Photonic Devices - Hamamatsu Photonics

2015
PHOTONIC DEVICES
Electron Tube Devices and Applied Products
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CONTENTS
PHOTODETECTORS .......................................................................................................................... 1
MICRO PMT ASSEMBLY AND MICRO PMT MODULE / Devlp. MICRO PMT PHOTON COUNTING HEAD ....................... 1
UBA (Ultra Bialkali), SBA (Super Bialkali) AND EGBA (Extended Green Bialkali) PHOTOMULTIPLIER TUBE SERIES ........ 3
TECHNICAL INFORMATION ........................................................................................................... 5
Devlp. HIGH IRRADIANCE LINEAR IRRADIATION TYPE UV-LED UNIT
LC-L5 ......................................... 5
Devlp. ULTRAVIOLET CATHODE EMITTING LIGHT SOURCE L12848-265 ............................................................................. 6
PHOTODETECTORS .......................................................................................................................... 7
PHOTOMULTIPLIER TUBE MODULES ................................................................................................................. 7
NEW
NEW
Photosensor module H11706 series, Photon counting head H12386, H12775 series
LINEAR ARRAY MULTIANODE PMT ASSEMBLY AND MODULES ............................................................................... 9
Devlp.
Linear array multianode PMT module with filters H12730, H12731, H12732
Linear array multianode PMT module with GaAsP photocathode H13197, H13198 series
MATRIX MULTIANODE PMT ASSEMBLIES ....................................................................................................... 11
Multianode PMT assembly H9500, H12445-100/-200, H12428-100/-200
Multianode PMT assembly H12700 series
NEW
Devlp.
Devlp.
METAL PACKAGE PHOTOMULTIPLIER TUBE R9880U SERIES ................................................................................ 12
UV REGION .............................................................................................................................................. 13
13 mm (1/2") side-on PMT R13194
Fire sensor UVTRON® R13192
UV to NEAR INFRARED (NIR) REGION ............................................................................................................. 14
NEW
NEW
NEW
Near infrared (NIR) detector unit series H10330B-25/-45/-75, H12694-25/-45/-75, H12397-75, R5509-43/-73
28 mm (1-1/8") side-on PMT R12829
28 mm (1-1/8") side-on PMT R13096
Cooled side-on PMT R9182-01, R11715-01
13 mm (1/2") side-on PMT R12857
RUGGEDIZED, HIGH-TEMPERATURE PMT SERIES ............................................................................................... 17
PMTs FOR DARK MATTER DETECTION R11065, R11410 ................................................................................... 17
FAST TIME RESPONSE SERIES ..................................................................................................................... 18
NEW
High speed PMT R12844, R12845, R13089
High speed compact HPD (hybrid photodetector) series R11322U-40, R10467U-06/-40/-50
PMT PERIPHERAL PRODUCTS ...................................................................................................................... 19
NEW
NEW
NEW
NEW
NEW
Accessories
Active D-type socket assembly E12788
High voltage power supply modules
High voltage power supply module C12733-01, C12733-02
Stabilized light sources for PMT L12367 series
BIOMEDICAL PRODUCT................................................................................................................. 21
Devlp.
Flow cell and flow cell assembly for flow cytometry J12800-000-101/-103, J11020-000-011/-012
POINT-OF-CARE TEST .................................................................................................................... 22
Devlp.
Devlp.
Immunochromato-reader C11787 series
Immunochromato-reader C11666 series
ION SOURCE ..................................................................................................................................... 23
Devlp.
Deuterium lamp for photoionization L13301
ION / ELECTRON DETECTORS..................................................................................................... 23
NEW
Fast decay time phosphor J12782-09D
Compact MCP assembly series F12334-11, F12395-11, F12396-11
Electron multipliers
IMAGING DEVICE ............................................................................................................................ 25
Devlp.
Proximity focused image intensifiers
Image intensifier with auto gate function
ICCD camera with InGaAs photocathode C10054-07/-17/-27
CCD camera with fiber optic window C12550
LAMPS ................................................................................................................................................. 27
Devlp.
NEW
NEW
Devlp.
75 W / 150 W high brightness xenon lamp
Compact S2D2 light source L10671D
Compact 2 W xenon flash lamp modules L12336 series
Excimer lamp light source FLAT EXCIMER L11751-01
Mini excimer lamp L13129
UV APPLIED PRODUCTS ............................................................................................................... 33
NEW
Opto-spectrum generator (OSG) L12194-00-34054/-39070/-43079/-70130
UV-LED spot light source
LC-L1V3
Spot light source
LC8
X-RAY RELATED PRODUCTS ....................................................................................................... 35
NEW
Microfocus X-ray Source
X-ray image intensifier digital camera unit C7336-05/-52
Compact X-ray CCD camera X-CUBE H8480/H8481/H8953 series
X-ray scintillator FOS™ / ACS™ / GPXS™ / ALS™
ELECTROSTATIC REMOVER ........................................................................................................ 37
Electrostatic remover PhotoIonizer series L12535, L12645, L11754
VUV Ionizer series L7293, L10706, L11798, L12542
LASER APPLICATION ..................................................................................................................... 39
STEALTH DICING™ technology
FAC lens (fast-axis collimating lens) J10919
TECHNICAL INFORMATION ......................................................................................................... 40
Low energy electron beam irradiation source EB-ENGINE™
Specifications shown in this brochure are typical values unless otherwise specified.
Specifications are subject to change without notice.
PHOTODETECTORS
MICRO PMT ASSEMBLY
AND MICRO PMT MODULE
• Small and thin size with conventional PMT's high sensitivity
• Multialkali photocathode introduced to lineup for a wider range of applications
• Product lineup includes a new photosensor module made up of a µPMT, a voltage
divider circuit, and a high-voltage power supply, as well as a photosensor assembly
with a built-in µPMT and voltage divider circuit
•Helps
• Helps downsize measurement devices and boost their performance
MICRO PMT ASSEMBLY
H12400 SERIES
MICRO PMT MODULE
H12402 SERIES
MICRO PMT
MICRO PMT MODULE
H12403 SERIES
■Spectral Response
■Gain
TPMHB0884EB
TPMHB0885EA
BIALKALI
PHOTOCATHODE
106
10
105
1
BIALKALI
PHOTOCATHODE
MULTIALKALI
PHOTOCATHODE
104
0.1
103
CATHODE RADIANT
SENSITIVITY
QUANTUM EFFICIENCY
0
200
300
400
500
600
700
800
WAVELENGTH (nm)
1
107
MULTIALKALI
PHOTOCATHODE
GAIN
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
100
900
1000
102
0.5
-500
0.6
-600
0.7
-700
0.8
-800
0.9
1.0 1.1
-900 -1000 -1100
CONTROL VOLTAGE (V)*
SUPPLY VOLTAGE (V)
* Control voltage of a Micro PMT module.
PHOTODETECTORS
MICRO PMT ASSEMBLY AND MICRO PMT MODULE
■SPECIFICATIONS
PRODUCT VARIATIONS
Type No.
H12400-00-01 / H12402 / H12403
H12400-01-01 / H12402-01 / H12403-01
Spectral Response
300 nm to 650 nm
300 nm to 850 nm
Photocathode Material
Bialkali
Multialkali
Features
for visible range
for visible to near IR range
CHARACTERISTICS (Supply voltage: 900 V, at 25 °C)
Parameter
Min.
Typ.
Cathode
Blue Sensitivity Index
Typ.
Red / White Ratio
Typ.
Radiant Sensitivity (Wavelength of Maximum Response) Typ.
Min.
Luminous Sensitivity
Typ.
Radiant Sensitivity (Wavelength of Maximum Response) Typ.
Typ.
Anode
Dark Current
Max.
Rise Time
Typ.
Time Response
Transit Time
Typ.
T.T.S. 1
Typ.
Gain
Typ.
Effective Area
H12400 Series (Assembly type)
Supply Voltage
Between Anode and Cathode
Maximum
Divider Current
Ratings
Average Output Signal Current
H12402/H12403 Series (Module type)
Input Voltage
Maximum Input Current 2
Maximum Average Output Signal Current 3
Recommended Control Voltage Adjustment Range *
Peak Sensitivity Wavelength
Ripple Noise 34 (peak to peak)
Max.
Settling Time 5
Max.
Luminous Sensitivity
H12400-01-01 /
H12402-01 / H12403-01
100
200
—
0.2
62
15
70
2.1 × 104
H12400-00-01 /
H12402 / H12403
50
80
8.0
—
80
30
160
1.6 × 105
0.3
3
1.2
8.0
1.3
2 × 106
3 (X) × 1 (Y)
Unit
µA/lm
—
—
mA/W
A/lm
A/W
nA
ns
3.5 × 105
—
mm
1150
126
5
V dc
µA
µA
+4.5 to +5.5
20
5
V
mA
µA
V
nm
mV
s
+0.5 to +1.0
+0.5 to +1.1
420
0.3
10
1T.T.S.=Transit Time Spread (FWHM)
2At +5 V input voltage, +0.9 V control voltage, and output current equal to dark current
3+0.9 V control voltage
4Cable RG-174/U, Cable length 450 mm, Load resistance=1 MΩ, Load capacitance=13 pF
5The time required for the output to reach a stable level following a change in the control voltage from +1.0 V to +0.5 V.
* "Control voltage" × 1000 = "Supply voltage" of PMT
Devlp.
MICRO PMT PHOTON COUNTING HEAD
H12406 (Photon counting type)
Input Voltage
Maximum Input Current
Effective Area
Pulse-pair Resolution
Output Pulse Width
Output Pulse Height (50 Ω Load)
µPMT is effective for developing
high-performance handheld
measurement devices that features:
•Smaller size
•Less sample
•Less expensive
•Easy and general use
+5
40
3 (X) × 1 (Y)
20
10
+2.2
V
mA
mm
ns
ns
V
Making on-site measurements easy and more effective
Environment
Pollution
measurement
on individual
or area basis
Medical care
Health
checkup at
bedside in
the hospital
or at home
2
PHOTODETECTORS
HIGH SENSITIVITY PHOTOMULTIPLIER TUBE SERIES
Ultra Bialkali
Super Bialkali
EGBA
3
Extended Green Bialkali
PHOTODETECTORS
■Spectral Response (R7600U-100/-200/-300 Series)
50
TPMHB0836EA
ULTRA BIALKALI
45
SUPER BIALKALI
QUANTUM EFFICIENCY (%)
40
EXTENDED
GREEN
BIALKALI
35
30
25
20
15
10
CURRENT BIALKALI
5
0
200 250 300 350 400 450 500 550 600 650 700
WAVELENGTH (nm)
Photocathode
Type
Peak
Wavelength
(nm)
SBA
350
UBA
Quantum Efficiency
at Peak
at 400 nm
Wavelength
Typ.
Typ.
(%)
(%)
35
34
380
EGBA
at 550 nm
Typ.
(%)
—
Cathode Blue
Sensitivity Index
(CS 5-58)
Typ.
13.5
43
40
—
15.5
39
38
14
14
Photocathode
Type
Effective
Area
(mm)
Photocathode
Type
Effective
Area
(mm)
R9880U-110/-210
SBA / UBA
8
R1924A-100
SBA
22
R5900U-100-L16/-200-L16
SBA / UBA
16 × 15.8
R9800-100
SBA
22
SBA / UBA / EGBA
18 × 18
R3998-100-02
SBA
25
SBA / UBA / EGBA
18 × 18
R11920-100
SBA
30
R7600U-100-M16/-200-M16
SBA / UBA
18.1 × 18.1
R9420-100
SBA
34
R7600U-100-M64/-200-M64
SBA / UBA
18.1 × 18.1
R6231-100
SBA
46
R8900U-100-M4
SBA
23.5 × 23.5
R7724-100
SBA
46
R8900U-100-C12
SBA
23.5 × 23.5
R6233-100
SBA
70
SBA / UBA
23 × 23
R877-100
SBA
111
SBA / UBA / EGBA 18.1 × 18.1
R5912-100
SBA
190
SBA / UBA / EGBA 18.1 × 18.1
R7081-100
SBA
220
Type No.
R7600U-100/-200/-300
NEW
R7600U-100-M4/-200-M4/-300-M4
R11265U-100/-200
H8711-100/-200/-300
NEW
H7546A-100/-200/-300
H7546B-100/-200/-300
NEW
NEW
NEW
H11934-100/-200
SBA / UBA
23 × 23
H12428-100/-200
SBA / UBA
23 × 23
H12445-100/-200
SBA / UBA
23 × 23
H7260-100/-200
SBA / UBA
7 × 31.8
SBA
49 × 49
H10966A-100 / H10966B-100
Type No.
NEW
4
TECHNICAL INFORMATION
Devlp.
HIGH IRRADIANCE LINEAR IRRADIATION TYPE UV-LED UNIT
LC-L5
This new addition to the LC-L5 UV LED
light source lineup offers higher
irradiance yet easier handling due to
use of fan air cooling
■FEATURES
● High irradiance
● Compact
● Uses forced air cooling by fan
■APPLICATIONS
● UV ink drying
● UV coating agent drying
● UV tape peeling
● UV curing
● Fluorescence excitation / scratch
and flaw inspection lighting
■Irradiance Distribution (Typ.)
12000
X-direction
TLSZB0151EA
12000
Y-direction
TLSZB0152EA
Distance from beam exit point: 2 mm
Distance from beam exit point: 2 mm
10000
IRRADIANCE (mW/cm2)
IRRADIANCE (mW/cm2)
10000
8000
6000
4000
2000
8000
6000
4000
2000
0
-50
-40
-30
-20
-10
0
10
20
30
40
0
-30
50
DISTANCE FROM IRRADIATED CENTER (mm)
■Spectral Distribution
100
90
90
80
80
70
60
50
40
30
20
10
0
300
0
10
20
30
at 385 nm
TLSZB0154EA
70
60
50
40
30
20
10
350
400
450
WAVELENGTH (nm)
Parameter
Input Voltage
Input Current
UV Irradiance 1
Wavelength
Output Window Dimension
Light Output Stability
LED Service Life
1At working distance of 2 mm
5
-10
■Life (Typ.)
