PHOTODETECTORS
Photocathode
Type
SBA
UBA
Quantum Efficiency
at Peak
Peak
Wavelength
Wavelength
Typ.
(nm)
(%)
35
350
43
at 400 nm
Typ.
(%)
34
Cathode Blue
Sensitivity Index
(CS 5-58)
Typ.
13.5
40
15.5
Suitable
Socket
Assembly
Gain
Typ.
8
E10679
2.0 × 106
SBA / UBA
16 × 15.8
E6736
3.0 × 106
R7600U-100/-200
SBA / UBA
18 × 18
E5996
1.0 × 106
R7600U-100-M4/-200-M4
SBA / UBA
18 × 18
E7083
1.3 × 106
R7600U-100-M16/-200-M16
SBA / UBA
18.1 × 18.1
—
2.0 × 106
R7600U-100-M64/-200-M64
SBA / UBA
18.1 × 18.1
—
5.0 × 105
R8900U-100-M4
SBA
23.5 × 23.5
—
1.0 × 106
R8900U-100-M16
SBA
23.5 × 23.5
E9349
1.0 × 106
R8900U-100-C12
SBA
23.5 × 23.5
E7514
6.7 × 105
R11265U-100
SBA
23 × 23
R11265U-200
UBA
23 × 23
E11807
E11807-01
E11807
E11807-01
8.4 × 105
3.7 × 105
1.3 × 106
5.0 × 105
Photocathode
Type
Effective
Area
(mm)
R9880U-110/-210
SBA / UBA
R5900U-100-L16/-200-L16
Type No.
H12428-100/-200
NEW
SBA / UBA
23 × 23
—
1.0 × 106
H12445-100/-200
NEW
SBA / UBA
23 × 23
—
1.0 × 106
H10966A-100
SBA
49 × 49
—
3.2 × 105
H10966B-100
SBA
49 × 49
—
3.2 × 105
H8711-100/-200
SBA / UBA
18.1 × 18.1
—
2.0 × 106
H7546B-100/-200
SBA / UBA
18.1 × 18.1
—
5.0 × 105
H11934-100/-200
SBA / UBA
23 × 23
—
8.4 × 105 / 1.3 × 105
H7260-100/-200
SBA / UBA
7 × 31.8
—
2.0 × 106
R1924A-100
SBA
22
E2924
E2924-500
E2924-05
2.0 × 106
R9800-100
SBA
22
—
1.1 × 106
R3998-100-02
SBA
25
E990-29
1.0 × 106
R9420-100
SBA
34
—
3.7 × 105
R6231-100
SBA
46
E1198-26
E1198-27
2.3 × 105
R7724-100
SBA
46
—
2.0 × 106
R6233-100
SBA
70
2.3 × 105
R877-100
SBA
111
E1198-26
E1198-27
E1198-22
E1198-23
E7694-02
E7694-03
E7694-02
E7694-03
R5912-100
NEW
SBA
190
R7081-100
NEW
SBA
220
3.1 × 105
1.0 × 107
1.0 × 107
4
LAMPS
NEW
MINI EXCIMER LAMP (EX-mini) L12530
Amazingly handy and easy to use!
The EX-mini is a space-saving compact excimer lamp light source ideal for R&D work.
Hamamatsu shrunk its popular RF discharge excimer lamp into a compact shape that
still has the same great performance. The EX-mini delivers simple yet highly accurate
testing and evaluations using vacuum UV light whenever and wherever needed.
■FEATURES
●All-in-one light source
built into the irradiation box
Ozone decomposition unit
E12685
230
Just this one unit lets you start right away without having to design an irradiation box. Size
and weight are small enough to allow carrying
it around with you for field work, and there are
no special restrictions on installation positions
or work environments.
Inside dimensions (W × H × D):
204 mm × 118 mm × 139 mm (not including protrusions)
233
Compact excimer lamp light source
L12530
* Sample stage (jack, etc.) is not supplied with the EX-mini.
●Uniform irradiation and
high output
Design features such as a flat, long rectangular bulb and use of RF discharge
provide high material modification and
cleansing capability compared to similar
products from other companies.
344
●Ozone decomposition unit (sold separately)
Clean air
for handy indoor exhaust
(no exhaust ducts needed)
O2
O2
O2
The EX-mini can be easily used anywhere
since no exhaust duct installation is needed.
Just attach the connector to the EX-mini
to start operation.
Ozone
O3
O3
O3
O3
TLSZC0016EA
Outer dimensions (W × H × D): 136 mm × 109 mm × 115 mm (not including protrusions)
▲Light emitting section of lamp
(Irradiation area [W × H]: 86 mm × 40 mm)
* Ozone decomposition unit only eliminates ozone.
Toxic substances might possibly be emitted depending on the material being irradiated, so install
exhaust ducts in such cases.
■APPLICATION EXAMPLE
●Improvement in adhesion during printing/coating
Reforming
Cleaning
●Adhesive strength improvement during bonding
●Wettability improvement of resin, metal, rubber
and other materials
5
●Silicon wafer and glass substrate cleaning
●Removal of resist residues, adhesive residues, organic films and oil spots
LAMPS
NEW
UVCL (UV Cathode emitting Light source) L12848-305
Higher output than UV LED!
This UVCL (UV Cathode emitting Light source)
generates UV intensity higher than a LED used
in the same wavelength range, and also delivers a long service life of 5000 hours.
■FEATURES
● High output
● Mercury-free
● Long service life
● Compact
■APPLICATIONS
● Fluorescence analysis
● Environmental analysis
● UV curing
● Biomedical
● Material analysis
● Resistance test to UV
■Spectral Distribution
■Life
TLSZB0110EA
110
TLSZB0127EA
100
Higher than
conventional
UV LEDs!
RELATIVE LIGHT OUTPUT (%)
RELATIVE IRRADIANCE (%)
850
800
750
700
650
600
550
500
450
400
350
300
250
200
150
100
50
0
250
L12848-305
(Peak wavelength: 305 nm)*
LED (310 nm)
30 mA dc
90
80
Long Life
5000 h
70
60
50
40
30
20
10
Detector: HAMAMATSU R765 (Ebb=+20 V)
300
350
450
400
0
0.1
1
10
1000
100
10000
OPERATING TIME (h)
WAVELENGTH (nm)
NOTE *: Please consult us about other wavelengths.
■Brightness Distribution (Typ.)
HORIZONTAL
ANGLE (deg.)
-20°
-10° 0°
10°
VERTICAL
ANGLE (deg.)
20°
60
80
100
-100 -80
-60
-40
-20
0
20
40
60
80
100
RELATIVE INTENSITY (%)
TLSZB0132EA
40
20
0
-2.5 -2 -1.5 -1 -0.5 0 0.5 1 1.5 2 2.5
DISTANCE FROM BRIGHTNESS CENTER (mm)
RELATIVE LIGHT OUTPUT (%)
80
40
60
100
20
30°
-30°
80
60
0
20°
40
-20
10°
20
-40
RELATIVE INTENSITY (%)
-10° 0°
100
0
-2.5 -2 -1.5 -1 -0.5 0 0.5 1 1.5 2 2.5
DISTANCE FROM BRIGHTNESS CENTER (mm)
-60
-20°
30°
-30°
-100 -80
RELATIVE LIGHT OUTPUT (%)
■Directivity
TLSZB0133EA
6
PHOTODETECTORS
PHOTOMULTIPLIER TUBE MODULES
A single compact package for easy use
■FUNCTIONS
Photomultiplier tube (PMT) module functions are shown in the chart below. PMT modules are comprised of a photomultiplier tube to
convert light into electrical signals, a high voltage power supply circuit, and a voltage divider circuit to distribute the optimum voltage to
each dynode, all assembled into a single compact case. In addition to these basic PMT modules, Hamamatsu also provides modules
with various additional functions such as signal processing, cooling and interface to PC.
■SELECTION GUIDE
Metal Package
Built-in PMT Type
Head-on
Side-on
Photosensor Modules
H10720, H10721
H7826
/ H7827 (With Amp.)
H9305
/ H9306, H9307 (With Amp.)
H10722, H10723 (With Amp.)
H11411, H10425, H10426
/ H10492, H10493 (With Amp.)
H11461
/ H11462 (With Amp.)
Current to Voltage
Conversion Amp.
H7844
H7422A
Gating
Circuit
H11526
H11706, H12056
Photon Counting Heads
H7828
H10682
Photon Counting Circuit
Photomultiplier Tube
Voltage Divider Circuit
High Voltage Power Supply Circuit
Cooler
H11123, NEW H11870
Devlp. H12775
Gating
Circuit
H8259
Cooler
H7421
Counter
CPU
+
Interface
H11890
7
NEW H12525
H9319
PHOTODETECTORS
PHOTOSENSOR MODULE H11706 SERIES
The H11706 series is a current output type photosensor module with a metal package photomultiplier tube and a high voltage power supply. These modules have a gate function for
protection against excessive light.
■SPECIFICATIONS
Parameter
Suffix No.
Input Voltage
Max. Output Signal Current
Effective Area
Spectral Response
Typ.
Cathode Sensitivity
Typ.
Anode Sensitivity 1
H11706 Series
-20
+15
100
8
230 to 870
230 to 920
77 2
78 3
1.5 × 105 2
1.5 × 105 3
-01
NEW -40
2
5
300 to 720
176 4
8.8 × 104 4
Unit
—
V
µA
mm
nm
mA/W
A/W
1 Control Voltage: +1.0 V (H11706-01/-20)
: +0.8 V (H11706-40)
2 At 400 nm
3 At 630 nm
4 At 550 nm
Left: H11706-01, Right: H11706-40
■FEATURES
● Includes gate function for
protection against excessive
light
● Gate time: 1 µs to 10 ms
NEW
PHOTON COUNTING HEAD H11870 SERIES
The H11870 series photon counting heads contain a 25 mm diameter head-on photomultiplier tube, a high voltage power supply circuit, and a photon counting circuit. Compared to
currently marketed products, the H11870 series offers a large effective area and low power
consumption as well as a photocathode surface nearly flush with the front edge of the
housing.
■SPECIFICATIONS
Parameter
Input Voltage
Max. Input Current
Effective Area
Count Linearity
Pulse-pair Resolution
Output Pulse Width
Output Pulse Height
H11870 Series
+5
50
22
6.0 × 106
18
9
+3
Unit
V
mA
mm
s-1
ns
ns
V
■FEATURES
● Low power consumption
● Excessive light detection
output
NEW
PHOTON COUNTING HEAD H12525 SERIES
The H12525 series is a photon counting head device containing a 1/2 inch side-on PMT, a
high-voltage power supply circuit, a voltage divider circuit, and a photon counting circuit all
into the same package. It operates on a +5 V power supply and outputs TTL pulses obtained from detecting photons, which can be counted on an external counter.
■SPECIFICATIONS
Parameter
Input Voltage
Max. Input Current
Effective Area
Count Linearity
Pulse-pair Resolution
Output Pulse Width
Output Pulse Height
H12525 Series
+5
40
3.7 × 13
2.0 × 106
20
10
+2.2
Unit
V
mA
mm
s-1
ns
ns
V
■FEATURES
● Internal small 1/2-inch
diameter PMT
● Lower power consumption
● Excess light detection
output
8
PHOTODETECTORS
FLUORESCENCE DETECTOR SERIES
■LINEAR ARRAY MULTIANODE PMT MODULE
SELECTION GUIDE
Parameter
SBA
UBA
Photo- Visible
GaAsP
cathode
Multialkali
Visible to NIR
Extended red multialkali
—
Gain Control
Divider
Cooler
Configu- Preamplifier Photon Counting
High Voltage Gain Control
ration
Power Supply + Cooler
Photon Counting
+ Cooler
8 ch
●
—
—
●
●
H11451
H11452
—
—
16 ch
●
●
●
●
●
H11459
NEW H12310
H11836
H11658
32 ch
●
●
—
●
●
H11460
—
H12176
H11659
—
NEW H12311
—
—
H12210
H12211
■EXAMPLE: Gain control function
■Anode Uniformity
●Before gain control
●After gain control
TPMHB0865EA
100
TPMHB0866EA
100
90
90
80
80
80
70
70
70
60
50
40
OUTPUT (mV)
90
OUTPUT (mV)
OUTPUT (mV)
100
60
50
40
60
50
40
30
30
30
20
20
20
10
10
0
1
2
3
4
5
6
7
8
9
10 11 12 13 14 15 16
0
TPMHB0867EA
10
1
2
3
4
5
6
CHANNEL
7
8
9
0
10 11 12 13 14 15 16
1
2
3
4
5
CHANNEL
6
7
8
9
10 11 12 13 14 15 16
CHANNEL
■EXAMPLE: Cooling function
After Cooling
OUTPUT (50 mV/div.)
OUTPUT (50 mV/div.)
■Anode Dark Current (H11836, H12176)
Before Cooling
Number of dark current pulses
is reduced by cooling.
