Smart Sensors Laser Sensors CMOS Type ZX2 CSM_ZX2_DS_E_5_1 Stable measurement that is unaffected by workpiece changes. The simple setting for everyone. • High-precision measurement to approx. 10 μm. • Stable measurement regardless of movement or changes in workpiece color or material. • Smart tuning for optimal setting with one button for essentially any user. • The 11-segment display enables reading characters at a glance. • Four built-in banks make changeovers easy. • Stable measurement in harsh environments with IP67 protection for Sensor Head and robot cable. • Laser life indicator to prevent line stoppage through visualization. For the most recent information on models that have been certified for safety standards, refer to your OMRON website. Be sure to read Safety Precautions on page 11 Features Stability Easy Measurements to a Precision in the Order of 10 µm for any Workpiece Essentially Anyone Can Set Optimum Conditions Stable measurement even for changes in colors and materials or for moving workpieces with CMOS that has a dynamic range of two million times Easily select smart tuning with one button. PAT.P The use of a unique OMRON HSDR-CMOS (high-speed and dynamic range) image sensor and a step-less laser power adjustment algorithm enable stable measurements for any color or surface conditions, from metals to substrates, rubber, and transparent objects. Linearity of 0.05% F.S.* achieves a measurement precision in the order of 10 µm. PAT.P The optimum settings for stable measurement can be achieved with one smart tuning button. The settings will not rely on the skill of the user. Stablee measurements on objects with cha changing color/material Measurements for Bright Workpieces Measurements for Dark Workpieces Small CMO CMOS shutter ter tim time me L Large Weak Laser eemission on power Strong Sensor configuration by just a pushing the SMART button TTwo-element ment automatic autom adjustment justment Shinny metals Black rubber rubb Three selectable tunings The light g int intake amount mount remains changes. the same even if the workpiece orkpiece changes More accurate settings are made possible by the three tuning methods for different workpiece types and surface conditions. Light intake amount Scene.1 One type of workpiece Scene.2 Several types of workpiece Shinny metals Black rubber Linearity characteristic of the ZX2 according to material 1 0.8 0.6 0.4 0.2 0 -0.2 -0.4 White ceramic SUS304, hairline (parallel) -0.6 SUS304, mirror finishing Black rubber -0.6 SUS304, hairline (orthogonal) -1 2 4 6 8 10 -10 -8 -6 -4 -2 0 Distance (mm) Linearity (%FS) Linearity (%FS) Linearity characteristic of existing product according to material 1 0.8 0.6 0.4 0.2 0 -0.2 -0.4 White ceramic -0.6 SUS304, mirror finishing -0.6 SUS304, hairline (orthogonal) -1 -10 -8 -6 -4 -2 0 No Variation for Different Workpieces Single smart tuning SUS304, hairline (parallel) Black rubber 2 Best configuration for stable detection in case of objects do not change by pushing the button for one second 4 6 8 10 Distance (mm) Stable measurements on moving objects Limit of resolution of existing product when workpiece is moving Max error: approx.400µm 0 -100 -200 -300 -400 Rest state Moving condition workpiece Measurement error (µm) Measurement error (µm) Workpiece:SUS304, hairline (parallel) 100 Surface conditions of the workpiece are variable Limit of resolution of the ZX2 when workpiece is moving 40 400 200 Ideal configuration for stable detection of changing objects by pushing the button for three seconds Scene.3 A line beam is used in addition to an emitter beam when dealing with rough surfaces to average out the amount of reflected light and to offset the amount of light received at a high-speed measurement period of 30 µs in order to reduce variations in received light and to enable stable measurements for moving objects. 300 Multi-smart tuning Workpiece:SUS304, hairline (parallel) 30 20 Max error: approx.7µm 10 No Variation for Moving Workpieces 0 -10 -20 -30 -40 Rest state Moving condition workpiece * Linearity: The maximum error that occurs for measurements within the measurement range. A linearity of ±0.05% F.S. means that when the LD50L is used for a measurement range of 40 to 50 mm, the maximum error within the measurement range will be 10 µm. Active smart tuning Continuous configuration improvement for the stable detection of all locations by pushing the button for five seconds 1 ZX2 Ordering Information Units Sensor Heads [Dimensions➜ page 11] Appearance Sensing method Beam shape Sensing distance Line beam Diffuse reflection type Spot beam Diffusereflective Regularreflective Amplifier Units 50±10 mm 40 100±35 mm Spot beam 65 135 48±5mm 43 Model ZX2-LD50L 0.5M 1.5 μm 60 Line beam Spot beam Resolution ZX2-LD50 0.5M ZX2-LD100L 0.5M 5 μm ZX2-LD100 0.5M 1.5 μm 53 ZX2-LD50V 0.5M [Dimensions ➜ page 11] Appearance Power supply Output type Model NPN ZX2-LDA11 2M PNP ZX2-LDA41 2M DC Accessories (sold separately) Calculating Unit These are not included with the Sensor Head or Amplifier