TLSZB0153EA
RELATIVE INTENSITY (%)
RELATIVE INTENSITY (%)
100
-20
DISTANCE FROM IRRADIATED CENTER (mm)
0
0
1000 2000 3000 4000 5000 6000 7000 8000 9000 10000
OPERATING TIME (h)
Max.
Max.
Description / Value
48
12
10000
385
88 × 32
Within ± 5
Approx. 20000
Unit
V
A
mW/cm2
nm
mm
%h
h
TECHNICAL INFORMATION
Devlp.
ULTRAVIOLET CATHODE EMITTING LIGHT SOURCE L12848-265
Higher output than UV LED!
This UVCL (UV Cathode emitting Light source)
generates UV intensity higher than an LED
used in the same wavelength range, and also
delivers a long service life of 5000 hours.
■FEATURES
● High power
: Higher output than UV LED
For throughput improvement
● Long life
: 5000 h guaranteed life
For maintenance free
● All in one
: Includes a small built-in
power supply and housing
For design cost reduction
● Eco-friendly
: Mercury free
· For substitute of mercury lamp
■APPLICATIONS
● Fluorescence analysis
● Environmental analysis
● UV curing
● Material analysis
● Resistance test to UV
■Spectral Distribution
RELATIVE IRRADIANCE (%)
300
● Sterilization (L12848-265)
265 nm
UVCL 265 nm Type Devlp.
UVCL 305 nm Type
UV-LED (30 mAdc) 310 nm
UV-LED (30 mAdc) 255 nm
250
200
UV-C
UV-B
UV-A
(220 nm to 280 nm)
(280 nm to 315 nm)
(315 nm to 380 nm)
150
100
50
L12848-265
0
220 230 240 250 260 270 280 290 300 310 320 330 340 350 360 370 380 390 400
WAVELENGTH (nm)
■SPECIFICATIONS
L12848-265 L12848-305
Parameter
220 to 400 290 to 450
Spectral distribution 1
265
305
Peak Wavelength
0.3
Light Output Fluctuation (p-p) Max.
Stability
Drift
Max.
±3
Guaranteed life 2
5000
Light-emitting point size
Approx. 5
100 V to 240 V
34
Input Voltage (AC)
(50 Hz / 60 Hz)
Power Consumption
6
■Internal Structure
Unit
nm
nm
%
%/h
h
mm
HOUSING
VACUUM TUBE
ELECTRON BEAM
UV
TARGET
V
ELECTRON SOURCE
W
1If other wavelengths are needed, please consult us.
2End of service life is defined as the time when light intensity falls
below 50 % of the initial value or light output stability exceeds the
guaranteed value.
3When used with the supplied AC adapter.
4Input voltage to the light source power connector is 12 V DC
(10.8 V DC to 13.2 V DC).
POWER
SUPPLY
6
PHOTODETECTORS
PHOTOMULTIPLIER TUBE MODULES
A single compact package for easy use
■FUNCTIONS
Photomultiplier tube (PMT) module functions are shown in the chart below. PMT modules are comprised of a photomultiplier tube to
convert light into electrical signals, a high voltage power supply circuit, and a voltage divider circuit to distribute the optimum voltage to
each dynode, all assembled into a single compact case. In addition to these basic PMT modules, Hamamatsu also provides modules
with various additional functions such as signal processing, cooling and interface to PC.
■SELECTION GUIDE
Micro PMT
Built-in PMT Type
Metal Package
Head-on
Side-on
H10720, H10721
H7826
/ H7827 (With Amp.)
H9305
/ H9306, H9307 (With Amp.)
H10722, H10723 (With Amp.)
H11411, H10425, H10426
/ H10492, H10493 (With Amp.)
H11461
/ H11462 (With Amp.)
H8224A
H7844
H7828
H12525
H12402, H12403
Current to Voltage
Conversion Amp.
Protection
Circuit
H10770A
Cooler
H7422A
H10769A
H11526
H11706, H12056
Gating
Circuit
Photon Counting Heads
Devlp. H12406
Photon Counting Circuit
Photomultiplier Tube, Voltage Divider Circuit, High Voltage Power Supply Circuit
Photosensor Modules
H10682
NEW H12386
Devlp. H12775
Gating
Circuit
H8259
Protection
Circuit
Cooler
H7421
Counter
CPU
+
Interface
H11890
7
H11123, H11870
H9319
PHOTODETECTORS
PHOTOSENSOR MODULE H11706 SERIES
The H11706 series is a current output type photosensor module with a metal package photomultiplier tube and a high voltage power supply. These modules have a gate function for
protection against excessive light.
■SPECIFICATIONS
Parameter
Suffix No.
Input Voltage
Max. Output Signal Current
Effective Area
Spectral Response
Typ.
Cathode Sensitivity
Typ.
Anode Sensitivity 1
H11706 Series
-20
+15
100
8
230 to 870
230 to 920
77 2
78 3
1.5 × 105 2
1.5 × 105 3
-01
-40
2
5
300 to 720
176 4
8.8 × 104 4
Unit
—
V
µA
mm
nm
mA/W
A/W
1 Control Voltage: +1.0 V (H11706-01/-20), +0.8 V (H11706-40)
2 At 400 nm
3 At 630 nm
4 At 550 nm
Left: H11706-01, Right: H11706-40
■FEATURES
● Includes gate function for
protection against excessive
light
● Gate time: 1 µs to 10 ms
NEW
PHOTON COUNTING HEAD H12386 SERIES
The H12386 series is a photomultiplier module integrated with a TO-8 type photomultiplier
tube, high-voltage power supply circuit, divider circuit, and photon counting circuit. It operates from a +5 volt supply and outputs TTL pulses to an externally connected counter to
make measurements.
■SPECIFICATIONS
Parameter
Input Voltage
Max. Input Current
Effective Area
Count Linearity
Pulse-pair Resolution
Output Pulse Width
Output Pulse Height
Typ.
H12386 Series
+5
40
8
5.0 × 106
20
10
+2.2 (Load resistance 50 Ω)
Unit
V
mA
mm
s-1
ns
ns
V
■FEATURES
● Low power consumption
● Excessive light detection
output
Devlp.
PHOTON COUNTING HEAD H12775 SERIES
The H12755 series is a photomultiplier module integrated with a 1/2" head-on type photomultiplier tube, high-voltage power supply circuit, divider circuit, and photon counting circuit. It operates from a +5 volt supply and outputs TTL pulses to an externally connected
counter to make measurements.
■SPECIFICATIONS
Parameter
Input Voltage
Max. Input Current
Effective Area
Count Linearity
Pulse-pair Resolution
Output Pulse Width
Output Pulse Height
Typ.
H12775 Series
+5
40
10
5.0 × 106
20
10
+2.2 (Load resistance 50 Ω)
Unit
V
mA
mm
s-1
ns
ns
V
■FEATURES
● Includes small 1/2-inch
diameter PMT
● Lower power consumption
● Excess light detection
output
8
PHOTODETECTORS
LINEAR ARRAY MULTIANODE PMT ASSEMBLY AND MODULES
■SELECTION GUIDE
8 ch
Bialkali,
Multialkali
Number of Channels
Photocathode Material
Built-in Linear Array Multianode PMT
16 ch
32 ch
16 ch
Bialkali,
Bialkali,
GaAsP,
Multialkali
Multialkali
Extended Red GaAsP
Assembly Type
H9530
H10515B
H7260
H11459
H11460
H11836
H12176
Filter
H12730
Module Type
H11451
H12731
High Voltage Power Supply Circuit
Preamplifier
Photomultiplier Tube
Voltage Divider Circuit
Filter
Cooler
H11452
Gain
Control
Circuit
H12310
Filter
H12732
Cooler
H12311
Devlp.
Photon
Counting
Circuit
H11658
H11659
H13197
Devlp.
Cooler
H12210
9
H12211
H13198
PHOTODETECTORS
LINEAR ARRAY MULTIANODE PMT MODULE WITH FILTERS H12730, H12731, H12732
High-sensitivity, multiwavelength detection
with compact and highly-efficient optics
■Efficiency
TRANSMITTANCE (%)
CH1
100
90
80
70
60
50
40
30
20
10
0
350
■Geometric
CH2
CH3
CH4
CH5
CH6
CH7
CH8
Dielectric
Mirror
Glass
Block
Dichroic
Mirror
Bandpass
filter
Left: H12730, Center: H12731, Right: H12732
400
450
500
550
600
650
700
750
WAVELENGTH (nm)
800
850
45 mm × 60 mm
TPMHB0863EA
■FEATURES
■APPLICATIONS
● High sensitivity from visible to NIR region
● Compact design
● Highly efficient optics by using glass
block and dielectric mirror
● Biomedical fluorescence detection
● Laser scanning detection
Devlp.
LINEAR ARRAY MULTIANODE PMT MODULE WITH GaAsP PHOTOCATHODE H13197, H13198
High sensitivity 16-channel linear array multianode PMT modules
■FEATURES
■Spectral Response
■APPLICATIONS
● Biomedical fluorescence detection
● Laser scanning microscope
100
TPMHB0864EB
10
QUANTUM EFFICIENCY (%)
● Built-in photon counting circuit
● Reduced dark count by cooling
effect
● Extended red GaAsP photocathode
(H13197-42 / H13198-42)
Left: H13197, Right: H13198
1
0.1
GaAsP
EXTENDED RED GaAsP
EXTENDED RED MULTIALKALI
0.01
200
300
400
500
600
700
800
900
1000
WAVELENGTH (nm)
■SPECIFICATIONS
H13197-40
Parameter
GaAsP
Photocathode Material
Cooling Function
at 540 nm
Quantum Efficiency
at 800 nm
25°C
Dark Count / ch
When Cooled
Typ.
Typ.
Typ.
Typ.
—
45
—
400
—
H13197-42
Extended
red GaAsP
—
25
18
1000
—
H13198-40
GaAsP
●
45
—
400
40
H13198-42
Extended
red GaAsP
●
25
18
1000
100
Unit
—
—
%
%
s-1
s-1
10
PHOTODETECTORS
MATRIX MULTIANODE PMT ASSEMBLIES
MULTIANODE PMT ASSEMBLY H9500, H12445-100/-200, H12428-100/-200
■FEATURES
● Low profile
● High speed response
● Multianode
Parameter
Spectral Response
Transit Time Spread (FWHM)
Anode Type
Pixel Size
Effective Area
Dimensions (W × H × D)
H9500 1
0.4
16 × 16
3.04 × 3.04
49 × 49
52 × 33.3 × 52
■APPLICATIONS
● High resolution PET
● Compact gamma camera
● Scintimammography
● 2-D radiation monitor
H12445-100/-200 2 H12428-100/-200 2
300 to 650
0.34
0.35
Matrix
4×4
8×8
5.75 × 5.75
2.88 × 2.88
23 × 23
30 × 39 × 30
Unit
nm
ns
—
—
mm
mm
mm
H9500
UV type is also available, Suffix 1: -03, 2: -103/-203, 185 nm to 650 nm
Left: H12445-100/-200, Right: H12428-100/-200
MULTIANODE PMT ASSEMBLY H12700 SERIES
Flat panel type 8 × 8 (64 ch) multianode PMT with collection
efficiency high enough to detect even single photons
Compared to our current product (H8500), the H12700 offers higher collection efficiency
(boosted from 70 % to 87 %) capable of producing a single photoelectron peak on each
channel. The H12700 can be used as a direct replacement for the H8500 since their external dimensions and signal output connectors are identical. The H12700 also offers better time response characteristics (T.T.S. has been improved from 0.4 ns to 0.3 ns).
● Enhanced collection efficiency capable of detecting
single photons on all channels
● Wide effective area ratio:
87 %
● 8 × 8 (64 ch) multianodes
■APPLICATIONS
Left: H12700A, Right: H12700B
● Academic research (RICH,
calorimeter, gamma telescope, etc.)
● Medical diagnosis equipment (PET, gamma camera)
● Radiation measurement
1UV glass type is also available, Suffix = -03, 185 nm to 650 nm
ch1
ch8
Single
photoelectron
peak can be
observed on
all channels
ch57
■SPECIFICATIONS
Parameter
Spectral Response Range 1
Peak Wavelength
Photocathode Material
Number of Pixels
Anode
Pixel Size / Pitch at Center
Effective Area
Dimensions (W × H × D)
Supply Voltage Input
■Single Photon Counting
ch64
3000
Description / Value
300 to 650
400
Bialkali
64 (8 × 8 matrix)
5.8 × 5.8 / 6
48.5 × 48.5
52 × 25.8 × 52
A: Cable, B: Pin
Unit
nm
nm
—
—
mm
mm
mm
—
H8500
H12700
2500
2000
COUNT
■FEATURES
1500
1000
500
0
0
200
400
600
PULSE HEIGHT
11
800
1000
TPMHB0887EA
PHOTODETECTORS
METAL PACKAGE PHOTOMULTIPLIER TUBE R9880U SERIES
■Spectral Response
TPMHB0814EC
1000
R9880U-110
100
R9880U-210
10
R9880U-113
1
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
1000
TPMHB0815EB
R9880U-01
R9880U-20
100
R9880U-04
10
■FEATURES
1
WAVELENGTH (nm)
Photocathode
Spectral Response
Cathode Luminous Sensitivity
Cathode Blue Sensitivity Index (CS 5-58)
Red / White Ratio (R-68)
Dark Current at 1000 V (after 30 min)
Anode Luminous Sensitivity at 1000 V
Gain
Rise Time
12 mm
● High gain
● Compact
● Lightweight
0.1
100 200 300 400 500 600 700 800 900 1000
0.1
100 200 300 400 500 600 700 800 900 1000
Parameter
16 mm
WAVELENGTH (nm)
NEW
NEW
R9880U-01 R9880U-04 R9880U-20 R9880U-110 R9880U-113 R9880U-210
SBA
UBA
Multialkali
SBA
230 to 870 185 to 870 230 to 920 230 to 700 185 to 700 230 to 700
200
105
135
500
105
200
13.5
15.5
—
13.5
0.2
—
0.2
0.45
1
1
10
1
400
210
270
400
1000
210
2.0 × 106
0.57
Unit
—
nm
µA/lm
—
—
nA
A/lm
—
ns
D TYPE SOCKET ASSEMBLIES FOR R9880U SERIES
The E10679-02 and E10679-51 are D-type socket assemblies for the R9880U
series metal package photomultiplier tubes.