Current to voltage conversion factor : 0.1 V/µA
Frequency bandwidth : DC to 1 MHz
TIME (10 ms/div.)
TIME (10 ms/div.)
TPMZB0015EA
COUNT RATE PER CHANNEL (s-1)
Before
Cooling
2000
40
After
Cooling
95 % DOWN
1500
1000
500
Measured at the voltage producing the gain of 1 × 106
9
10
DARK CURRENT
TEMPERATURE
9
30
8
25
7
20
6
15
5
10
4
5
3
0
2
-5
1
-10
0
TPMZB0012EA
35
TEMPERATURE (°C)
2500
TPMZB0014EA
■Cooling Characteristics
0
5
10
15
20
COOLING TIME (min)
25
0
30
DARK CURRENT (nA)
■Anode Dark Count (H12210, H12211)
PHOTODETECTORS
NEW
LINEAR ARRAY MULTIANODE PMT MODULE WITH FILTERS H12730, H12731, H12732
Handy compact size and lower light loss in unit optics
compared to conventional type
■SELECTION GUIDE
■Geometric
Dielectric
Mirror
Glass
Block
Parameter
H12730 H12731 H12732
Filter
●
●
●
PMT
●
●
●
Divider Circuit
●
●
●
Preamplifier
●
●
High Voltage Power Supply
●
●
Gain Control Function
●
Dichroic
Mirror
Bandpass
filter
Left: H12730, Center: H12731, Right: H12732
■FEATURES
■Efficiency
45 mm × 60 mm
CH1
TRANSMITTANCE (%)
● High sensitivity from visible to NIR region
● Compact design
● Highly efficient optics by using glass
block and dielectric mirror
■APPLICATIONS
● Biomedical fluorescence detection
● Laser scanning detection
100
90
80
70
60
50
40
30
20
10
0
350
400
CH2
450
CH3
500
CH4
CH5
600
650
550
CH6
700
CH7
750
CH8
800
850
WAVELENGTH (nm)
TPMHB0863EA
LINEAR ARRAY MULTIANODE PMT MODULE WITH GaAsP PHOTOCATHODE H12310, H12311
High sensitivity 16-channel linear array multianode PMT
module with gain control
■FEATURES
● Gain can be controlled individually for each channel
● Reduced dark current due to cooling effect (H12311)
● Extended red GaAsP photocathode (H12310-42 / H12311-42)
■APPLICATIONS
Left: H12310, Right: H12311
● Biomedical fluorescence detection
● Laser scanning detection
■Spectral Response
100
■SPECIFICATIONS
Quantum
at 540 nm
Efficiency
at 800 nm
Gain (1 × 106)
Dark Current / ch
Crosstalk
Anode Uniformity
(at 25 °C)
NEW H12310-40, H12311-40 Devlp. H12310-42, H12311-42
Min.
40
—
0.5
—
—
—
Typ.
45
—
1
0.5
2
1: 2
Max.
—
—
—
1.5
—
—
Min.
20
13
0.5
—
—
—
Typ.
25
18
1
1
2
1: 2
Max.
—
—
—
3
—
—
Unit
%
%
—
nA
%
—
10
QUANTUM EFFICIENCY (%)
Parameter
TPMHB0864EA
1
0.1
Parameter
H12310-40
Photocathode Material
GaAsP
Cooling Function
Gain Control Function
—
●
H12310-42
Extended
red GaAsP
—
●
H12311-40
GaAsP
●
●
H12311-42
Extended
red GaAsP
●
●
EXTENDED RED MULTIALKALI
GaAsP
EXTENDED RED GaAsP
0.01
200
300
400
500
600
700
800
900
1000
WAVELENGTH (nm)
10
PHOTODETECTORS
PHOTOSENSOR WITH GaAsP / GaAs PHOTOCATHODE
High sensitivity! QE 45 % at peak wavelength (GaAsP), wide FOV (field of view) types available
ThermoFOV
Cooling
electric Temperature(∆T) High Voltage Heat Sink (Field
with
Fan
Power
Supply
Cooler
(Max.)
of view)
Type
Type No.
Photosensor
module
Photon
counting head
H7422A1-40/-50
Photosensor
module
H10769A1-40/-50 Built-in
35 °C
H7421-40/-50
68°
Protection circuit,
Low dark noise
Built-in photon counting circuit
A7423
(sold separately)
25 °C
Photosensor
module
Features
78°
Protection circuit,
Wide FOV
68°
Protection circuit,
Compact
Built-in
H8224A1-40/-50
—
Photosensor
module
H10770A1-40/-50
—
Protection circuit,
136° Wide FOV
—
1 "P" type for photon counting is available.
Parameter
Photocathode
Spectral Response
Peak Wavelength
-40
GaAsP
300 to 720
580
■APPLICATIONS
Unit
—
nm
nm
-50
GaAs
380 to 890
800
● Fluorescence correlation spectroscopy
● Confocal / Two-photon excitation microscopy
● Low light level measurement
NEW
28 mm (1-1/8") SIDE-ON PMT R12829
High sensitivity at 800 nm
■Spectral Response
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
10
80
CATHODE RADIANT SENSITIVITY (mA/W)
R12829
100
R928
1
0.1
70
R12829
60
50
200
300
400
500
600
700
800
About
4 Times
30
20
R928
10
0
700
750
800
850
WAVELENGTH (nm)
CATHODE RADIANT SENSITIVITY
QUANTUM EFFICIENCY
0.01
100
About
3 Times
40
900
WAVELENGTH (nm)
■SN Ratio Comparison (Simulation)
●Condition
●Result
100
INPUT
LIGHT
SPECTRUM
80
TIME
CATHODE RADIANT SENSITIVITY (mA/W)
EMISSION
90
THE SHOT NOISE
EMISSION
SPECTRA
800 nm ± 30 nm
70
60
R928
R12829
± σ R928
● Biological analysis
± σ R12829
30
TWICE
R928
0
700
• Flow cytometry
• Microscopy, etc.
● Spectroscopy, etc.
10
750
800
850
WAVELENGTH (nm)
11
■APPLICATIONS
50
20
R928 R12829 Unit
Parameter
Cathode Luminous Sensitivity 250
650 µA/lm
Anode Luminous
2500 8500 A/lm
Sensitivity at 1000 V
22
Dark Current
31
nA
Cathode Radiant Sensitivity
17
65 mA/W
at 800 nm
Cathode Quntum Efficiency
2.37
10.1
%
at 800 nm
1After 30 minutes storage in darkness at 1000 V
2After 30 minutes storage in darkness at 1 × 106 gain
R12829
40
900
900
HISTOGRAM OF THE SHOT NOISE
PHOTODETECTORS
COOLED SIDE-ON PMT R9182-01, R11715-01
Combination with thermoelectric cooling element reduces
effects of ambient temperature
■FEATURES
■APPLICATIONS
● Improved detection
limit by cooling
● High sensitivity
● Pin compatible with
1-1/8 inch side-on
PMT
R9182-01
● Low level fluorescence measurement
● NOx measurement
R11715-01
● MTP reader
● Fluorescence spectrophotometer
● Chemiluminescence detection
■SPECIFICATIONS
(at 25 °C)
R11715-01
Unit
Typ.
Max.
Min.
185 to 710
nm
410
nm
Low noise bialkali
—
8 × 24
mm
—
1.0 × 107 —
—
—
0.02
0.2
nA
R9182-01
Min.
Typ.
Max.
185 to 900
450
Multialkali
10 × 14
—
9.5 × 106 —
—
0.3
1
Parameter
Spectral Response
Peak Wavelength
MateriaI
Photocathode
Minimum Effective Area
Gain
Anode Dark Current at 1000 V (When cooled) 1
Left: R9182-01, Right: R11715-01
1After 30 min storage in darkness
■Cooling Characteristics
1000
■Equivalent Noise Input
TPMSB0245EB
10-13
100
R9182-01
10
1
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
EQUIVALENT NOISE INPUT (W)
100
10-14
10-15
10-16
0.1
SAMPLE: R9182-01
CONDITION: PMT VOLTAGE=1000 V
Qmax: 8.2 W
0.01
10
15
20
25
30
TPMSB0246EA
R928
R9182-01
NOT COOLED
COOLED
DARK CURRENT (nA)
■Spectral Response
TPMSB0251EA
35
40
45
50
55
10
R11715-01
1
0.1
CATHODE RADIANT SENSITIVITY
QUANTUM EFFICIENCY
10-17
200
60
300
400
AMBIENT TEMPERATURE (°C)
500
600
700
800
900
0.01
100 200 300 400 500 600 700 800 900 1000
1000
WAVELENGTH (nm)
WAVELENGTH (nm)
NEW
THERMOELECTRIC COOLER FOR PMT C12473
Cooling module for 1-inch square PMT
● Compact size
● Cooling temperature:
∆t 25 °C
● Cooling time:
20 minutes
■APPLICATIONS
● NOx measurement
■Cooling Characteristics
35
TACCB0125EA
30
TEMPERATURE (°C)
■FEATURES
25
20
15
10
C12473 with D-type socket assembly
* D-type socket assembly is sold separately
5
0
0
5
10
15
TIME (min)
20
25
30
12
PHOTODETECTORS
RUGGEDIZED, HIGH-TEMPERATURE PMT SERIES
The R1288AH series is a ruggedized, high-temperature-resistant, head-on PMT for
geological surveys deep underground. It has a long life of 3000 hours even at a
high temperature of 175 °C, lasting nearly 8 times longer than our conventional
PMTs. Even at 200 °C, this PMT still achieves an actual service life of 1000 hours,
which is 6 times longer than conventional types.
The R8874-01, which can be used under 50 G level vibration, is now available.
■FEATURES
● Longer life at high temperature
● High reliability
● High sensitivity
● Shock and vibration resistance
Left: R8874-01, Right: R1288AH
■EXAMPLE
Oil well logging
Resistance to high temperature
and vibration is needed here
since the drilling unit (PMT is
installed nearby) digs deep
underground.
■ Output Changes at 200 °C
150
TPMHB0837EA
RELATIVE VALUE (%)
Light Source: Blue LED (Simulated NaI(Tl) + 137Cs)
Light was led to temperature oven with optical fiber.
Count rate: 1 ks-1
* High temperature: Up to 200 °C
* Resistance to vibration: Up to 50 G
R1288AH SERIES
100
CONVENTIONAL TYPE
PMT
Scintillator
50
Long life
×6
0
1
10
100
1000
Drill bit
OPERATION TIME (h)
PMTs FOR DARK MATTER DETECTION R11065, R11410
The R11065 and R11410 are 76 mm (3") diameter head-on PMTs with extremely
low radioactivity, and are operable in low-temperature environments such as liquid
Xe (-110 °C) and liquid Ar (-186 °C).
R11410-20 and R11065-20, whose radioactivities are 1/4 lower compared with
those of R11410 and R11065, are now available.
■FEATURES
● High QE
● High cathode linearity
● Extremely low radioactivity
■Spectral Response
35
■ Cathode Current Linearity Example
TPMHB0838EA
10
TPMHB0839EA
25 °C
-60 °C
-110 °C
-150 °C
R11410
5
25
DEVIATION (%)
QUANTUM EFFICIENCY (%)
30
20
15
-5
-10
10
R11065
-15
5
0
150 200 250 300 350 400 450 500 550 600 650 700 750
WAVELENGTH (nm)
13
0
-20
10-12
10-11
10-10
10-9
10-8
10-7
CATHODE CURRENT (A)
10-6
10-5
PHOTODETECTORS
METAL PACKAGE PHOTOMULTIPLIER TUBE R9880U SERIES
■Spectral Response
TPMHB0814EB
1000
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
1000
R9880U-110
100
R9880U-210
10
R9880U-113
1
TPMHB0815EB
16 mm
R9880U-01
R9880U-20
100
R9880U-04
12 mm
10
■FEATURES
1
0.1
100 200 300 400 500 600 700 800 900 1000
0.1
100 200 300 400 500 600 700 800 900 1000
● High gain
● Compact
● Lightweight
WAVELENGTH (nm)
WAVELENGTH (nm)
Devlp.
Parameter
Photocathode
Spectral Response
Cathode Luminous Sensitivity
Cathode Blue Sensitivity Index (CS 5-58)
Red / White Ratio (R-68)
Dark Current at 1 kV (after 30 min)
Anode Luminous Sensitivity at 1000 V
Gain
Rise Time
Devlp.
R9880U-01 R9880U-04 R9880U-20 R9880U-110 R9880U-113 R9880U-210
SBA
UBA
Multialkali
SBA
230 to 870 185 to 870 230 to 920 230 to 700 185 to 700 230 to 700
200
105
135
500
105
200
13.5
15.5
—
13.5
0.2
—
0.2
0.45
1
1
10
1
400
210
270
400
1000
210
2.0 × 106
0.57
Unit
—
nm
µA/lm
—
—
nA
A/lm
—
ns
D TYPE SOCKET ASSEMBLIES FOR R9880U SERIES
The E10679-02 and E10679-51 are D-type socket assemblies for the R9880U
series metal package photomultiplier tubes.
