Data Sheet

Freescale Semiconductor
Data Sheet: Technical Data
Document Number: MPX53
Rev. 7.1, 07/2015
MPX53, 0 to 50 kPa, Differential and
Gauge, Uncompensated,
Silicon Pressure Sensors
MPX53
The MPX53 series silicon piezoresistive pressure sensors provide a very
accurate and linear voltage output, directly proportional to the applied pressure.
These standard, uncompensated sensors permit manufacturers to design and
add their own external temperature compensating and signal conditioning
networks. Compensation techniques are simplified because of the predictability
of Freescale's single element strain gauge design.
Unibody packages
Features
MPX53
Case 98ASB42280B
•
Patented silicon shear stress strain gauge design
•
Ratiometric to supply voltage
•
Easy to use chip carrier package options
•
60 mV span (typical)
•
Differential and gauge options
Typical applications
•
Air movement control
•
Environmental control systems
•
Level indicators
•
Leak detection
•
Medical instrumentation
•
Industrial controls
•
Pneumatic control systems
•
Robotics
MPX53DP
Case 98ASB14912C
MPX53GP
Case 98ASB14911C
Front view
Pin 1
identification
GND
+VOUT
VS
-VOUT
1 2 3 4
Pinout
Ordering information
# of Ports
Device name
Shipping
Pressure type
Package
None
Single
Dual
Gauge
Differential
Absolute
Device
marking
Unibody package
MPX53D
Rail
98ASB42280B
MPX53DP
Rail
98ASB14912C
MPX53GP
Rail
98ASB14911C
•
•
•
•
•
•
Freescale reserves the right to change the detail specifications as may be required to permit
improvements in the design of its products.
© 2007-2009, 2015 Freescale Semiconductor, Inc. All rights reserved.
MPX53D
MPX53DP
MPX53GP
Contents
1
2
3
4
General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Pinout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Mechanical and Electrical Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.1 Maximum ratings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.2 Operating characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.3 Voltage output versus applied differential pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.4 Temperature compensation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.5 Linearity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Package Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.1 Pressure (P1)/Vacuum (P2) side identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.2 Package dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Related Documentation
The MPX53 device features and operations are described in a variety of reference manuals, user guides, and application notes.
To find the most-current versions of these documents:
1.
Go to the Freescale homepage at:
http://www.freescale.com/
2.
3.
In the Keyword search box at the top of the page, enter the device number MPX53.
In the Refine Your Result pane on the left, click on the Documentation link.
MPX53
2
Sensors
Freescale Semiconductor, Inc.
1
General Description
1.1
Block diagram
Figure 1 shows a schematic of the internal circuitry on the stand-alone pressure sensor chip.
3
+VS
2
+VOUT
Sensor
4
-VOUT
1
GND
Figure 1. Uncompensated pressure sensor schematic
1.2
Pinout
Pin 1
identification
2
3
4
GND
+VOUT
VS
-VOUT
1
Figure 2. Device pinout (front view)
Table 1. Pin functions
Pin
Name
Function
1
GND
2
+VOUT
Ground, denoted by notch.
Output voltage
3
VS
Voltage supply
4
-VOUT
Output voltage
MPX53
Sensors
Freescale Semiconductor, Inc.
3
2
Mechanical and Electrical Specifications
2.1
Maximum ratings
Table 2. Maximum ratings(1)
Rating
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
PMAX
175
kPa
Burst Pressure (P1 > P2)
PBurst
200
kPa
Storage Temperature
TSTG
–40 to +125
°C
TA
–40 to +125
°C
Operating Temperature
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
2.2
Operating characteristics
Table 3. Operating characteristics (VS = 3.0 Vdc, TA = 25 °C unless otherwise noted, P1 > P2)
Characteristic
Pressure
Supply
range(1)
voltage(2)
Supply current
Full-scale
span(3)
Symbol
Min
Typ
Max
Units
POP
0
—
50
kPa
VS
—
3.0
6.0
VDC
IO
—
6.0
—
mAdc
VFSS
45
60
90
mV
Offset(4)
VOFF
0
20
35
mV
Sensitivity
ΔV/ΔΡ
—
1.2
—
mV/kPa
Linearity
—
–0.6
—
0.4
%VFSS
Pressure hysteresis (0 to 50 kPa)
—
—
±0.1
—
%VFSS
Temperature hysteresis
—
—
±0.5
—
%VFSS
Temperature coefficient of full-scale span
TCVFSS
–0.22
—
-0.16
%VFSS/°C
Temperature coefficient of offset
TCVOFF
—
±15
—
µV/°C
TCR
0.21
—
0.27
%ZIN/°C
ZIN
355
—
505
Ω
ZOUT
750
—
1875
Ω
Temperature coefficient of resistance
Input impedance
Output impedance
Response time
(5)
tR
—
1.0
—
ms
Warm-up time
(6)
(10% to 90%)
—
—
20
—
ms
Offset stability
(7)
—
—
±0.5
—
%VFSS
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.
3. Full-scale span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (VOFF) is defined as the output voltage at the minimum rated pressure.
5. Response time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.
6. Warm-up time is defined as the time required for the product to meet the specified output voltage after the pressure is stabilized.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of pulsed pressure, temperature cycling with bias test.
MPX53
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Freescale Semiconductor, Inc.
2.3
Voltage output versus applied differential pressure
The differential voltage output of the sensor is directly proportional to the differential pressure (P1) relative to the vacuum side
(P2). Similarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure side
(P1).
