Thermosensors TS 118 - 3 / TS 118 - 4 THERMOPILES are used for non-contact surface temperature measuring. Any object emits infrared radiation. The radiation power is increasing with growing surface temperatures. Based on this relation, THERMOPILES measure the emitted power and determine the object’s temperature precisely. Function Principle THERMOPILES are based on the Seebeck effect, which is used since a long time for conventional thermocouples. The application of micromechanics and thin film technology allows the production of miniaturized and cost effective sensor elements. absorption area (hot junctions) SiNx-membrans silizium-substraet (cold junctions) A multitude of thermojunctions deposited on a silicon substrate is connected in series to form a THERMOPILE. The hot junctions are thermally insulated from the cold junctions on the substrate by etching a self-supporting extremely thin membrane. An absorbing layer on the hot junctions transforms the incoming radiation into heat. A voltage proportional to the radiation is generated by the thermoelectric effect. The sensors are delivered in TO05 packages. Different housings and filter types can be selected to find an optimal solution for each application. Chips without housing are available as well. Filter Specifications Parameter Symbol Number of thermojunctions Material Active Area Chip Size Resistance of Thermopile TC of resistance Sensitivity of sensor TC of sensitivity Specific detectivity Noise equivalent power Time constant Operation temperature Storage temperature n AA AC R TCR S TCS D* NEP t63 T T Unit Value mm² mm² kΩ %/K V/W %/K cm*Hz1/2 / W nW ms °C °C 100 BiSb, NiCr 0.7 * 0.7 2.0 * 2.0 50 ± 15 -0.03 ± 0.02 typical 80 -0.52 ± 0.08 1.5 * 108 0.46 40 ± 10 -20 ... +100 -40 ... +100 Condition 25 °C +25...+75 °C 25°C, 500 K, DC +25...+75 °C 500 K, DC 500 K, 1 Hz 500 K, 1 Hz Reference Resistor Resistance RNi 0 °C 1000 ± 0.4% Ω TC of resistance TCRNi ppm / K 6178 ± 1% 0 °C...100 °C Function: R(T) = 1000Ω + 6,17*T*Ω, for detailled information see data sheet of reference resistor HL-Planartechnik GmbH E-Mail: [email protected] Thermosensors TS 118 - 3 / TS 118 - 4 Connecting Diagram TS118-3 TS118-4 bottom view Output Voltage versus Object Temperature Thermopile-Output voltage (mV) 12,0 Conditions: Distance from Thermopile to Black Body is 5 cm, emissivity equals 1, surrounding temperature is 25°C 10,0 8,0 6,0 4,0 Tables with emissitvity of different materials and surface are available. 2,0 0,0 -2,0 25 75 125 175 225 Object temperature (°C) Housing TO 18 Applications • contactless measurement of surface temperatures or IR-Radiation • temperature measurement of moving objects • manufacturing temperature control systems • thermal alarm systems • consumer, safety- and environmental systems • absorption measurement for gas analysis (see special data sheet) • industrial and automotive climate control systems • medical instruments Additional products with different filters and packages are also available. Tables with emissivity of different materials and surfaces are available. Specifications are subject to change without notice ! HL-Planartechnik GmbH E-Mail: [email protected] Stand: 08.04.02 Design: Zn