Unit. Please order as necessary. [Dimensions ➜ page 12] Appearance Model Communications Interface Unit Appearance ZX2-CAL Sensor Head Extension Cables [Dimensions ➜ page 12] Type Model RS-232C ZX2-SF11 [Dimensions ➜ page 12] Cable Length Model 1m ZX2-XC1R 4m ZX2-XC4R 9m ZX2-XC9R 20 m ZX2-XC20R Note: Extension cables cannot be coupled and used together. Mounting Brackets [Dimensions ➜ page 13] Applicable Sensor Head Appearance ZX2-LD50V ZX2-LD50L ZX2-LD50 Model Remarks E39-L178 Mounting Brackets (1) Nut Plate (1) Phillips screws (M30 ✕ 30) (2) ZX2-LD100L ZX2-LD100 E39-L179 2 ZX2 Sensor Head Sensor Heads for Various Applications-select the Range and Type of Beam New Regular-reflective Sensor Head Designed for Optimal Wafer Measurement ZX2-LD50L ZX2-LD50 Line beam type • • Resolution • Linearity 50mm ±10mm 1.5µm Line beam ±0.05%F.S.*1 Spot beam ±0.10%F.S.*1 • Beam size Line beam Measurement range ZX2-LD50V Spot beam type Spot beam • • Resolution • Linearity • Beam size Measurement range Spot beam type (regular-reflective) 48mm ±5mm 1.5µm Spot beam ±0.3%F.S. Spot beam Approx.60µm dia. Approx.60µm×2.6mm Approx.60µm dia. ZX2-LD100L ZX2-LD100 Line beam type Spot beam type • Measurement range • Resolution • Linearity 100mm ±35mm 5µm Line beam ±0.05%F.S.*2 Spot beam ±0.10%F.S.*2 • Beam size Line beam Spot beam Spot beam Regular-reflective Precise measurement on micro-scale objects Stable wafer measurement Approx.110µm×2.7mm Approx.110µm dia. Line beam Stable measurement on rough-surfaced objects *1 Using 40 to 50mm *2 Using 65 to 100mm Reliable measurements in harsh environments IP67, robot cable & temperature characteristic 0.02% F.S./°C IP67 protection class enables to use the sensor in harsh environments. A robot cable is used as standard between the head and amplifier, that the unit can be used reliably on moving parts. In addition, as 3D UV bond is used to fix the optical components rather than screws, stress can be controlled and a temperature characteristic 0.02% F.S./°C* is realized. * If the room temperature varies 1°C, the measured value varies 0.02% F.S. (corresponding to 4µm for the Model ZX2-LD50) Compact sensor for easy mounting World smallest* The world’s smallest CMOS laser displacement sensor head is realized in a resin case. Enables to mount the sensor in smallest spaces and to minimize measurement errors arising from temperature fluctuations. * According to OMRON investigation of CMOS laser displacement sensors performed in September 2010. 35.5mm Cable can be fed through from the back 22.6mm 47. mm 47.5mm 3 ZX2 Amplifier and Calculating Unit Ease of Use by “LED Display” and “Calculating Unit” Easy calculations of measurements 11-segment LED display for intuitive configuration Determination output indicators High (orange)/Pass (green)/ Low (orange), two color display Intuitive operation through cross buttons 11 Segment LED Display No need for a manual 11 Segment LED Display An 11 segment LED display is integrated in the compact housing. Alphanumeric characters can be read with ease and there is no need to refer to a manual. Comparison of the existing 7 segment LED display and the 11 segment LED display The 7 segment display on existing models The 11 segment display on model ZX2 30mm 30mm 38mm 31mm 64mm 72mm The compact housing stays just as it is Perform two calculations with ease Thickness + subtraction mode The calculated results of two sensor heads are displayed on the amplifier unit by just connecting the calculating unit between the two amplifier units. The calculation function can be chosen from the two modes of thickness and subtraction. It is also possible to prevent mutual interference by coupling via the calculating units. (Up to five amplifier units can be connected.) Thickness mode Sensor 1 Subtraction mode A Sensor 1 0 criterion Sensor 2 0 criterion K T S A B Sensor 2 B Thickness T=K+(A+B) Level difference S=B - A Easy change of setup Equipped with 4 banks Existing models The amplifier unit is equipped with four bank functions. Easy change of setup between four modes is supported by just switching between the bank functions. ZX2 B BANAKNK 3 2 BANK 1 0 Amplifier unit + Bank unit Built into the unit 4 ZX2 Specifications Diffuse-reflective Sensor Heads Item Optical system Model ZX2-LD50L ZX2-LD50 ZX2-LD100L ZX2-LD100 Diffuse reflective Visible-light semiconductor laser with a wavelength of 660 nm and an output of 1mW max. Light source (wave length) EN class 2, FDA class 2 *5 Measurement center point 50 mm 100 mm Measurement range ±10 mm ±35 mm Beam shape Line Spot Line Spot Beam size *1 Approx. 60 μm × 2.6 mm Approx. 60 μm dia. Approx.110 μm × 2.7 mm Approx. 