The E10679-02 has an output cable, while the E10679-51 has output pins for
mounting on a circuit board.
■FEATURES
17.5 mm
17.5 mm
15 mm
24 mm
● Cable output or pin output
● Compact and lightweight
Left: E10679-02, Right: E10679-51
Devlp.
PMT ASSEMBLY H13175 SERIES
Photomultiplier tube assembly integrating a R9880U series photomultiplier tube and
a voltage divider circuit
Compared to the combination of the currently available R9880U series and E10679-51
(D-type socket assembly), the overall length of the H13175 is shortened by
approximately 8 mm. This helps downsize the equipment and also improves the
degree of design freedom.
17.5 mm
19.3 mm
12
PHOTODETECTORS
UV REGION
Devlp.
13 mm (1/2") SIDE-ON PMT R13194
■FEATURES
■Spectral Response
● Excellent solar blind
characteristic
● High sensitivity in VUV
region
● Low dark current
CATHODE RADIANT SENSITIVITY (mA/W)
100
Ratio
121nm/300nm
About
10
5 Times
better than
R10825
1
■APPLICATIONS
CONVENTIONAL TYPE
(R10825)
0.1
● AES (Atomic emission
spectrophotometry)
● Observation of UV plasma
in vacuum
0.01
R13194
0.001
100
150
200
Parameter
250
Spectral Response
Cathode Radiant Sensitivity at 121 nm
Anode Radiant Sensitivity at 121 nm
Gain at 1000 V
Anode Dark Current at 1000 V
Anode Sensitivity Ratio 121 nm / 300 nm
300
WAVELENGTH (nm)
Conventional Type
R10825
115 to 195
25.5
1.0 × 105
3.9 × 106
0.05
1500
8500
Devlp. R13194
Unit
nm
mA/W
A/W
—
nA
—
Devlp.
FIRE SENSOR UVTRON ® R13192
The R13192 delivers enhanced sensitivity by a new design
for the effective photosensitive area
20.2 mm Max.
■FEATURES
● Detects fire from long distances (high sensitivity)
● Detects only UV light without using any optical filters
■APPLICATIONS
● Fire detection in a building with large space
● Arson surveillance
● Discharge detection
SENSITIVITY (counts/min)
2500
R13192 (Target value)
R1753-01 (Actual value)
R2868 (Actual value)
2000
About
1.5 times
1500
Fire size: 500 mm × 500 mm
Fuel: Ethanol
1000
500
0
30
40
50
60
70
80
90
100
■Spectral Response
RELATIVE SENSITIVITY, RELATIVE INTENSITY
(ARBITRARY UNIT)
■Sensitivity and Distance from Fire
■Fire detection in a building
with large space
TPT B0009EB
100
UVTRON
UVTRON
SUNLIGHT
50
GAS
FLAME
0
100
200
300
400
TUNGSTEN
LIGHT
500
600
700
800
WAVELENGTH (nm)
DISTANCE (m)
13
ULTRAVIOLET
VISIBLE
INFRARED
900
PHOTODETECTORS
UV to NEAR INFRARED (NIR) REGION
NEAR INFRARED (NIR) DETECTOR UNIT SERIES
The near infrared (NIR) detector unit series has a full line of products to support diverse measurements of weak or fast phenomena in
the NIR region. The R5509 series provides wide spectral range.
NIR PMT Unit
Product Type
NIR PMT
Fiber input,
Easy handling, Gate function (H12694) Low noise
Low noise (H10330B-25, H12694-25)
at 1.7 µm
Features
Wide spectral
response
51 mm
88 mm
100 mm
H10330B/H12694
Type No.
H12397-75 (fiber input type)
Cooler is not shown.
H10330B/H12694
R5509
NEW H12397-75
Suffix No.
Spectral Response
-25
-45
-75
950 to 1200
950 to 1400
950 to 1700
Rise Time
950 to 1700
2.5 ×
2.5 ×
300 to 1400
300 to 1700
3000
2.5 ×
5×
1.6 ×
1.6 ×
Thermoelectrically cooled
(No liquid nitrogen, no cooling water)
Liquid nitrogen cooled
—
Cooler
Included
C9940-01/-02 (Sold separately)
—
High Voltage Power Supply
Included
C9525 (Sold separately)
—
Mode
Gate Gate width (FWHM)
Mode
Repetition Rate
—
—
—
1 µs to 10 ms (H12694)
—
—
—
10 Max. (H12694)
—
—
kHz
-60 °C
TPMOB0201EB
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
CATHODE RADIANT SENSITIVITY
QUANTUM EFFICIENCY
101
R5509-73,
-75 TYPE
R5509-43/-73
100
10-1
104
Normally OFF (H12694)
■Spectral Response
102
103
ps
s-1
Cooling Method
105
nm
105
Dark Count
104
Unit
ps
1500
400
400
103
-73
900
900
T.T.S. (FWHM)
-43
■APPLICATIONS
● Photoluminescence
● Singlet oxygen measurement
● Raman spectroscopy
● Cathodoluminescence
● Fluorescence / Fluorescence lifetime
● LIDAR (light detection and ranging)
● Quantum cryptography
-25 TYPE
R5509-43,
-45 TYPE
10-2
200
400
600
800
1000 1200 1400 1600 1800
WAVELENGTH (nm)
14
PHOTODETECTORS
UV to NEAR INFRARED (NIR) REGION
28 mm (1-1/8") SIDE-ON PMT R12829
High sensitivity at 800 nm
■Spectral Response
100
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
CATHODE RADIANT SENSITIVITY (mA/W)
TPMHB0888EB
R12829
10
R928
1
0.1
80
70
R12829
60
50
About
3 Times
40
About
4 Times
30
20
R928
10
0
700
750
800
850
Parameter
900
Cathode Luminous Sensitivity
Anode Luminous
Sensitivity at 1000 V
Dark Current
Cathode Radiant Sensitivity at 800 nm
Quantum Efficiency at 800 nm
WAVELENGTH (nm)
CATHODE RADIANT SENSITIVITY
QUANTUM EFFICIENCY
0.01
100
200
300
400
500
600
700
800
900
■APPLICATIONS
WAVELENGTH (nm)
● Biological analysis
● Spectroscopy, etc.
R12829
650
R928
250
Unit
µA/lm
8500
2500
A/lm
21
32
65
10.1
17
2.4
nA
mA/W
%
1After 30 minutes storage in darkness at 1 × 106 gain
2After 30 minutes storage in darkness at 1000 V
NEW
28 mm (1-1/8") SIDE-ON PMT R13096
Wide effective area, twice R3896
The sensitivity is the same as R3896
■FEATURES
■APPLICATIONS
● Sensitivity and stability equal
to conventional products but
with large sensitive area
● Spectroscopy
● Environmental
monitoring
● Chemiluminescence
● Biomedical analysis
Left: R13096, Right: R3896
■Uniformity Area
■SN Ratio Comparison (Simulation)
R13096
R3896
TIME
60
40
ANODE RELATIVE OUTPUT (%)
20
0
-10
0
-8
-6
-4
-2
0
2
(mm)
6
PHOTOCATHODE
0
20
40
60
80
DIFFUSED LIGHT
100
100
90
80
70
60
50
40
30
20
10
0
700
R3896
R13096
750
800
850
WAVELENGTH (nm)
900
EMISSION SPECTRA 800 nm ± 30 nm
R3896
R13096
TEST CONDITIONS
SUPPLY VOLTAGE: 750 V
LIGHT SIZE
: 1 mm slit
WAVELENGTH
: 420 nm
-6
-12
(mm)
15
Parameter
Luminous
Cathode
Sensitivity
Red / White Ratio
Anode Sensitivity Luminous
Anode Dark Current
(After 30 min storage in darkness)
± σ R3896
± σ R13096
NUMBER OF SAMPLE
80
THE SHOT NOISE
R3896
FWHM
About
2 Times
CATHODE RADIANT SENSITIVITY (mA/W)
EMISSION
ANODE RELATIVE OUTPUT (%)
R13096
100
1.4
Times
HISTOGRAM OF THE SHOT NOISE
R13096
525
0.4
5000
R3896
525
0.4
5000
Unit
µA/lm
—
A/lm
20
10
nA
PHOTODETECTORS
COOLED SIDE-ON PMT R9182-01, R11715-01
Combination with thermoelectric cooling element reduces
effects of ambient temperature.
■FEATURES
■APPLICATIONS
● Improved detection
limit by cooling
● High sensitivity
● Pin compatible with
1-1/8 inch side-on
PMT
R9182-01
● Low level fluorescence measurement
● NOx measurement
R11715-01
● MTP reader
● Fluorescence spectrophotometer
● Chemiluminescence detection
(at 25 °C)
R11715-01
Unit
Typ.
Max.
Min.
185 to 710
nm
410
nm
Low noise bialkali
—
8 × 24
mm
—
1.0 × 107
—
—
—
0.02
0.2
nA
R9182-01
Min.
Typ.
Max.
185 to 900
450
Multialkali
10 × 14
—
9.5 × 106
—
—
0.3
1
Parameter
Spectral Response
Peak Wavelength
MateriaI
Photocathode
Minimum Effective Area
Gain
Anode Dark Current at 1000 V (When cooled) 1
Left: R9182-01, Right: R11715-01
1After 30 min storage in darkness
■Example of Cooling Characteristics
Before
Cooling
■Anode Dark Current (R11715-01)
OUTPUT (10 mV/div.)
■Spectral Response
100
200
TPMSB0246EA
R9182-01
TPMSB0245EB
After
Cooling
Signal
Signal
OUTPUT (10 mV/div.)
Signal
TIME (1 ms/div.)
TPMSB0239EA
50
45
180
40
160
35
PHOTOCATHODE
TEMPERATURE (°C)
140
30
120
25
100
20
80
15
60
DARK COUNT (s-1)
10
40
5
20
0
0
0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
Signal
DARK COUNT (s-1)
Signal
PHOTOCATHODE TEMPERATURE (°C)
Signal
10
R11715-01
1
0.1
CATHODE RADIANT SENSITIVITY
QUANTUM EFFICIENCY
0.01
100 200 300 400 500 600 700 800 900 1000
TIME (s)
TIME (1 ms/div.)
WAVELENGTH (nm)
NEW
13 mm (1/2") SIDE-ON PMT R12857
High sensitivity from VISIBLE to NIR region
■Spectral Response
R12857
CATHODE RADIANT SENSITIVITY (mA/W)
QUANTUM EFFICIENCY (%)
10
R6357
1
0.1
CATHODE RADIANT SENSITIVITY (mA/W)
TPMHB0888EB
100
80
70
R12857
60
50
About
2 Times
40
30
20
R6357
10
0
700
750
800
850
WAVELENGTH (nm)
CATHODE RADIANT SENSITIVITY
QUANTUM EFFICIENCY
0.01
100 200 300 400 500 600 700 800 900 1000
WAVELENGTH (nm)
■APPLICATIONS
● Biological analysis
● Spectroscopy, etc.
900
Parameter
Cathode Luminous Sensitivity
Anode Luminous
Sensitivity at 1000 V
Dark Current 1
R12857 R6357 Unit
650
500
µA/lm
2600
2000
A/lm
3
2
nA
1After 30 minutes storage in darkness at 1000 V
16
PHOTODETECTORS
RUGGEDIZED, HIGH-TEMPERATURE PMT SERIES
The R1288AH series is a ruggedized, high-temperature-resistant, head-on PMT for
geological surveys deep underground. It has a long life of 3000 hours even at a
high temperature of 175 °C, lasting nearly 8 times longer than our conventional
PMTs. Even at 200 °C, this PMT still achieves an actual service life of 1000 hours,
which is 6 times longer than conventional types.
The R8874-01, which can be used under 50 G level vibration, is now available.
■FEATURES
● Longer life at high temperature
● High reliability
● High sensitivity
● Shock and vibration resistance
Left: R8874-01, Right: R1288AH
■EXAMPLE
PMT
Scintillator
■ Output Changes at 200 °C
150
TPMHB0837EA
RELATIVE VALUE (%)
Light Source: Blue LED (Simulated NaI(Tl) + 137Cs)
Light was led to temperature oven with optical fiber.
Count rate: 1 ks-1
R1288AH SERIES
100
High voltage
power supply
Drill bit
(see page 20)
CONVENTIONAL TYPE
50
Oil well logging
Long life
×6
0
1
10
100
Resistance to high temperature
and vibration is needed here since
the drilling unit (PMT is installed
nearby) digs deep underground.
1000
* High temperature: Up to 200 °C
* Resistance to vibration: Up to 50 G
OPERATION TIME (h)
PMTs FOR DARK MATTER DETECTION R11065, R11410
The R11065 and R11410 are 76 mm (3") diameter head-on PMTs with extremely
low radioactivity, and are operable in low-temperature environments such as liquid
Xe (-110 °C) and liquid Ar (-186 °C).
