Datasheet

D6F-A7D/-AB71D
MEMS Flow Sensor
Digital Compensation for High
Accuracy
• Temperature compensation and linear compensation produce
high accuracy (±3% RD (25% to 100% FS)).
• Compact models for 10 to 70 L/min.
• Reduced piping work with quick-fastening feature.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Characteristics
MEMS Flow Sensor
D6F-10A7D-000-0
Quick joint P10
Air
Quick joint P14
Flow rate range
Model
0 to 10 L/min
D6F-10A7D-000-0
0 to 20 L/min
D6F-20A7D-000-0
0 to 50 L/min
D6F-50A7D-000-0
0 to 70 L/min
D6F-70AB71D-000-0
70000
60000
60000
50000
40000
30000
20000
10000
0
Quick fastener
D6F-FASTENER-P10
Connections
Connector
30000
20000
10
0
5
10
15
20
Flow rate (L/min)
D6F-70AB71D-000-0
50000
60000
50000
40000
30000
20000
40000
30000
20000
10000
0
10
20
30
40
0
50
10
20
30
40
50
60
70
Flow rate (L/min)
Flow rate (L/min)
D6F-10A7D-000-0
Use the following connectors for connections to the D6F:
Housing
GHR-04V-S (made by J.S.T. Mfg. Co.)
Terminals
SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.)
Wires
AWG26 to AWG30
3: SCL
8
70000
0
1: Vcc
2: SDA
3: SCL
4: GND
GHR-04V-S (made by J.S.T. Mfg. Co.)
4: GND
6
10000
0
D6F-10A7D-000-0
D6F-20A7D-000-0
D6F-50A7D-000-0
D6F-70AB71D-000-0
Pin No.
4
Output (Count)
D6F-CABLE3
2
D6F-50A7D-000-0
Model
Cable
40000
Flow rate (L/min)
Output (Count)
Type
50000
10000
0
0
Accessories (Sold separately)
D6F-20A7D-000-0
70000
Output (Count)
Applicable fluid
Output (Count)
Joint
2: SDA
1: Vcc
Flow rate
L/min (normal)
0
2
4
6
8
10
Output voltage
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 10
D6F-20A7D-000-0
Flow rate
L/min (normal)
0
4
8
12
16
20
Output voltage
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 20
D6F-50A7D-000-0
Enlarged View
Flow rate
L/min (normal)
0
10
20
30
40
50
Output voltage
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 50
D6F-70AB71D-000-0
Flow rate
L/min (normal)
0
20
40
60
70
Output voltage
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
43024
(A810)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 100
20
D6F-A7D/-AB71D
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-10A7D-000-0
Flow Range (See note 1.)
0 to 10L/min
D6F-20A7D-000-0
0 to 20 L/min
D6F-50A7D-000-0
0 to 50 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
Quick joint P10
Electrical Connection
Four-pin connector
Power Supply
3.0 to 3.6 VDC
Current Consumption
10 mA max. with no load, Vcc = 3.3 VDC, GND = 0 VDC, 25°C
Quick joint P14
Resolution
15 bit
Accuracy (See note 3.)
±5%RD (10%F.S. ≤ Flow rate < 25%F.S.)
±3%RD (25%F.S. ≤ Flow rate ≤ 100%F.S.)
Response time
90 ms max.
Repeatability (See note 4.)
0.3 %RD
Interface (See note 5.)
I2C
0.3%RD
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
100 kPa
Pressure Drop (See note 4.)
0.034 kPa
Operating Temperature (See note 6.)
–10 to +60°C
Operating Humidity (See note 6.)
35 to 85%RH
Storage Temperature (See note 6.)
–30 to +80°C
D6F-70AB71D-000-0
0 to 70 L/min
0.083 kPa
±5%RD (10L/min ≤ Flow rate < 20L/min)
±3%RD (20L/min ≤ Flow rate ≤ 70L/min)
0.5%RD
1.3%RD
0.28 kPa
0.57 kPa
Storage Humidity (See note 6.)