110 μm dia. Resolution *2 1.5 μm 5 μm Linearity *3 ±0.05% F.S. (40 to 50 mm) ±0.1% F.S. (40 to 50 mm) ±0.05% F.S. (65 to 100 mm) ±0.1% F.S. (65 to 100 mm) Temperature characteristic *4 0.02% F.S. /°C Ambient illumination Incandescent lamp: 10,000 lx max. (on light receiving side) Ambient temperature Operating: 0 to 50 °C, Storage: −15 to 70 °C (with no icing or condensation) Ambient humidity Operating and storage: 35% to 85% (with no condensation) Dielectric strength 1,000 VAC, 50/60 Hz for 1 min. Vibration resistance (destruction) 10 to 150 Hz, 0.7-mm double amplitude, 80 min. each in X, Y, and Z directions Shock resistance (destruction) 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward) Degree of protection IEC60529, IP67 Connection method Connector connection (standard cable length: 500 mm) Weight (packed state) Approx. 160 g (main unit only: Approx. 75 g) Materials Case and cover: PBT (polybutylene terephtahalate), Optical window: Glass, Internal thread: Brass, Cable: PVC Accessories Instruction sheet, Ferrite core ×1 (made by TDK Corp. ZCAT1730-0730A), Laser warning label (English), FDA Regular-reflective Sensor Head Item Model Optical system Light source (wave length) Measurement center point Measurement range Beam shape Beam size *1 Resolution *2 Linearity *3 Temperature characteristic *4 Ambient illumination Ambient temperature Ambient humidity Dielectric strength Vibration resistance (destruction) Shock resistance (destruction) Degree of protection Connection method Weight (packed state) Materials Accessories ZX2-LD50V Regular reflective Visible-light semiconductor laser with a wavelength of 660 nm and an output of 0.24 mW max. EN class 1, FDA class 1 *5 48mm ±5mm Spot Approx. 60 μm dia. 1.5 μm ±0.3%F.S. (entire range) 0.06%F.S./°C Incandescent lamp: 10,000lx max. (on light receiving side) Operating: 0 to 50 °C, Storage: -15 to 70 °C (with no icing or condensation) Operating and storage: 35% to 85% (with no condensation) 1,000 VAC, 50/60 Hz for 1 minute 10 to 150 Hz, 0.7-mm double amplitude, 80 minutes, each in X,Y,and Z directions 300 m/s2 3 times each in six directions (up/down,left/right,forward/backward) IEC 60529, IP67 Connector connection (standard cable length: 500 mm) Approx.160g (Sensor Head only: Approx.75g) Case and cover: PBT (polybutylene terephtahalate), Optical window: Glass, Internal thread: Brass, Cable: PVC Instruction sheet, Ferrite core ×1 (made by TDK Corp. ZCAT1730-0730A), Laser warning label (English), FDA Note: False detection outside the measurement range can occur in the case of an object with high reflectance. *1. Beam size: Defined as 1/e2 (13.5 %) of the center optical intensity at the minimum value of the measurement range (effective value). False detections can occur in the case there is light leakage outside the defined region and the surroundings of the target object have a high reflectance in comparison to the target object. Correct measurements may not be obtained if the workpiece is smaller than the beam size. *2. Resolution: indicates the degree of fluctuation (±3σ) of analog output when connected to the ZX2-LDA. (The measured value is given for the center distance for OMRON’s standard target object (diffuse-reflective models: white ceramic object, regular-reflective models:1/4 λ flat mirror) when the response time of the ZX2-LDA is set to 128 ms.) Indicates the repetition accuracy for when the workpiece is in a state of rest. Not an indication of distance accuracy. Resolution performance may not be satisfied in a strong electromagnetic field. *3. Linearity: indicates the error with respect to the ideal straight line of the displacement output in the case of measuring Omron’ s standard target object. Linearity and measured value may vary depending on target object. F.S. indicates the full scope of the measurement range. (ZX2-LD50(L): 20 mm) *4. Temperature characteristic: Value for the case the space between the sensor head and Omron’ s standard target object is secured by an aluminum jig. (Measured at the measurement center distance) *5. These Sensors are classified as Class 2 laser devices for diffuse-reflective models and Class 1 for regular-reflective models under EN 608251 and the regulations of Laser Notice No. 50 for FDA certification. CDRH registration has been completed. 5 ZX2 Amplifier Units Item Measurement period *1 Model Response time Analog output *2 Judgement outputs (HIGH/PASS/LOW: 3 outputs), error output Laser OFF input, zero reset input, timing input, reset input, bank input Functions Indications Power supply voltage Power consumption Ambient temperature Ambient humidity Dielectric strength Vibration resistance (destruction) Shock resistance (destruction) Degree of protection Connection method Weight (packed state) Materials Accessories ZX2-LDA11 ZX2-LDA41 Min. 30 μs 60 μs, 120 μs, 240 μs, 500 μs, 1 ms, 2 ms, 4 ms, 8 ms, 12 ms, 20 ms, 36 ms, 66 ms, 128 ms, 250 ms, 500ms 4 to 20 mA, Max. load resistance: 300Ω/±5 VDC or 1 to 5 VDC, Output impedance: 100Ω NPN open-collector outputs, 30 VDC, 50 mA max. PNP open-collector outputs, 30 VDC, 50 mA max. (residual voltage: 1 V max. for load current 10 mA (residual voltage: 1 V max. for load current 10 mA max., 2V max. for load current above 10 mA) max., 2 V max. for load current above 10 mA) ON: Supply voltage short-circuited or supply voltage ON: Short-circuited with 0-V terminal or 1.2 V or less within -1.2 V OFF: Open (leakage