PETERMANN-TECHNIK GmbH Lechwiesenstr. 13 D-86899 Landsberg am Lech Fon: +49/8191/305395 Fax: +49/8191/305397 www.petermann-technik.com [email protected] ISO 9001:2008 4” SAPPHIRE SUBSTRATE PTSS100 FEATURES High reliability for low cost Used for GaN Epitaxial High thermal stability Outstanding chemical resistance and mechanical strength GENERAL DATA TYPE DIMENSIONS ORIENTATION FLATNESS SURFACE CONDITION DIAMETER THICKNESS PRIMARY FLAT LENGTH EDGE CHAMFERING SURFACE ORIENTATION M-axis SURFACE ORIENTATION A-axis PRIMARY FLAT ORIENTATION A-axis BOW TTV LTV FRONT SURFACE QUALITY BACK SURFACE ROUGHNESS CLEANNESS DEFECTS LASER MARK MATERIAL QUALITY PACKAGE PTSS100 100 ± 0.15 mm 650 ± 10 µm 30 ± 1 mm 45° (Can be customized) 0.2 ± 0.1° 0 ± 0.1° 0 ± 0.3° -15 µm ≤ BOW ≤ 0 µm ≤10 µm ≤2 µm (10 mm x 10 mm) Epitaxial ready (Ra≤3Å) 0.8 - 1.2 µm Partical (Size > 0.3 µm) Number should be less than 100 No crack, No pores, No scratch, No inclusions, No twins Can be customized ≥99.996% AL2O3 Mono-crystalline AL2O3 Wafers are packed in cleaned wafer cassettes containing 25 wafers under clean room environment CRYSTALS CERAMIC FILTERS OSCILLATORS SAW COMPONENTS CERAMIC RESONATORS Premium Quality by PETERMANN-TECHNIK Spec.01 • REV.00 • January 2014