SEMI F-47 Test Compliance Test Report Standard: SEMI F47-0200 Specification for Semiconductor Processing Equipment Voltage Sag Immunity Test Procedure Standard: Semi F42 : Test method for Semiconductor Processing Equipment. Voltage Sag Immunity 1. Test Setup Sag Generator: Schaffner NSG1003: Dropout and Varation Simulator Tektronics: TDS1002 2. Test Units Units Name TCL24-105 TCL24-112 TCL24-124 TCL060-112 TCL060-124 TCL060-148 TCL120-112 TCL120-124 Nominal Voltage [VAC] 100-240 100-240 100-240 100-240 100-240 100-240 100-240 100-240 Output Voltage [V] 5 12 24 12 24 48 12 24 Output Current [A] 4 2 1 4 2.5 1.25 8 5 Date Prep. Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 1/20 3. Test Report 3.1 TCL24-105 Input Voltage V=208VAC Output: V=5VDC/4A Voltage Sag [V] 166.4 166.4 145.6 145.6 145.6 104 104 104 104 104 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage Percent of Nominal [V] DUT 50Hz [%]SEMI F47 [%] Result 5 0.0 80 PASS 5 0.0 80 PASS 5 0.0 70 PASS 5 0.0 70 PASS 5 0.0 70 PASS 5 0.0 50 PASS 5 0.0 50 PASS 5 0.0 50 PASS 5 0.0 50 PASS 5 0.0 50 PASS 5 0.0 0 PASS TCL24-105 [%] V=208V 100 90 80 70 60 50 SEMI F-47 40 DUT 50Hz 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 0.6 Date Prep. 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 2/20 TCL24-105 Input Voltage V=100VAC Output: V=5VDC/4A Voltage Sag [V] 80 80 70 70 70 50 50 50 50 50 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage Percent of Nominal [V] DUT 50Hz [%]SEMI F47 [%] Result 5 0.0 80 PASS 5 0.0 80 PASS 4.5 10 70 PASS 4.5 10 70 PASS 4.5 10 70 PASS 0.3 90 50 FAIL 0.3 90 50 FAIL 0.3 90 50 FAIL 0.3 90 50 FAIL 5 0 50 PASS 5 0 0 PASS TCL-24-105 [%] V=100V 100 90 80 70 60 SEMI-F47 50 40 DUT 50Hz 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Date Prep. 0.7 0.8 0.9 1 [s] Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 3/20 3.2 TCL24-112 Input Voltage V=208VAC Output: V=12VDC/2.0A Voltage Sag [V] 166.4 166.4 145.6 145.6 145.6 104 104 104 104 104 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Output Voltage [V] 12 12 12 12 12 12 12 12 12 12 12 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 TCL24-112 [%] Percent of Nominal DUT 50Hz [%]SEMI F47 [%] Result 0.0 80 PASS 0.0 80 PASS 0.0 70 PASS 0.0 70 PASS 0.0 70 PASS 0.0 50 PASS 0.0 50 PASS 0.0 50 PASS 0.0 50 PASS 0.0 50 PASS 0.0 0 PASS V=208V 100 90 80 70 60 50 SEMI F-47 40 DUT 50Hz 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 0.6 Date Prep. 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 4/20 TCL24-112 Input Voltage V=100VAC Output: V=12VDC/2.0A Voltage Sag [V] 80 80 70 70 70 50 50 50 50 50 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Output Voltage [V] 11.8 11.8 10.6 10.6 10.6 7.9 7.9 7.9 8 10.8 10.8 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 TCL-112 [%] Percent of Nominal DUT 50Hz [%] SEMI F47 [%] Result 1.7 80 PASS 1.7 80 PASS 11.7 70 PASS 11.7 70 PASS 11.7 70 PASS 34.2 50 PASS 34.2 50 PASS 34.5 50 PASS 33.3 50 PASS 10 50 PASS 10 0 PASS V=100V 100 90 80 70 60 