current: 0.1 mA max.) OFF: Open (leakage current: 0.1 mA max.) Smart tuning, scaling, sample hold, peak hold, bottom hold, peak-to-peak hold, self-peak hold, self-bottom hold, average hold, zero reset, On-delay timer, OFF-delay timer, keep/clamp switch, (A-B) calculations *3, thickness calculation *3, mutual interference prevention *3, laser deterioration detection, bank function (4 banks), differential function Judgement indicators: HIGH (orange), PASS (green), LOW (orange), 11-segment main display (red), 11-segment sub-display (orange), laser ON (green), zero reset (green), enable (green), menu (green), HIGH threshold (orange), LOW threshold (orange) 10 to 30 VDC, including 10% ripple (p-p) 3,000 mW max. (at 24 VDC: 125 mA max., at 12 VDC: 250 mA max.) Operating: 0 to 50 °C, Storage: −15 to 70 °C (with no icing or condensation) Operating and storage: 35% to 85% (with no condensation) 1,000 VAC, 50/60 Hz for 1 min. 10 to 150 Hz, 0.7-mm double amplitude, 80 min. each in X, Y, and Z directions 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward) IEC60529, IP40 Prewired (standard cable length: 2 m) Approx. 200 g (main unit only: Approx. 135 g) Case: PBT (polybutylene terephtahalate), Cover: Polycarbonate, Display: Methacrylic resin, Button: Polyacetal, Cable: PVC Instruction sheet *1. In the case of Omron’s standard target object (white ceramic) *2. Select current output (4 to 20 mA) and voltage output (±5V or 1 to 5V) by MENU mode. *3. Calculating unit (ZX2-CAL) is necessary. Calculations are possible for up to two amplifier units. Mutual interference prevention is possible for up to five amplifier units. Calculating Unit Item Model ZX2-CAL Applicable Amplifier Units ZX2-LDA11, ZX2-LDA41 12 mA max. (supplied from the Smart Current consumption Sensor Amplifier Unit) Operating: 0 to +50°C, storage: -15 to Ambient temperature +70°C (with no icing or condensation) Operating and storage: 35% to 85% Ambient humidity (with no condensation) Connection method Connector Dielectric strength 1,000 VAC, 50/60 Hz for 1 minute Vibration resistance 10 to 150 Hz, 0.7-mm double amplitude, (destruction) 80 minutes, each in X,Y,and Z directions Shock resistance 300 m/s2 3 times each in six directions (destruction) (up/down, left/right, forward/backward) Materials Case: ABS, Display: Methacrylic resin Approx. 50g Weight (packed state) (Calculating Unit only: Approx. 15g) Accessories Instruction sheet ZX2-series Communications Interface Unit Item Model Power supply voltage Power consumption Applicable Amplifier Units Applicable Amplifier Unit versions Max. No. of Amplifier Units Port Communications method Synchronization method Transmission code Commu- Baud rate nications functions Data bit length Parity check Stop bit length Receiving Data delimiter Sending Indicators Protective circuits Ambient temperature Ambient humidity Insulation resistance Dielectric strength Materials Accessories ZX2-SF11 10 to 30 V DC ±10% (including 10% ripple (p-p)) (Supplied from Sensor Amplifier.) 720 mW max. (at 24 V: 30 mA max., at 12 V: 60 mA max.) (Not including Sensor Amplifier current consumption or output current ZX2-LDA@@ (Production after November 2013) Sensor Amplifier Unit version: V1.330 or higher (The Sensor Amplifier version is shown on the sub-digital display when the power of the Sensor Amplifier is turned ON.) 5 RS-232C (9-pin, D-Sub connector) Full duplex Start/stop synchronization ASCII 38,400 (at shipping)/9,600 bps switchable 8 bits None 1 bit CR or CR + LF is automatically recognized. CR + LF fixed Power supply: green, Sensor communications: green, Sensor communications error: red, External terminal communications: green, External terminal communications error: red Power supply reverse polarity protection Operating: 0 to 50°C, storage: -15 to 60°C (with no icing or condensation) Operating and storage: 35% to 85% (with no condensation) 20 MΩ min. (at 500 VDC) 1,000 VAC, 50/60 Hz for 1 min, Leakage current: 10 mA max. Case: PBT (polybutylene terephthalate), Cover: Polycarbonate Instruction sheet, 2 clamps 6 ZX2 Engineering Data (Reference Value) Angle Characteristic ZX2-LD50 Side-to-side Inclination Front-to-back Inclination Error (%F.S.) Error (%F.S.) The angle characteristic is a plot of the inclination of the sensing object in the measurement range and the maximum value of the error to analog output. Note: SUS304 = Stainless steel SUS304 1.0 White ceramic SUS304, mirror finish Black rubber 0.8 0.6 0.4 + Inclination - Inclination + Inclination 0.4 - Inclination 0 −0.2 −0.2 −0.4 −0.4 −0.6 −0.6 −0.8 −0.8 1.0 White ceramic SUS304, mirror finish Black rubber 0.8 0.6 + Inclination 0.4 - Inclination −1.0 −50 −40 −30 −20 −10 10 20 30 40 50 Angle of Inclination (°) 0 10 20 30 40 50 Angle of Inclination (°) Front-to-back Inclination Error (%F.S.) 0 ZX2-LD50L Side-to-side Inclination Error (%F.S.) 0.6 0 −1.0 −50 −40 −30 −20 −10 0.2 1.0 White ceramic SUS304, mirror finish Black rubber 0.8 0.6 + Inclination 0.4 - Inclination 0.2 0 0 −0.2 −0.2 −0.4 −0.4 −0.6 −0.6 −0.8 −0.8 0 ZX2-LD100 