2SMPP-03
MEMS Gauge Pressure Sensor
MEMS Gauge Pressure Senser
Featuring Small Size and Low
Power Consumption
• Superior electrical characteristics
at -50 kPa to 50 kPa pressure range.
Offset voltage of -2.5±4.0 mV
Span voltage of 42.0±5.5 mV
(At rated pressure 50 kPa, 100 µADC Current supply)
• Small package 6.1 × 4.7 × 8.2 mm (L × W × H).
• Good temperature dependency
at 0 to 85°C, at rated pressure 0 to 50 kPa
Temp. influence of span of ±3.0%FS
Temp. influence of offset of ±5.0%FS
(100 µADC Current supply)
• Rated power consumption of 0.2 mW
RoHS Compliant
Refer to the Safety Precautions on page 8.
Ordering Information
Standard Models with Surface mount package
Classification
Structure
Bottom Port Type
Packaging
SOP
MOQ (Minimum Order Quantity)
Plastic sleeve
2SMPP-03
Model
2SMPP-03
112 pcs/ 1 sleeve
Terminal Arrangement
➅ Icc
Connection Diagram
➀ Vout (+)
5
➁ Non Connected
➂ GND
6
➄ N-sub
+
➃ Vout (−)
R2
Constant
current
source
R1
1
Output
voltage
4
R3
−
R4
3
Note:
If necessary, add a variable resistor below the GND pin (3).
The NC pin (2) must be secured to the circuit board.
1
2SMPP-03
MEMS Gauge Pressure Sensor
Application Examples
• Medical equipment
• Home appliance
• Air movement control
• Level indicators
• Leak detection
• Pressure controller
Specifications
■ Ratings
Item
2SMPP-03
Type of pressure
Gauge pressure
Sensing method
Piezoresistance
Pressure medium
Air
Driving method
Constant current drive
Drive current
100 µADC
Pressure range
-50 to 50 kPa
Withstand pressure
-80 to 120 kPa
Absolute maximum current
200 µADC max.
Ambient operating temperature
-10 to 100°C (with no icing and condensation)
Ambient operating humidity
10 to 95%RH (with no icing and condensation)
Ambient storage temperature
-40 to 120°C (with no icing and condensation)
Ambient storage humidity
10 to 95%RH (with no icing and condensation)
Weight
0.17 g
2SMPP-03
Note: 1. The above values are initial values measured at ambient temperature condition of 23°C.
Note: 2. Please avoid caustic gases.
2
2SMPP-03
MEMS Gauge Pressure Sensor
Characteristics
■ Operating characteristics
Positive pressure (at rated pressure 0 to 50 kPa)
Item
Min.
Typ.
Max.
Unit
Supply current
-
100
-
µADC
Bridge resistance
18.0
20.0
22.0
kohm
Operating pressure range
0
-
50
kPa
Offset voltage
-6.5
-2.5
1.5
mV
Span voltage
36.5
42.0
47.5
mV
Non-linearity
0.3
0.8
1.3
%FS
%FS
Pressure hysteresis
-0.2
0.0
0.2
Temperature influence of span voltage at 0°C
-1.0
1.0
3.0
%FS
Temperature influence of span voltage at 50°C
-2.1
-0.1
1.9
%FS
Temperature influence of span voltage at 85°C
-2.0
1.0
4.0
%FS
Temperature influence of offset voltage at 0°C
-4.0
-1.0
2.0
%FS
Temperature influence of offset voltage at 50°C
-2.0
1.0
4.0
%FS
Temperature influence of offset voltage at 85°C
-3.0
2.0
7.0
%FS
Negative pressure (at rated pressure 0 to -50 kPa)
Min.
-
Typ.
100
Max.
Unit
-
µADC
Bridge resistance
18.0
20.0
22.0
kohm
Operating pressure range
-50
-
0
kPa
Offset voltage
-6.5
-2.5
1.5
mV
Span voltage
-48.5
-43.0
-37.5
mV
Non-linearity
-0.3
0.2
0.7
%FS
Pressure hysteresis
-0.2
0.0
0.2
%FS
Temperature influence of span voltage at 0°C
-1.2
0.8
2.8
%FS
Temperature influence of span voltage at 50°C
-1.9
0.1
2.1
%FS
Temperature influence of span voltage at 85°C
-1.8
1.2
4.2
%FS
Temperature influence of offset voltage at 0°C
-4.0
-1.0
2.0
%FS
Temperature influence of offset voltage at 50°C
-2.0
1.0
4.0
%FS
Temperature influence of offset voltage at 85°C
-3.0
2.0
7.0
%FS
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Note: 5.
Note: 6.
Note: 7.
The above values are initial values.
Ambient temperature condition: 23°C without Temperature property.
The above values are operated at 100 µADC
The above values are operated at 0 to 50 kPa, and 0 to -50 kPa.
Offset voltage is defined as the output voltage at 0 kPa rated pressure.
Positive span voltage is defined as the algebraic difference between the output voltage at 50 kPa rated pressure and the output voltage at 0 kPa rated pressure.
