Datasheet

D6F-N2/-L2
MEMS Flow Sensor
A Compact, High-accuracy Sensor
That Measures Low Flow Rates.
• High accuracy of ±3% FS.
• Flow rates can be measured without being affected by
temperature or pressure.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-01N2-000
Natural gas (13A)
LP gas
Model
0 to 1 L/min
D6F-01N2-000
0 to 2 L/min
D6F-02N2-000
0 to 5 L/min
D6F-05N2-000
0 to 2 L/min
D6F-02L2-000
D6F-05N2-000
6.0
6.0
5.0
5.0
Output voltage (V)
Flow rate range
Output voltage (V)
Applicable fluid
4.0
3.0
2.0
1.0
0.0
0.0
0.2
0.4
0.6
Flow rate (L/min)
0.8
4.0
3.0
2.0
1.0
0.0
0.0
1.0
1.0
2.0
3.0
Flow rate (L/min)
4.0
5.0
1.6
2.0
Accessory (included)
Cable
D6F-CABLE1
Connections
D6F-01N2-000
D6F-02N2-000
D6F-05N2-000
D6F-02L2-000
Pin No.
Connector
D6F-02N2-000
D6F-02L2-000
6.0
6.0
5.0
5.0
Output voltage (V)
Model
Output voltage (V)
Type
4.0
3.0
2.0
1.0
0.0
0.0
0.4
0.8
1.2
Flow rate (L/min)
1.6
2.0
4.0
3.0
2.0
1.0
0.0
0.0
0.4
0.8
1.2
Flow rate (L/min)
D6F-01N2-000
1: Vcc
2: Vout
3: GND
53398 (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
0.2
0.4
0.6
0.8
1.0
1.90
±0.12
2.81
±0.12
3.64
±0.12
4.37
±0.12
5.00
±0.12
0.4
0.8
1.2
1.6
2.0
2.20
±0.12
3.20
±0.12
3.98
±0.12
4.55
±0.12
5.00
±0.12
1.0
2.0
3.0
4.0
5.0
2.91
±0.12
3.92
±0.12
4.47
±0.12
4.79
±0.12
5.00
±0.12
0.4
0.8
1.2
1.6
2.0
3.02
±0.08
3.95
±0.08
4.47
±0.08
4.79
±0.08
5.00
±0.12
D6F-02N2-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
D6F-05N2-000
2: Vout
1: Vcc
3: GND
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
D6F-02L2-000
Enlarged View
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.30
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
10
D6F-N2/-L2
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-01N2-000
Flow Range (See note 1.)
0 to 1 L/min
Calibration Gas (See note 2.)
Natural gas (13A)
Flow Port Type
Rc 1/4 thread
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
D6F-02N2-000
D6F-05N2-000
0 to 2 L/min.
0 to 5 L/min
Propane gas
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.2% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
±2% to ±7.5% F.S. (25°C
characteristic)
±0.3% FS
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
Aluminum alloy
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
200 kPa
Pressure Drop (See note 3.)
0.017 kPa
Operating Temperature (See note 4.)
−10 to 60°C
D6F-02L2-000
0 to 2 L/min.
0.033 kPa
0.10 kPa
0.14 kPa
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±3% FS for 25°C characteristic at −10 to 60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
±4% FS for 25°C
characteristic at −10 to 60°C
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
35.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
D6F-01N2-000
D6F-02N2-000
D6F-05N2-000
D6F-02L2-000
Two, M3 holes with a depth of at least 5 mm
16.2
Mounting Hole Dimensions
16.2±0.05
Two, 3.5 dia.
37
62±0.5
(3.7)
37±0.05
(6)
21.6±0.5
10
3-17
10
Cable (included): D6F-CABLE1
200±35
22.1±0.5
100±15
Brown wire
Black wire
8.85
1. Vcc
2. Vout
Two, tapped threads 0.35
for Rc 1/4 pipe
Blue wire
3. GND
11
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