Side-to-side Inclination 1.0 White ceramic SUS304, mirror finish Black rubber 0.8 0.6 + Inclination 0.4 - Inclination −1.0 −50 −40 −30 −20 −10 10 20 30 40 50 Angle of Inclination (°) 0 10 20 30 40 50 Angle of Inclination (°) Front-to-back Inclination Error (%F.S.) −1.0 −50 −40 −30 −20 −10 Error (%F.S.) White ceramic SUS304, mirror finish Black rubber 0.8 0.2 0.2 0.2 1.0 White ceramic SUS304, mirror finish Black rubber 0.8 0.6 + Inclination 0.4 - Inclination 0.2 0 0 −0.2 −0.2 −0.4 −0.4 −0.6 −0.6 −0.8 −0.8 0 ZX2-LD100L Side-to-side Inclination 1.0 White ceramic SUS304, mirror finish Black rubber 0.8 0.6 + Inclination 0.4 - Inclination −1.0 −50 −40 −30 −20 −10 10 20 30 40 50 Angle of Inclination (°) 10 20 30 40 50 Angle of Inclination (°) 1.0 White ceramic SUS304, mirror finish Black rubber 0.8 0.6 + Inclination 0.4 - Inclination 0.2 0.2 0 0 −0.2 −0.2 −0.4 −0.4 −0.6 −0.6 −0.8 −0.8 −1.0 −50 −40 −30 −20 −10 0 Front-to-back Inclination Error (%F.S.) −1.0 −50 −40 −30 −20 −10 Error (%F.S.) 1.0 0 10 20 30 40 50 Angle of Inclination (°) −1.0 −50 −40 −30 −20 −10 0 10 20 30 40 50 Angle of Inclination (°) 7 ZX2 Linearity Characteristic for Different Materials White ceramic SUS304, mirror finish Black rubber 0.8 0.6 0.4 0.6 0.2 1.0 0.6 0.4 +50° Inclination −50° Inclination 0.2 0 0 0 −0.2 −0.2 −0.4 −0.4 −0.4 −0.6 −0.6 −0.6 −0.8 −0.8 −0.8 −1.0 −10 −1.0 −10 White ceramic SUS304, mirror finish Black rubber 0.8 0.6 −1.0 −10 −6 −4 −2 0 2 4 6 8 10 FAR side NEAR side Measurement center distance Displacement (mm) −50° Inclination Front-to-back 1.0 0.4 −8 White ceramic SUS304, mirror finish Black rubber 0.8 0.6 0.4 0° Inclination 0.2 0.2 0.6 0.4 +50° Inclination −50° Inclination 0.2 0 0 −0.2 −0.2 −0.4 −0.4 −0.4 −0.6 −0.6 −0.6 −0.8 −0.8 −0.8 −1.0 −10 −1.0 −10 −2 0 2 4 6 8 10 −8 FAR side NEAR side Measurement center distance Displacement (mm) ZX2-LD100 0° Inclination −4 −2 0 2 4 6 8 0.8 0.6 White ceramic SUS304, mirror finish Black rubber 0.6 0.2 −0.4 −0.4 −0.4 −0.6 −0.6 −0.6 −0.8 −0.8 −1.0 −35 35 0.6 0.4 −5 0 5 15 25 White ceramic SUS304, mirror finish Black rubber 0.8 0.6 0.6 +50° Inclination 0 −0.4 −0.4 −0.4 −0.6 −0.6 −0.6 −0.8 −0.8 −0.8 −1.0 −35 −1.0 −35 25 35 35 0.2 −0.2 15 25 0.4 −50° Inclination 0 5 15 White ceramic SUS304, mirror finish Black rubber 0.8 −0.2 −5 0 5 1.0 0 −15 −5 0 +50° Inclination 1.0 −0.2 FAR side NEAR side Measurement center distance Displacement (mm) −15 FAR side NEAR side Measurement center distance Displacement (mm) −50° Inclination Front-to-back 0.2 −25 −25 FAR side NEAR side Measurement center distance Displacement (mm) 0.4 0° Inclination 0.2 −1.0 −35 35 Error (%F.S.) White ceramic SUS304, mirror finish Black rubber 0.8 −15 Error (%F.S.) Error (%F.S.) 1.0 10 −0.8 −25 FAR side NEAR side Measurement center distance Displacement (mm) ZX2-LD100L 0° Inclination 8 +50° Inclination 0 25 6 0.2 −0.2 15 4 0.4 −50° Inclination 0 5 2 White ceramic SUS304, mirror finish Black rubber 0.6 −0.2 −5 0 0 0.8 0 −15 −2 1.0 −0.2 −25 −4 +50° Inclination 1.0 0.8 −6 FAR side NEAR side Measurement center distance Displacement (mm) 0.4 0° Inclination 0.2 −1.0 −35 −8 FAR side NEAR side Measurement center distance Displacement (mm) Error (%F.S.) White ceramic SUS304, mirror finish Black rubber −1.0 −10 10 −50° Inclination Front-to-back 1.0 0.4 −6 Error (%F.S.) −4 White ceramic SUS304, mirror finish Black rubber 0.8 0 −6 −6 −4 −2 0 2 4 6 8 10 FAR side NEAR side Measurement center distance Displacement (mm) 1.0 −0.2 −8 −8 +50° Inclination 1.0 Error (%F.S.) −6 −4 −2 0 2 4 6 8 10 FAR side NEAR side Measurement center distance Displacement (mm) Error (%F.S.) −8 White ceramic SUS304, mirror finish Black rubber 0.8 −0.2 ZX2-LD50L 0° Inclination Error (%F.S.) White ceramic SUS304, mirror finish Black rubber 0.8 0.4 0° Inclination 0.2 Error (%F.S.) +50° Inclination 1.0 Error (%F.S.) −50° Inclination Front-to-back 1.0 Error (%F.S.) Error (%F.S.) ZX2-LD50 0° Inclination −25 −15 −5 0 5 15 25 35 FAR side NEAR side Measurement center distance Displacement (mm) −1.0 −35 −25 −15 −5 0 5 15 25 35 FAR side NEAR side Measurement center distance Displacement (mm) Note: The x-axis displacement indicates the measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and −, respectively. 8 ZX2 ZX2-LD50V Side-to-side Inclination for Flat Mirror Front-to-back Inclination for Flat Mirror Side-to-side Inclination for Silicon Wafer Error (%F.S.) Error (%F.S.) Error (%F.S.) Angle Characteristic 3.0 -1.0° -0.5° 0° 2.5 2.0 0.5° 1.0° + Inclination 1.5 - Inclination 1.0 3.0 10.5° 2.0 0.5° 1.0° + Inclination - Inclination 1.5 1.0 0.5 -1.0° -0.5° 0° 2.5 3.0 2.0 0.5 0 0 0 -0.5 -0.5 -1.0 -1.0 -1.0 -1.5 -1.5 -1.5 -2.0 -2.0 -2.0 -2.5 -2.5 -3 -2 -1 0 1 2 3 4 -3.0 -5 5 - Inclination 1.0 0.5 -4 0.5° 1.0° + Inclination 1.5 -0.5 -3.0 -5 -1.0° -0.5° 0° 2.5 -2.5 -4 -2 -1 0 1 2 3 4 -3.0 -5 5 -4 -3 -2 -1 0 1 2 3 4 5 FAR side NEAR side Measurement center distance Displacement (mm) Front-to-back Inclination for Glass 3.0 -1.0° -0.5° 0° 2.5 10.5° 2.0 0.5° 1.0° + Inclination - Inclination 1.5 1.0 Error (%F.S.) Front-to-back Inclination