Negative span voltage is defined as the algebraic difference between the output voltage at -50 kPa rated pressure and the output voltage at 0 kPa rated pressure.
Note: 8. Hysteresis is defined as follows,
In case of positive pressure:
{The output voltage difference at 0 kPa before and after a pressure cycle (0 to 50 to 0 kPa)} / (span voltage) × 100 [%FS].
In case of negative pressure:
{The output voltage difference at 0 kPa before and after a pressure cycle (0 to -50 to 0 kPa)} / (span voltage) × 100 [%FS].
Note: 9. Temperature influence of span voltage is defined as follows,
{Span voltage at 0°C. - span voltage at 25°C. } / span voltage at 25°C. × 100 [%FS]
{Span voltage at 50°C. - span voltage at 25°C. } / span voltage at 25°C. × 100 [%FS]
{Span voltage at 85°C. - span voltage at 25°C. } / span voltage at 25°C. × 100 [%FS]
Note: 10.Temperature influence of offset voltage is defined as follows,
{Offset voltage at 0°C. - offset voltage at 25°C. } / span voltage at 25°C. × 100 [%FS]
{Offset voltage at 50°C. - offset voltage at 25°C. } / span voltage at 25°C. × 100 [%FS]
{Offset voltage at 85°C. - offset voltage at 25°C. } / span voltage at 25°C. × 100 [%FS]
Environment characteristics
Item
Vibration Resistance
Shock Resistance
Life Expectancy
2SMPP-03
Destruction
10 to 500 Hz 10 G
Malfunction
10 to 500 Hz 10 G
Destruction
15 G
Malfunction
15 G
100,000 Operations min. (0 to 75 kPa)
ESD
1,000 V (Human body model)
Package Material
PPS (Polyphenylenesulfide)
3
2SMPP-03
Item
Supply current
2SMPP-03
MEMS Gauge Pressure Sensor
Example of Application Circuit for MEMS Pressure Sensor
VDD
Constant current circuit unit
Amplifier circuit unit
+
−
Pressure
Sensor
+
−
−
+
Vout
−
+
(1) The pressure sensor is designed to convert a voltage by means of constant current drive.
(2) Please amplifier the output voltage of the pressure sensor by using the amplifying circuit if necessary.
Engineering Data (for Reference)
■ Output Characteristics
Rated Pressure vs. Output Voltage
40
30
Output voltage (mV)
2SMPP-03
20
10
0
–10
–20
–30
–40
–50
–50 –40 –30 –20 –10 0 10 20 30 40
Rated Pressure (kPa)
Note: 1.
Note: 2.
Note: 3.
Note: 4.
4
50
Ambient temperature condition: 23°C.
Drive current: 100 µA
These output voltage characteristics are measured with tester without a mounting board.
The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual equipment before use.
2SMPP-03
MEMS Gauge Pressure Sensor
Temperature influence of Offset voltage (at 0 kPa)
2
3
Temp. Influence of Offset Voltage (%FS)
Temp. Influence of Positive Span Voltage (%FS)
Temperature influence of Span voltage (at 0 to 50 kPa)
1.5
1
0.5
0
–0.5
–1
–10 0
10 20 30 40 50 60 70 80
2.5
2
1.5
1
0.5
0
–0.5
–1
–1.5
–2
–10 0
90
10 20 30 40 50 60 70 80
Temperature (˚C)
90
Temperature (˚C)
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Measured points are 0°C, 25°C, 50°C and 85°C at 0 to 50 kPa.
Drive current: 100 µA
These output voltage characteristics are measured with tester without a mounting board.
The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual equipment before use.
Pressure Cycle Range ( 0 to 75 kPa)
1
0.5
0
–0.5
–1
Note: 1.
Note: 2.
Note: 3.
Note: 4.
0
25,000
50,000
75,000
Pressure cycle
100,000
0.5
0
2SMPP-03
Span voltage range (%FS)
Offset voltage range (%FS)
1
–0.5
–1
0
25,000
50,000
75,000
Pressure cycle
100,000
Tested temperature condition: 25°C
Number of pressure cycle time: 1 × 105
Rated cycle pressure: 0 to 75 kPa
These output voltage characteristics are measured with tester without a mounting board.
5
2SMPP-03
MEMS Gauge Pressure Sensor
Dimensions
Note: All units are in millimeters unless otherwise indicated.
4.75
4.00
3
0.25±0.05
#1
3.80 dia.
0.62 dia.
6.15 5.40
9.85
A
3.20
4-R0.50
4
6
1.27
0.40
1.27 x 2 = 2.54
1.00
2.00
1.50
2.80
1.00
(1.10)
4.75
0.80
1.80 dia.
2.60 dia.
Pin Diagram
(Top Surface of Sensor)
2SMPP-03
Atmospheric pressure hole
1 Vout (+)
6 Icc
2 NC
5 N-sub
3 GND
6 Vout (-)
Markings
0.75
Recommended Pad Dimensions
5.45
0.10
11.05
8.75
4.00 dia.
1.125
P P 0 3
0.90
1.27
4.05
1.125
0.45
5 6 7 8
0.60
2.30
(0.90)
1.65
1.65
3.30
(1.075)
Lot No.