The E10679-02 has an output cable, while the E10679-51 has output pins for
mounting on a circuit board.
■FEATURES
● Cable output or pin output
● Compact and lightweight
Left: E10679-02, Right: E10679-51
MODULE INTEGRATING R9880 SERIES
Type No.
H10720 Series
H10721 Series
H10722 Series
H10723 Series
H10682 Series 1
Output Type
Current
Output
Voltage
Output
Photon
Counting
1-20 type is not available.
Recommended
Input Voltage
Configuration
+3 V to +5 V
PMT R9880 series
+
Voltage divider circuit
+
High voltage power supply circuit
On-board
Cable
Output
PMT R9880 series
+
Voltage divider circuit
+
±3 V to ±5 V
High voltage power supply circuit
+
Current to voltage conversion amp.
+5 V
PMT R9880 series
+
Voltage divider circuit
+
High voltage power supply circuit
+
Photon counting circuit
14
PHOTODETECTORS
UV REGION
Devlp.
UV SENSOR MODULE H12412, H12413
■Spectral Response
RADIANT SENSITIVITY (mA/W)
100
Mercury Line (253.7 nm)
TPT B0046EA
10
1
■FEATURES
● Photocathode with solar blind
spectral response
● Voltage output via built-in amplifier
● Moisture-proof type usable under
high humidity conditions (H12413)
● Small and lightweight
● Optional perforated metal reduces
input light level (1/100, 1/1000)
Left: H12412, Right: H12413
■APPLICATIONS
0.1
0.01
100
200
300
400 500 600
800 1000
WAVELENGTH (nm)
UV
● UV light source monitoring
● Mercury lamp monitoring
● Ozone monitoring
VISIBLE
Parameter
Type
Output Type
Spectral Response
Dimensions
Photocathode Material
Photocathode Effective Area
Recommended Operating Voltage
Output Voltage
Input Light Level at 254 nm
Offset Signal
H12412
Normal Type
Max.
Max.
Max.
Unit
—
—
nm
mm
—
mm
V
V
µW/cm2
mV
H12413
Moisture-proof Type
Voltage Output
185 to 350
22 × 25.5
Cs-Te
6
+12 to +15
10
20
20
VISIBLE REGION
HEAD-ON PMT WITH EXTENDED GREEN BIALKALI PHOTOCATHODE R7600U-300, R7600U-300-M4, H8711-300, H7546B-300
Photomultiplier tube with higher sensitivity in the green spectrum
region than ordinary bialkali photocathodes
TPMHB0836EA
ULTRA BIALKALI
45
SUPER BIALKALI
QUANTUM EFFICIENCY (%)
40
35
EXTENDED
GREEN
BIALKALI
30
25
20
15
10
CURRENT BIALKALI
5
0
200 250 300 350 400 450 500 550 600 650 700
WAVELENGTH (nm)
15
2
■FEATURES
■Spectral Response
50
1
● Extended green bialkali photocathode:
QE 14 % (at 550 nm)
● Spectral response: 300 nm to 700 nm
● 2 × 2 multianode (R7600U-300-M4)
4 × 4 multianode (H8711-300)
8 × 8 multianode (H7546B-300)
● High speed response
● Low dark count
■APPLICATIONS
● Academic research
● Medical equipment
● Spectrophotometry
● SEM (scanning electron microscope)
3
4
1H8711-300
2H7546B-300
3R7600U-300 4R7600U-300-M4
● Confocal microscope
● Semiconductor inspection
system
● Neutron structure analysis
PHOTODETECTORS
MULTIANODE PMT ASSEMBLY H9500, H12445-100/-200, H12428-100/-200
■FEATURES
● Low profile
● High speed response
● Multianode
Parameter
H9500 1
Spectral Response
Transit Time Spread (FWHM)
0.4
Anode Type
Pixel Size
Effective Area
Dimensions (W × H × D)
16 × 16
3.04 × 3.04
49 × 49
52 × 33.3 × 52
■APPLICATIONS
● High resolution PET
● Compact gamma camera
● Scintimammography
● 2-D radiation monitor
NEW
NEW
H12445-100/-200 2 H12428-100/-200 2
300 to 650
0.34
0.35
Matrix
4×4
8×8
5.75 × 5.75
2.88 × 2.88
23 × 23
30 × 39 × 30
Unit
nm
ns
—
—
mm
mm
mm
H9500
UV type is also available, Suffix 1: -03, 2: -103/-203, 185 nm to 650 nm
Left: H12445-100/-200, Right: H12428-100/-200
NEW
MULTIANODE PMT ASSEMBLY H12700
Flat panel type 8 × 8 (64 ch) multianode PMT with collection
efficiency high enough to detect even single photoelectrons
Compared to our current product (H8500), the H12700 offers higher collection efficiency
(boosted from 60 % to 87 %) capable of producing a single photoelectron peak on each
channel. The H12700 can be used as a direct replacement for the H8500 since their external dimensions and anode output are identical. The H12700 also offers better time response characteristics (T.T.S. has been improved from 0.4 ns to 0.3 ns).
● Enhanced collection efficiency capable of detecting
single photoelectrons on all
channels
● Wide effective area ratio:
87 %
● 8 × 8 (64 ch) multianodes
■APPLICATIONS
Left: H12700A, Right: H12700B
● Academic research (RICH,
colorimeters, gamma telescopes, etc.)
● Medical diagnosis equipment (PET, gamma cameras)
● Radiation measurement
1UV glass type is also available, Suffix = -03, 185 nm to 650 nm
ch1
ch8
Single
photoelectron
peak can be
observed on
all channels
ch57
■SPECIFICATIONS
Parameter
Spectral Response Range 1
Peak Wavelength
Photocathode Material
Number of Pixels
Anode
Pixel Size / Pitch at Center
Effective Area
Dimensions (W × H × D)
Supply Voltage Input
■Single Photon Counting
ch64
3000
Description / Value
300 to 650
400
Bialkali
64 (8 × 8 matrix)
5.8 × 5.8 / 6
48.5 × 48.5
52 × 25.8 × 52
A: Cable, B: Pin
Unit
nm
nm
—
—
mm
mm
mm
—
H8500
H12700
2500
2000
COUNT
■FEATURES
1500
1000
500
0
0
200
400
600
PULSE HEIGHT
800
1000
TPMHB0887EA
16
PHOTODETECTORS
UV to NEAR INFRARED (NIR) REGION
28 mm (1-1/8") SIDE-ON PMT R11540, R10699
R11540..... High sensitivity from UV to VISIBLE region
R10699..... High sensitivity from VISIBLE to NIR region
■Spectral Response
1000
TPMSB0247EA
1000
TPMHB0888EA
R11540
R3788
100
10
1
0.1
100 200
300 400 500 600
R10699
R3896
R928
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
CATHODE RADIANT SENSITIVITY (mA/W)
CATHODE RADIANT SENSITIVITY
QUANTUM EFFICIENCY
100
10
Left: R11540, Right: R10699
1
0.1
CATHODE RADIANT SENSITIVITY
QUANTUM EFFICIENCY
0.01
100 200 300 400 500 600 700 800 900 1000
700 800 900 1000
WAVELENGTH (nm)
WAVELENGTH (nm)
■APPLICATIONS
● Biological analysis
• Flow cytometry
Parameter
Photocathode Material
Cathode Luminous
Sensitivity
Anode Luminous
Sensitivity at 1000 V
Dark Current
Red / White Ratio
(R-68)
R11540
Bialkali
R10699
Unit
Multialkali —
190
650
µA/lm
1900
8500
A/lm
51
22
nA
0.02
0.43
—
1 After 30 minutes storage in darkness at 1000 V
2 After 30 minutes storage in darkness at 1 × 106 gain
• Microscopy, etc.
● Spectroscopy, etc.
NEW
28 mm (1-1/8") SIDE-ON PMT R12896
Wide spectral response: 160 nm to 900 nm
■FEATURES
● High signal to noise ratio
● Pin compatible with any 1-1/8
inch side-on PMT
● UV enhanced type of R3896
■APPLICATIONS
● Spectroscopy
• Fluorescence spectrometer
• UV-VIS spectrometer
● Environmental
monitoring
● Semiconductor
industry
■Spectral Response
■SPECIFICATIONS
R12896
525
47
63
0.4
R3896
525
—
60
0.4
Unit
µA/lm
mA/W
mA/W
—
5000
5000
A/lm
10
10
nA
TPMHB0889EA
R12896
R3896
CATHODE RADIANT SENSITIVITY (mA/W)
Parameter
Luminous
Cathode
at 194 nm
Radiant
Sensitivity
at 254 nm
Red / White Ratio
Anode
Luminous
Sensitivity
Anode Dark Current
(After 30 min storage in darkness)
1000
100
10
1
0.1
CATHODE RADIANT SENSITIVITY
QUANTUM EFFICIENCY
0.01
100 200 300 400 500 600 700 800 900 1000
WAVELENGTH (nm)
17
PHOTODETECTORS
NEAR INFRARED (NIR) DETECTOR UNIT SERIES
The near infrared (NIR) detector unit series has a full line of products to support diverse measurements of weak or fast phenomena in
the NIR region. The R5509 series provides wide spectral range.
NIR PMT Unit
Product Type
NIR PMT
Wide spectral
response
Easy handling, Gate function (H12694) Low noise
Low noise (H10330B-25, H12694-25)
Features
51 mm
88 mm
100 mm
H10330B/H12694
Type No.
H12397-75 (fiber input type)
Cooler is not shown.
H10330B/ NEW H12694
R5509
Devlp. H12397-75
Suffix No.
Spectral Response
-25
-45
-75
950 to 1200
950 to 1400
950 to 1700
Rise Time
950 to 1700
2.5 ×
2.5 ×
300 to 1400
300 to 1700
3000
2.5 ×
5×
1.6 ×
1.6 ×
Thermoelectrically cooled
(No liquid nitrogen, no cooling water)
Liquid nitrogen cooled
—
Cooler
Included
C9940-01/-02 (Sold separately)
—
High Voltage Power Supply
Included
C9525 (Sold separately)
—
Mode
Gate Gate width (FWHM)
Mode
Repetition Rate
—
—
—
1 µs to 10 ms (H12694)
—
—
—
10 Max. (H12694)
—
—
kHz
-60 °C
TPMOB0201EB
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
CATHODE RADIANT SENSITIVITY
QUANTUM EFFICIENCY
101
104
Normally OFF (H12694)
■Spectral Response
102
103
ps
s-1
Cooling Method
105
nm
105
Dark Count
104
Unit
ps
1500
400
400
103
-73
900
900
T.T.S. (FWHM)
-43
R5509-73
-75 TYPE
R5509-43/-73
■APPLICATIONS
● Photoluminescence
● Singlet oxygen measurement
● Raman spectroscopy
● Cathodoluminescence
● Fluorescence / Fluorescence lifetime
● LIDAR (light detection and ranging)
100
10-1
-25 TYPE
R5509-43
-45 TYPE
10-2
200
400
600
800
1000 1200 1400 1600 1800
WAVELENGTH (nm)
18
PHOTODETECTORS
FAST TIME RESPONSE SERIES
HIGH SPEED COMPACT HPD (HYBRID PHOTODETECTOR) SERIES
The HPD (Hybrid Photodetector) utilizes the "electron bombardment" method in
which photoelectrons are accelerated in a strong electric field to directly strike an
avalanche diode (AD) in a vacuum tube. This mechanism achieves excellent quality
of amplification.
Using a new AD with very low capacitance, we have developed a compact HPD
with an excellent time resolution.
■APPLICATIONS
● Laser scanning microscope (confocal / two-photon)
● FCS (fluorescence correlation spectroscopy)
● LIDAR (light detection and ranging)
● TCSPC (time-correlated single photon counting)
R10467U series
■T.T.S. (R10467U-06)
10000
TPMHB0767ED
Full Illumination
HV: -8 kV
AD Bias: 405 V
NEW
Parameter
R11322U-40 R10467U-06 R10467U-40 R10467U-50 Unit
300 to 720
GaAsP
5
45
170
220 to 650 300 to 720 380 to 890 nm
Bialkali
GaAsP
—
GaAs
6
3
mm
28 1
%
45 2
14 3
5
—
1.2 × 10
ps
400
50
90
1000
100
ps
130
FWHM
50 ps
COUNTS
Spectral Response
PhotoMaterial
cathode Effective Area
Quantum Efficiency
Gain 4
Rise Time
T.T.S. (Transit Time
Spread) 5 (FWHM)
10
0.5
1
1.5
1 At 350 nm
2 At 500 nm
3 At 800 nm
4 At the photocathode voltage of –8 kV and the AD bias voltage of Vb –10 V
5 At the single photon state and full illumination on the photocathode, specified as FWHM
(Full Width at Half Maximum). These values include the jitter of the electronics of about 30 ps
2
2.5
3
3.5
TIME (ns)
HIGH SPEED PMT R9800, R12844, 12845
A new series of high speed photomultiplier tubes (PMT) from Hamamatsu has now
appeared on the market. These offer a very small transit time spread that is uniform
across the entire effective area. This excellent time resolution has been achieved
with a simple PMT design that is suitable for mass production.
