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MEMS Flow Sensor
High-accuracy Sensing with a Compact
Body for Flow Rates Up to 50 L/min.
• Accurately detects a mass flow rate of 10 to 50 L/min.
• A compact size of 30 × 78 × 30 mm (H × W × D).
RoHS Compliant
Refer to the Safety Precautions on page 3.
Ordering Information
Applicable fluid Flow rate range Minimum order
Air
D6F-50A5-000
6.0
6.0
0 to 20 L/min
1
5.0
5.0
0 to 50 L/min
D6F-CABLE1 (Optional) −
−
1
1
Connector
1: Vcc
2: Vout
3: GND
53398 (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
1: Vcc 2: Vout 3: GND
3.0
2.0
1.0
2.0
4.0
6.0
Flow rate (L/min)
8.0
10.0
40.0
50.0
4.0
3.0
2.0
1.0
0.0
0.0
4.0
8.0
12.0
Flow rate (L/min)
16.0
20.0
D6F-50A5-000
6.0
5.0
Output voltage (V)
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
4.0
0.0
0.0
Connections
Pin No.
D6F-20A5-000
1
4.0
3.0
2.0
1.0
0.0
0.0
10.0
20.0
30.0
Flow rate (L/min)
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D6F-20A5-000
D6F-10A5-000
0 to 10 L/min
Output voltage (V)
D6F-10A5-000
Output voltage (V)
Model
Output Voltage Characteristics
D6F-10A5-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
2.0
4.0
6.0
8.0
10.0
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
4.0
8.0
12.0
16.0
20.0
1.93
±0.12
2.87
±0.12
3.70
±0.12
4.41
±0.12
5.00
±0.12
10
20
30
40
50
4.20
±0.12
4.66
±0.12
5.00
±0.12
D6F-20A5-000
Flow rate
L/min (normal)
Enlarged View
Output voltage
V
0
1.00
±0.12
D6F-50A5-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
2.45
±0.12
3.51
±.12
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
1
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MEMS Flow Sensor
Characteristics/Performance
Model
D6F-10A5-000
Flow Range (See note 1.)
0 to 10 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
Manifold
D6F-20A5-000
0 to 20 L/min
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.3% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS/aluminum alloy
Degree of Protection
IEC IP40
Withstand Pressure
500 kPa
Pressure Drop (See note 3.)
0.8 kPa
Operating Temperature
−10 to 60°C (with no condensation or icing)
2.9 kPa
Operating Humidity
35% to 85% (with no condensation or icing)
Storage Temperature
−30 to 80°C (with no condensation or icing)
Storage Humidity
35% to 85% (with no condensation or icing)
Temperature Characteristics
±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
17.2 kPa
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
103 g
Note: 1. A 0 to 1 L/min. (normal) volumetric flow rate at 0°C, 101.3 kPa.
Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Note: 3. Reference (typical)
Dimensions (Unit: mm)
● MEMS Flow Sensors
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D6F-50A5-000
0 to 50 L/min
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
Mounting Hole
Dimensions
Lot number label
14±0.1
Four, 3.2-dia. through holes
Four, M3 holes
3.7
78±0.5
66±0.1
66±0.05
6
30.05
Two, 5 dia.
14±0.05
6
30±0.5
30±0.5
● Cable (Order Separately)
D6F-CABLE1
200±35
100±15
Brown wire
Black wire
1. Vcc
2. Vout
Blue wire
2
3. GND
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MEMS Flow Sensor
Safety Precautions
● Operating Environment
The D6F is built for use with general-purpose devices. In cases
such as those described below, where safety is required, implement measures to ensure the safety of the system and all
devices, such as fail-safe designs, redundancy designs, and regular maintenance.
• Safety devices for ensuring safety for persons
• Transportation equipment control (such as applications to stop
operation)
• Aviation and space equipment
• Nuclear power equipment
Do not use the D6F for applications in which D6F operation
would directly affect human life.
Caution
Make sure that the power to all equipment is turned OFF before
you install the Sensor. Installing the Sensor while the power supply is ON may result in electrical shock or abnormal operation.