SEMI-F47 50 40 DUT 50Hz 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Date Prep. 0.7 0.8 0.9 1 [s] Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 5/20 3.3 TCL24-124 Input Voltage V=208VAC Output: V=24VDC/1.0A Voltage Sag [V] 166.4 166.4 145.6 145.6 145.6 104 104 104 104 104 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage Percent of Nominal [V] DUT 50Hz [%]SEMI F47 [%] Result 24 0 80 PASS 24 0 80 PASS 24 0 70 PASS 24 0 70 PASS 24 0 70 PASS 24 0 50 PASS 24 0 50 PASS 24 0 50 PASS 24 0 50 PASS 24 0 50 PASS 24 0 0 PASS TCL24-124 [%] V=208V 100 90 80 70 60 SEMI F-47 50 DUT 50Hz 40 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 Date Prep. 0.6 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 6/20 TCL24-124 Input Voltage V=100VAC Output: V=24VDC/1.0A Voltage Sag [V] 80 80 70 70 70 50 50 50 50 50 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage Percent of Nominal [V] DUT 50Hz [%]SEMI F47 [%] Result 23.8 0.8 80 PASS 23.8 0.8 80 PASS 22 8.3 70 PASS 22 8.3 70 PASS 22 8.3 70 PASS 6.4 73.3 50 FAIL 6.4 73.3 50 FAIL 6.4 73.3 50 FAIL 9.2 61.7 50 FAIL 22 8.3 50 PASS 22 8.3 0 PASS TCL24-124 [%] V=100V 100 90 80 70 60 SEMI F-47 50 40 DUT 50Hz 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 0.6 Date Prep. 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 7/20 3.4 TCL060-112 Input Voltage V=208VAC Output: V=12VDC/4.0A Voltage Sag [V] 166.4 166.4 145.6 145.6 145.6 104 104 104 104 104 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage [V] 12 12 12 12 12 12 12 12 12 12 12 Percent of Nominal DUT 50Hz [%]SEMI F47 [%] Result 0 80 PASS 0 80 PASS 0 70 PASS 0 70 PASS 0 70 PASS 0 50 PASS 0 50 PASS 0 50 PASS 0 50 PASS 0 50 PASS 0 0 PASS TCL060-112 [%] V=208V 100 90 80 70 60 50 SEMI F-47 40 DUT 50Hz 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 0.6 Date Prep. 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 8/20 TCL060-112 Input Voltage V=100VAC Output: V=12VDC/4.0A Voltage Sag [V] 80 80 70 70 70 50 50 50 50 50 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage [V] 12 12 11.4 11.4 11.4 9.52 9.52 9.52 9.68 12 12 Percent of Nominal DUT 50Hz [%]SEMI F47 [%] Result 0 80 PASS 0 80 PASS 5 70 PASS 5 70 PASS 5 70 PASS 20.7 50 PASS 20.7 50 PASS 20.7 50 PASS 19.3 50 PASS 0 50 PASS 0 0 PASS TCL060-112 V=100V [%] 100 90 80 70 60 SEMI-F47 50 40 DUT 50Hz 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 Date Prep. 0.6 0.7 0.8 0.9 1 [s] Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 9/20 3.5 TCL060-124 Input Voltage V=208VAC Output: V=24VDC/2.5A Voltage Sag [V] 166.4 166.4 145.6 145.6 145.6 104 104 104 104 104 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Output Voltage [V] 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 TCL060-124 [%] Percent of Nominal DUT 50Hz [%]SEMI F47 [%] Result 0.0 80 PASS 0.0 80 PASS 0.0 70 PASS 0.0 70 PASS 0.0 70 PASS 0.0 50 PASS 0.0 50 PASS 0.0 50 PASS 0.0 50 PASS 0.0 50 PASS 0.0 0 PASS V=208V 100 90 80 70 60 50 SEMI F-47 40 DUT 50Hz 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 0.6 Date Prep. 