The new high speed PMT series can be used as a powerful tool for precision timing
measurement in many application fields.
■APPLICATIONS
● TOF-PET in nuclear medicine
● TOF counter in HEP experiments
● Radiation monitor in security instruments
Left: R12845, Center: R12844, Right: R9800
■T.T.S. (R12844)
10000
R9800
25 mm (1 inch) 28 mm (1-1/8 inch) 38 mm (1.5 inch)
300 to 650
Bialkali
5 × 105
1.0 × 106
5 × 105
1300
1300
1500
1.0
1.0
1.2
270
190
Devlp. R12845
190
Unit
—
nm
—
—
V
ns
TPMHB0805EA
HV: 1.3 kV
1000
FWHM
190 ps
COUNTS
Parameter
Diameter
Spectral Response
Photocathode
Gain
Supply Voltage
Rise Time
T.T.S. (Transit Time
Spread) (FWHM)
Devlp. R12844
100
ps
10
0.5
1
1.5
2
TIME (ns)
19
2.5
3
3.5
PHOTODETECTORS
ION / ELECTRON DETECTOR
NEW
COMPACT MCP ASSEMBLY SERIES F12334-11, F12395-11, F12396-11
Thin and flat shape makes it possible to install into limited space
This assembly has a suitable time response characteristic for TOF (Time of Flight)
measurement and is useful for ion, electron, X-ray or VUV-light detection.
Its thin and flat shape allows installation when space is limited, which is often the case
in equipment design.
● Easy replacement
2 connections (HV and Signal)
● Suitable installation
● Robust MCP
● Compact
● 3 choices of effective area
F12334-11: 20 mm
F12395-11: 27 mm
F12396-11: 42 mm
■Output Waveform
20
TMCPB0112EA
Left: F12334-11, Center: F12395-11, Right: F12396-11
0
OUTPUT VOLTAGE (mV)
■FEATURES
■ACCESSORY FOR MCP
ASSEMBLY
-20
-40
FWHM
1.5 ns
-60
-80
●Coupler E12717
e
D vlp.
-100
■APPLICATIONS
-120
-2
● TOF-MS
● SIMS
● Electron detection
● Pulse counting
0
2
4
6
8
RESPONSE TIME (ns)
FLAME SENSOR
UVTRON® R9533, R9454
Quick detection of flame from a distance
■APPLICATIONS
● Flame detectors for gas/oil lighters and matches
● Combustion monitors for burners
● Detection of discharge
(corona discharge of high voltage transmission lines, etc.)
●Flame detector
9 mm
Vibration and
Shock Proof Type
13.5 mm
55 mm
30 mm
●Boiler flame monitor
Left: R9533, Right: R9454
STEAM
UVTRON
DUST
AIR
WATER
GAS
GAS
UVTRON
RELATIVE SENSITIVITY, RELATIVE INTENSITY
(ARBITRARY UNIT)
■Spectral Response
TPT B0009EB
100
UVTRON
SUNLIGHT
50
GAS
FLAME
0
100
200
300
400
TUNGSTEN
LIGHT
500
600
700
800
900
WAVELENGTH (nm)
TPT C0028EA
ULTRAVIOLET
VISIBLE
INFRARED
20
PHOTODETECTORS
PMT PERIPHERAL PRODUCTS
ACCESSORIES
We provide a wide variety of quality socket assemblies, which enable easy yet reliable operation of photomultiplier tubes. They can
also be combined with other peripheral products such as high voltage (HV) power supplies, preamplifiers, etc.
D...Voltage Divider
DP...Voltage Divider and HV Power Supply
DAP...Voltage Divider, Amplifier and HV Power Supply
28 mm Dia.
Side-On PMT
28 mm Dia.
Head-On PMT
D TYPE
DP TYPE
DAP TYPE
D TYPE
DP TYPE
DAP TYPE
E717-63, E717-74
C12597-01, C8991
C6271, C7950
E990-07
C10344-03, C9028-01
C7950-01
Socket
Assembly
E717-63
High Voltage
Power Supply
C12597
C10344-03
C7950
C11152, C9619
C9525, C9727
C4900, C10940
C11152, C9525
C12419, C11184, C9999
C9663, C7319, C6438, C5594
Module
Unit
C7319
C12419
M7279
M8879
Frequency Bandwidth
DC to
DC to
(-3 dB)
10 MHz 150 MHz
Current-to-voltage
+10 mV/µA +4 mV/µA
Conversion Factor
(Load Resistance: 50 Ω)
Amplifier
Parameter
Parameter
M7279, M8879
C6438
C6438-01
NEW C6438-02
C9999
DC to 20 kHz or
DC to 200 kHz DC to 1 MHz DC to 10 MHz
(switchable)
-0.1 V/µA,
Current-to-Voltage
-1 V/µA*
+50 mV/µA
Conversion Factor -1 V/µA, -10 V/µA
(Load Resistance: 50 Ω) (switchable)*
* Load Resistance: 10 kΩ
Frequency
Bandwidth (-3 dB)
C9663
C11184
C5594
DC to 50 MHz DC to 150 MHz DC to 300 MHz 50 kHz to 1.5GHz
+0.5 mV/µA (C6438)
+25 mV/µA (C6438-01)
±5 mV/µA (C6438-02)
+4 mV/µA
+1.25 mV/µA
+3.15 mV/µA
NEW
AMPLIFIER UNIT C6438-02
The output signal from a photomultiplier tube can be directly input to the C6438-02, and
it provides a voltage output signal with 50 Ω load at a conversion factor of 5 mV/µA.
The C6438-02 has a selection switch for non-inverting / inverting output.
■FEATURES
● Wide bandwidth: DC to 50 MHz
■SPECIFICATIONS
Parameter
Frequency Bandwidth (-3 dB)
Current-to-voltage Conversion Factor
Rise Time
Maximum Output Signal Voltage
Output Noise Voltage
Power Supply Voltage
21
● Non-inverting / inverting
output switchable
(at load resistance 50 Ω)
Typ.
Min.
Max.
Description / Value
DC to 50
5
7
±1.3
2
±5
Unit
MHz
mV/µA
ns
V
mV rms
V
■APPLICATIONS
● Signal readout from PMT
PHOTODETECTORS
HIGH VOLTAGE POWER SUPPLY MODULES
Stability
Ripple
Output Output Input
/ Noise 12
Voltage Current
12 Load 1
Line
Voltage
(Typ.)
(Max.) (Max.)
(%)
(%)
(mV p-p)
(V)
(mA)
(V)
Type No.
-03
-03-R2
C10940
-53
-53-R2
—
-01
C4900
-50
-51
-1200
0.6
+5
50
±0.02
±0.01
15 × 18 × 15
0.6
0.5
0.6
0.5
+15
+12
+15
+12
38
±0.01
±0.01
46 × 24 × 12
0.6
+15
125
±0.01
±0.01
46 × 24 × 12
0.5
+12
1
+15
125
±0.01
±0.01
46 × 24 × 12
8
±0.01
±0.01
41 × 10 × 41
60
±0.01
±0.01
62 × 15 × 45
+1200
-1250
+1250
—
C10673
-1250
-01
—
-1250
-50
+1250
C10764
C11152
C9619
—
-01
-50
-51
—
-01
-50
-51
-1500
1
+1500
-2000
2
+2000
-12
-2000
-52
+2000
-12
-1000
-52
+1000
C12446
1At maximum output voltage
+15
+12
+15
+12
+15
+12
+15
+12
5
+24
50
±0.01
±0.01
62 × 15 × 45
10
+24
50
±0.01
±0.01
62 × 15 × 45
C11784
-02
-02-R1
C11323 -02-R2
-52
-52-R1
-52-R2
Size
W×H×D
(mm)
-1800
20
+24
40
±0.01
±0.01
+1800
98 × 27 × 51
Note
Digital Control RS-485,
Daisy-chain
(-R2 type only)
UL recognized
Low ripple / noise
High current output
Digital control
-R1 type: RS-232C
-R2 type: RS-485
2At maximum output current
Devlp.
HIGH VOLTAGE POWER SUPPLY MODULE C12733-01
High voltage power supply module with high environment resistance
■FEATURES
● Wide operating temperature
Operating ambient temperature: -40 °C to +175 °C
● High reliability for shock / vibration
Vibration: 300 m/s2, Shock: 10000 m/s2
● Best match with most of the hamamatsu ruggedized
high temperature PMT assemblies
■SPECIFICATIONS
Parameter
Input Voltage
Output Voltage
Max.
Output Current
Ripple / Noise (p-p) 12 Typ.
Output Voltage Control
Weight
Typ.
1At maximum output voltage
Description / Value
+15 ± 1
-1000 to -1800
90
50
By external controlling voltage (0 V to +5 V)
80
2At maximum output current
Unit
V
V
µA
mV
—
g
22
PHOTODETECTORS
PMT PERIPHERAL PRODUCTS
Devlp.
STABILIZED LIGHT SOURCE FOR PMT L12367 SERIES
Stabilized light source with a microtiter plate (MTP) contour
This stabilized LED light source has a shape similar to an MTP. It has 9 light-emitting
points in 3 different colors and 3 intensity levels. The output wavelength and intensity
can be customized upon request.
■FEATURES
● Stable light emission
for 10 hours or more
● LED light source
■APPLICATIONS
● Designed for adjusting
sensitivity of detectors
having built-in MTP readers
■SPECIFICATIONS
Parameter
Selectable Peak Emission Wavelength
Spectral Half Width
LED
Light-emitting Size
Emission Stability (0 °C to +50 °C) Max.
Battery
Battery Service Life (at +25 °C) Min.
Operating Ambient Temperature / Humidity
Storage Temperature / Humidity
L12367 Series
428
465
522
660
65
26
35
30
7.0 (9 points)
±2
AAA Battery
10
0 °C to +50 °C / below 85 %
-20 °C to +60 °C / below 85 %
Unit
nm
nm
mm
%
—
h
—
—
■Usage Examples
POWER
TACCC0159EA
STABILIZED LIGHT SOURCES FOR PMT L11416, L11494 SERIES
Accurate low-light-level measurement even at photon counting levels
The L11416 series is available in a package identical to test tubes for blood
analyzers, and the L11494 series in a thin plate-like package used on sample
stages in MTP readers, etc. Both LED light sources emit stable light even at photon
counting levels, making them ideal for adjustment of PMT sensitivity.
■FEATURES
● High stability even at photon counting light levels
● Battery operation: 24 hours or more
Left: L11494, Right: L11416
■SPECIFICATIONS
■Usage Examples
●L11416 Series
L11416-470 L11416-525 L11416-555 L11416-590
Parameter
Peak Emission Wavelength
465
522
555
592
Spectral Half Width
26
35
30
18
Light Emission Power
1 ± 0.5
Emission Stability (0 °C to +50 °C) Max.
±2
Battery
Button battery SR41 or equivalent
Battery Service Life (at +25 °C) Min.
24
Operating Ambient Temperature / Humidity
0 °C to +50 °C / below 85 %
Storage Temperature / Humidity
-20 °C to +60 °C / below 85 %
Unit
nm
nm
pW
%
—
h
—
—
●L11494 Series
L11494-430 L11494-470 L11494-525 L11494-660
Parameter
428
465
522
660
Peak Emission Wavelength
65
26
35
30
Spectral Half Width
High: 1 ± 0.5, Low: 0.01 ± 0.005
Light Emission Power
7.0
Emission Area
Emission Stability (0 °C to +50 °C) Max.
±2
Battery
Button battery SR41 or equivalent
10
24
Battery Service Life (at +25 °C) Min.
0 °C to +50 °C / below 85 %
Operating Ambient Temperature / Humidity
Storage Temperature / Humidity
-20 °C to +60 °C / below 85 %
23
●L11416
TACCC0149EA
●L11494
Unit
nm
nm
pW
mm
%
—
h
—
—
POWER
2
1
1L11494
2Photosensor
TACCC0150EA
POINT-OF-CARE TEST
Devlp.
IMMUNOCHROMATO-READER C11787 SERIES
The C11787 series Immunochromato-Reader makes rapid, high sensitivity, quantitative measurements of color intensities for red/blue/fluorescence-based immunochromatographic reagents.
Since measurement data is saved as a CSV file, it can be analyzed on commercially
available spreadsheet software, and calibration curve and time-course graphs then
easily drawn. The C11787 series Immunochromato-Reader is an optimal tool for
R&D work as well as quality control of immunochromatography reagent kits.
■FEATURES
● High sensitivity
● High repeatability
● Wide selection of functions
● It can respond to gold colloid,
latex, and fluorescent labels.