R11410-20, whose radioactivities are 1/4 lower compared with that of R11410 is
now available.
■FEATURES
● High QE
● High cathode linearity
● Extremely low radioactivity
■Spectral Response
35
■ Cathode Current Linearity Example
TPMHB0838EA
10
TPMHB0839EA
25 °C
-60 °C
-110 °C
-150 °C
R11410
5
25
DEVIATION (%)
QUANTUM EFFICIENCY (%)
30
20
15
-5
-10
10
R11065
-15
5
0
150 200 250 300 350 400 450 500 550 600 650 700 750
WAVELENGTH (nm)
17
0
-20
10-12
10-11
10-10
10-9
10-8
10-7
CATHODE CURRENT (A)
10-6
10-5
PHOTODETECTORS
FAST TIME RESPONSE SERIES
NEW
HIGH SPEED PMT R12844, R12845, R13089
A new series of high speed photomultiplier tubes (PMT) from Hamamatsu has now
appeared on the market. These offer a very small transit time spread that is uniform
across the entire effective area. This excellent time resolution has been achieved
with a simple PMT design that is suitable for mass production.
The new high speed PMT series can be used as a powerful tool for precision timing
measurement in many application fields.
■APPLICATIONS
● TOF-PET in nuclear medicine
● TOF counter in HEP experiments
● Radiation monitor in security instruments
Left: R12844, Center: R12845, Right: R13089
■T.T.S. (R12844)
10000
R13089
51 mm (2 inch)
2.0
Unit
—
nm
—
—
V
ns
270
ps
3.2 × 105
TPMHB0805EB
SUPPLY VOLTAGE: 1500 V
1000
COUNTS
Parameter
R12845
R12844
Diameter
28 mm (1-1/8 inch) 38 mm (1.5 inch)
300 to 650
Spectral Response
Bialkali
Photocathode
5 × 105
5 × 105
Gain
1500
Supply Voltage
1.2
1.0
Rise Time
T.T.S. (Transit Time
190
170
Spread) (FWHM)
FWHM
170 ps
100
10
1
0.5
1
1.5
2
2.5
3
3.5
TIME (ns)
HIGH SPEED COMPACT HPD (HYBRID PHOTODETECTOR) SERIES
The HPD (Hybrid Photodetector) utilizes the "electron bombardment" method in
which photoelectrons are accelerated in a strong electric field to directly strike an
avalanche diode (AD) in a vacuum tube. This mechanism achieves excellent quality
of amplification.
Using a new AD with very low capacitance, we have developed a compact HPD
with an excellent time resolution.
■APPLICATIONS
● Laser scanning microscope (confocal / two-photon)
● FCS (fluorescence correlation spectroscopy)
● LIDAR (light detection and ranging)
● TCSPC (time-correlated single photon counting)
■T.T.S. (R10467U-06)
10000
Unit
nm
—
mm
%
—
ps
TPMHB0767ED
Full Illumination
HV: -8 kV
AD Bias: 405 V
1000
FWHM
50 ps
COUNTS
R11322U-40 R10467U-06 R10467U-40 R10467U-50
Parameter
300 to 720 220 to 650 300 to 720 380 to 890
Spectral Response
Bialkali
GaAsP
GaAsP
PhotoGaAs
Material
6
3
5
cathode Effective Area
28 2
45 1
Quantum Efficiency
45 1
14 3
Gain 4
1.2 × 105
Rise Time
400
T.T.S. (Transit Time
170
50
90
130
Spread) 5 (FWHM)
R10467U series
100
ps
1 At 500 nm
2 At 350 nm
3 At 800 nm
4 At the photocathode voltage of -8 kV and the AD bias voltage of Vb (breakdown voltage) -10 V
5 At the single photon state and full illumination on the photocathode, specified as FWHM
(Full Width at Half Maximum). These values include the jitter of the electronics of about 30 ps.
10
0.5
1
1.5
2
2.5
3
3.5
TIME (ns)
18
PHOTODETECTORS
PMT PERIPHERAL PRODUCTS
ACCESSORIES
We provide a wide variety of quality socket assemblies, which enable easy yet reliable operation of photomultiplier tubes. They can
also be combined with other peripheral products such as high voltage (HV) power supplies, preamplifiers, etc.
D...Voltage Divider
DP...Voltage Divider and HV Power Supply
DAP...Voltage Divider, Amplifier and HV Power Supply
28 mm Dia.
Side-On PMT
28 mm Dia.
Head-On PMT
D TYPE
DP TYPE
DAP TYPE
D TYPE
E717-63, E717-74
C12597-01, C8991
C6271, C7950
E990-07
DP TYPE
DAP TYPE
C10344-03, C13004-01 NEW
C7950-01
Socket
Assembly
E717-63
High Voltage
Power Supply
C12597
C11152, C9619
C9525, C9727
C4900, C10940
C11152, C9525
C12419, C11184, C9999
C9663, C7319, C6438, C5594
Parameter
Parameter
M7279, M8879
Module
Unit
Amplifier
C10344-03
C7950
C7319
C12419
M7279
M8879
Frequency Bandwidth
DC to
DC to
(-3 dB)
10 MHz 150 MHz
Current-to-voltage
+10 mV/µA +4 mV/µA
Conversion Factor
(Load Resistance: 50 Ω)
C9999
NEW C9999-01
DC to 20 kHz or
DC to 200 kHz DC to 1 MHz DC to 10 MHz
(switchable)
-0.1 V/µA,
Current-to-Voltage
+50 mV/µA (C9999)
-1 V/µA*
Conversion Factor -1 V/µA, -10 V/µA
±10 mV/µA (C9999-01)
(Load Resistance: 50 Ω) (switchable)*
* Load Resistance: 10 kΩ
Frequency
Bandwidth (-3 dB)
C6438
C6438-01
C6438-02
C11184
C9663
C5594
DC to 50 MHz DC to 150 MHz DC to 300 MHz 50 kHz to 1.5GHz
+0.5 mV/µA (C6438)
+25 mV/µA (C6438-01)
±5 mV/µA (C6438-02)
+4 mV/µA
+1.25 mV/µA
+3.15 mV/µA
NEW
ACTIVE D-TYPE SOCKET ASSEMBLY E12788
The E12788 is a D-type socket assembly designed for 28 mm
diameter side-on photomultiplier tubes
■FEATURES
● Low power consumption, low heat generation
Without incident light, power consumption is 1/15 of that of resistive divider type.
● Excellent output linearity
● High output current even at low supply voltage
■DC Linearity
■SPECIFICATIONS
25
Max.
Typ.
Max.
Typ.
Min.
Description / Value
1500
-200 to -1500
130
30
195
45
100
DC / Pulse
Unit
V
V
µA
µA
mW
mW
µA
—
NOTE: AThe current at which output of photomultiplier tube deviates by ±2 % from the linear.
BThis divider circuit supports a higher current than previous models, but does not exceed the maximum
19
current specified for an individual PMT.
TACCB0131EA
E717-63
RESISTIVE CHAIN TYPE
(SUPPLY VOLTAGE: -1000 V)
20
15
DEVIATION (%)
Parameter
Max. Supply Voltage Between Case and Terminals
Supply Voltage Between GND and HV Cable
Voltage Divider Current at output signal current of 100 µA
(at Max. Supply Voltage) when no incident light
at output signal current of 100 µA
Power Consumption
(at Max. Supply Voltage) when no incident light
Linear Output in DC Mode (at -1000 V) A
Signal Output B
10
E5815-01
(SUPPLY VOLTAGE: -1000 V)
5
0
-5
-10
10-7
E12788
(SUPPLY VOLTAGE: -1000 V)
10-6
10-5
10-4
OUTPUT CURRENT (A)
10-3
PHOTODETECTORS
HIGH VOLTAGE POWER SUPPLY MODULES
Stability
Ripple
Output Output Input
/ Noise 12
Voltage Current
12 Load 1
Line
Voltage
(Typ.)
(Max.) (Max.)
(%)
(%)
(mV p-p)
(V)
(V)
(mA)
Type No.
-03
-03-R2
C10940
-53
-53-R2
—
-01
C4900
-50
-51
-1200
0.6
+5
50
±0.02
±0.01
15 × 18 × 15
0.6
0.5
0.6
0.5
+15
+12
+15
+12
38
±0.01
±0.01
46 × 24 × 12
0.6
+15
125
±0.01
±0.01
46 × 24 × 12
0.5
+12
1
+15
125
±0.01
±0.01
46 × 24 × 12
8
±0.01
±0.01
41 × 10 × 41
60
±0.01
±0.01
62 × 15 × 45
+1200
-1250
+1250
—
C10673
-1250
-01
—
-1250
-50
+1250
C10764
—
-01
-50
-51
—
-01
-50
-51
C11152
C9619
-1500
1
+1500
-2000
2
+2000
-12
-2000
-52
+2000
-12
-1000
-52
+1000
C12446
C11323
-12
NEW
+24
50
±0.01
±0.01
62 × 15 × 45
10
+24
50
±0.01
±0.01
62 × 15 × 45
-1800
1At maximum output voltage
20
+24
40
±0.01
±0.01
98 × 27 × 51
30
+24
75
±0.01
±0.01
107 × 25.5 × 72
+1800
-1500
C12766
-52
+15
+12
+15
+12
+15
+12
+15
+12
5
C11784
-02
-02-R1
-02-R2
-52
-52-R1
-52-R2
Size 3
W×H×D
(mm)
+1500
2At maximum output current
Note
Digital Control RS-485,
Daisy-chain
(-R2 type only)
UL recognized
Low ripple / noise
High output current
Digital control
-R1 type: RS-232C
-R2 type: RS-485
High output current
UL recognized (-12 type only)
3Excluding projecting parts
HIGH VOLTAGE POWER SUPPLY MODULE C12733-01, C12733-02
High voltage power supply module with high environment resistance
■FEATURES
● Wide operating temperature
Operating ambient temperature: -40 °C to +175 °C
● High reliability for shock / vibration
Vibration: 300 m/s2, Shock: 10000 m/s2
● Best match with most Hamamatsu ruggedized high
temperature PMT assemblies
■SPECIFICATIONS
Parameter
Input Voltage
Output Voltage
Max.
Output Current
Ripple / Noise (p-p) 12 Typ.
Output Voltage Control
Weight
Typ.
1At maximum output voltage
NEW C12733-01
C12733-02
+15 ± 1
-1000 to -1800
+1000 to +1800
90
50
By external controlling voltage (0 V to +5 V)
80
2At maximum output current
Devlp.
Unit
V
V
µA
mV
—
g
Size: 22.2 mm × 85.4 mm
(Excluding projecting parts)
20
PHOTODETECTORS
PMT PERIPHERAL PRODUCTS
NEW
STABILIZED LIGHT SOURCE FOR PMT L12367 SERIES
Stabilized light source with a microtiter plate (MTP) contour
This stabilized LED light source has a shape similar to an MTP. It has 9 light-emitting
points in 3 different colors and 3 intensity levels. The output wavelength and intensity
can be customized upon request.
■FEATURES
● Stable light emission
for 10 hours or more
● LED light source
■APPLICATIONS
● Designed for adjusting
sensitivity of detectors built
into MTP readers
■SPECIFICATIONS
Parameter
Selectable Peak Emission Wavelength
Spectral Half Width
LED
Light-emitting Size
Emission Stability (0 °C to +50 °C) Max.
Battery
Battery Service Life (at +25 °C) Min.
Operating Ambient Temperature / Humidity
Storage Temperature / Humidity
L12367 Series
428
465
522
660
65
26
35
30
7.0 (9 points)
±2
AAA Battery
10
0 °C to +50 °C / below 85 %
-20 °C to +60 °C / below 85 %
Unit
nm
nm
mm
%
—
h
—
—
■Usage Examples
POWER
TACCC0159EA
BIOMEDICAL PRODUCT
Devlp.
FLOW CELL AND FLOW CELL ASSEMBLY FOR FLOW CYTOMETRY
Custom flow cell assembly for OEM
■FEATURES
● Proposed assembly structure design based on laminar flow model
● Flow cell customization options: Size, shape, coating, etc.
Avoid flow clogging with air
Ra = 0.05 µm available (transparent surface)
■CURRENT APPLICATION
● Flow Cell Assembly for Flow Cytometer
Countermeasure against
stray light with black quartz
Lens coupling available
without glue
● Flow Cell for HPLC
For refractive index detector
10 mm
J12800-000-101
21
J12800-000-103
J11020-000-011
For fluorescence detection
10 mm
J11020-000-012
POINT-OF-CARE TEST
Devlp.
IMMUNOCHROMATO-READER C11787 SERIES
The C11787 series Immunochromato-Reader makes rapid, high sensitivity, quantitative measurements of color intensities for red/blue/fluorescence-based immunochromatographic reagents.
Since measurement data is saved as a CSV file, it can be analyzed on commercially
available spreadsheet software, and calibration curve and time-course graphs then
easily drawn. The C11787 series Immunochromato-Reader is an optimal tool for
R&D work as well as quality control of immunochromatography reagent kits.
■FEATURES
● High sensitivity
● High repeatability
● Wide selection of functions
● It can respond to gold colloid,
latex, and fluorescent labels.