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 10/20 TCL060-124 Input Voltage V=100VAC Output: V=24VDC/2.5A Voltage Sag [V] 80 80 70 70 70 50 50 50 50 50 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage [V] 21.8 21.8 20.9 20.9 20.9 18 18 18.2 18.3 21.4 21.4 Percent of Nominal DUT 50Hz [%]SEMI F47 [%] Result 9.2 80 PASS 9.2 80 PASS 12.9 70 PASS 12.9 70 PASS 12.9 70 PASS 25 50 PASS 25 50 PASS 24.2 50 PASS 23.8 50 PASS 10.8 50 PASS 10.8 0 PASS TCL060-124 [%] V=100V 100 90 80 70 60 SEMI F-47 50 40 DUT 50Hz 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 0.6 Date Prep. 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 11/20 3.6 TCL060-148 Input Voltage V=208VAC Output: V=48VDC/1.25A Voltage Sag [V] 166.4 166.4 145.6 145.6 145.6 104 104 104 104 104 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage [V] 48 48 48 48 48 48 48 48 48 48 48 Percent of Nominal DUT 50Hz [%]SEMI F47 [%] Result 0 80 PASS 0 80 PASS 0 70 PASS 0 70 PASS 0 70 PASS 0 50 PASS 0 50 PASS 0 50 PASS 0 50 PASS 0 50 PASS 0 0 PASS TCL060-148 [%] V=208V 100 90 80 70 60 50 SEMI F-47 40 DUT 50Hz 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 0.6 Date Prep. 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 12/20 TCL060-148 Input Voltage V=100VAC Output: V=48VDC/1.25A Voltage Sag [V] 80 80 70 70 70 50 50 50 50 50 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage [V] 45.4 45.4 42.9 42.9 42.9 35.8 35.8 35.8 37 44.3 44.3 Percent of Nominal DUT 50Hz [%]SEMI F47 [%] Result 5.4 80 PASS 5.4 80 PASS 10.6 70 PASS 10.6 70 PASS 10.6 70 PASS 25.4 50 PASS 25.4 50 PASS 25.4 50 PASS 22.9 50 PASS 7.7 50 PASS 7.7 0 PASS TCL060-148 [%] V=100V 100 90 80 70 60 SEMI F-47 50 DUT 50Hz 40 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 Date Prep. 0.6 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 13/20 3.7 TCL120-112 Input Voltage V=208VAC Output: V=12VDC/8.0A Voltage Sag [V] 166.4 166.4 145.6 145.6 145.6 104 104 104 104 104 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage [V] 12 12 12 12 12 12 12 12 12 12 12 TCL120-112 [%] Percent of Nominal DUT 50Hz [%]SEMI F47 [%] Result 0 80 PASS 0 80 PASS 0 70 PASS 0 70 PASS 0 70 PASS 0 50 PASS 0 50 PASS 0 50 PASS 0 50 PASS 0 50 PASS 0 0 PASS V=208V 100 90 80 70 60 50 SEMI F-47 40 DUT 50Hz 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 Date Prep. 0.5 0.6 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 14/20 TCL120-112 Input Voltage V=100VAC Output: V=12VDC/8.0A Voltage Sag [V] 80 80 70 70 70 50 50 50 50 50 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage [V] 12 12 11.8 11.8 11.8 10.3 10.3 10.3 10.6 12 12 Percent of Nominal DUT 50Hz [%]SEMI F47 [%] Result 0 80 PASS 0 80 PASS 1.7 70 PASS 1.7 70 PASS 1.7 70 PASS 14.2 50 PASS 14.2 50 PASS 14.2 50 PASS 11.7 50 PASS 0 50 PASS 0 0 PASS TCL120-112 V=100V [%] 100 90 80 70 60 SEMI-F47 50 40 DUT 50Hz 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 Date Prep. 0.6 0.7 0.8 0.9 1 [s] Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 