● Can shorten time to market
through reduced development
time and cost
● Can customize settings for stand-alone
OEM reader (C11787-50/-60/-70)
■APPLICATIONS
● R&D
C11787-00/-10/-20 PC operation type
Biochemistry
● Food
Allergen
● Agriculture
Virus
Residual pesticides
● Environment
Endocrine disrupters
C11787-50/-60/-70 Stand alone type*
*: Possible to operate by PC
■CUSTOMIZABLE OPTIONS FROM THE BASIC MODEL
Parameter
Measurement object
Light source
Display
C11787-00/-50
Red-based color line
Green LED
Basic Model
C11787-10/-60
Blue-based color line
Red LED
Monochrome LCD
4 buttons
Operation
Transmission of data
Printer
Internal memory
Other functions
Firmware
Customizable options
C11787-20/-70
Fluorescent label
UV LED*
USB 2.0
RS-232C
—
Flash ROM (200 records)
Reagent information registration IC chip
—
—
—
Measurement: Require registration of reagent information with IC card
QC Measurement: Inspection
—
—
Color LCD
5 buttons
Keypad
Touch panel
Thermal printer
Internal bar-code reader
External bar-code reader
Reagent temperature control
Customizable based on
requirements
* Please ask us about other wavelengths.
BIOMEDICAL PRODUCT
Devlp.
FLOW CELL ASSEMBLY FOR FLOW CYTOMETRY
Custom flow cell assembly for OEM
■FEATURES
● Proposed assembly structure design based on laminar flow model
● Flow cell customization options: Size, shape, coating, etc.
J12800-000-101
Avoid flow clogging with air
Ra = 0.05 µm available (transparent surface)
Countermeasure against
stray light with black quartz
Lens coupling available
without glue
24
IMAGING DEVICE
■SELECTION GUIDE
Wide Variety
Standard Type
Image Intensifier
I.I. UNITS
High Speed Gate
High
Voltage
Power Supply
Gate /
High Speed
Gate
C9016
C9016-2x, C9546, C9547
High Speed Gate & High Repetition
High
Speed
Gate
Pulse
Generator
High
Voltage
Power Supply
C9548
ICCD CAMERA
High
Speed
Shutter
C10880-03 Series
High Speed Shutter
CCD
Camera
High
Voltage
Power Supply
C10054
PROXIMITY FOCUSED IMAGE INTENSIFIERS
The V12841U, which is the 16 mm dia. type, is under development. It is a light and compact.
First GaAs photocathode will be available, and then the other photocathodes will be available.
The crystalline photocathode (GaAs, GaAsP, extended red GaAsP and InGaAs) are available
for 18 mm and 25 mm dia. types. Standard input window is borosilicate glass, and FOP input
window is also available.
GaN photocathode is available just for 18 mm type, and this photocathode has higher sensitivity in the UV region and good solar blind characteristic.
These Gen3 tubes can be used in various applications.
■APPLICATIONS
● Bio-imaging
● High speed shutter camera
● Time-resolved low light level imaging
Parameter
Photocathode Material
Photocathode Size
Effective Area
Borosilicate Input
Suffix
FOP Input
V9569U
■Spectral Response
100
V7090U
GaAs
18
13.5 × 10
25
16 × 16
-71
—
-72
V9501U
V8070U
GaAsP
Extend Red GaAsP
18
25
13.5 × 10
16 × 16
-74
-73
-75
—
—
Devlp. V12841U
16
12 × 10
—
—
V8071U
InGaAs
-76
—
Unit
—
mm
mm
—
—
Unit
—
mm
mm
—
—
TII B0120EA
V9501U-74
V9870U
QUANTUM EFFICIENCY (%)
Parameter
V9870U-J360
Photocathode Material
GaN
Photocathode Size
18
Effective Area
—
Borosilicate Input
—
Suffix
FOP Input
—
V12841
10
V9569U-71
1
V8071U-76
0.1
0.01
200
400
600
800
WAVELENGTH (nm)
25
1000
1200
IMAGING DEVICE
IMAGE INTENSIFIER WITH AUTO GATE FUNCTION
Image intensifier using a wrap-around power supply
with internal auto gate function
This power supply can be used for various image intensifiers
■FEATURES
■APPLICATIONS
● Wide dynamic range
(1 × 10-6 to 1 × 102 lx)
● Resistant to excessive light
● Long service life
● Security cameras
● Scientific measurement
● In-car cameras
■Imaging Example (at 1000 lx)
● With auto gate function
● Without auto gate function
ICCD CAMERA WITH InGaAs PHOTOCATHODE C10054-07/-17/-27
The C10054-07/-17/-27 is a very compact Intensified CCD (ICCD) camera with high-speed
shutter function. An InGaAs image intensifier is built into this ICCD camera. This camera
will be very effective for imaging in near infrared light region (ex. 900 nm to 1100 nm).
■FEATURES
● Compact
● Progressive scan type available
● High speed shutter: 5 ns to DC
● High sensitivity:
InGaAs photocathode
● High resolution: 470 TV lines
■APPLICATIONS
● Night vision
● Material evaluation of
solar cell
Devlp.
CCD CAMERA WITH FIBER OPTIC WINDOW C12550
Digital CCD camera with fiber optic window
The C12550 is a digital CCD camera with a fiber optic window designed to read out images from image intensifier units. Fiber coupling allows highly efficient image transfer
compared to lens coupling. Image data is output to a PC via the USB 2.0 interface.
■FEATURES
● Highly efficient image readout
● Digital output
● Exposure time: 10 µs to 10 s
■APPLICATIONS
● Image readout from
image intensifiers and
image intensifier units
26
LAMPS
■SELECTION GUIDE
Lamp Type
Output
Lamp
Spectral
Stability
Distribution Rating Fluctuation
(nm)
(W)
p-p (%)
Life
(h)
Calibrated
Light Source
Related Products
Xenon Lamp
185
to
2000
35
to
300
0.2 Typ.
1000
to
3000
185
to
2000
50
to
500
0.5 Typ.
500
to
2000
Lamp
Opto-Spectrum
Housing Power Supply Generator (OSG)
Xenon Short Arc
Spot
Light Source Reflection Lamp
Calibrated
Xenon Lamp
Light Source
Mercury Xenon Lamp
Xenon Flash Lamp
160
to
2000
2
to
60
Less than 3
400 1
to
5000
(See page 33)
(See page 32)
Trigger
Socket
Shield
Box
Power
Supply
Xenon Flash Lamp
Flash Light Source
Module
(See page 29)
(See page 31)
UV-VIS Fiber
Light Source
VUV Light
Source Unit
NEW
Excimer Lamp
Mini Excimer Lamp
172
250
—
1000
(See page 5)
H2D2 Lamp
(High Brightness High
End Deuterium Lamp)
X2D2 Lamp
(High Brightness)
L2D2 Lamp
(Long Life)
115
to
400
115
to
400
120
0.05
Typ.
L2D2 Lamp
(Synthetic silica
window type)
1000
Lamp Housing
30
0.005
Typ.
Power Supply
2000,
4000
(See page 38)
S2D2 Lamp
(Stable and Small
Deuterium Lamp)
S2D2
115
to
400
5
to
8
S2D2 Module
0.005
Typ.
S2D2 UV-VIS
S2D2 UV-VIS
S2D2 VUV
Fiber Light Source
Fiber Light Source (UV Enhanced Type) Light Source Unit
1000,
1500
L2D2
(See page 28)
UV-LED Unit
LC-L5
LED
365±5,
385±5
—
—
NEW EB Pumped
Light Source
290 2
to
450
6
0.1
Typ.
1 Depends on the repetition rate.
2 L12848-305 type (peak wavelength: 305 nm)
27
UV-LED
Spot Light Source UV-LED Module
LC-L1V3
LC-L2
20000
(See page 34)
5000
(See page 38)
(See page 33)
Calibrated
Deuterium Lamp
Light Source
LAMPS
■Spectral Distribution
UV: Ultraviolet
100 nm
Visible
200 nm
400 nm
Deuterium Lamps
115
1000 nm
2000 nm
400
Xenon Flash Lamps
160
Broad
spectrum
IR: Infrared
600 nm
2000
185
Xenon Lamps
2000
185
Mercury Xenon Lamps
2000
290
450*
EB Pumped Light Source
Line
spectrum
Hollow Cathode Lamps
193
852
* L12848-305 type (peak wavelength: 305 nm)
■ Fluctuation (Short-term stability)
0.01 %
1%
0.1 %
EB Pumped Light Source
10 %
Xenon Flash Lamps
0.3 %
3%
Mercury Xenon Lamps
Deuterium Lamps
2%
0.005 %
Vacuum Ultraviolet Deuterium Lamps
Xenon Lamps
0.05 %
1%
Lamp light output stability is an important factor that affects measurement accuracy and reliability of equipment. To supply
lamps with high output stability, Hamamatsu has made consistent efforts to achieve ideal electrode construction and
positioning accuracy and also to develop optimum power supplies.
COMPACT UV-VIS S2D2 FIBER LIGHT SOURCE (UV ENHANCED TYPE) L12515
UV-VIS fiber light source with enhanced intensity in short
wavelength region
■FEATURES
■APPLICATIONS
● Spectrophotometers
● Environmental analysis
● Biochemical analysis
● Semiconductor inspection
● Compact size
● Long service life (S2D2 lamp)
● High output
● High stability
■Light Output Stability
●200 nm to 220 nm (enlarged view of enhanced output region)
●at 230 nm
ABSORBANCE (10-5 A.U.)
■Spectral Distribution
1.4
L12515
L10671 (conventional type)
1
●200 nm to 1100 nm
TLSZB0125EA
0.8
10
3
0.4
L12515
L10671 (conventional type)
Times
LIGHT GUIDE
A7969-08AS
CORE DIAMETER= 0.8 mm
0.2
0
200
202
204
206
208
210
212
WAVELENGTH (nm)
214
216
218
220
1
0.1
LIGHT GUIDE
A7969-08AS
CORE DIAMETER= 0.8 mm
0.01
200
300
400
500
600
700
800
900
1000
15
10
5
0
-5
-10
-15
-20
TIME (100 s/div.)
●at 600 nm
ABSORBANCE (10-5 A.U.)
0.6
RELATIVE IRRADIANCE
RELATIVE IRRADIANCE
1.2
20
20
15
10
5
0
-5
-10
-15
-20
TIME (100 s/div.)
TLSZB0107EA
1100
WAVELENGTH (nm)
28
LAMPS
NEW
COMPACT 2 W XENON FLASH LAMP MODULES L12336 SERIES
These flash lamp modules are ideal for portable chemical analyzers ordinary 2 W
xenon flash lamp modules that require line voltage to operate.
■FEATURES
■APPLICATIONS
● Spectrophotometers
● Fluorescence
spectrometer
● Blood analysis
● MTP reader
● Water quality and
pollution analysis
● Laboratory testing
● Air pollution analysis
● Semiconductor
inspection
● Small size
(world’s smallest in its class)
● High stability: 0.5 % CV Typ.
● Long life: 1 × 109 flashes
● Repetition rate: 532 Hz Max.
● Broad radiant spectrum: Ultraviolet to near infrared range
● High precision electrode positioning: Accuracy to ±0.05 mm
● Low electromagnetic noise:
CISPR11 Class B
● Compatible with SMA fibers
(no lens design required)
■Emission Pulse Waveform
■Emission Spectrum (L12336-01)
TLSZB0103EA
0.10
Operating conditions
Main discharge voltage: 600 V
Measurement distance: 20 cm
100
Main discharge capacitance
0.141 µF (L12336-01)
0.094 µF (L12336-02)
0.047 µF (L12336-03)
0.02 µF (L12336-04)
80
60
40
20
■Emitted Light Distribution (L12336-01)
90°
100 %
TLSZB0131EA
Operating conditions
Main discharge voltage: 600 V
Main discharge capacitance: 0.141 µF
Flash frequency: 79 Hz
Measurement distance: 50 cm
0.09
IRRADIANCE (µW·cm-2 ·nm-1)
RELATIVE LIGHT OUTPUT (%)
120
Left: SMA fiber adapter type, Right: Normal type
0.08
80
60
0.07
L12336-01 (Normal type)
L12336-11 (SMA fiber adapter type*)
* Measured using an optical fiber with a
core diameter of 800 µm (A7969-08AS)
0.06
0.05
40
20
0.04
0°
0.02
0.01
0
0
0.2
0.4
0.6
0.8
1
1.2
300
400
TIME (µs)
110
500
600
700
800
900
1000
1100
90°
100 %
WAVELENGTH (nm)
■Light Output Stability
■Life
TLSZB0126EA
110
Operating conditions
Main discharge voltage: 600 V
Flash frequency: 50 Hz
Measurement distance: 50 cm
Lamp electrode angle
0
200
1.4
180°
0.03
80
TLSZB0128EA
60
RELAITIVE LIGHT OUTPUT (%)
RELATIVE LIGHT OUTPUT (%)
100
105
0.38 %CV
100
Operating Condition
Main Discharge Voltage: 600 V
Main Discharge Capacitor: 0.47 µF
Repetition Rate: 236 Hz
Average Input: 2 W
95
90
0
50
100
150
200
250
300
40
90
L12336-01
L12336-02
L12336-03
L12336-04
80
70
NUMBER OF FLASHES
50
40
Lamp electrode angle
TLSZB0102EA
30
20
0
GUARANTEED LIFE RANGE
0
2 × 108
4 × 108
■Installation Example
MINI-SPECTROMETER
REAGENT
COMPACT 2 W
XENON FLASH
LAMP MODULE
LENS
29
6 × 108
8 × 108
NUMBER OF FLASHES
POWER SUPPLY
+ OSCILLATION CIRCUIT
180°
60
10
350
20
0°
1 × 109
1.2 × 109
LAMPS
20 W XENON FLASH LAMP
These lamps are developed for environmental and medical analysis applications, and
have high stability and long service life with a maximum input energy of 0.5 J. Their output light intensity is 1.2 times and stability is 1.5 times higher than our previous products.
