Datasheet

D6F-P
MEMS Flow Sensor
A Compact, High-accuracy Flow
Sensor with Superior Resistance
to Environments.
• Anti-dust performance is improved using the Cyclon method.
• A full lineup of models with different connector types: bamboo
joints, lead terminals for direct mounting on-board, and manifolds.
• High accuracy of ±5% FS.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
MEMS Flow Sensor
Flow Port Type
Connection
Applicable fluid
Lead terminals
Bamboo joint
Model
D6F-P0001A1
D6F-P0010A1
Air
0 to 1 L/min
Connector
Manifold
Flow rate range
0 to 0.1 L/min
D6F-P0010A2
D6F-P0010AM2
Accessory (Sold separately)
Type
Model
Cable
D6F-CABLE2
Output Voltage Characteristics
D6F-P0010A1/-P0010A2/-P0010AM2
3.0
3.0
2.5
2.5
Output voltage (V)
Output voltage (V)
D6F-P0001A1
2.0
1.5
1.0
0.5
0.0
2.0
1.5
1.0
0.5
0.0
0
0.02
0.04
0.06
Flow rate (L/min)
0.08
0.10
0
0.25
1
Flow rate
L/min (normal)
0
Output voltage
0.50
0.90
1.30
1.70
2.10
2.50
Output voltage
0.50
1.60
2.10
2.31
2.50
V
±0.10
±0.10
±0.10
±0.10
±0.10
±0.10
V
±0.10
±0.10
±0.10
±0.10
±0.10
0.02
0.04
0.06
0.08
0.10
Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
Flow rate
L/min (normal)
0.5
0.75
Flow rate (L/min)
0
0.25
0.50
0.75
1.00
Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
25
D6F-P
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-P0001A1
Flow Range (See note 1.)
0 to 0.1 L/min
Calibration Gas (See note 2.)
Air
D6F-P0010A1
D6F-P0010A2
Bamboo joint
Flow Port Type
Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm
Electrical Connection
Lead terminals
Power Supply
4.75 to 5.25 VDC
Current Consumption
15 mA max. with no load and a Vcc of 5.0 V
0.5 to 2.5 VDC (Load resistance: 10 kΩ)
Accuracy
±5% FS (25°C characteristic)
Repeatability (See note 3.)
±1.0% FS
Output Voltage (Max.)
3.1 VDC (Load resistance: 10 kΩ)
±0.4% FS
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
10 VDC
4 VDC
Case
PBT
Manifold
Three-pin connector
Output Voltage
Rated Output Voltage
D6F-P0010AM2
0 to 1 L/min
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure (See note 3.)
50 kPa
Pressure Drop (See note 3.)
0.005 kPa
0.19 kPa
0.67 kPa
Operating Temperature (See note 4.) −10 to +60°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to +80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±5% FS for 25°C characteristic at an ambient temperature of -10 to +60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
8.5 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
8.0 g
Tubing
You can measure large flows by mounting the Sensor on a bypass.
D6F-P
Flow Sensor
P1
P2
Resistance to flow
Mounting Direction
PCB-mounting Sensor
26
Manifold-type Sensor
D6F-P
MEMS Flow Sensor
Connections/Dimensions (Unit: mm)
● Lead Terminals
Label: Gives model and lot numbers.
D6F-P0001A1/D6F-P0010A1
Two, 3-dia.
through hole
10
23.3
Two, 4.9 dia.
2.6 dia.
11.7
7.2
Two, 1.1 dia.
4.76
Three, 1.3-dia. lands
Label
2.54
MADE IN JAPAN
D6F
27.2
7.3
13.5
Three, 0.8-dia.
through holes
5.04
7.6±0.2
14
Recommended Dimensions for
Connector Mounting Holes
(Bottom view)
16.2
6
1.2
1.7
17.2
13.5
1.5
Two, R: 1.4
Connector
XG8V-0344
(manufactured
by OMRON)
A
9.8
6
2.8 dia.
3. GND
7.2
2.54
13.2
1. Vcc
5.08
2. Vout
Detailed View of A
4.76
● Connectors
D6F-P0010A2
Label: Gives model and lot numbers.
10
23.3
11.7
Two, 4.9 dia.
2.6 dia.
MADE IN JAPAN
D6F
27.2
A
7.3
Two, 1.1 dia.
1.Vcc
7.6±0.2
14
Label
2.Vout
16.2
8.5
6
3.GND
1.2
Detailed View of A
1.7
8.5
13.5
1.5
Two, R: 1.4
17.2
2.8 dia.
13.2
D6F-P0010AM2
1±0.1 dia.,
Depth: 2.4±0.1
Pin No.
1: Vcc
2: Vout
3: GND
Connector SM03B-SRSS-TB (made by J.S.T. Mfg. Co.)
22
18
6.7±0.1 *1
8
2
0
Two, 4−0.05
dia.
B
3.5 dia.
1+0.1
0
27.2 14±0.05
22.1
A
Note:
1) Pressure welding connector
Socket: 03SR-3S
Wire: AWG#30
Or
2) Crimp type connector
Contact: SSH-003T-P0.2
Housing: SHR-03V-S
Wire: AWG#32 to #28
6.4 9.6
2-R6
Two, C0.3
(entire circumference)
6
3.GND
2.Vout
1.Vcc
2.7±0.1
0.3±0.1
0.3±0.1
Detailed View of A
Detailed View of B
Grooves to stop rotation
Connector Details
Lot number label
*1. Recommended Installation Dimensions
O-ring Installation Hole Dimensions
Depth: 2.6 to 3.0
6.7±0.1
C0.4 (entire circumference)
Two, 7 +0.5
dia.
0
M3 threaded
7 +0.5
0
14±0.05
● Cable (Optional)
D6F-CABLE2
The recommended
O-ring is JIS B 2401,
nominal number P4.
Use one of the following connectors from JST Mfg.
Co., Ltd. to connect to the D6F.
Tubes
Install tubes made of materials such as rubber or urethane
so that they will not come out.
For urethane tubes, tubes with an outer diameter of 6 mm
and an inner diameter of 4 mm are recommended.
Soldering Conditions
Use a soldering iron for 5 s at 350°C with a pressure of 100
gf max.
(This applies only to PCB-mounting Sensors.)
White wire
Black wire
3: GND
Red wire
180±10
1: Vcc
2: Vout
15±3
(5)
27
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