● Can shorten time to market
through reduced development
time and cost
● Can customize settings for stand-alone
OEM reader (C11787-50/-60/-70)
■APPLICATIONS
● R&D
C11787-00/-10/-20 PC operation type
Biochemistry
● Food
Allergen
● Agriculture
Virus
Residual pesticides
● Environment
Endocrine disrupters
C11787-50/-60/-70 Stand-alone type*
*: Possible to operate by PC
■CUSTOMIZABLE OPTIONS FROM THE BASIC MODEL
Parameter
Measurement Object
Light Source
Display
C11787-00/-50
Red-based color line
Green LED
Printer
Internal Memory
Other Functions
Firmware
C11787-20/-70
Fluorescent label
UV LED*
4 buttons
Operation
Transmission of Data
Basic Model
C11787-10/-60
Blue-based color line
Red LED
Monochrome LCD
USB 2.0
RS-232C
—
Flash ROM (200 records)
Reagent information registration IC chip
—
—
—
Measurement: Require registration of reagent information with IC card
QC Measurement: Inspection
Customizable options
—
—
Color LCD
5 buttons
Keypad
Touch panel
Thermal printer
Internal barcode reader
External barcode reader
Reagent temperature control
Customizable based on
requirements
* Please ask us about other wavelengths.
IMMUNOCHROMATO-READER C11666 SERIES
This product quantitatively measures the color intensities of red/blue-based immunochromatographic reagents up to a maximum of 30 pieces at one time with high
sensitivity and excellent reproducibility.
The PC program that comes with this product allows easy measurement setting,
measurement data analysis, calculation of calibration curve functions, and concentration conversion. This product is ideal for research & development and quality
control of immunochromatographic reagents since it is able to process a large number of reagents at one time.
■FEATURES
● Two different labels (Blue / Red)
can be measured
● Semi-automatic measurement of
30 samples
● High-throughput measurement
30
Samples
22
ION SOURCE
PHOTOIONIZATION LIGHT SOURCE
Devlp.
DEUTERIUM LAMP FOR PHOTOIONIZATION L13301
Photoionization light source ideal for mass spectrometry
■FEATURES
■APPLICATIONS
● Capable of soft ionization
● Long life
● High stability
● Compact
● Mass spectrometry
● Environmental analysis
■ADVANTAGES OF PHOTOIONIZATION BY
DEUTERIUM LAMP
■Spectral Distribution
● Single photon ionization
(Fragment free soft ionization)
● Easy installation
● Low cost than another methods
● Identify the object molecule easily
VUV region: for reference only
TLSOB0079EB
RELATIVE IRRADIANCE (%)
100
High energy
from 10.78 eV
80
60
40
20
0
100
120
140
160
180
200
220
240
400
WAVELENGTH (nm)
■PHOTOIONIZATION LIGHT SOURCE LINEUP
Parameter
Feature
Irradiance
Housing 2
Vacuum Flange 2
Power Supply 2
L11798
L10706
L7293
High output power
Enable proximity irradiation 1
Long life, Low cost
1
10 times (Compared to L10706) 20 times (Compared to L10706)
Supplied
Prepared by the user
Supplied
Prepared by the user
JIS VF50/ICF114 (Sold separately)
ICF-70 (Supplied)
Supplied
Sold separately
Supplied
L13301
Compact, Low cost
1
Prepared by the user
Prepared by the user
Sold separately
1SUS flexible tube with a vacuum flange
2Please consult with us when designing the equipment.
ION / ELECTRON DETECTORS
NEW
FAST DECAY TIME PHOSPHOR J12782-09D
For electron beam detection
● High speed decay time
(decay time: 12 ns)
● Long life
● High brightness efficiency
■APPLICATIONS
● Semiconductor inspection
instrument
● SEM (Scanning Electron
Microscope)
● Mass spectrometry
● General electron detection
23
■Phosphor Decay Time Characteristics
120
TPMZB0002EB
100
RELATIVE OUTPUT (%)
■FEATURES
80
60
40
20
0
-10
-5
0
5
10
TIME (ns)
15
20
25
30
ION / ELECTRON DETECTORS
COMPACT MCP ASSEMBLY SERIES F12334-11, F12395-11, F12396-11
Thin shape enables installation into minimum space
This assembly has a suitable time response characteristic for TOF (Time of Flight)
measurement and is useful for ion, electron, X-ray or VUV-light detection.
Its thin and flat shape allows installation when space is limited, which is often the case
in equipment design.
■FEATURES
■Output Waveform
* Breeder resistors are integrated.
● Thin and light weight
● Robust MCP
● Signal connector: SMA (Receptacle)
● 3 choices of effective area
F12334-11: 20 mm
F12395-11: 27 mm
F12396-11: 42 mm
20
TMCPB0112EA
0
OUTPUT VOLTAGE (mV)
● Easy to use
Only 1 negative high voltage p/s
2 connections (HV and Signal)
are required.
-20
Left: F12334-11, Center: F12395-11, Right: F12396-11
-40
FWHM
1.5 ns
-60
-80
-100
-120
-2
0
2
4
6
8
RESPONSE TIME (ns)
■APPLICATIONS
● TOF-MS
● SIMS
● Electron detection
● Pulse counting
Rear view (F12334-11)
ELECTRON MULTIPLIERS
Ion detectors are widely used as detectors for MS (mass spectrometer), and are capable of detecting weak positive and negative ion signals with high sensitivity.
■FEATURES
● Very compact (R8811)
● Thin thickness (R4146-10)
● Measures both positive ions
and negative ions (R6985-80)
● High gain
● Easy to use
● Can be customized
■APPLICATIONS
● GC / QMS
● LC / QMS
● Multi-collector MS
● ICP MS
Left: R4146-10, Center: R8811, Right: R6985-80
■Positive Ion / Negative Ion Detection Mechanism (R6985-80)
CONVERSION DYNODE
-10 kV
Q-POLE
ELECTRONS
POSITIVE IONS
Q-POLE
ELECTRONS
-1 kV
GND
CONVERSION DYNODE
+10 kV
Q-POLE
POSITIVE IONS
NEGATIVE IONS
Q-POLE
ELECTRONS
When positive ions strike the conversion dynode, electrons are emitted from the
conversion dynode according to the quantity of input ions. These emitted electrons are
then guided into the electron multiplier for secondary multiplication.
When negative ions strike the conversion dynode, positive ions are emitted from the
conversion dynode according to the quantity of input ions. These emitted positive ions
then enter the electron multiplier while receiving energy from the difference in potential
between the conversion dynode and electron multiplier, and strike the first dynode of
the electron multiplier where electrons are released according to the quantity of input
positive ions. These electrons are then guided to the second and subsequent dynodes
for secondary multiplication.
-1 kV
GND
TPMHC0248EA
24
IMAGING DEVICE
■SELECTION GUIDE
Wide Variety
Standard Type
Image Intensifier
I.I. UNITS
High Speed Gate
High
Voltage
Power Supply
Gate /
High Speed
Gate
C9016
C9016-2x, C9546, C9547
High Speed Gate & High Repetition
High
Speed
Gate
Pulse
Generator
High
Voltage
Power Supply
C9548
ICCD CAMERA
High
Speed
Shutter
C10880
High Speed Shutter
CCD
Camera
High
Voltage
Power Supply
C10054
PROXIMITY FOCUSED IMAGE INTENSIFIERS
The V12841D, which is the 16 mm dia. type, is developed. It is light and compact. First GaAs
photocathode is incorporated, and then the other photocathodes will be available.
The crystalline photocathode (GaAs, GaAsP, extended red GaAsP and InGaAs) are available
for 18 mm and 25 mm dia. types. Standard input window is borosilicate glass, and FOP input
window is also available.
These Gen3 tubes can be used in various applications.
■APPLICATIONS
● Bio-imaging
● High speed shutter camera
● Time-resolved low light level imaging
V9569U
V7090U
GaAs
18
13.5 × 10
25
16 × 16
-71
—
-72
NEW V12841D
*
16
12.8 × 9.6
—
—
Unit
—
mm
mm
—
—
*: Borosilicate input window
Parameter
Photocathode Material
Photocathode Size
Effective Area
Borosilicate Input
Suffix
FOP Input
V9501U
V8070U
GaAsP
Extended Red GaAsP
18
25
13.5 × 10
16 × 16
-74
-73
-75
—
—
V8071U
InGaAs
-76
—
Unit
—
mm
mm
—
—
■Spectral Response
100
TII B0120EA
V9501U-74
V12841
QUANTUM EFFICIENCY (%)
Parameter
Photocathode Material
Photocathode Size
Effective Area
Borosilicate Input
Suffix
FOP Input
V12841
10
V9569U-71
1
V8071U-76
0.1
0.01
200
400
600
800
WAVELENGTH (nm)
25
1000
1200
IMAGING DEVICE
IMAGE INTENSIFIER WITH AUTO GATE FUNCTION
Image intensifier using a wrap-around power supply
with internal auto gate function
This power supply can be used for various image intensifiers
■FEATURES
■APPLICATIONS
● Wide dynamic range
(1 × 10-6 to 1 × 102 lx)
● Resistant to excessive light
● Long service life
● Security cameras
● Scientific measurement
● In-car cameras
■Imaging Example (at 1000 lx)
● With auto gate function
● Without auto gate function
ICCD CAMERA WITH InGaAs PHOTOCATHODE C10054-07/-17/-27
The C10054-07/-17/-27 is a very compact Intensified CCD (ICCD) camera with high-speed
shutter function. An InGaAs image intensifier is built into this ICCD camera. This camera
will be very effective for imaging in near infrared light region (ex. 900 nm to 1100 nm).
■FEATURES
● Compact
● Progressive scan type available
● High speed shutter: 5 ns to DC
● High sensitivity:
InGaAs photocathode
● High resolution: 470 TV lines
■APPLICATIONS
● Night vision
● Material evaluation of
solar cell
Devlp.
CCD CAMERA WITH FIBER OPTIC WINDOW C12550
Digital CCD camera with fiber optic window
The C12550 is a digital CCD camera with a fiber optic window designed to read out images from image intensifier units. Fiber coupling allows highly efficient image transfer
compared to lens coupling. Image data is output to a PC via the USB 2.0 interface.
■FEATURES
● Highly efficient image readout
● Digital output
● Exposure time: 30 µs to 10 s
■APPLICATIONS
● Image readout from
image intensifiers and
image intensifier units
26
LAMPS
■SELECTION GUIDE
Lamp Type
Output
Lamp
Spectral
Stability
Distribution Rating Fluctuation
(nm)
(W)
p-p (%)
Life
(h)
Calibrated
Light Source
Related Products
Xenon Lamp
185
to
2000
35
to
300
0.2
Typ.
1000
to
3000
185
to
2000
50
to
500
0.5
Typ.
500
to
2000
Lamp
Opto-Spectrum
Housing Power Supply Generator (OSG)
Xenon Short Arc
Spot
Light Source Reflection Lamp
Calibrated
Xenon Lamp
Light Source
Mercury Xenon Lamp
Xenon Flash Lamp
160
to
2000
2
to
60
3
Max.
400 1
to
5000
(See page 34)
(See page 33)
Trigger
Socket
Shield
Box
Power
Supply
Xenon Flash Lamp
Flash Light Source
Module
(See page 30)
Mini Excimer Lamp Mini Excimer Lamp
for R & D
for production line
Excimer Lamp
172
H2D2 Lamp
(High Brightness High
End Deuterium Lamp)
X2D2 Lamp
(High Brightness)
L2D2 Lamp
(Long Life)
115
to
400
115
to
400
180
120
30
—
0.05
Typ.
0.005
Typ.
2000
H2D2 Lamp
(Synthetic silica
window type)
1000
Lamp Housing
Power Supply
S2D2 Module
S2D2
Photoionization
Light Source
UV-VIS Fiber
Light Source
VUV Light
Source Unit
2000,
4000
(See page 38)
S2D2 Lamp
(Stable and Small
Deuterium Lamp)
S2D2
115
to
400
5
to
8
0.005
Typ.
1000,
1500
L2D2
(See page 29)
UV-LED Unit
LC-L5
LED
365±5,
385±5
—
—
265, 2
305
(See page 6)
1 Depends on the repetition rate.
2 Peak wavelength
27
6
0.3
Max.
5000
(See page 38)
UV-LED
Spot Light Source UV-LED Module
LC-L1V3
LC-L2
20000
(See page 5)
Devlp. UVCL
(Ultraviolet Cathode
Emitting Light Source)
S2D2 UV-VIS
S2D2 VUV
Fiber Light Source
(UV Enhanced Type) Light Source Unit
(See page 34)
Calibrated
Deuterium Lamp
Light Source
LAMPS
■Spectral Distribution
UV: Ultraviolet
100 nm
Visible
200 nm
400 nm
Deuterium Lamps
115
2000 nm
Xenon Flash Lamps
2000
185
Xenon Lamps
2000
185
Mercury Xenon Lamps
2000
220
Line
spectrum
1000 nm
400
160
Broad
spectrum
IR: Infrared
600 nm
UVCL
450
Hollow Cathode Lamps
193
852
■ Fluctuation (Short-term stability)
0.01 %
1%
0.1 %
UVCL
10 %
Xenon Flash Lamps
0.3 %
Deuterium Lamps
0.005 %
Vacuum Ultraviolet Deuterium Lamps
3%
Mercury Xenon Lamps
2%
0.05 %
Xenon Lamps
1%
Lamp light output stability is an important factor that affects measurement accuracy and reliability of equipment. To supply
lamps with high output stability, Hamamatsu has made consistent efforts to achieve ideal electrode construction and
positioning accuracy and also to develop optimum power supplies.
Devlp.
75 W / 150 W HIGH BRIGHTNESS XENON LAMP
High brightness about 1.5 times greater than our conventional
lamps. BI (Barium-Impregnated) cathode ensures long service
life and high stability.
■Arc Distribution
Conventional Type
High Brightness Type
High
Brightness
x 1.5
■Spectral Distribution
Cathode
■FEATURES
Cathode
● High brightness
● High stability
Fluctuation:
0.2 % p-p (Typ.)
Drift:
±0.5 %/h (Typ.)