for Silicon Wafer Side-to-side Inclination for Glass Error (%F.S.) FAR side NEAR side Measurement center distance Displacement (mm) Error (%F.S.) FAR side NEAR side Measurement center distance Displacement (mm) -3 3.0 -1.0° -0.5° 0° 2.5 2.0 0.5° 1.0° + Inclination 1.5 - Inclination 1.0 3.0 1.0 0.5 0 0 -0.5 -0.5 -0.5 -1.0 -1.0 -1.0 -1.5 -1.5 -1.5 -2.0 -2.0 -2.0 -2.5 -2.5 -3 -2 -1 0 1 2 3 4 5 FAR side NEAR side Measurement center distance Displacement (mm) -3.0 -5 0.5° 1.0° + Inclination - Inclination 1.5 0 -4 10.5° 2.0 0.5 -3.0 -5 -1.0° -0.5° 0° 2.5 0.5 -2.5 -4 -3 -2 -1 0 1 2 3 4 5 FAR side NEAR side Measurement center distance Displacement (mm) -3.0 -5 -4 -3 -2 -1 0 1 2 3 4 5 FAR side NEAR side Measurement center distance Displacement (mm) Linearity Characteristic for Different Materials Error (%F.S.) ZX2-LD50V 0° Inclination 1.0 Flat Mirror Silicon Wafer Glass 0.8 0.6 0.4 10.5° 0° Inclination 0.2 0 -0.2 -0.4 -0.6 -0.8 -1.0 -5 -4 -3 -2 -1 0 1 2 3 4 5 FAR side NEAR side Measurement center distance Displacement (mm) Note: The x-axis displacement indicates the measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and −, respectively. 9 ZX2 Beam Size Spot Beams Line Beams L L Beam cross-section Beam cross-section Y Y X X ZX2-LD50 ZX2-LD50L L* +10 mm 0 mm −4 mm −10 mm L* +10 mm 0 mm −4 mm −10 mm X Approx. 600 μm Approx. 160 μm Approx. 40 μm Approx. 220 μm X Approx. 2.6 mm Approx. 2.6 mm Approx. 2.6 mm Approx. 2.6 mm Y Approx. 350 μm Approx. 90 μm Approx. 60 μm Approx. 130 μm Y Approx. 350 μm Approx. 90 μm Approx. 60 μm Approx. 130 μm ZX2-LD100 ZX2-LD100L L* +35 mm 0 mm −20 mm −35 mm L* +35 mm 0 mm −20 mm −35 mm X Approx. 1.1 mm Approx. 400 μm Approx. 70 μm Approx. 250 μm X Approx. 2.1 mm Approx. 2.5 mm Approx. 2.7 mm Approx. 2.9 mm Y Approx. 550 μm Approx. 190 μm Approx. 110 μm Approx. 150 μm Y Approx. 550 μm Approx. 190 μm Approx. 110 μm Approx. 150 μm * Measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and −, respectively. I/O Circuit Diagrams NPN Amplifier Unit (ZX2-LDA11) PNP Amplifier Unit (ZX2-LDA41) Brown: 10 to 30 VDC Brown: 10 to 30 VDC Load Load White: HIGH judgement output White: HIGH judgement output 10 to 30 VDC Load Load Green: PASS judgement output Green: PASS judgement output 10 to 30 VDC Gray: LOW judgement output Gray: LOW judgement output Yellow: Error output Load Load Yellow: Error output Load Load Blue: GND (0 V) Pink: LD-OFF input Orange: Zero reset input Purple: Timing input/BANK input 0 Red: Reset input/BANK input 1 Internal circuits Internal circuits Blue: GND (0 V) Pink: LD-OFF input Orange: Zero reset input Purple: Timing input/BANK input 0 Red: Reset input/BANK input 1 Current output 4 to 20 mA Current/voltage output switch Voltage output 100 Ω ±5 V 1 to 5 V Current output 4 to 20 mA Black: Analog output Load Current output: 300 Ω or lower Voltage output: 10 kΩ or higher Shield: Analog GND Current/voltage output switch 100 Ω Black: Analog output Voltage output ±5 V 1 to 5 V Load Current output: 300 Ω or lower Voltage output: 10 kΩ or higher Shield: Analog GND Wiring Amplifier Units ZX2-LDA11/ZX2-LDA41 Brown Blue White Green Gray Yellow Black Shield Pink Orange Purple Red 10 to 30 VDC GND (0V) HIGH judgement output PASS judgement output LOW judgement output Error output Analog output Analog GND LD-OFF input Zero reset input Timing input/BANK input 0 Reset input/BANK input 1 Note: 1. Use a separate stabilized power supply for the Amplifier Unit, particularly when high resolution is required. 2. Wire the Unit correctly. Incorrect wiring may result in damage to the Unit. (Do not allow wiring, particularly the Analog output, to come into contact with other wires.) 3. Use the 0-V ground (blue) for the power supply and use the Analog ground (shield) for Analog output. Each of these grounds must be used for the designed purpose. When not using the Analog output, connect the Analog ground (shield) to the 0-V ground (blue). 10 ZX2 Safety Precautions For details, refer to common precautions, warranty, limitation of liability, and other related information. WARNING Precautions for Correct Use and Other Details Refer to the “Smart Sensors Laser Displacement Sensors CMOS Type ZX2 Series User’s Manual” (Cat. No. Z310). This product is not designed or rated for ensuring safety of persons. Do not use it for such purposes. (Unit: mm) Dimensions Tolerance class IT16 applies to dimensions in thes data sheet unless otherwise specified. Units Sensor Heads Reference surface ZX2-LD50 ZX2-LD50L ZX2-LD100 ZX2-LD100L ZX2-LD50V (9.7) Emitter axis 22.6 9.7 L* Emitter axis 10.1 10.5 Mounting Dimensions Reference surface Two, 3.2-dia. (Mounting holes) 35.5 27.5 4 Reference surface 6 Range indicator 4.8 20.9 A* 4±0.05 35.3 16.7 39.5 43.5±0.05 47.5 Receiver axis Two, M3 Mounting reference surface 4 7 7 Mounting reference surface 4.8 Emitter center 15.1 Range indicator Laser warning light 28.43 4±0.05 31.5±0.05 12.6 dia. * In the case of ZX2-LD50 (L), L=50, A=21 ° In the case of ZX2-LD100 (L), L=100, A=11.5 ° 29.8 Vinyl insulated round cable, 4.7 dia., 4 