■TYPE NUMBER GUIDE
■FEATURES
● High stability: 1.0 % CV Typ.
● Long life: 1 × 108 flashes
● High output
L11936
2
1Type No.
Type No.
Arc Size
Reflector
L1193x Series
1.5 mm
—
L1194x Series
1.5 mm
Built-in
L1195x Series
3.0 mm
—
Built-in
L1196x Series
3.0 mm
2Lamp Window Material
Last number in "1Type No." Window Material
Borosilicate Glass
6
UV Glass
7
Sapphire Glass
8
Fused Silica
9
■APPLICATIONS
● MTP reader
Left: L11947, Right: L11937
● Blood analysis
● Air pollution analysis
● Water quality and pollution analysis
● Semiconductor inspection
● Fluorescence spectrometers
● Light sources for image processing
■Spectral Distribution
■Life
TLS B0014EA
110
Operating conditions
Main voltage: 1000 V
Main capacitor: 1.0 µF
Repetition rate: 40 Hz
Measurement distance: 50 cm
1.0
0.8
Fused silica
Sapphire glass
UV glass
Borosilicate glass
0.6
0.4
0.2
0
200
300
400
500
600
700
800
900
1000
■Light Output Stability
TLS B0015EA
110
100
RELATIVE LIGHT OUTPUT (%)
IRRADIANCE (µW·cm-2 ·nm-1)
1.2
1100
WAVELENGTH (nm)
90
80
70
60
50
20
Operating conditions
Main voltage: 1000 V
Main capacitor: 1.0 µF
Repetition rate: 40 Hz
Measurement distance: 50 cm
10
1 × 108 Flashes
40
30
0
TLS B0016EA
105
RELATIVE LIGHT OUTPUT (%)
1
0
100
200
300
100
95
0.49 % CV
2.72 %P-P
90
85
80
Operating conditions
Main voltage: 1000 V
Main capacitor: 1.0 µF
Repetition rate: 40 Hz
Measurement distance: 50 cm
75
70
65
400
500
600
700
60
800
0
50
100
150
200
250
300
350
400
NUMBER OF FLASHES
OPERATING TIME (h)
694 hours = 1.0 × 108 Flashes (40 Hz continuous)
FLASH LIGHT SOURCE
LF2
Ideal for strobe light source!
Irradiates high power pulsed light to any desired area!
Includes most functions of prior LF1 at lower cost due to
elimination of the CPU
■FEATURES
■APPLICATIONS
● Flash light sources for various inspection cameras
(Example: Macro-inspections in semiconductor manufacturing processes)
Type No.
L11729 / L11730
-04-01-2
-04-01-1
Suffix No.
-04-04-1
15 W
40 W
40 W
Maximum Lamp Input Power
Maximum Lamp Input Energy 0.5 J (per flash) 1.28 J (per flash) 0.5 J (per flash)
70 Hz
100 Hz
30 Hz to 70 Hz
Maximum Emission Frequency
385 nm to 1600 nm
Spectral Distribution
1 µF
1 µF
4 µF
Internal Capacitor
Left: Rear light guide port type L11730
Right: Front light guide port type L11729
* Light guide is sold separately.
■Spectral Distribution
120
RELATIVE IRRADIANCE (%)
● Long life: 1 × 108 flashes
● Cassette type lamp: Easy lamp replacement,
no optical axis alignment required
● Can be synchronized with CCD camera: External trigger emission
● Low cost achieved by eliminating CPU
● Accommodates two lamp types: 15 W or 40 W
Internal capacitor: 4 µF
TLSZB0080EA
VISIBLE TYPE
(Glass light guide)
100
80
60
40
20
0
300
350
400
450
500
550
600
650
700
750
800
WAVELENGTH (nm)
30
LAMPS
RF* DISCHARGE TYPE EXCIMER LAMP
*RF: Radio Frequency
The possibilities of light for "REFORMING" and "CLEANING"!
■FEATURES
● Uniformly irradiates a large
area by use of a long flat lamp
Hamamatsu
long flat lamps
■Uniformity characteristics (along short axis)
Long flat lamps vs. cylindrical lamps
100
TLS B0011EA
Better uniformity
since entire surface is
in close proximity
RELATIVE IRRADIANCE (%)
90
80
70
Cylindrical lamps from
other companies
60
■APPLICATIONS
50
40
30
● Surface reforming of PET plastic
UV power meter: Hamamatsu H9535-172
Lamp to UV power meter distance: 5 mm
Pinhole is interposed between lamp and UV power meter
Pinhole diameter: 1 mm
Measurement atmosphere: Air
20
10
0
-20
-15
-10
-5
0
5
10
15
80°
Poor uniformity
since lamp bottom is
in close proximity
20
DISTANCE FROM IRRADIATED CENTER (mm)
15°
15
10
5
0
-5
-10
-15
Before irradiation
-200
-150
-100
-50
0
50
100
150
80 % or more
60 % – 80 %
Below 60 %
UV power meter: Hamamatsu H9535-172
Pinhole diameter: 1 mm
Lamp to UV power meter distance: 5 mm
Measurement atmosphere: Air
Pinhole is interposed between lamp and UV power meter
TLS B0012EA
● Gives a stable output with minimal flicker by
using RF (radio frequency) discharge
■RF discharge vs. dielectric barrier discharge
●RF discharge
Dielectric material (glass, etc.)
●Dielectric barrier discharge
Dielectric material (glass, etc.)
External electrode
Glow discharge
After irradiation
● Bonding pre-processing
(improve adhesiveness)
200
DISTANCE FROM IRRADIATED CENTER (mm)
External electrode
Example: PPS (polyphenylene sulfide) + PO (polyolefin)
3
Bonding strength
DISTANCE FROM
IRRADIATED
CENTER (mm)
■Long flat lamp irradiation intensity distribution
Improved
about
3 times
2
1
Microplasma discharge
0
Before Excimer
lamp processing
Uniform discharge without irregular light emissions
Thread-like discharge with irregular light emissions
● Power supply auto-tuning function for efficient light emission
● Single wavelength at 172 nm allows highly efficient processing
● Instantaneous lamp ON/OFF operation
After Excimer
lamp processing
TLS B0013EA
● Dry cleaning of gold-coated mirror
for laser
■SPECIFICATIONS
Excimer Lamp L11751
Parameter
Rating
Emission Wavelength
Irradiation Intensity 1
Weight
Description / Value
250
172
50 or more
220
Unit
W
nm
mW/cm2
g
1 Measured with Hamamatsu H9536-172 UV power meter.
31
After irradiation
Power Supply for Excimer Lamp C11753
Lamp House for Excimer Lamp E11752
Parameter
Description / Value
Irradiation Area Size (W × H)
488 × 38
Dimensions (W × H × D)
700 × 180 × 105
Forced-air cooling by suction through duct
Cooling Method
Suction Flow Rate Through Duct
350 (270 to 430)
Weight
8.2
Before irradiation
Unit
mm
mm
—
l/min
kg
Parameter
Input Voltage
Input Current
Oscillation Frequency
RF Output Power
Dimensions (W × H × D)
Weight
Description / Value
Single phase AC200
Below 4
Approx. 2
0 to 250
430 × 99 × 500
13.4
Unit
V
A
MHz
W
mm
kg
LAMPS
OPTO-SPECTRUM GENERATOR (OSG) L12194-00-39070/-43079/-70130
■LINEUP & APPLICATIONS
● Visible range (390 nm to 700 nm):
L12194-00-39070
VISIBLE
NIR
(for solar simulator: solar cell)
● Visible range (430 nm to 790 nm):
L12194-00-43079
240
400
700
(for bio-photostimulation)
1300
● Near IR range (700 nm to 1300 nm):
L12194-00-70130
(spectral sensitivity inspection for camera)
■FEATURES
● Compact body means no more
worries about installation space and
location
● Easy control from your PC
■Spectrum comparison *
TLSZB0129EA
Opto-Spectrum
Generator
RELATIVE LIGHT OUTPUT
● Emits light when and
where you need it
over a wide range of
wavelengths
● Ideal tool for making
high-accuracy
evaluations and tests
● High output while
maintaining high
stability
■Sample software
LED
620
640
660
680
700
720
740
WAVELENGTH (nm)
* Spectrum comparison between typical 680 nm LED and
680 nm monochromatic light emitted from OSG
■Spectral Distribution Example (for visible range)
■Spectral Distribution Example (for Near IR range)
●L12194-00-39070 (390 nm to 700 nm)
●L12194-00-70130 (700 nm to 1300 nm)
●L12194-00-43079 (430 nm to 790 nm)
TLSZB0104EB
TLSZB0042EB
TLSZB0130EA
100
100
90
90
90
80
70
60
50
40
30
20
RELATIVE LIGHT OUTPUT (%)
100
RELATIVE LIGHT OUTPUT (%)
RELATIVE LIGHT OUTPUT (%)
NEW
900 1000
WAVELENGTH (nm)
80
70
60
50
40
30
20
10
10
0
350
400
450
500
550
600
650
700
750
800
850
0
350
80
70
60
50
40
30
20
10
400
450
500
550
600
650
700
750
800
850
0
650
700
750
800
WAVELENGTH (nm)
WAVELENGTH (nm)
850
900
950
1000 1050 1100 1150 1200 1250 1300 1350
WAVELENGTH (nm)
* Each graph shows emission spectra at a wavelength interval of 40 nm.
■SPECIFICATIONS
Parameter
Emission wavelength range
Spectral half-width
Irradiation intensity 1
Light output stability
Wavelength tunable width
Wavelength tuning speed
Warm-up time (Typ.)
Power consumption
Guaranteed lamp service life 2
L12194-00-39070
390 to 700
L12194-00-43079
430 to 790
Approx. 20
15 or more
within ±5
1
50
10
280
1000
L12194-00-70130
700 to 1300
1 or more
Unit
nm
nm
mW
%
nm
nm/s
min
VA
h
NOTE 1: <Control items>
· Lamp ON / OFF
· Shutter drive (open / close)
Manual / Auto
· Timer setting
· Light level adjustment
· Emission wavelength setting
· Total lamp ON time
· Error signal
1Initial illuminance measured at the output end of the A10014-50-0110 light guide (sold separately) attached to the OSG.
2End of service life is defined as the time when irradiation intensity falls below 60 % of its initial illuminance.
* Please consult us if different wavelengths and specifications are needed.
■Connection example
Light guide
(sold separately)
Power
supply
(AC)
Uniform irradiation lens
or condenser lens
(sold separately)
RS-232C cable
(sold separately)
Opto-Spectrum Generator
Object
PC (sold separately)
32
UV APPLIED PRODUCTS
UV-LED SPOT LIGHT SOURCE
LC-L1V3
Space-saving design reduces the cubic volume by up to 90 %
compared with our prior model
■SPECIFICATIONS
Parameter
Max. UV Irradiation Intensity
Peak Wavelength
LED Service Life
Input Voltage (DC)
Power Consumption (Max.)