● Long service life
Lamp
Rating
(W)
150
75
Window
Material
Fused Silica
■APPLICATIONS
● Spectrophotometer
● Liquid chromatograph
● Fluorophotometer
● Microscope light source
● Semiconductor inspection
● Color measuring device,
color scanner
Transmission Guaranteed
Wavelength Operating Life
(nm)
(h)
3000
185 to 2000
2000
Average
Life
(h)
4000
3000
RELATIVE RADIANCE
10
1
150 W HIGH BRIGHTNESS TYPE
150 W CONVENTIONAL TYPE
75 W HIGH BRIGHTNESS TYPE
75 W CONVENTIONAL TYPE
0.1
0.01
0.001
200
300
400
500
600
700
800
900
WAVELENGTH (nm)
Metal Base
Anode
Cathode
(mm)
(mm)
12
12
9
9
28
LAMPS
COMPACT S2D2 LIGHT SOURCE L10671D
World’s smallest point-source deuterium lamp
This is the world’s smallest deuterium lamp acting as a point light source. The newly
developed electrode structure has made it possible to produce this small deuterium
lamp without sacrificing stability. This lamp operates on low power input yet delivers
high illuminance.
■FEATURES
● High stability:
0.005 % p-p Typ.
(Equivalent to 2 × 10-5 A.U.)
● High brightness
● Low power consumption
● Compact
● Long life
■APPLICATIONS
● Spectrophotometry
● Environmental
measurement
● Pharmaceutical testing
● High performance liquid
chromatography
● Film thickness
measurement
Left: L10671D, Right: L2D2 lamp
■Customized Example
* We also accept orders for custom
products to meet special needs.
Feel free to contact us as needed.
■Spectral Distribution
L10671D
IRRADIANCE (µW·cm-2·nm-1) at 50 cm
0.010
■Usage Example (Air pollution analysis)
TLSOB0109EB
0.009
0.008
0.007
0.006
0.005
0.004
0.003
0.002
0.001
0.000
200
220
240
260
280
300
320
340
360
380
400
WAVELENGTH (nm)
■RELATED PRODUCT
● COMPACT UV-VIS S2D2 FIBER LIGHT SOURCE (UV ENHANCED TYPE) L12515
■Spectral Distribution
●200 nm to 220 nm (enlarged view of enhanced output region)
1.4
L12515
L10671 (conventional type)
1
●200 nm to 1100 nm
TLSZB0125EA
0.8
10
3
0.6
0.4
L12515
L10671 (conventional type)
Times
LIGHT GUIDE
A7969-08AS
CORE DIAMETER= 0.8 mm
0.2
0
200
202
204
206
208
210
212
WAVELENGTH (nm)
214
216
218
220
RELATIVE IRRADIANCE
RELATIVE IRRADIANCE
1.2
1
0.1
LIGHT GUIDE
A7969-08AS
CORE DIAMETER= 0.8 mm
0.01
200
300
400
500
600
700
800
WAVELENGTH (nm)
29
900
1000
1100
LAMPS
NEW
COMPACT 2 W XENON FLASH LAMP MODULES L12336 SERIES
These modules L12336 series allow compact 2 W xenon
flash lamp to be operated with 5 V battery
A further plus is that these modules do not require a 12 V power supply, so they can
be used as a light source for portable analyzers.
■FEATURES
* Battery must be prepared by the user
● Operates from a 5 V battery *
and battery is set externally.
●Required battery specifications
● Small size
· Voltage: 5 V output
(world’s smallest in its class)
· Current: 1.5 A output
● High stability: 0.5 % CV Typ.
■APPLICATIONS
● Long life: 1 × 109 flashes
● Spectrophotometer
● Broad radiant spectrum:
● Fluorescence spectrometer
Ultraviolet to near infrared range
● Blood analysis
●High precision electrode positioning:
● MTP reader
Accuracy to ±0.05 mm
● Water quality and pollution analysis
● Low electromagnetic noise: CISPR11 Class B
● Laboratory testing
● Compatible with SMA fibers
● Air pollution analysis
(no lens design required)
● Semiconductor inspection
■Emission Pulse Waveform
0.10
Operating conditions
Main discharge voltage: 600 V
Measurement distance: 20 cm
100
Main discharge capacitance
0.141 µF (L12336-01)
0.094 µF (L12336-02)
0.047 µF (L12336-03)
0.02 µF (L12336-04)
80
60
40
20
■Emitted Light Distribution (L12336-01)
TLSZB0131EA
90°
100 %
Operating conditions
Main discharge voltage: 600 V
Main discharge capacitance: 0.141 µF
Repetition rate: 79 Hz
Measurement distance: 50 cm
0.09
IRRADIANCE (µW·cm-2 ·nm-1)
RELATIVE LIGHT OUTPUT (%)
■Emission Spectrum (L12336-01)
TLSZB0103EA
120
0.08
80
60
0.07
L12336-01 (Normal type)
L12336-11 (SMA fiber adapter type*)
* Measured using an optical fiber with a
core diameter of 800 µm (A7969-08AS)
0.06
0.05
40
20
0.04
0°
0
0
0.2
0.4
0.6
0.8
1
1.2
0.02
300
400
TIME (µs)
●5 V battery input
600
700
800
900
1000
1100
90°
100 %
80
●Power supply input
TLSZB0126EA
110
500
WAVELENGTH (nm)
■Light Output Stability
60
110
40
RELATIVE LIGHT OUTPUT (%)
RELATIVE LIGHT OUTPUT (%)
Same level of stability can be obtaind
even with battery operation
105
0.38 %CV
(1.44 %P-P)
100
Operating condition
Main discharge voltage: 600 V
Main discharge capacitor: 0.141 µF
Repetition rate: 79 Hz
Average input: 2 W
95
90
0
50
100
150
200
250
300
105
20
0.38 %CV
(1.44 %P-P)
0°
180°
100
Lamp electrode angle
90
TLSZB0102EA
Operating condition
Main discharge voltage: 600 V
Main discharge capacitor: 0.141 µF
Repetition rate: 79 Hz
Average input: 2 W
95
0
50
100
150
200
250
300
NUMBER OF FLASHES
NUMBER OF FLASHES
■Life
110
Operating conditions
Main discharge voltage: 600 V
Repetition rate: 50 Hz
Measurement distance: 50 cm
Lamp electrode angle
0
200
1.4
180°
0.03
0.01
■Usage Example (Water quality and pollution analysis)
TLSZB0128EA
100
RELAITIVE LIGHT OUTPUT (%)
NEW
90
L12336-01
L12336-02
L12336-03
L12336-04
80
70
60
50
40
30
20
GUARANTEED LIFE RANGE
10
0
0
2 × 108
4 × 108
6 × 108
8 × 108
NUMBER OF FLASHES
1 × 109
1.2 × 109
30
LAMPS
NEW
EXCIMER LAMP LIGHT SOURCE FLAT EXCIMER L11751-01
The possiblities of light for "Modification" and "Cleaning"
These excimer light sources offer an extended lifetime that is twice as long as conventional excimer lamps, which helps to reduce maintenance costs. (Guaranteed lifetime is extended from 500 hours to 1000 hours, and lamp replacement period from
1000 hours to 2000 hours.)
■SPECIFICATIONS
Power Supply for Excimer Lamp C11997
Excimer Lamp L11751-01
Unit
V
VA
MHz
W
Parameter
Description / Value
Input Voltage
Single phase AC200
Power Consumption 500 (Typ.), 750 (Max.)
Oscillation Frequency
Approx. 2
RF Output Power
0 to 180
Unit
Parameter
Description / Value
Irradiation Area
400 × 38
mm
Emission Wavelength
172
nm
Irradiance
50 or more
mW/cm2
h
Lamp Service Life
2000
■FEATURES
● Uniformly irradiates a large area by using a long flat lamp
■Uniformity characteristics (along short axis): Long flat lamp vs. cylindrical lamp
TLS B0019EA
100
Hamamatsu
long flat lamp
90
RELATIVE OUTPUT (%)
80
Cylindrical lamp from
other companies
70
60
50
40
30
20
10
0
-20
Good uniformity since entire target
surface is in close proximity
UV power meter: Hamamatsu H9535-172
Lamp to UV power meter distance: 5 mm
Measurement atmosphere: Air
-15
-10
-5
0
5
10
15
Poor uniformity since only
portions of target directly
below lamp are in close proximity
20
DISTANCE FROM IRRADIATED CENTER (mm)
DISTANCE FROM
IRRADIATED
CENTER (mm)
■Irradiance intensity distribution of long flat lamp
15
10
5
0
-5
-10
-15
-200
80 % or more
60 % – 80 %
Below 60 %
-150
-100
-50
0
50
100
150
UV power meter: Hamamatsu H9535-172
Lamp to UV power meter distance: 5 mm
Measurement atmosphere: Air
200
DISTANCE FROM IRRADIATED CENTER (mm)
TLS B0012EB
● Gives stable output with minimal flicker by using RF* discharge
* RF indicates "radio frequency"
■RF discharge vs. dielectric barrier discharge
●RF discharge (HAMAMATSU)
Dielectric material (glass, etc.)
●Dielectric barrier discharge (Other companies)
External electrode
Glow discharge
Uniform discharge without irregular light emissions
Dielectric material (glass, etc.)
External electrode
Microplasma discharge
Thread-like discharge with irregular light emissions
● Power supply auto-tuning function for efficient light emission
● Single wavelength at 172 nm allows highly efficient processing
● Instantaneous lamp ON / OFF operation
31
LAMPS
Devlp.
MINI EXCIMER LAMP L13129
The compact excimer lamp light source designed for use in
production lines
This compact and low cost excimer lamp is designed for use in production lines and
is easier to be installed and use compared to conventional excimer lamps.
■SPECIFICATIONS
Parameter
Irradiance
Emission Wavelength
Irradiation Area Size (W × H)
Lamp Service Life
Input Voltage (AC)
Power Consumption
Cooling Method
Description / Value
50 or more
172
86 × 40
2000
100 to 240
130 or less
Forced air cooling using duct or fan
Unit
mW/cm2
nm
mm
h
V
VA
—
Lamp
Bottom view
■APPLICATIONS
Comparison with other methods
Before irradiation
Example:
PPS (polyphenylene sulfide) + PO (polyolefin)
Before Excimer
lamp processing
● No dust particle generation
After Excimer
lamp processing
TLS B0013EA
In the corona/plasma discharge methods, dust particles
generated by electrode spattering might fly upward and adhere
to the target object surface. The excimer lamp method, however,
solves these problems and ensures clean processing.
Unlike the corona/plasma discharge methods, the excimer lamp
method using light does not cause uneven irradiation and so
achieves highly efficient, uniform processing over a large area.
Cleaning
Electrode
● No irregular processing
50
40
30
20
10
0
* Data verified by in-house testing
Dust particle
Excimer lamp
60
TAC
0
70
PVA
1
80
Polycarbonate
Improved
about
3 times
Before processing
After processing
90
PPS
2
Irradiation time: 10 s
Irradiation processing: 2 mm
Irradiation atmosphere: air
TLS B0019EA
100
Acrylic
3
After irradiation
Polyimide
Damage
●Surface modification of various materials
15°
PET
Electrode
●Bonding pre-processing
(improve adhesiveness)
80°
COP
Excimer lamp
●Surface modification of plastic
Glass epoxy
In the corona/plasma discharge methods, the target object is
directly exposed to discharge which might cause damage to it. In
the excimer lamp method, however, the object is merely irradiated
with ultraviolet light, so there will be no damage to it.
Further enhances:
• Adhesive strength
• Printing adhesion
• Coating adhesion
• Wettability improvement
in various
materials such as plastic,
metal, and rubber
Polyethylene
● No damage to object
Modification
Discharge
Polypropylene
Vacuum UV light
CONTACT ANGLE TO PURE WATER (°)
Corona discharge method
Plasma discharge method
Bonding strength
Excimer lamp method
Surface modification using excimer lamps can be used to boost
adhesion and improve the functionality of materials such as by making
them hydrophilic, and its applications are expanding in recent years to
include a wide range of fields and materials.
Cleaning is performed just by illuminating the material with light, so it is
especially effective on materials not compatible with wet cleaning or that are
easily damaged by heat.
• Glass substrate cleaning
• Silicon wafer cleaning
• Organic film removal
• Resist residue removal
• Adhesive residue removal
• Oil stain removal, etc.
●Removal of acetone cleaning residues
Before irradiation
Vacuum UV light
Bonding
Discharge
After irradiation
Since bonding is carried out by surface activation using light, it does not
damage materials, helps downsize equipment, reduces its cost,
simplifies the process, and allows bonding only at the desired position.