conductors (Conductor cross-section: 0.086 mm2/Insulator diameter: 0.9 mm) Standard length: 0.5 m, Minimum bending radius: 30 mm Note: Attach the enclosed ferrite core (16.5 dia., length: 30 mm) to the cable within 100 mm from the Sensor Head. Amplifier Units ZX2-LDA11 ZX2-LDA41 11.7 *2 6.2 72 (when cover open, 84.6) 50 4.2 47.6 30 *1. Maximum height when cover open: 56 *2. Minimum length when connected: 50 18 9.6 34.2 10.9 16.9 6.1 20.7 38.4 *1 16.6 15.4 36.8 Vinyl insulated round cable,5.2 dia., 11 conductors (Conductor cross-section 0.09 mm2/Insulator diameter: 0.7 mm) Note: The analog output line (black) has double shielding and the diameter of the insulator is 2.3 mm. Standard length: 2 m, Minimum bending radius: 30 mm 11 ZX2 Accessories (sold separately) Sensor Head Extension Cables Calculating Unit ZX2-CAL ZX2-XC1R ZX2-XC4R ZX2-XC9R ZX2-XC20R 24.9 Coupled indicators Coupling connectors 15.1 57 44.05 12 8 12.6 dia. 28.9 L* 29.8 12 dia. 9.5 30 14.4 Amplifier Unit attachment connector (female, 6 poles) 15 3.4 5 Vinyl insulated round cable, 4.7 dia. (ZX2-XC20R: 5.1 dia.) Sensor Head attachment connector (male, 6 poles) * Length L is as follows. ZX2-XC1R: 1 m, ZX2-XC4R: 4 m, ZX2-XC9R: 9 m, ZX2-XC20R: 20 m Minimum bending radius: 30 mm Note: Attach the enclosed ferrite cores (16.5 dia., length: 30 mm) within 100 mm of each end of the extension cable. 36.7 ZX2-series Communications Interface Unit ZX2-SF11 Coupling connector Sensor communications indicator (communications operation) Sensor communications indicator (communications error) Power supply indicator External terminal communications indicator (communications operation) External terminal communications indicator (communications error) 4.2 3 30 64.3 4.2 (336) (46) 31.5 15 13.2 36.8 13 Vinyl -insulated round cable, 5.23 dia. Standard length 100 mm 29 2.2 11.7 4.3 (33.1) Connector 11.7 3 5 6.55 12 ZX2 Mounting Bracket Mounting Bracket E39-L178 E39-L179 Mounting Bracket (36.4) 31.4 2-R3 Nut plate 6 5 Mounting Bracket (36.6) 31.6 2-R3 2- M3 P=0.5 6 5 5 3.2 dia. 3.2 dia. 2- M3 P=0.5 .1 54.1 48.1 56 .1 R48 R48 54.1 48.1 58 3.5 3.5 23 24.5°(Regular-reflective Sensor mounting) 34.7°(Diffuse-reflective Sensor mounting) 8.8 23 29.2°(Regular-reflective Sensor mounting) 34.7°(Diffuse-reflective Sensor mounting) Material: Stainless steel (SUS304) Thickness: 2.0 mm 8.8 3.2 14 Material: Stainless steel (SUS304) Thickness: 2.0 mm 3.2 14 12 12 3.2 5.2 Nut plate 5 Material: Stainless steel (SUS304) Thickness: 3.0 mm Accessories: Phillips screws (M3×30): 2 Nut plate: 1 2-R3 16.8 9.6 (26.4) 16.8 3.2 5.2 2-R3 16.8 9.6 (26.4) 16.8 Material: Stainless steel (SUS304) Thickness: 3.0 mm Accessories: Phillips screws (M3×30): 2 Nut plate: 1 this Mounting Bracket when installing the ZX2-LD100 (L) as a normal * Use Diffuse-reflective or Regular-reflective Sensor Head. Installation Method for Regular-reflective Sensor Head Using a E39-L178 Mounting Bracket: *1 (32) 22.6 Phillips screws Installation Method for Regular-reflective Sensor Heads (Installing a Diffuse-reflective Sensor Head as a Regular-reflective Sensor Head) Using a E39-L179 Mounting Bracket: *1 Phillips screws (32) 22.6 Nut plate Nut plate Mounting Bracket 10.5° *2 5.75° *2 Note: When securing the Sensor Head in the Mounting Bracket, insert the screws into the side of the Sensor Head where the warning label is located and secure the Sensor Head into place. *1. The measurement distance reference position is the end of the Mounting Bracket. *2. For the Regulalr-reflective Sensor Heads, rotate the Sensor Head counterclockwise, secure it in place, and then perform any necessary fine adjustments. Mounting Bracket Note: When securing the Sensor Head in the Mounting Bracket, insert the screws into the side of the Sensor Head where the warning label is located and secure the Sensor Head into place. *1. The measurement distance reference position is the end of the Mounting Bracket. *2. For the IInstalling a Diffuse-reflective Sensor as a Regular-reflective Sensor, rotate the Sensor Head counterclockwise, secure it in place, and then perform any necessary fine adjustments. Not Using a Mounting Bracket: Tilt the Sensor Head towards the workpiece as shown below. 79.4±0.05 48 Measurement center distance (43.85) workpiece (19.85) 10.5° ±0.1° Adjust the installation so that the angle is 10.5° ±0.1°. * The mounting hole dimensions in parentheses (reference values) are for when the Sensor is installed at 10.5°. 13 ZX2 Installation Method for Diffuse-reflective Sensor Heads Using a E39-L178, E39-L179 Mounting Bracket: Not Using a Mounting Bracket: Mount the Sensor Head in relation to the workpiece as shown below. *1 Phillips screws (32) 22.6 L* Measurement center distance 31.5 ±0.05 Nut plate 39.5±0.05 Mounting Bracket workpiece measurement distance reference position is *1 The the Sensor’s sensing surface. 4.0 ±0.05 * ZX2-LD50 (L): 50 ZX2-LD100 (L): 100 Note: When securing the Sensor Head in the Mounting Bracket, insert the screws into the side of the Sensor Head where the warning label is located and secure the Sensor Head into place. 