15/20 3.8 TCL120-124 Input Voltage V=208VAC Output: V=24VDC/5.0A Voltage Sag [V] 166.4 166.4 145.6 145.6 145.6 104 104 104 104 104 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Output Voltage [V] 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 TCL060-124 [%] Percent of Nominal DUT 50Hz [%]SEMI F47 [%] Result 0.0 80 PASS 0.0 80 PASS 0.0 70 PASS 0.0 70 PASS 0.0 70 PASS 0.0 50 PASS 0.0 50 PASS 0.0 50 PASS 0.0 50 PASS 0.0 50 PASS 0.0 0 PASS V=208V 100 90 80 70 60 50 SEMI F-47 40 DUT 50Hz 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 0.6 Date Prep. 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 16/20 TCL120-124 Input Voltage V=100VAC Output: V=24VDC/5.0A Voltage Sag [V] 80 80 70 70 70 50 50 50 50 50 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage [V] 22.6 22.6 21.6 21.6 21.6 18.7 18.7 19 19 22 22 Percent of Nominal DUT 50Hz [%]SEMI F47 [%] Result 5.8 80 PASS 5.8 80 PASS 10 70 PASS 10 70 PASS 10 70 PASS 22.1 50 PASS 22.1 50 PASS 20.8 50 PASS 20.8 50 PASS 8.3 50 PASS 8.3 0 PASS TCL120-124 [%] V=100V 100 90 80 70 60 SEMI F-47 50 40 DUT 50Hz 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 0.6 Date Prep. 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 17/20 3.9 TCL24-105 Input Voltage V=110VAC Output: V=5VDC/4A Voltage Sag [V] 88 88 77 77 77 55 55 55 55 55 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage Percent of Nominal [V] DUT 50Hz [%]SEMI F47 [%] Result 5 0.0 80 PASS 5 0.0 80 PASS 4.8 4 70 PASS 4.8 4 70 PASS 4.8 4 70 PASS 3.88 22.4 50 PASS 3.88 22.4 50 PASS 3.88 22.4 50 PASS 3.92 21.6 50 PASS 5 0 50 PASS 5 0 0 PASS TCL-24-105 [%] V=110V 100 90 80 70 60 SEMI-F47 50 40 DUT 50Hz 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 Date Prep. 0.6 0.7 0.8 0.9 1 [s] Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 18/20 4.0 TCL24-124 Input Voltage V=110VAC Output: V=24VDC/1.0A Voltage Sag [V] 88 88 77 77 77 55 55 55 55 55 0 Duration [s] 1 0.5 0.5 0.25 0.2 0.2 0.15 0.1 0.05 0.02 0.02 Cycles 50 25 25 12.5 12.5 10 7.5 5 2.5 1 1 Output Voltage Percent of Nominal [V] DUT 50Hz [%]SEMI F47 [%] Result 24 0 80 PASS 24 0 80 PASS 23.8 0.8 70 PASS 23.8 0.8 70 PASS 23.8 0.8 70 PASS 18 25 50 PASS 18 25 50 PASS 18.4 23.3 50 PASS 20.2 15.8 50 PASS 24 0 50 PASS 24 0 0 PASS TCL24-124 [%] V=110V 100 90 80 70 60 SEMI F-47 50 40 DUT 50Hz 30 20 10 0 [s] 0 0.1 0.2 0.3 0.4 0.5 Date Prep. 0.6 0.7 0.8 0.9 1 Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 19/20 Conclusion All TCL models where tested at the nominal ranges of 230VAC and 115VAC and the applicable voltage tolerances as per specification. The deviation of the output voltage is noted in the tables (DUT50Hz). All units passed the requirements of the F-47 standard with the restriction to nominal voltage only of the TCL24-105 and TCl24-124. These units will pass the standard at 110VAC input voltage. Details are shown on the last two pages of this report. Date Prep. Name 18.05.06 TIM TEST REPORT TCL SERIES SEMI F47 Compliance Iss. Change Date Name Sheet/of 20/20