■Application fields
where microfluidic
devices are used
• Protein and DNA analysis
• Drug discovery support
• Cell experiments
• Chemical monitoring
●Bonding of microfluidic devices
SAMPLE
IRRADIATED
SURFACE
JOINTED
PORTION
REAGENT
* Processing effects shown in violet
32
UV APPLIED PRODUCTS
OPTO-SPECTRUM GENERATOR (OSG) L12194-00-34054/-39070/-43079/-70130
A UV-visible type has been added to the lineup to cover a wide
spectral range from UV to near infrared
■LINEUP & APPLICATIONS
● UV to Visible range (340 nm to 540 nm): ● Visible range (430 nm to 790 nm):
L12194-00-34054
L12194-00-43079
NEW
(for evaluating materials' optical properties)
(for bio-photostimulation)
● Visible range (390 nm to 700 nm):
L12194-00-39070
● Near IR range (700 nm to 1300 nm):
L12194-00-70130
(for solar simulator: solar cell)
(spectral sensitivity inspection for cameras)
■FEATURES
● Compact body means no more
worries about installation space and
location
● Easy control from your PC
■Spectrum comparison *
TLSZB0129EA
Opto-Spectrum
Generator
RELATIVE LIGHT OUTPUT
● Emits light when and
where you need it
over a wide range of
wavelengths
● Ideal tool for making
high-accuracy
evaluations and tests
● High output while
maintaining high
stability
■Sample software
LED
620
640
660
680
700
720
740
WAVELENGTH (nm)
* Spectrum comparison between typical 680 nm LED and
680 nm monochromatic light emitted from OSG
■Spectral Distribution Example
●For UV to visible range
●For visible range
●L12194-00-34054
(340 nm to 540 nm)
TLSZB0150EA
●L12194-00-43079
(430 nm to 790 nm)
●L12194-00-70130
(700 nm to 1300 nm)
TLSZB0104EB
TLSZB0042EB
TLSZB0130EA
100
100
90
90
90
90
80
70
60
50
40
30
20
10
0
300
80
70
60
50
40
30
20
400
450
500
550
600
650
700
750
800
0
350
WAVELENGTH (nm)
80
70
60
50
40
30
20
10
10
350
RELATIVE LIGHT OUTPUT (%)
100
RELATIVE LIGHT OUTPUT (%)
100
RELATIVE LIGHT OUTPUT (%)
RELATIVE LIGHT OUTPUT (%)
●For Near IR range
●L12194-00-39070
(390 nm to 700 nm)
400
450
500
550
600
650
700
750
800
850
0
350
80
70
60
50
40
30
20
10
400
450
500
550
600
650
700
750
800
850
0
650 700 750 800 850 900 950 1000 1050 1100 1150 1200 1250 1300 1350
WAVELENGTH (nm)
WAVELENGTH (nm)
WAVELENGTH (nm)
* Each graph shows emission spectra at a wavelength interval of 40 nm.
■SPECIFICATIONS
Parameter
L12194-00-34054 L12194-00-39070 L12194-00-43079 L12194-00-70130
Emission Wavelength Range
340 to 540
700 to 1300
390 to 700
430 to 790
Approx. 20
Spectral Half-width
1 or more
1 or more
15 or more
Irradiance 1
Light Output Stability
within ±5
Wavelength Tunable Width
1
Wavelength Tuning Speed
50
Warm-up Time (Typ.)
10
Power Consumption
280
Guaranteed Lamp Service Life 2
1000
1Initial illuminance measured at the output end of the A10014-50-0110 light guide (sold separately) attached to the OSG.
2End of service life is defined as the time when irradiance falls below 60 % of its initial illuminance.
* Please consult us if different wavelengths and specifications are needed.
■Connection example
Light guide
(sold separately)
Power
supply
(AC)
Uniform irradiation lens
or condenser lens
(sold separately)
RS-232C cable
(provided by the
customer)
Opto-Spectrum Generator
Object
33
PC (provided by the customer)
Unit
nm
nm
mW
%
nm
nm/s
min
VA
h
NOTE 1: <Control items>
· Lamp ON / OFF
· Shutter drive (open / close)
Manual / Auto
· Timer setting
· Light level adjustment
· Emission wavelength setting
· Total lamp ON time
· Error signal
UV APPLIED PRODUCTS
UV-LED SPOT LIGHT SOURCE
LC-L1V3
Space-saving design reduces the cubic volume by up to 90 %
compared with our prior model
■SPECIFICATIONS
Parameter
Max. UV Irradiance
Peak Wavelength
LED Service Life
Input Voltage (DC)
Power Consumption (Max.)
Cooling Method
365 nm
14000
365 ± 5
385 nm
15000
385 ± 5
20000
9 ± 0.5
25
Natural Air Cooling
■FEATURES
● Compact
● Low power consumption
● Includes optical feedback
function
● Programmable irradiance
and time
● PC communication control
improves work efficiency
USB CABLE
■Irradiance Distribution (Standard type)
15 mm
20 mm
25 mm
30 mm
■Irradiance Distribution (Right-angle type)
365 nm Type
TLSZB0082EB
16000
15000
14000
13000
12000
11000
10000
9000
8000
7000
6000
5000
4000
3000
2000
1000
0
-10
4000
365 nm Type
TLSZB0087EA
3500
10 mm
15 mm
20 mm
25 mm
30 mm
-8
-6
-4
-2
0
2
4
6
8
Z=25 mm
Z=30 mm
SPOT LIGHT SOURCE
3000
2500
2000
1500
1000
500
0
-10
10
DISTANCE FROM IRRADIATED CENTER (mm)
Z: Distance from output end of lens
Z=10 mm
Z=15 mm
Z=20 mm
IRRADIANCE (mW/cm2)
10 mm
IRRADIANCE (mW/cm2)
Illuminated area 3 mm
Unit
mW/cm2
nm
h
V
W
—
-8
-6
-4
-2
0
2
4
6
8
10
DISTANCE FROM IRRADIATED CENTER (mm)
Z: Distance from output end of lens
Z=10 mm
Z=15 mm
Z=20 mm
Z=25 mm
Z=30 mm
LC8
Operate it from your PC via RS-232C port
■FEATURES
● Long life: 4000 h guaranteed
● Light intensity monitor with internal optical feedback
function (option, sold separately)
● Easy lamp replacement
● Selectable positions of light guide port
● CE marking compliance
● Instantaneous power-outage response
● Memory Step™ for 9-type with 7-step programs
■APPLICATIONS
Light guide is sold separately.
Computer is provided by the customer.
● UV curing
• Catheter
• Sealing of LCD panel
• Electronic parts attachment
• CD / DVD pick-up devices
• CCD packaging
34
X-RAY RELATED PRODUCTS
■SELECTION GUIDE
MICROFOCUS X-RAY SOURCE
L9631
X-ray
Source
MAX. TUBE CURRENT (µA)
800
(50 W Max.)
L12161-07
500
(75 W Max.)
L9181-02
300
L10101, L10321
200
(20 W Max.)
L9421-02
200
Sealed
Type
(39 W Max.)
(8 W Max.)
L10801
1000
Open
Type
NEW L10711-03
L11091
200
20
30
40
50
60
70
80
90
100
110
120
130
140
150
160
230
TUBE VOLTAGE OPERATING RANGE (kV)
Specifications
High spatial resolution makes X-ray inspection with resolution of 1/1000 mm possible
CAMERA
X-RAY I.I.
DIGITAL CAMERA UNIT
C7336-05/-52
DEVICE
SCINTILLATOR
COMPACT X-RAY CCD CAMERA ENERGY DIFFERENTIATION TYPE 64 CH
X-CUBE™
CdTe RADIATION
H8480 / H8481 / H8953 SERIES
LINE SENSOR C10413
FOS™/ ACS™ / GPXS™
/ ALS™
X-ray
Detector
Specifications
Left: H8480, Center: H8953, Right: H8481
FOS
(See page 36)
(See page 36)
(See page 36)
Digital output:
high resolution,
high contrast
X-ray imaging as easy as
handling ordinary
CCD cameras
X-ray and gamma-ray
imaging with featured energy
differentiation (multicolor)
Next generation of large
format X-ray imaging
device series
MICROFOCUS X-RAY SOURCE
Type No.
L9421-02
L10101
L10321
L9631
L9181-02
L12161-07
L11091
L10711-03
L10801
NEW
1Nominal value
Tube Voltage Setting Range Focal Spot Size1 Beam Angle
Min. FOD2
(kV)
(µm)
Approx. (degree) Approx. (mm)
9.5
20 to 90
39
6.8
42
5
20 to 100
7.3
118
16.8
62
15
40 to 110
13
45
40 to 130
5
17
43
40 to 150
120
13
0.5
20 to 160
140
0.25 3
3
40
5
4
20 to 230
2FOD is Focus to Object Distance
L10711-03
3Minimum resolution
■APPLICATIONS
● Non-destructive inspection
● X-ray CT
● In-line X-ray inspection
In-line X-ray
Inspection System
DETECTOR
[Applicable objects]
• Electronic component
• Counterfeit parts
• Plastic component
• Food
• Medicine & drugs
35
• Printed circuit board
• Metal component
• Beverage can
• Bioproduct
• Small animal, insect
BELT CONVEYOR
MICROFOCUS
X-RAY SOURCE
TLSOC0049EA
X-RAY RELATED PRODUCTS
X-RAY IMAGE INTENSIFIER DIGITAL CAMERA UNIT C7336-05/-52
2.8-megapixel digital cameras
■IMAGING EXAMPLES
(Sample: BGA)
Analog type
Digital type C7336-05
Clear
and
Sharp
■FEATURES
X-ray tube voltage: 80 kV
Parameter
Field of View
Effective Number of Pixels (H × V)
Frame Rate (Signal Output)
Interface
● Digital output
● High resolution, high contrast
● High-speed readout
● Low noise
● Low distortion
X-ray tube voltage: 80 kV
C7336-05
C7336-52
Unit
4
2 or 4 (Selectable)
inch
1920 × 1440
—
30(12), 45(8)
frames/s(bit)
IEEE 1394b × 2 bus
—
COMPACT X-RAY CCD CAMERA X-CUBE H8480/H8481/H8953 SERIES
X-CUBE is a compact X-ray CCD camera designed for nondestructive inspection. Using a
general-purpose CCD chip mounted in a rugged but lightweight camera head, X-CUBE
makes X-ray imaging as easy as handling ordinary CCD cameras.
■IMAGING EXAMPLES (Sample: cellular phone substrate)
X-ray tube voltage: 90 kV, Geometrical magnification rate: ×1.15
●H8480
●H8953
●H8481
Effective view: 25 mm Min.
Resolution : 10 Lp/mm Typ.
Effective view: 16.7 mm × 12.5 mm
Resolution : 16 Lp/mm Typ.
Effective view: 8.4 mm × 6.3 mm
Resolution : 20 Lp/mm Typ.
Left: H8480, Center: H8953, Rihgt: H8481
■FEATURES
● High sensitivity
: Csl scintillator
● Compact
● Low power consumption
X-RAY SCINTILLATOR FOS™ / ACS™ / GPXS™ / ALS™
■FEATURES
● Large format
Maximum size: 468 mm (17") × 468 mm (17") for
ACS, GPXS and ALS
■STRUCTURE
(ACS / GPXS / ALS)
Scintillator : CsI(Tl)
● High light output
Amorphous-Carbon: ACS
Aluminum Plate: GPXS / ALS
3.2 times higher with GPXS-HB type (CsI 400 µm)
than Lanex-R (powdery scintillator) [Typ.]
● High resolution
20 Lp/mm at CTF 13 % FOS-HR type (CsI 150 µm) [Typ.]
Protection Film
Product
Name
Structure
Fiber Optic Plate
with Csl Scintillator
Amorphous-Carbon Plate
ACS
with Csl Scintillator
High Reflective Aluminum Plate
GPXS
with Csl Scintillator
Aluminum Plate
ALS
with Csl Scintillator
FOS
Dimensions
Scintillator Effective
Substrate
Area (mm)
Thickness
(mm)
Min.
Max.
150 × 150*
10 × 10
1 to 3
440 × 440
14 × 14
0.5 to 2
440 × 440
14 × 14
0.3 or 0.5
440 × 440
14 × 14
0.5 or 1
* CsI coating available on supplied FOP up to 440 mm × 440 mm.
Scintillator
Thickness
(µm)
2D Image-Device
Features
X-ray shield,
Low energy X-ray detection
High resolution,
Large format
1000 Max.
High light output,
Large format
High light output,
Large format
Applications
Dental intraoral,
Dental-panoramic, Mammography
Dental intraoral, Mammography,
Chest examination
Chest examination,
Dental CT
Dental-panoramic,
Chest examination
36
ELECTROSTATIC REMOVER
TM
ELECTROSTATIC REMOVER
Removal of static electricity in air
The PhotoIonizer is an electrostatic remover
utilizing the photoionization effect.
■Principle of Photoionization
■Photoionization
Stable atom or molecule
■FEATURES
SERIES
Soft X-ray
● No air flow
● No overshooting
● High ion density
● Ozone free
● Particle free
● Compact size for flexible
installation layout (L12535)
● Wide-ranging removal of
electrostatic charges in a short
time (L11754)
Ejected electron e–
Atom or
molecule of
positive polarity
Ion
as one electron
is ejected.
e–
Stable atom
or molecule
Ion
OV
Soft X-rays
Positive ions
Both positive and
negative ions
are generated.
Negative ions
Charges
Ion
Ion
TAPPC0170EA
■SELECTION GUIDE
Type No.
Distance from
the head to the
charged object
L12535
Bar Type
L12645
Basic Type
L11754
High Performance Type
10 cm to 30 cm
1m
2m
Compact / simple shield
Basic type
For high-speed / wide area
Features
No air flow / No overshooting / High ion density / Ozone free / Particle free
Conveyance transfer
LCD
Large size objects
AFM
Film
Materials development
Semiconductor
Semiconductor
LCD / OLED
Applications
■Example Installation of the PhotoIonBar (L12535)
PhotoIonBar works effectively within 300 mm working distance.
●Distance to charged object:
100 mm
●Interval between head units:
100 mm
HEAD UNIT L12536
100
DAISY-CHAIN CABLE A12538-001
CABLE LENGTH: 100 mm
DIN RAIL
X-RAYS
100
CHARGED OBJECT
4-PIN I/O CABLE
A12538-050/-100
CABLE LENGTH: 5 m/10 m
Neutralization area: 760 mm × 350 mm
PhotoIonBar
POWER
ON
OFF
ALERT
I - PRO
ION
CONTROLLER
C12537
37
POWER (AC)
ELECTROSTATIC REMOVER
VUV IONIZER SERIES
Removal of static electricity under depressurized conditions
This unique system eliminates static charges by using vacuum ultraviolet light (VUV).
Conventional ionizers cannot neutralize static electricity in a depressurized (vacuum)
state because of their mechanism. However, our VUV ionizer works by directly ionizing residual molecules with vacuum ultraviolet light and so can eliminate static charges even in a depressurized environment. Moreover, this VUV ionizer is also effective
in removing electrostatic charges from inert gas environments.