2.4
Temperature compensation
Figure 3 shows the typical output characteristics of the MPX53 series over temperature.
The piezoresistive pressure sensor element is a semiconductor device which gives an electrical output signal proportional to the
pressure applied to the device. This device uses a unique transverse voltage diffused semiconductor strain gauge which is
sensitive to stresses produced in a thin silicon diaphragm by the applied pressure.
Because this strain gauge is an integral part of the silicon diaphragm, there are no temperature effects due to differences in the
thermal expansion of the strain gauge and the diaphragm, as are often encountered in bonded strain gauge pressure sensors.
However, the properties of the strain gauge itself are temperature dependent, requiring that the device be temperature
compensated if it is to be used over an extensive temperature range.
Temperature compensation and offset calibration can be achieved rather simply with additional resistive components, or by
designing your system using the MPX2053 series sensors.
Several approaches to external temperature compensation over –40 to +125 °C and 0 to +80 °C are presented in Freescale
Application Note, AN840.
2.5
Linearity
Linearity refers to how well a transducer's output follows the equation: VOUT = VOFF + (sensitivity x P) over the operating pressure
range (see Figure 3). There are two basic methods for calculating nonlinearity: (1) end point straight line fit or (2) a least squares
best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are
burdensome.
Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations
are more straightforward for the user. Freescale’s specified pressure sensor linearities are based on the end point straight line
method measured at the midrange pressure.
Figure 4 illustrates the differential or gauge configuration in the unibody chip carrier (Case 98ASB42280B). A silicone gel isolates
the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon
diaphragm.
The MPX53 series pressure sensor operating characteristics and internal reliability and qualification tests are based on use of
dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability.
Refer to application note AN3728, for more information regarding media compatibility.
100
Output (mVdc)
90
80
70
MPX53
VS = 3 Vdc
P1 > P2
60
50
40
30
20
10
0
PSI 0
kPa 0
+25°C
–40°C
Span
Range
(Typ)
+125ºC
Offset
(Typ)
1
10
2
3
4
5
6
20
30
40
Pressure Differential
7
50
8
Figure 3. Output vs. pressure differential
MPX53
Sensors
Freescale Semiconductor, Inc.
5
90
Linearity
80
70
Actual
60
Span
(VFSS)
Output (mVdc)
50
40
Theoretical
30
20
Offset
(VOFF)
10
0
0
Pressure (kPa)
MAX
POP
Figure 4. Linearity specification comparison
Silicone
Die Coat
Stainless Steel
Metal Cover
Die
P1
Wire Bond
Lead Frame
P2
Epoxy
Case
RTV Die
Bond
Figure 5. Unibody package — cross-sectional diagram
(not to scale)
MPX53
6
Sensors
Freescale Semiconductor, Inc.
3
Package Information
3.1
Pressure (P1)/Vacuum (P2) side identification
Freescale designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure
(P1) side is the side containing silicone gel which isolates the die from the environment. The Freescale MPX53 pressure sensor
is designed to operate with positive differential pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the following table.
Part number
Case number
Pressure (P1) side identifier
MPX53D
98ASB42280B
Stainless steep cap
MPX53DP
98ASB14912C
Side with port marking
MPX53GP
98ASB14911C
Side with port attached
MPX53
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Freescale Semiconductor, Inc.
7
3.2
Package dimensions
This drawing is located at http://cache.freescale.com/files/shared/doc/package_info/98ASB42280B.pdf.
Case 98ASB42280B, Unibody package
MPX53
8
Sensors
Freescale Semiconductor, Inc.
This drawing is located at http://cache.freescale.com/files/shared/doc/package_info/98ASB14912C.pdf.
Case 98ASB14912C, Unibody package
MPX53
Sensors
Freescale Semiconductor, Inc.
9
This drawing is located at http://cache.freescale.com/files/shared/doc/package_info/98ASB14911C.pdf.
SEATING
PLANE
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
-A-
-T-
U
L
R
H
N
PORT #1
POSITIVE
PRESSURE
(P1)
-Q-
B
1 2 3 4
PIN 1
K
-P0.25 (0.010)
J
M
T Q
S
S
F
C
G
D 4 PL
0.13 (0.005)
M
T S
S
Q
S
DIM
A
B
C
D
F
G
H
J
K
L
N
P
Q
R
S
U
INCHES
MILLIMETERS
MIN
MAX
MIN
MAX
1.145
1.175
29.08
29.85
0.685
0.715
17.40
18.16
0.305
0.325
7.75
8.26
0.016
0.020
0.41
0.51
0.048
0.064
1.22
1.63
0.100 BSC
2.54 BSC
0.182
0.194
4.62
4.93
0.014
0.016
0.36
0.41
0.695
0.725
17.65
18.42
0.290
0.300
7.37
7.62
0.420
0.440
10.67
11.18
0.153
0.159
3.89
4.04
0.153
0.159
3.89
4.04
0.230
0.250
5.84
6.35
0.220
0.240
5.59
6.10
0.910 BSC
23.11 BSC
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4 - OUTPUT
Case 98ASB14911C, Unibody package
MPX53
10
Sensors
Freescale Semiconductor, Inc.
4
Revision History
Table 4. Revision history
Revision
number
Revision
date
7.1
06/2015
Description
• Updated format.
• Removed obsolute MPXV53GC7U option and package drawing.
• Updated package outline drawings with current versions.
MPX53
Sensors
Freescale Semiconductor, Inc.
11
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© 2007-2009, 2015 Freescale Semiconductor, Inc.
Document Number: MPX53
Rev. 7.1
07/2015
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