Cooling Method
365 nm
14000
365 ± 5
385 nm
15000
385 ± 5
20000
9 ± 0.5
25
Natural Air Cooling
■FEATURES
● Compact
● Low power consumption
● Includes optical feedback
function
● Programmable irradiation
intensity and time
● PC communication control
improves work efficiency
USB CABLE
■Irradiation Intensity Distribution (Standard type)
15 mm
20 mm
25 mm
30 mm
16000
15000
14000
13000
12000
11000
10000
9000
8000
7000
6000
5000
4000
3000
2000
1000
0
-10
■Irradiation Intensity Distribution (Right-angle type)
365 nm Type
TLSZB0082EB
4000
365 nm Type
TLSZB0087EA
3500
10 mm
15 mm
20 mm
25 mm
30 mm
-8
-6
-4
-2
0
2
4
6
8
Z=25 mm
Z=30 mm
SPOT LIGHT SOURCE
3000
2500
2000
1500
1000
500
0
-10
10
DISTANCE FROM IRRADIATED CENTER (mm)
Z: Distance from output end of lens
Z=10 mm
Z=15 mm
Z=20 mm
IRRADIANCE (mW/cm2)
10 mm
IRRADIANCE (mW/cm2)
Illuminated area 3 mm
Unit
mW/cm2
nm
h
V
W
—
-8
-6
-4
-2
0
Z: Distance from output end of lens
Z=10 mm
Z=15 mm
Z=20 mm
Z=25 mm
LC8
Operate it from your PC via RS-232C port
■FEATURES
● Long life: 4000 h guaranteed
● Light intensity monitor with internal optical feedback
function (option, sold separately)
● Easy lamp replacement
● Selectable positions of light guide port
● CE marking compliance
● Instantaneous power-outage response
● Memory Step™ for 9-type with 7-step programs
■APPLICATIONS
● UV curing
• Catheter
• Sealing of LCD panel
• Electronic parts attachment
• CD / DVD pick-up devices
• CCD packaging
33
2
4
6
8
10
DISTANCE FROM IRRADIATED CENTER (mm)
Light guide is sold separately.
Computer is provided by the customer.
Z=30 mm
UV APPLIED PRODUCTS
LINEAR IRRADIATION TYPE UV-LED UNIT
LC-L5
Breaking all the old limits on product line irradiation work using UV lamps!
A whole new generation of light sources is on the scene!
■APPLICATIONS
■FEATURES
● UV ink drying
● UV coating agent
drying
● UV tape peeling
● UV curing
● Fluorescence excitation / Scratch & flaw
inspection lighting
● No duct, no chiller needed
● Huge cuts in maintenance costs
● Easy layout due to compactness
● Reduced environmental impact
● Long service life
● Stable output accuracy
● Uniform UV irradiation over a wide range
● Two types of cooling fans provided:
suction fan and blower fan ("-001" for blowing fan
Z: Distance from beam exit point
Z=5 m
Z=2 mm
Z=20 mm
Z=15 mm
type, or "-002" for suction type is added to the end of type No. as suffix.)
■Irradiated area (L11403-1112/-2112)
10 mm
15 mm
20 mm
30 mm
Y
X
Parameter
Illumination Area 1
UV Irradiation Intensity 2
Peak Wavelength
120
100
80
60
40
20
0
-200
■SPECIFICATIONS
X direction
TLSZB0030EB
RELATIVE IRRADIANCE (%)
2 mm
5 mm
Z
RELATIVE IRRADIANCE (%)
120
-160
-120
-80
-40
0
40
80
120
160
L11403-2104
100
80
60
40
20
0
-40
200
1 Area subject to at least 80 % irradiation intensity at distance of 2 mm
* Feel free to consult us about any custom specifications you might need.
-30
-20
-10
0
10
L11403-1112
L11403-2112
300 × 10
1200
385 ± 5
20
30
40
DISTANCE FROM IRRADIATED CENTER (mm)
100 × 10
1300
365 ± 5
Y direction
TLSZB0031EB
DISTANCE FROM IRRADIATED CENTER (mm)
L11403-1104
Z=10 mm
Z=30 mm
1300
365 ± 5
1200
385 ± 5
Unit
mm
mW/cm2
nm
2 5 minutes after lamp ON at distance of 2 mm within irradiation area
LAMPS
Devlp.
75 W / 150 W HIGH BRIGHTNESS XENON LAMP
High brightness about 1.5 times greater than our current
lamps. BI (Barium-Impregnated) cathode ensures long service
life and high stability.
■FEATURES
● High brightness
● High stability
Fluctuation:
0.2 % p-p (Typ.)
Drift:
±0.5 %/h (Typ.)
● Long service life
Lamp
Rating
(W)
150
75
Window
Material
Fused Silica
■APPLICATIONS
● Spectrophotometers
● Liquid chromatographs
● Fluorophotometers
● Microscope light sources
● Semiconductor inspection
systems
● Color measuring devices,
color scanners
Transmission Guaranteed
Wavelength Operating Life
(nm)
(h)
3000
185 to 2000
2000
Average
Life
(h)
4000
3000
■Arc Distribution
High Brightness Type
Conventional Type
Cathode
Cathode
34
X-RAY RELATED PRODUCTS
■SELECTION GUIDE
MICROFOCUS X-RAY SOURCE
L9631
X-ray
Source
MAX. TUBE CURRENT (µA)
800
L10951
NEW
500
(50 W Max.)
L12161-07
(75 W Max.)
L9181-02
300
L10101, L10321
200
(20 W Max.)
L9421-02
200
Sealed
Type
(39 W Max.)
(8 W Max.)
L10801
1000
Devlp. L10711-03
L11091
200
20
30
40
50
Open
Type
60
70
80
90
100
110
120
130
140
150
160
230
TUBE VOLTAGE OPERATING RANGE (kV)
Specifications
High spatial resolution makes X-ray inspection with resolution of 1/1000 mm possible
CAMERA
X-RAY I.I.
DIGITAL CAMERA UNIT
C7336-03/-05/ NEW -52
DEVICE
SCINTILLATOR
COMPACT X-RAY CCD CAMERA ENERGY DIFFERENTIATION TYPE 64 CH
X-CUBE™
CdTe RADIATION
H8480 / H8481 / H8953 SERIES
LINE SENSOR C10413
ACS™ / ALS™ / FOS™
/ GPXS™
X-ray
Detector
(See page 36)
Digital output:
high resolution,
high contrast
Specifications
Left: H8480, Center: H8953, Right: H8481
X-ray imaging as easy as
handling ordinary
CCD cameras
FOS
(See page 36)
X-ray and gamma-ray
imaging with featured energy
differentiation (multicolor)
Next generation of large
format X-ray imaging
device series
MICROFOCUS X-RAY SOURCE
Type No.
L9421-02
L10101
L10321
L9631
L10951
L9181-02
L12161-07
L11091
L10711-03
L10801
NEW
Devlp.
Tube Voltage Setting Range (kV)
20 to 90
1Minimum resolution
Focal Spot Size (µm)
5
20 to 100
Min. FOD2 (mm)
9.5
6.8
7.3
40 to 110
15
16.8
40 to 130
40 to 150
5
13
17
11
0.25 1
41
20 to 160
20 to 230
0.5
5
2FOD is Focus to Object Distance
■APPLICATIONS
● Non-destructive inspection
● X-ray CT
● In-line X-ray inspection
L12161-07
In-line X-ray
Inspection System
DETECTOR
[Applicable objects]
• Electronic component
• Counterfeit parts
• Plastic component
• Food
• Medicine & drugs
35
• Printed circuit board
• Metal component
• Beverage
• Bioproduct
• Small animal, insect
BELT CONVEYOR
MICROFOCUS
X-RAY SOURCE
TLSOC0049EA
X-RAY RELATED PRODUCTS
X-RAY SCINTILLATOR ACS™/ ALS™/ FOS™/ GPXS™
■FEATURES
■STRUCTURE (ACS / ALS)
● Large format
● High light output
Scintillator : CsI(Tl)
Amorphous-Carbon: ACS
Aluminum Plate: ALS/GPXS
2.5 times higher with ACS-HL type (CsI 600 µm)
than Lanex-R (powdery scintillator)
● High resolution
20 Lp/mm at CTF 13 % FOS-HR type (CsI 150 µm)
2D Image-Device
Protection Film
Dimension
Scintillator Effective
Substrate
Structure
Area (mm)
Thickness
(mm)
Max.
Min.
Amorphous-Carbon Plate 468 × 468
0.5 or 2
14 × 14
ACS
(17" × 17")
with Csl Scintillator
468 × 468
Aluminum Plate
1
14 × 14
ALS
(17" × 17")
with Csl Scintillator
240 × 180
Fiber Optic Plate
1 to 3
10 × 10
FOS
(9" × 7")
with Csl Scintillator
High Reflective Aluminum Plate 468 × 468
0.5 or 2.2
14 × 14
GPXS
(17" × 17")
with Csl
Product
Name
Scintillator
Thickness
(µm)
600 Max.
DETECTIVE QUANTUM EFFICIENCY
●Detective quantum efficiency (DQE)
1
Features
Applications
High resolution,
Large format
High light output,
Large format
X-ray shield,
Low energy X-ray detection
High light output,
Large format
Dental intraoral, Mammography,
Chest examination
Dental-panoramic,
Chest examination
Dental intraoral,
Dental-panoramic, Mammography
Chest examination
●Structure
Needle scintillator (Csl [Tl])
TXPRB019EA
Powdery scintillator (GOS)
X-ray conditions:
RQA5 (70 kV, Al filter = 21 mm)
0.9
0.8
0.7
0.6
0.5
CsI
0.4
0.3
GOS
0.2
0.1
0
0
0.5
1
1.5
2
2.5
3
3.5
4
4.5
5
cy/mm
X-RAY IMAGE INTENSIFIER DIGITAL CAMERA UNIT C7336-03/-05/-52
1.45 and 2.8-megapixel digital cameras
■IMAGING EXAMPLES
Digital type C7336-03
(Sample: BGA)
Analog type
Clear
and
Sharp
X-ray tube voltage: 80 kV
Parameter
C7336-03
Field of View
4
Effective Number of Pixels (H × V) 1380 × 1030
Frame Rate (Signal Output)
24(10)
Interface
CameraLink
X-ray tube voltage: 80 kV
Unit
C7336-05 NEW C7336-52
2 or 4 (Selectable)
inch
4
1920 × 1440
—
frames/s(bit)
30(12), 45(8)
—
IEEE 1394b × 2 bus
■FEATURES
● Digital output
● High resolution, High contrast
● High-speed readout
● Low noise
● Low distortion
36
ELECTROSTATIC REMOVER
TM
ELECTROSTATIC REMOVER
Removal of static electricity in air
The PhotoIonizer is an electrostatic remover
utilizing the "photoionization" effect.
■Principle of Photoionization
■Photoionization
Stable atom or molecule
■FEATURES
SERIES
Soft X-ray
● No air flow
● No overshooting
● High ion density
● Ozone free
● Particle free
● Compact size for flexible
installation layout (L12535)
● Wide-ranging removal of
electrostatic charges in a short
time (L11754)
Ejected electron e–
Atom or
molecule of
positive polarity
Ion
as one electron
is ejected.
e–
Stable atom
or molecule
Ion
OV
Soft X-rays
Positive ions
Both positive and
negative ions
are generated.
Negative ions
Charges
Ion
Ion
TAPPC0170EA
■SELECTION GUIDE
Type No.
Distance from
the head to the
charged object
L12535
Bar Type
L12645
Basic Type
L11754
High Performance Type
10 cm to 30 cm
1m
2m
Compact / simple shield
Basic type
For high-speed / wide area
NEW
Features
No air flow / No overshooting / High ion density / Ozone free / Particle free
Conveyance transfer
LCD
Large size objects
AFM
Film
Materials development
Semiconductor
Semiconductor
LCD / OLED
Applications
■Example Installation of the PhotoIonBar (L12535)
PhotoIonBar works effectively within 300 mm working distance.
●Distance to charged object:
100 mm
●Interval between head units:
100 mm
HEAD UNIT L12536
100
DAISY-CHAIN CABLE A12538-001
CABLE LENGTH: 100 mm
DIN RAIL
X-RAYS
100
CHARGED OBJECT
4-PIN I/O CABLE
A12538-050/-100
CABLE LENGTH: 5 m/10 m
Neutralization area: 760 mm × 350 mm
PhotoIonBar
POWER
ON
OFF
ALERT
I - PRO
ION
CONTROLLER
C12537
37
POWER (AC)
ELECTROSTATIC REMOVER
VUV IONIZER SERIES
Removal of static electricity under depressurized conditions
This unique system eliminates static charges by using vacuum ultraviolet light (VUV).
Conventional ionizers cannot neutralize static electricity in a depressurized (vacuum)
state because of their mechanism. However, our VUV ionizer works by directly ionizing residual molecules with vacuum ultraviolet light and so can eliminate static charges even in a depressurized environment. Moreover, this VUV ionizer is also effective
in removing electrostatic charges from inert gas environments.
■FEATURES
● No air flow
● No overshooting
● Particle free
■APPLICATIONS
● Electrostatic remover
L12542 (Wide-angle irradiation type)
• Dechucking of electrostatic
chucks
• Devices utilizing electron beams
(SEM, etc.)
• LCD manufacturing equipment
• Organic EL manufacturing
equipment
L10706
L10366
L11798
(Proximity irradiation type) (Accurate positioning type) (High power type)
■Effect of VUV Light
■Directivity (Light Distribution)
RELATIVE RADIANT INTENSITY (%)
SEM Image (Sample: Polyvinylidene-fluoride)
When the sample is treated with VUV light, the electrostatic charge is
neutralized.