■FEATURES
● No air flow
● No overshooting
● Particle free
■APPLICATIONS
● Electrostatic remover
L12542 (Wide-angle irradiation type)
• Dechucking of electrostatic
chucks
• Devices utilizing electron beams
(SEM, etc.)
• LCD manufacturing equipment
• Organic EL manufacturing
equipment
L7293
L10706
(Low cost type)
(Proximity irradiation type) (High power type)
■Effect of VUV Light
L11798
■Directivity (Light Distribution)
RELATIVE RADIANT INTENSITY (%)
SEM Image (Sample: Polyvinylidene-fluoride)
When the sample is treated with VUV light, the electrostatic charge is
neutralized.
100
80
60
With VUV light radiation
Without VUV light radiation
30°
40
20°
20
L12542
10°
0
ANGLE (deg.)
0°
-10°
-20
-20°
-40
-30°
-60
-80
VUV IONIZER (L12542)
CONVENTIONAL TYPE
-100
TLSZB0105EA
■Electrostatic Charge Removal Effect
TLSZB0043EA
7
NEUTRALIZATION TIME (s)
0.7
MEASUREMENT CONDITIONS
CHARGED PLATE: 25 mm
CHARGED VOLTAGE: 1 kV / 100 V
VACUUM LEVEL: 1 × 10-2 Pa
LIGHT SOURCE: L10706
6
5
PLUS CHARGED
MINUS CHARGED
4
3
2
0
200
400
600
800
TLSOB0079EB
100
PLUS CHARGED
MINUS CHARGED
0.5
0.4
0.3
0.2
0.1
1
0
TLSZB0096EA
0.6
NEUTRALIZATION TIME (s)
8
■Spectral Distribution
Neutralization Time vs. Vacuum Level
1000
1200
1400
DISTANCE BETWEEN LIGHT SOURCE OUTPUT WINDOW AND CHARGED PLATE (mm)
RELATIVE IRRADIANCE (%)
Neutralization Time vs. Distance
MEASUREMENT CONDITIONS
CHARGED PLATE: 25 mm
CHARGED VOLTAGE: 1 kV / 100 V
DISTANCE BETWEEN LIGHT SOURCE OUTPUT
WINDOW AND CHARGED PLATE: 300 mm
LIGHT SOURCE: L10706
0
0.0001
0.001
0.01
0.1
1
80
60
40
20
10
VACUUM LEVEL (Pa)
0
100
120
140
160
180
200
220
240
400
WAVELENGTH (nm)
L12542
L11798
L7293 2
Approx. 35 W
Approx. 110 W
Approx. 30 W
20 times
10 times
10 times
Light Intensity
1
(compared to L10706)
(compared to L10706)
(compared to L10706)
Cooling Method
High-pressure air cooling Air cooling by cooling fan Air cooling by cooling fan Air cooling by cooling fan
Guaranteed Life 1
2000 hours
1000 hours
1000 hours
2000 hours
Installation Environment In vacuum (Standard room pressure) Standard room pressure Standard room pressure Standard room pressure
Parameter
Lamp Rating
L10706
Approx. 6 W
1End of service life is defined as the time when light intensity at 230 nm falls below 50 % of its initial value.
2The L7293 does not include a vacuum flange, lamp house, and power supply to allow flexible designs.
38
LASER APPLICATION
STEALTH DICING ™ TECHNOLOGY
Laser dicing technology with a completely dry process
Stealth Dicing (SD) is capable of dividing the wafer from the inside of the silicon
wafer. The laser is irradiated at any desired depth to create the modified layer (SD
layer). With an external force such as tape expansion, the cracks inside the silicon wafer extend to the surface level and divide the wafer without any cutting loss.
■FEATURES
Laser Beam
No Damage!
Dama
SD Layer
● Completely dry process
● Particle free
● No chipping
● Zero cutting loss
■Cutting Surface Comparison (Before Tape Expansion)
Stealth Dicing
TEG
Si Wafer
BG Tape
Cutting Loss
less than 1 µm
Device
Device Area
Si wafer thickness: 50 µm
Dicing speed: 300 mm/s
10 µm
■DICING MATERIALS
● Sapphire
● LiTaO3
● LiNbO3
● Quartz crystal
● SiC
● GaAs
Blade Dicing
chipping
● Glass
• Chemically Tempered Glass
• Alkali-free Glass
• Alkali Glass
• Quartz Glass
etc.
Cutting Loss
40 µm
10 µm
Si wafer thickness: 50 µm
Dicing speed: 50 mm/s
Allows glass-silicon wafers to be easily separated into chips by tape expansion only
NEWLiTaO3
Glass-Si [Resin bonding]
Sample components
Glass
: 400 µm
Resin layer : 50 µm
Si
: 100 µm
Sample components
Cutting results
LiTaO3: 250 µm
Intersection point
Process flow
Process flow
1Laser process (Si)
1Laser process
SD layer
SD laser beam
Si wafer
Glass
Frame
DC tape
2Tape remount
100 µm
SD layer
No chipping
LiTaO3
Intersection point
SD laser beam
Frame
DC tape
No chipping
DC tape
Diced cross-section
DC tape
Diced cross-section
Direction of incident laser
for glass processing
4Separation into chips by tape
expansion
50 µm
2Breaking
DC tape
3Laser process (Glass)
Cutting results
3Separation into chips by tape
expansion
Direction of incident laser
for LiTaO3 processing
250 µm
Glass
t: 400 µm
Resin layer
t: 50 µm
Si
t: 100 µm
Good process quality because no
mechanical break process is required.
39
Direction of incident laser
for silicon processing
Higher production throughput since only stealth dicing is
needed to cut and split the target
LASER APPLICATION
FAC LENS (Fast-Axis Collimating Lens) J10919
FAC lens is an optical lens that collimates light spreading
from a semiconductor laser in the fast-axis direction
Semiconductor lasers have a large divergence angle in the fast-axis direction, so the
output light cannot be efficiently used unless collimated. The FAC lens collimates light
spreading from a semiconductor laser into a narrow beam with a radiation angle of several milliradians (mrad) or less so that the diverging light can be efficiently utilized.
■FEATURES
● Aspheric micro-cylindrical lens
● Highly efficient utilization of light from LD bar
● Small variations in characteristics allow mass
production
● Well-aligned and sharp output distribution (minimized
smile and side lobes) due to high-precision fabrication
technology
■Collimating Image
■APPLICATIONS
● Highly efficient utilization of light
from LD
■Output Distribution Image when Installed to LD Bar
Radiation angle spreading in elliptical cone shape
A–A' PROFILE
A
Fast axis
LD (laser diode) bar
Radiation angle axis
A'
RELATIVE INTENSITY (%)
100
Laser emitting point
90
80
70
60
50
40
30
20
10
FAC lens
0
-5
LD (laser diode) bar
-4
-3
-2
-1
0
1
2
3
4
5
RADIATION ANGLE (mrad)
Laser emitting point
TECHNICAL INFORMATION
LOW ENERGY ELECTRON BEAM IRRADIATION SOURCE EB-ENGINE ™
Low energy EB paves the way for new applications
This low energy electron beam irradiation source called the EB-ENGINE is the ideal tool
for thin-film surface modification with greater efficiency and better results than conventional electron beam irradiation sources using high accelerating voltages.
The low accelerating voltage offers many advantages including simple equipment shielding, energy-saving, light weight and compact size.
Irradiation Area
Approx. 300 mm
■FEATURES
● Suitable acceleration voltage for thin-film modification:
50 kV to 70 kV
● Modular parts allow easy maintenance
● Electron beam irradiation in the air
● Compact and lightweight
● Simple X-ray shield
(A shield chamber is not included. However, HAMAMATSU can be consulted about its design.)
● Includes PC control unit and vacuum pump
■APPLICATIONS OF LOW ENERGY ELECTRON BEAM IRRADIATION
● Cross-linkage, curing
· Printing ink drying
· Coating and adhesive curing
· Improvement in physical properties
by cross-linkage
● Surface modification
· Function assignment to outermost
surface by graft polymerization
· Improvement in adhesion and
wettability
● Sterilization
· Surface sterilization / sterilization
processing of medical supplies
and food packages
40
HAMAMATSU PHOTONICS K.K., Electron Tube Division
314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan
Telephone: (81)539/62-5248, Fax: (81)539/62-2205
www.hamamatsu.com
Main Products
Sales Offices
Electron Tubes
Photomultiplier Tubes
Photomultiplier Tube Modules
Microchannel Plates
Image Intensifiers
Xenon Lamps / Mercury Xenon Lamps
Deuterium Lamps
Light Source Applied Products
Laser Applied Products
Microfocus X-ray Sources
X-ray Imaging Devices
Japan:
HAMAMATSU PHOTONICS K.K.
325-6, Sunayama-cho, Naka-ku,
Hamamatsu City, Shizuoka Pref. 430-8587, Japan
Telephone: (81)53-452-2141, Fax: (81)53-456-7889
E-mail: [email protected]
Opto-semiconductors
Si photodiodes
APD
Photo IC
Image sensors
PSD
Infrared detectors
LED
Optical communication devices
Automotive devices
X-ray flat panel sensors
Mini-spectrometers
Opto-semiconductor modules
Imaging and Processing Systems
Cameras / Image Processing Measuring Systems
X-ray Products
Life Science Systems
Medical Systems
Semiconductor Failure Analysis Systems
FPD / LED Characteristic Evaluation Systems
Spectroscopic and Optical Measurement Systems
Laser Products
Semiconductor lasers
Applied products of semiconductor lasers
Solid state lasers
China:
HAMAMATSU PHOTONICS (CHINA) Co., Ltd.
B1201 Jiaming Center, No.27
Dongsanhuan Beilu, Chaoyang District,
Beijing 100020, China
Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866
E-mail: [email protected]
Information in this catalog is
believed to be reliable. However,
no responsibility is assumed for
possible inaccuracies or omission.
Specifications are subject to
change without notice. No patent
rights are granted to any of the
circuits described herein.
© 2015 Hamamatsu Photonics K.K.
Germany, Denmark, The Netherlands, Poland:
HAMAMATSU PHOTONICS DEUTSCHLAND GmbH
Main Office
Arzbergerstr. 10,
D-82211 Herrsching am Ammersee, Germany
Telephone: (49)8152-375-0, Fax: (49)8152-265-8
E-mail: [email protected]
U.S.A.:
HAMAMATSU CORPORATION
Main Office
360 Foothill Road, Bridgewater, N.J 08807, U.S.A.
Telephone: (1)908-231-0960, Fax: (1)908-231-1218
E-mail: [email protected]
Danish Office
Lautruphøj 1-3
DK-2750 Ballerup, Denmark
Telephone: (45)70-20-93-69, Fax: (45)44-20-99-10
Email: [email protected]
Western Sales Office
Suite 200 & Suite 110, 2875 Moorpark Ave.
San Jose, CA 95128, U.S.A.
Telephone: (1)408-261-2022, Fax: (1)408-261-2522
E-mail: [email protected]
Netherlands Office
Televisieweg 2
NL-1322 AC Almere, The Netherlands
Telephone: (31)36-5405384, Fax: (31)36-5244948
E-mail: [email protected]
United Kingdom:
HAMAMATSU PHOTONICS UK Limited
Main Office
2 Howard Court, 10 Tewin Road, Welwyn Garden City,
Hertfordshire AL7 1BW, UK
Telephone: (44)1707-294888, Fax: (44)1707-325777
E-mail: [email protected]
Poland Office
02-525 Warsaw, 8 St. A. Boboli Str., Poland
Telephone: (48)22-646-0016, Fax: (48)22-646-0018
E-mail: [email protected]
South Africa Office
PO Box 1112, Buccleuch 2066,
Johannesburg, South Africa
Telephone/Fax: (27)11-802-5505
France, Portugal, Belgium, Switzerland, Spain:
HAMAMATSU PHOTONICS FRANCE S.A.R.L.
Main Office
19, Rue du Saule Trapu Parc du Moulin de Massy,
91882 Massy Cedex, France
Telephone: (33)1 69 53 71 00
Fax: (33)1 69 53 71 10
E-mail: [email protected]
REVISED JAN. 2015
Spanish Office
C. Argenters, 4 edif 2
Parque Tecnológico del Vallés
08290 Cerdanyola (Barcelona), Spain
Telephone: (34)93 582 44 30
Fax: (34)93 582 44 31
E-mail: [email protected]
Swiss Office
Dornacherplatz 7
4500 Solothurn, Switzerland
Telephone: (41)32 625 60 60,
Fax: (41)32 625 60 61
E-mail: [email protected]
Belgian Office
Axisparc Technology, Rue Andre Dumont 7 1435
Mont-Saint-Guibert, Belgium
Telephone: (32)10 45 63 34
Fax: (32)10 45 63 67
E-mail: [email protected]
Quality, technology and service are part of every product.
North Europe and CIS:
HAMAMATSU PHOTONICS NORDEN AB
Main Office
Torshamnsgatan 35 16440 Kista, Sweden
Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01
E-mail: [email protected]
Russian Office
11, Chistoprudny Boulevard, Building 1,
101000, Moscow, Russia
Telephone: (7)495 258 85 18, Fax: (7)495 258 85 19
E-mail: [email protected]
Italy:
HAMAMATSU PHOTONICS ITALIA S.r.l.
Main Office
Strada della Moia, 1 int. 6
20020 Arese (Milano), Italy
Telephone: (39)02-93581733, Fax: (39)02-93581741
E-mail: [email protected]
Rome Office
Viale Cesare Pavese, 435, 00144 Roma, Italy
Telephone: (39)06-50513454, Fax: (39)06-50513460
E-mail: [email protected]
TOTH0023E01
JAN. 2015 IP
(4000)