4” SAPPHIRE SUBSTRATE PTSS100

PETERMANN-TECHNIK GmbH
Lechwiesenstr. 13
D-86899 Landsberg am Lech
Fon: +49/8191/305395
Fax: +49/8191/305397
www.petermann-technik.com
[email protected]
ISO 9001:2008
4” SAPPHIRE SUBSTRATE PTSS100
FEATURES
 High reliability for low cost
 Used for GaN Epitaxial
 High thermal stability
 Outstanding chemical resistance and mechanical strength
GENERAL DATA
TYPE
DIMENSIONS
ORIENTATION
FLATNESS
SURFACE
CONDITION
DIAMETER
THICKNESS
PRIMARY FLAT LENGTH
EDGE CHAMFERING
SURFACE ORIENTATION M-axis
SURFACE ORIENTATION A-axis
PRIMARY FLAT ORIENTATION
A-axis
BOW
TTV
LTV
FRONT SURFACE QUALITY
BACK SURFACE ROUGHNESS
CLEANNESS
DEFECTS
LASER MARK
MATERIAL QUALITY
PACKAGE
PTSS100
100 ± 0.15 mm
650 ± 10 µm
30 ± 1 mm
45° (Can be customized)
0.2 ± 0.1°
0 ± 0.1°
0 ± 0.3°
-15 µm ≤ BOW ≤ 0 µm
≤10 µm
≤2 µm (10 mm x 10 mm)
Epitaxial ready (Ra≤3Å)
0.8 - 1.2 µm
Partical (Size > 0.3 µm) Number should be less
than 100
No crack, No pores, No scratch, No inclusions,
No twins
Can be customized
≥99.996% AL2O3
Mono-crystalline AL2O3
Wafers are packed in cleaned wafer cassettes
containing 25 wafers under clean room
environment
CRYSTALS
CERAMIC FILTERS
OSCILLATORS
SAW COMPONENTS
CERAMIC RESONATORS
Premium Quality by
PETERMANN-TECHNIK
Spec.01 • REV.00 • January 2014
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