35 to 85%RH
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
57.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Note: 5.
Note: 6.
Note: 7.
64.4 g
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
-10 ≤ Operating Temperature ≤ 60 C
Reference (typical)
Refer to the D6F-@@@@D-000-@ Application Notes for details.
With no condensation or icing.
The following custom options are available.
Ask your OMRON representative for details.
- Temperature measurement
- Address settings (up to four addresses)
- Fault detection
- Threshold setting
Communication
Serial Interface
Master/Slave
Speed mode
I2C
Slave / Address:
HEX : 0x6C
BIN : 110_1100 (7bit)
Fast Mode 400kHz
Signal
SCL
Serial Clock
SDA
Data Signal
21
D6F-A7D/-AB71D
MEMS Flow Sensor
Dimensions (Unit: mm)
● MEMS Flow Sensors
D6F-10A7D-000-0
D6F-20A7D-000-0
D6F-50A7D-000-0
Lot No. Display
A
A
(4.4)
84.6±0.5
(60.6)
(66.6)
(34.9)
B
B
(7.9)
30°
20±0.5 dia.
Note 1. Note . The Port type of pipe fitting based on “Quick Joint P10 Type”.
* P10 shows the name of an O-ring prescribed by JIS B 2401.
* The port of O-ring ditch is based on P10 of JIS B 2406.
30±0.5
17±0.5 dia.
+0.1
13 -0.05 dia.
3±0.15
6
0.9±0.5
Note
C0.5 (circumference)
R2 (circumference)
Note 2. Use the following connectors to connect to the Sensor.
Connector
:GHR-04V-S (JST)
Terminals
:SSHL-002T-P0.2 (JST)
Wires
:AWG26 to AWG30
Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND
30±0.5
C0.5 (circumference)
CROSS A-A (B-B)
D6F-70AB71D-000-0
Lot No. Display
20.5±0.2
A
2-2.6 dia. Depth 6.5
A
20.5±0.2
25.8±0.2
(4.4)
84.6±0.5 (64.5)
(66.6) (60.6)
25.8±0.2
Two, 4±0.1 dia.
30.9±0.5
(34.8)
Recommended
Installation
Dimensions
from back side
(See note 2.)
B
B
30°
26±0.5 dia.
30±0.5
22±0.5 dia.
+0.1
18 -0.05dia.
3±0.15
Note 1. The Port type of pipe fitting based on “Quick Joint P14 Type”.
* P14 shows the name of an O-ring prescribed by JIS B 2401.
* The port of O-ring ditch is based on P14 of JIS B 2406.
(7.9)
0.9±0.5
Note 1
C0.5 (circumference)
32±0.5
30±0.5
R2 (circumference)
C0.5 (circumference)
6
CROSS A-A (B-B)
● Cable (Sold separately)
D6F-CABLE3
Blue wire
15±3
(5)
Note 3. Use the following connectors to connect to the Sensor.
Connector
:GHR-04V-S (JST)
Terminals
:SSHL-002T-P0.2 (JST)
Wires
:AWG26 to AWG30
Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND
● Quick fastener (Sold separately)
D6F-FASTENER-P10
Black wire
Red wire
660±10
Note 2. To mount the Sensor with 2.6-dia. holes, use P-type
self-tapping screws with a nominal diameter of 3 mm and
tighten them to a torque of 1.2 N·m max.
The screw threads must engage for 5.5 mm min.
Return direction
1. Vcc
2. SDA
3. SCL
4. GND
16.5±2
11.5±1
Rolling direction
3.3
1
Yellow wire
4-R1.5
2-R2
730±10
750±35
R8.5
R8.5
14
1
11
2-R2
8-R2.5
“10” is engraved
here.
6±0.15
3
12±0.15
22
8±0.3
3±0.15
15±1
2-R1
t=0.8±0.04
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