14 Terms and Conditions Agreement Read and understand this catalog. Please read and understand this catalog before purchasing the products. Please consult your OMRON representative if you have any questions or comments. Warranties. (a) Exclusive Warranty. Omron’s exclusive warranty is that the Products will be free from defects in materials and workmanship for a period of twelve months from the date of sale by Omron (or such other period expressed in writing by Omron). Omron disclaims all other warranties, express or implied. (b) Limitations. OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, ABOUT NON-INFRINGEMENT, MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OF THE PRODUCTS. BUYER ACKNOWLEDGES THAT IT ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. Omron further disclaims all warranties and responsibility of any type for claims or expenses based on infringement by the Products or otherwise of any intellectual property right. (c) Buyer Remedy. Omron’s sole obligation hereunder shall be, at Omron’s election, to (i) replace (in the form originally shipped with Buyer responsible for labor charges for removal or replacement thereof) the non-complying Product, (ii) repair the non-complying Product, or (iii) repay or credit Buyer an amount equal to the purchase price of the non-complying Product; provided that in no event shall Omron be responsible for warranty, repair, indemnity or any other claims or expenses regarding the Products unless Omron’s analysis confirms that the Products were properly handled, stored, installed and maintained and not subject to contamination, abuse, misuse or inappropriate modification. Return of any Products by Buyer must be approved in writing by Omron before shipment. Omron Companies shall not be liable for the suitability or unsuitability or the results from the use of Products in combination with any electrical or electronic components, circuits, system assemblies or any other materials or substances or environments. Any advice, recommendations or information given orally or in writing, are not to be construed as an amendment or addition to the above warranty. See http://www.omron.com/global/ or contact your Omron representative for published information. Limitation on Liability; Etc. OMRON COMPANIES SHALL NOT BE LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR PRODUCTION OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED IN CONTRACT, WARRANTY, NEGLIGENCE OR STRICT LIABILITY. Further, in no event shall liability of Omron Companies exceed the individual price of the Product on which liability is asserted. Suitability of Use. Omron Companies shall not be responsible for conformity with any standards, codes or regulations which apply to the combination of the Product in the Buyer’s application or use of the Product. At Buyer’s request, Omron will provide applicable third party certification documents identifying ratings and limitations of use which apply to the Product. This information by itself is not sufficient for a complete determination of the suitability of the Product in combination with the end product, machine, system, or other application or use. Buyer shall be solely responsible for determining appropriateness of the particular Product with respect to Buyer’s application, product or system. Buyer shall take application responsibility in all cases. NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY OR IN LARGE QUANTITIES WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT(S) IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM. Programmable Products. Omron Companies shall not be responsible for the user’s programming of a programmable Product, or any consequence thereof. Performance Data. Data presented in Omron Company websites, catalogs and other materials is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of Omron’s test conditions, and the user must correlate it to actual application requirements. Actual performance is subject to the Omron’s Warranty and Limitations of Liability. Change in Specifications. Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our practice to change part numbers when published ratings or features are changed, or when significant construction changes are made. However, some specifications of the Product may be changed without any notice. When in doubt, special part numbers may be assigned to fix or establish key specifications for your application. Please consult with your Omron’s representative at any time to confirm actual specifications of purchased Product. Errors and Omissions. Information presented by Omron Companies has been checked and is believed to be accurate; however, no responsibility is assumed for clerical, typographical or proofreading errors or omissions. 2015.4 In the interest of product improvement, specifications are subject to change without notice. OMRON Corporation Industrial Automation Company http://www.ia.omron.com/ (c)Copyright OMRON Corporation 2015 All Right Reserved.