Precautions for Correct Use
● Fluids, Pipes, and Sensor Installation
All Models
(1) Use clean fluids. Dust and mist can affect the characteristics
of the Sensor or damage the Sensor. Install a filter and mist
separator on the upstream pipe. (Not required for the [email protected], D6F-V, D6F-P or D6F-PH.)
(2) Do not use combustible gases (e.g., hydrogen), corrosive
gases (e.g., chlorine, sulfur, acidic, or alkali gas), or other
non-approved fluids. They may damage the Sensor.
(3) The performance specifications that are given for the G6F
do not apply if any fluids other than the specified applicable
fluid are used.
(4) Foreign matter in the pipes that are connected to the Sensor
may damage the Sensor. Prevent any foreign matter from
entering the pipes after the Sensor is removed from its packaging.
(5) Attach the pipes so that fluid flows only in the direction designated by the arrows on the Sensor. Correct measurements
cannot be obtained if the fluid flows in the wrong direction.
(6) We recommend that you install the pipes horizontally. If the
pipes are not installed horizontally, an error of ±1% FS or
higher may result. (This does not apply to the D6F-03A3.)
(7) Install the Sensor on a flat surface. Incorrect installation may
damage the Sensor and make it impossible to obtain correct
measurements.
(8) After the Sensor is installed, check to confirm that it operates
correctly.
(9) Do not drop the Sensor, remove the cover, or attempt to disassemble the Sensor in any way.
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(1) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N·m.
(2) Install O-rings to seal the fluid inlet and outlet points. The
recommended O-ring is JIS B 2401, nominal number P5.
Do not use the Sensor in the following locations:
• Locations directly subject to heat radiated from heating equipment
• Locations subject to water or oil
• Locations subject to direct sunlight
• Locations subject to intense temperature changes
• Locations subject to icing or condensation
• Locations subject to excessive vibration or shock
● Countermeasures against Noise
Noise may make it impossible to obtain correct measurements.
Consider the following countermeasures.
• Allow as much space as possible between the Sensor and
devices that generates high frequencies (such as high-frequency welders and high-frequency sewing machines) or
surges.
• Attach surge absorbers or noise filters to noise-generating
devices that are near the Sensor (in particular, equipment with
inductance, such as motors, transformers, solenoids, and
magnetic coils).
(It also helps to separate pipes and ducts, and to use shielded
cables.)
● Power Supply
• Do not directly solder power supply leads to the connector terminals. Use only the appropriate connectors.
• Wire with the correct terminal names and polarities. Incorrect
wiring will cause failure of internal components.
• When using a commercially available switching regulator,
ground the FG (frame ground) and G (ground) terminals.
RoHS Directive
The RoHS mark is displayed on the packing of products for
which the six substances banned by the RoHS Directive have
been abolished (both in processing and in the electronic components mounted to the PCBs).
*
RoHS marking may be terminated if it is later determined that parts that were
previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts.
● RoHS Compliance Criteria
The following standards are used to determine RoHS compliance for the six banned substances.
(Items to which the RoHS Directive is not applicable are not
given.)
• Lead: 1,000 ppm max.
• Hexavalent chromium: 1,000 ppm max.
• Mercury: 1,000 ppm max.
• PBB: 1,000 ppm max.
• Cadmium: 100 ppm max.
• PBDE: 1,000 ppm max.
Installation Example
Outlet
O-ring
Inlet
3
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WARNING
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MEMS Flow Sensor
• Application examples provided in this document are for reference only. In actual applications, confirm equipment functions and safety before using the product.
• Consult your OMRON representative before using the product under conditions which are not described in the manual or applying the product to nuclear control systems, railroad
systems, aviation systems, vehicles, combustion systems, medical equipment, amusement machines, safety equipment, and other systems or equipment that may have a serious
influence on lives and property if used improperly. Make sure that the ratings and performance characteristics of the product provide a margin of safety for the system or
equipment, and be sure to provide the system or equipment with double safety mechanisms.
Note: Do not use this document to operate the Unit.
OMRON Corporation
Electronic and Mechanical Components Company
4
Contact: www.omron.com/ecb
Cat. No. A219-E1-02
1014