100
80
60
With VUV light radiation
Without VUV light radiation
30°
40
20°
20
L12542
10°
0
ANGLE (deg.)
0°
-10°
-20
-20°
-40
-30°
-60
-80
VUV IONIZER (L12542)
CONVENTIONAL TYPE
-100
TLSZB0105EA
■Electrostatic Charge Removal Effect
TLSZB0043EA
7
NEUTRALIZATION TIME (s)
0.7
MEASUREMENT CONDITIONS
CHARGED PLATE: 25 mm
CHARGED VOLTAGE: 1 kV / 100 V
VACUUM LEVEL: 1 × 10-2 Pa
LIGHT SOURCE: L10706
6
5
PLUS CHARGED
MINUS CHARGED
4
3
2
0
200
400
600
800
1000
1200
1400
DISTANCE BETWEEN LIGHT SOURCE OUTPUT WINDOW AND CHARGED PLATE (mm)
Parameter
Lamp Rating
Light Intensity
Cooling Method
Guaranteed Life*
Installation Environment
TLSOB0079EB
100
PLUS CHARGED
MINUS CHARGED
0.5
0.4
0.3
0.2
0.1
1
0
TLSZB0096EA
0.6
NEUTRALIZATION TIME (s)
8
■Spectral Distribution
Neutralization Time vs. Vacuum Level
RELATIVE IRRADIANCE (%)
Neutralization Time vs. Distance
MEASUREMENT CONDITIONS
CHARGED PLATE: 25 mm
CHARGED VOLTAGE: 1 kV / 100 V
DISTANCE BETWEEN LIGHT SOURCE OUTPUT
WINDOW AND CHARGED PLATE: 300 mm
LIGHT SOURCE: L10706
0
0.0001
0.001
0.01
0.1
1
10
VACUUM LEVEL (Pa)
80
60
40
20
0
100
120
140
160
180
200
220
240
400
WAVELENGTH (nm)
L10706
Approx. 6 W
L10366
L12542
L11798
Approx. 35 W
Approx. 35 W
Approx. 110 W
10 times
10 times
20 times
1
(compared to L10706)
(compared to L10706)
(compared to L10706)
High-pressure air cooling Air cooling by cooling fan Air cooling by cooling fan Air cooling by cooling fan
1000 hours
2000 hours
2000 hours
1000 hours
In vacuum (in the air)
In the air
In the air
In the air
* End of service life is defined as the time when light intensity at 230 nm falls below 50 % of its initial value.
38
LASER APPLICATION
STEALTH DICING ™ TECHNOLOGY
Laser dicing technology with a completely dry process
Stealth Dicing (SD) is capable of dividing the wafer from the inside of the silicon
wafer. The laser is irradiated at any desired depth to create the modified layer (SD
layer). With an external force such as tape expansion, the cracks inside the silicon wafer extend to the surface level and divide the wafer without any cutting loss.
■FEATURES
Laser Beam
No Damage!
Dama
SD Layer
● Completely dry process
● Particle free
● No chipping
● Zero cutting loss
■Cutting Surface Comparison (Before Tape Expansion)
Stealth Dicing
TEG
Si Wafer
BG Tape
Cutting Loss
less than 1 µm
Device
Device Area
Si wafer thickness: 50 µm
Dicing speed: 300 mm/s
10 µm
■DICING MATERIALS
● Sapphire
● LiTaO3
● LiNbO3
● Quartz crystal
● SiC
● GaAs
Blade Dicing
chipping
● Glass
• Chemically Tempered Glass
• Alkali-free Glass
• Alkali Glass
• Quartz Glass
etc.
Cutting Loss
40 µm
10 µm
Si wafer thickness: 50 µm
Dicing speed: 50 mm/s
Allows glass-silicon wafers to be easily separated into chips by tape expansion only
NEWSiC
Glass-Si [Resin bonding]
Sample components
Glass
: 400 µm
Resin layer : 50 µm
Si
: 100 µm
Sample components
Cutting results
4H-SiC: 350 µm
Intersection point
Process flow
Process flow
1Laser process (Si)
1Laser process
SD layer
SD laser beam
Si wafer
Glass
Frame
DC tape
2Tape remount
100 µm
SD layer
No chipping
4H-SiC
Intersection point
SD laser beam
Frame
DC tape
No chipping
DC tape
Diced cross-section
DC tape
Diced cross-section
Direction of incident laser
for glass processing
4Separation into chips by tape
expansion
100 µm
2Breaking
DC tape
3Laser process (Glass)
Cutting results
3Separation into chips by tape
expansion
Direction of incident laser
for 4H-SiC processing
350 µm
Glass
t: 400 µm
100 µm
Resin layer
t: 50 µm
Si
t: 100 µm
Good process quality because no
mechanical break process is required.
39
Direction of incident laser
for silicon processing
Higher production throughput since only stealth dicing is needed to cut
and split target
LASER APPLICATION
FAC LENS (Fast-Axis Collimating Lens) J10919
FAC lens is an optical lens that collimates light spreading
from a semiconductor laser in the fast-axis direction
Semiconductor lasers have a large divergence angle in the fast-axis direction, so the
output light cannot be efficiently used unless collimated. The FAC lens collimates light
spreading from a semiconductor laser into a narrow beam with a radiation angle of several milliradians (mrad) or less so that the diverging light can be efficiently utilized.
■FEATURES
● Aspheric micro-cylindrical lens
● Highly efficient utilization of light from LD bar
● Small variations in characteristics allow mass
production
● Well-aligned and sharp output distribution (minimized
smile and side lobes) due to high-precision fabrication
technology
■Collimating Image
■APPLICATIONS
● Highly efficient utilization of light
from LD
■Output Distribution Image when Installed to LD Bar
Radiation angle spreading in elliptical cone shape
A–A' PROFILE
A
Fast axis
LD (laser diode) bar
Radiation angle axis
A'
RELATIVE INTENSITY (%)
100
Laser emitting point
90
80
70
60
50
40
30
20
10
FAC lens
0
-5
LD (laser diode) bar
-4
-3
-2
-1
0
1
2
3
4
5
RADIATION ANGLE (mrad)
Laser emitting point
TECHNICAL INFORMATION
LOW ENERGY ELECTRON BEAM IRRADIATION SOURCE
Low energy EB paves the way for new applications
This low energy electron beam irradiation source called the EB-ENGINE is the ideal tool
for thin-film surface modification with greater efficiency and better results than conventional electron beam irradiation sources using high accelerating voltages.
The low accelerating voltage offers many advantages including simple equipment shielding, energy-saving, light weight, and compact size.
Irradiation Area
Approx. 150 mm
■FEATURES
● Suitable acceleration voltage for thin-film modification:
60 kV to 70 kV
● Modular parts allow easy maintenance
● Electron beam irradiation in air
● Compact and lightweight
● Simple X-ray shield
(A shield chamber is not included. However, HAMAMATSU can be consulted about its design.)
● Includes PC control unit and vacuum pump
■APPLICATIONS OF LOW ENERGY ELECTRON BEAM IRRADIATION
● Cross-linkage, curing
· Printing ink drying
· Coating and adhesive curing
· Improvement in physical properties
by cross-linkage
● Surface modification
· Function assignment to outermost
surface by graft polymerization
· Improvement in adhesion and
wettability
● Sterilization
· Surface sterilization / sterilization
processing of medical supplies
and food packages
40
HAMAMATSU PHOTONICS K.K., Electron Tube Division
314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan
Telephone: (81)539/62-5248, Fax: (81)539/62-2205
www.hamamatsu.com
Main Products
Sales Offices
Electron Tubes
Photomultiplier Tubes
Photomultiplier Tube Modules
Microchannel Plates
Image Intensifiers
Xenon Lamps / Mercury Xenon Lamps
Deuterium Lamps
Light Source Applied Products
Laser Applied Products
Microfocus X-ray Sources
X-ray Imaging Devices
Japan:
HAMAMATSU PHOTONICS K.K.
325-6, Sunayama-cho, Naka-ku,
Hamamatsu City, Shizuoka Pref. 430-8587, Japan
Telephone: (81)53-452-2141, Fax: (81)53-456-7889
E-mail: [email protected]
Opto-semiconductors
Si photodiodes
APD
Photo IC
Image sensors
PSD
Infrared detectors
LED
Optical communication devices
Automotive devices
X-ray flat panel sensors
Mini-spectrometers
Opto-semiconductor modules
Imaging and Processing Systems
Cameras / Image Processing Measuring Systems
X-ray Products
Life Science Systems
Medical Systems
Semiconductor Failure Analysis Systems
FPD / LED Characteristic Evaluation Systems
Spectroscopic and Optical Measurement Systems
Laser Products
Semiconductor lasers
Applied products of semiconductor lasers
Solid state lasers
China:
HAMAMATSU PHOTONICS (CHINA) Co., Ltd.
B1201 Jiaming Center, No.27
Dongsanhuan Beilu, Chaoyang District,
Beijing 100020, China
Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866
E-mail: [email protected]
Information in this catalog is
believed to be reliable. However,
no responsibility is assumed for
possible inaccuracies or omission.
Specifications are subject to
change without notice. No patent
rights are granted to any of the
circuits described herein.
© 2014 Hamamatsu Photonics K.K.
Germany, Denmark, The Netherlands, Poland:
HAMAMATSU PHOTONICS DEUTSCHLAND GmbH
Main Office
Arzbergerstr. 10,
D-82211 Herrsching am Ammersee, Germany
Telephone: (49)8152-375-0, Fax: (49)8152-265-8
E-mail: [email protected]
U.S.A.:
HAMAMATSU CORPORATION
Main Office
360 Foothill Road, Bridgewater, N.J 08807, U.S.A.
Telephone: (1)908-231-0960, Fax: (1)908-231-1218
E-mail: [email protected]
Danish Office
Lautruphøj 1-3
DK-2750 Ballerup, Denmark
Telephone: (45)70-20-93-69, Fax: (45)44-20-99-10
Email: [email protected]
Western Sales Office
Suite 200 & Suite 110, 2875 Moorpark Ave.
San Jose, CA 95128, U.S.A.
Telephone: (1)408-261-2022, Fax: (1)408-261-2522
E-mail: [email protected]
Netherlands Office
Televisieweg 2
NL-1322 AC Almere, The Netherlands
Telephone: (31)36-5405384, Fax: (31)36-5244948
E-mail: [email protected]
United Kingdom:
HAMAMATSU PHOTONICS UK Limited
Main Office
2 Howard Court, 10 Tewin Road, Welwyn Garden City,
Hertfordshire AL7 1BW, UK
Telephone: (44)1707-294888, Fax: (44)1707-325777
E-mail: [email protected]
Poland Office
02-525 Warsaw, 8 St. A. Boboli Str., Poland
Telephone: (48)22-646-0016, Fax: (48)22-646-0018
E-mail: [email protected]
South Africa Office
PO Box 1112, Buccleuch 2066,
Johannesburg, South Africa
Telephone/Fax: (27)11-802-5505
France, Portugal, Belgium, Switzerland, Spain:
HAMAMATSU PHOTONICS FRANCE S.A.R.L.
Main Office
19, Rue du Saule Trapu Parc du Moulin de Massy,
91882 Massy Cedex, France
Telephone: (33)1 69 53 71 00
Fax: (33)1 69 53 71 10
E-mail: [email protected]
REVISED SEP. 2014
Spanish Office
C. Argenters, 4 edif 2
Parque Tecnológico del Vallés
08290 Cerdanyola (Barcelona), Spain
Telephone: (34)93 582 44 30
Fax: (34)93 582 44 31
E-mail: [email protected]
Swiss Office
Dornacherplatz 7
4500 Solothurn, Switzerland
Telephone: (41)32 625 60 60,
Fax: (41)32 625 60 61
E-mail: [email protected]
Belgian Office
Axisparc Technology, Rue Andre Dumont 7 1435
Mont-Saint-Guibert, Belgium
Telephone: (32)10 45 63 34
Fax: (32)10 45 63 67
E-mail: [email protected]
Quality, technology and service are part of every product.
North Europe and CIS:
HAMAMATSU PHOTONICS NORDEN AB
Main Office
Torshamnsgatan 35 16440 Kista, Sweden
Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01
E-mail: [email protected]
Russian Office
11, Chistoprudny Boulevard, Building 1,
101000, Moscow, Russia
Telephone: (7)495 258 85 18, Fax: (7)495 258 85 19
E-mail: [email protected]
Italy:
HAMAMATSU PHOTONICS ITALIA S.r.l.
Main Office
Strada della Moia, 1 int. 6
20020 Arese (Milano), Italy
Telephone: (39)02-93581733, Fax: (39)02-93581741
E-mail: [email protected]
Rome Office
Viale Cesare Pavese, 435, 00144 Roma, Italy
Telephone: (39)06-50513454, Fax: (39)06-50513460
E-mail: [email protected]
TOTH0022E02
SEPT. 2014 IP