PH10 TECHNOLOGY

PH10 TECHNOLOGY
The new UMS 0.1µm GaAs Very High Frequency pHEMT Process
UMS is now pleased to extend its foundry offer with the opening
of 0.1µm High Frequency GaAs pHEMT process.
PH10 process is optimised for low noise amplification up
to 110GHz with a typical Ft of 130GHz, a power density
above 250mW/mm at 2.5V and a typical noise figure of
2.3dB @ 70GHz. It includes two metal interconnect layers,
precision TaN resistors, high values TiWSi resistors, MIM
capacitors, air-bridges, via-holes and gold plated back side.
PH10 is available with BCB encapsulation.
PH10 offers a very wide range
of applications among them:
• E-Band point-to-point communication
• W-Band radar
• Fiber Optics
• Security sensors
• Space instrumentation
•…
Process main characteristics
Element
FET
Parameter
Resistor
Substrate
Condition
Idss (mA/mm)
280
Vds=2.0V, Gm_max
Gm_max (mS/mm)
725
Vds=2.0V, Gm_max
Vbds (V)
MIM Capacitor
Typical Value
6
Ids= Idss/100
Noise Figure (dB)
2.3
@ 70GHz
Density (pF/mm2)
330
@ 1MHz
30
Ohms/sq
TiWSI
TaN
1000
Ohms/sq
GaAs
120
Ohms/sq
Thickness
70
µm
Typical UMS product references are: • LNA 71-86GHz: CHA2080-98F
• MPA 71-76GHz: CHA3080-98F
• MPA 81-86GHz: CHA3090-98F
UMS 2012/2013 - Printed on PEFC paper - Smith Corporate : 01 69 59 11 30
www.ums-gaas.com
Contact us:
UMS SAS - North Europe,
Ph: +33 1 69 86 32 00
e-mail: [email protected]
UMS GmbH - Germany,
Ph: +49 731 505 30 80
e-mail: [email protected]
UMS USA, Inc. - America,
Ph: +1 978 905 3162
e-mail: [email protected]
UMS SAS - South Europe,
Ph: +39 0765 480 434
e-mail: [email protected]
UMS - Asia,
Ph: +86 21 6103 1703
e-mail: [email protected]
Worlwide distributor: Richardson RFPD, Inc. – www.richardsonrfpd.com