Freescale Semiconductor Data Sheet: Technical Data Document Number: MPXM2051G Rev. 3.0, 11/2015 MPXM2051G, 0 to 50 kPa, Gauge Compensated Pressure Sensors MPXM2051G The MPXM2051G device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output - directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. MPAK package Features • Temperature compensated over 0 °C to +85 °C • Available in easy-to-use tape and reel • Ratiometric to supply voltage • Gauge ported MPXM2051GS/GST1 Case 98ARH99087A Typical applications • Pump/motor controllers • Robotics • Level indicators • Medical diagnostics • Pressure switching • Top view Non-invasive blood pressure measurement '1& 9287 96 9287 *1' Pinout Ordering information # of Ports Pressure type Device name Shipping Package Absolute Device marking MPXM2051GS Rail 98ARH99087A • • MPXM2051GS MPXM2051GST1 Tape and reel 98ARH99087A • • MPXM2051GS None Single Dual Gauge Differential Freescale reserves the right to change the detail specifications as may be required to permit improvements in the design of its products. © 2005, 2009, 2015 Freescale Semiconductor, Inc. All rights reserved. Contents 1 2 3 4 5 General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.1 Block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.2 Pinout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Mechanical and Electrical Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.1 Maximum Ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.2 Operating Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.3 Voltage output versus applied differential pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.4 Linearity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . On-chip Temperature Compensation and Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Package Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.1 Package dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 3 3 4 4 4 4 5 6 7 7 9 Related Documentation The MPXM2051G device features and operations are described in a variety of reference manuals, user guides, and application notes. To find the most-current versions of these documents: 1. Go to the Freescale homepage at: http://www.freescale.com/ 2. 3. In the Keyword search box at the top of the page, enter the device number MPXM2051G. In the Refine Your Result pane on the left, click on the Documentation link. MPXM2051G 2 Sensors Freescale Semiconductor, Inc. 1 General Description 1.1 Block diagram Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. VS Thin Film Temperature Compensation and Calibration Transducer Sensing Element VOUT+ VOUT- GND Figure 1. Integrated pressure sensor block diagram 1.2 Pinout '1& 9287 96 9287 *1' Figure 2. Device pinout (top view) Table 1. Pin functions Pin Name Function 1 GND 2 VOUT+ Output voltage 3 VS Voltage supply 4 VOUT- Output voltage 5 DNC Do not connect to external circuitry or ground. Ground MPXM2051G Sensors Freescale Semiconductor, Inc. 3 2 Mechanical and Electrical Specifications 2.1 Maximum ratings Table 2. Maximum ratings(1) Rating Symbol Value Unit Pmax 200 kPa Storage Temperature Tstg -40 to +125 °C Operating Temperature TA -40 to +125 °C Maximum Pressure 1.Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2.2 Operating characteristics Table 3. Operating characteristics (VS = 10 Vdc, TA = 25°C.) Symbol Min Typ Max Pressure Range(1) Characteristic POP 0 — 50 kPa Supply Voltage(2) VS — 10 16 Vdc mAdc Supply Current Full Scale Span(3) Offset(4) Unit Io — 6.0 — VFSS 38.5 40 41.5 mV Voff -1.0 — 1.0 mV ΔV/ΔP — 0.8 — mV/kPa Linearity — -0.3 — 0.3 %VFSS Pressure Hysteresis(0 to 50 kPa) — — ±0.1 — %VFSS Temperature Hysteresis (-40°C to +125°C) — — ±0.5 — %VFSS TCVFSS -1.0 — 1.0 %VFSS Sensitivity Temperature Effect on Full Scale Span Temperature Effect on Offset TCVoff -1.0 — 1.0 mV Input Impedance Zin 1000 — 2500 Ω Output Impedance Zout 1400 — 3000 Ω (5) tR — 1.0 — ms Warm-Up — — 20 — ms Offset Stability(6) — — ±0.5 — %VFSS Response Time (10% to 90%) 1.1.0 kPa (kiloPascal) equals 0.145 psi. 2.Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3.Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4.Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5.Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 6.Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 2.3 Voltage output versus applied differential pressure The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum side relative to the pressure side. MPXM2051G 4 Sensors Freescale Semiconductor, Inc. 2.4 Linearity Linearity refers to how well a transducer's output follows the equation: VOUT = VOFF + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 3) or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. The specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. Least Square Deviation Least Squares Fit Relative Voltage Output Exaggerated Performance Curve Straight Line Deviation End Point Straight Line Fit OFFSET 0 50 100 Pressure (% Full scale) Figure 3. Linearity specification comparison MPXM2051G Sensors Freescale Semiconductor, Inc. 5 3 On-chip Temperature Compensation and Calibration Figure 4 shows the minimum, maximum and typical output characteristics of the MPXM2051G series at 25 °C. The output is directly proportional to the differential pressure and is essentially a straight line. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. 40 VS = 10 Vdc TA = 25°C Output (mVdc) 35 TYP 30 25 20 SPAN RANGE (TYP) MAX 15 10 MIN 5 kPa PSI 0 -5 0 12.5 1.8 25 3.6 37.5 5.4 50 7.25 OFFSET (TYP) Figure 4. Output versus pressure differential MPXM2051G 6 Sensors Freescale Semiconductor, Inc. 4 Package Information 4.1 Package dimensions This drawing is located at http://cache.freescale.com/files/shared/doc/package_info/98ARH99087A.pdf. PIN 4 PIN 1 Case 98ARH99087A, 5-lead M-PAC MPXM2051G Sensors Freescale Semiconductor, Inc. 7 Case 98ARH99087A, 5-lead M-PAC MPXM2051G 8 Sensors Freescale Semiconductor, Inc. 5 Revision History Table 4. Revision history Revision number Revision date 3.0 11/2015 Description of changes • Updated format. MPXM2051G Sensors Freescale Semiconductor, Inc. 9 How to Reach Us: Information in this document is provided solely to enable system and software Home Page: freescale.com implementers to use Freescale products. There are no express or implied copyright Web Support: freescale.com/support information in this document. licenses granted hereunder to design or fabricate any integrated circuits based on the Freescale reserves the right to make changes without further notice to any products herein. Freescale makes no warranty, representation, or guarantee regarding the suitability of its products for any particular purpose, nor does Freescale assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters that may be provided in Freescale data sheets and/or specifications can and do vary in different applications, and actual performance may vary over time. All operating parameters, including “typicals,” must be validated for each customer application by customer’s technical experts. Freescale does not convey any license under its patent rights nor the rights of others. Freescale sells products pursuant to standard terms and conditions of sale, which can be found at the following address: freescale.com/salestermsandconditions. Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc., Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © 2005, 2009, 2015 Freescale Semiconductor, Inc. Document Number: MPXM2051G Rev. 3.0 11/2015