Note: Unless otherwise specified, the tolerance for all of the above drawings is ±0.3 mm.
6
2SMPP-03
MEMS Gauge Pressure Sensor
Packing and Shipping
Outer box
Plastic sleeve
Material: PS (Transparent)
Adhesive tape
Processing: Static electricity prevention processing
Full length: 550 mm
Board thickness: 0.6 mm
(Unit: mm)
10.6
6.6
4.6
0.3
Inner box
1.3
(1.4)
Plastic sleeve
(1)
9.4
2
7.2+0.2
–0.3
1.9
Max. 50 sleeves per box
2.5
3
2.5
Plastic sleeve
Stopper Insertion Elevational view
Plastic sleeve
Stopper
Stoppe
112 sensors per sleeve
Plastic Sleeve
• 50 plastic sleeves are packed up by Inner Box.
2SMPP-03
• Max. 5,600 pcs. products can be packed in a box.
7
2SMPP-03
MEMS Gauge Pressure Sensor
Safety Precautions
Precautions for Correct Use
Handling the Sensor
(1) Only air can be used as pressure media on the products
directly. It is prohibited to use pressure media including corrosive gases (e.g. organic solvents gases, sulfur dioxide and
(4) Keep in an appropriate temperature and humidity condition
specified as
Temperature : 5 to 30°C , Humidity : 40 to 60%.
(5) As the lead is plated with silver, there is a possibility of
hydrogen sulfide gases), fluid and any other foreign materi-
being tarnished depending on storage condition.
als.
Not guarantee the tarnishing after shipping. Be careful the
(2) The products are not water proof. Please keep dry in use.
(3) Don't use the products under dew-condensing conditions.
method of storage.
(6) Don't keep the products under humid or dusty condition.
Frozen fluid on sensor chips may also cause fluctuation of
sensor output and any other troubles.
(4) Don't put foreign materials (e.g. a wire and a pin) into a connecting tube. It may cause breakage of pressure sensor
chips or fluctuation of sensor output caused by clogging the
tube.
Mounting Method
• Use lands on the printed-circuit boards to which the sensor
can be securely fixed.
• Fix pin No.2 on the printed-circuit boards, not fixed causes
fluctuation of sensor output signals.
(5) Use the products within rated pressure. Usage at pressure
out of the range may cause breakage.
(6) Don't use under high-frequency vibration including ultrasonic wave.
(7) The products may be broken by static electricity. Charged
Soldering Method
• Due to its small size, the thermal capacity of the pressure sensor is low. Therefore, take steps to minimize the effects of
external heat.
materials (e.g. a workbench and a floor) and workers must
• Dip soldering bath: Max. 260°C, within 10 sec.
provide measures against static electricity, including ground
• Soldering iron: Max. 260°C, within 10 sec.
connection.
• Do not heat the case of sensor package, heat only terminal.
(8) Overpowering terminals may deform them and detract their
solder abilities. Don't drop and handle the products roughly.
(9) Don't use the products under humid or dusty condition.
• Use a non-corrosive resin type of flux. Since the pressure sensor chip is exposed to the atmosphere, do not allow flux to
enter inside.
(10) Terminals connection of pressure sensors must be handled
as directed by a connection diagram.
Cleaning
2SMPP-03
• Since the pressure sensor chip is exposed to atmosphere, do
Environmental Condition for Transportation and Storage
(1) It is prohibited to keep the products with corrosive gases
(e.g. organic solvents gases, sulfur dioxide and hydrogen
sulfide gases).
(2) The products are not water proof. Please keep dry during
storage.
not allow cleaning fluid to enter inside.
• Avoid ultrasonic cleaning since this may cause breaks or disconnections in the wiring.
• Do not wash the print circuit board after the pressure sensor is
mounted using detergent containing silicone. Otherwise, the
detergent may remain on the surface of the pressure sensor.
(3) An anti-static treatment has been applied to the sleeves.
Please note the following points.
1. Getting wet may remove an anti-static treatment and
eliminate its effect.
2. The sleeve may feel sticky under hot and humid condition
due to the nature of the anti-static treatment.
3. Anti-static has aging degradation. It is prohibited to keep
the sleeves for more than six months. The sleeves are
also non-reusable.
Coating
• Do not coat the pressure sensor when it is mounted to the
print circuit board.
• Application examples provided in this document are for reference only. In actual applications, confirm equipment functions and safety before using the product.
• Consult your OMRON representative before using the product under conditions which are not described in the manual or applying the product to nuclear control systems, railroad
systems, aviation systems, vehicles, combustion systems, medical equipment, amusement machines, safety equipment, and other systems or equipment that may have a serious
influence on lives and property if used improperly. Make sure that the ratings and performance characteristics of the product provide a margin of safety for the system or
equipment, and be sure to provide the system or equipment with double safety mechanisms.
Note: Do not use this document to operate the Unit.
OMRON Corporation
Electronic and Mechanical Components Company
8
Contact: www.omron.com/ecb
Cat. No. A227-E1-01
1214(1214)(O)