Datasheet

MEMS Gauge Pressure Sensor
2SMPP-02
MEMS Gauge Pressure Senser
Featuring Small Size and Low Power Consumption
■ Ultra-miniature 6.1 × 4.7 × 8.2 mm (L × W × H).
■ Superior electrical characteristics
to capacitive type pressure sensers.
■ 0 to 37 kPa pressure range.
• Offset voltage of -2.5±4 mV
• Span voltage of 31.0±3.1 mV
■ Low Power consumption of 0.2 mW
■ Low Temperature Influence
• Span of ±1.0%FS
• Offset of ±3.0%FS
RoHS compliant
Refer to the Safety Precautions on page 6.
Terminal Arrangement
F Icc
Connection Diagram
A Vout (+)
5
B Non Connected
C GND
6
E N-sub
+
D Vout (−)
R2
Constant
current
source
R1
1
Output
voltage
4
R3
−
R4
3
Note:
If necessary, add a variable resistor below the GND
pin (3).
The NC pin (2) must be secured to the circuit board.
Application Examples
• Medical equipment
• Home appliance
• Air movement control
• Level indicators
• Leak detection
• Pressure controller
1
2SMPP-02
2SMPP-02
Ordering Information
Standard Models with Surface mount package
Model
2SMPP-02
Classification
Structure
Bottom Port Type
SOP
Packaging
Plastic sleeve
Specifications
■
Ratings
Item
Type of pressure
*1
2SMPP-02
Gauge pressure
Sensing method*2
Piezoresistance
Pressure medium
Air
Driving method
Constant current drive
Drive current
100 µA DC
Pressure range
0 to 37 kPa
Maximum allowable pressure
53 kPa
Maximum drive current
130 µA DC
Ambient operating temperature range
0 to 50°C (with no condensation or icing)
Ambient operating humidity range
15% to 95% (with no condensation or icing)
Ambient storage temperature range
−30 to 85°C (with no condensation or icing)
Ambient storage humidity range
10% to 95% (with no condensation or icing)
Weight
0.17 g
Note:
The above specifications are the results of measurements taken at an ambient temperature of 23°C.
*1 Do not use the Sensor under negative pressure.
*2 Do not use any corrosive gases. Use only air.
Characteristics
■
Electrical Characteristics
Item
Gauge resistance value
2SMPP-02
20 ±2 kΩ
Offset voltage
−2.5 ±4.0 mV
Span voltage
31.0 ±3.1 mV (with an applied pressure of 37 kPa)
Non-linearity
0.8% FS max. (0 to 37 kPa)
Hysteresis
0.5% FS (0 to 37 kPa)
Sensitivity variation with temperature
0.5 ±1.0% FS (0°C)
0.3 ±1.0% FS (50°C)
Offset voltage variation with temperature
0 ±3.0% FS (0 to 25°C)
0 ±3.0% FS (25 to 50°C)
Measurement conditions: Ambient temperature = 23°C, constant current and drive current = 100 µA
2
2SMPP-02
2SMPP-02
Example of Application Circuit for MEMS Pressure Sensor
VDD
Constant current circuit unit
Amplifier circuit unit
Pressure
+
−
Sensor
+
−
−
+
Vout
−
+
1. The pressure sensor is designed to convert a voltage by means of constant current drive.
2. Please amplifier the output voltage of the pressure sensor by using the amplifying circuit if necessary.
Engineering Data (for Reference)
■
Output Characteristics
Rated Pressure vs. Output Voltage
40
35
Output Voltage [mV]
30
25
20
15
10
5
0
−5
Note:
0
10
20
30
40
Rated Pressure [kPa]
50
1. Ambient temperature condition: 25°C
2. Drive current: 100 µA
3. These output voltage characteristics are measured with tester without a mounting board.
4. The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in
actual equipment before use.
3
2SMPP-02
2SMPP-02
Temperature Influence of Span Voltage
Temperature Influence of Offset Voltage
2.0
Temp. Influence of Offset Voltage [%FS]
Temp. Influence of Span Voltage [%FS]
2.0
1.5
1.0
0.5
0.0
−0.5
−1.0
−10
Note:
0
10
20
30
40
Temperature [°C]
50
1.5
1.0
0.5
0.0
−0.5
−1.0
−1.5
−2.0
−10
60
0
10
20
30
40
Temperature [°C]
50
60
1. Measured points are 0°C and 25°C, 50°C
2. Drive current: 100 µA
3. These output voltage characteristics are measured with tester without a mounting board.
4. The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in
actual equipment before use.
Pressure Cycle Range ( 0 to 40 kPa)
1
Span voltage range [%FS]
Offset voltage range [%FS]
1
0.5
0
−0.5
−1
Note:
0
100000
200000
Pressure cycle
300000
0.5
0
−0.5
−1
0
100000
200000
Pressure cycle
1. Tested temperature condition: 25°C
2. Number of pressure cycle time: 3 × 105
3. Rated cycle pressure: 0 to 40 kPa
4. These output voltage characteristics are measured with tester without a mounting board.
4
300000
2SMPP-02
2SMPP-02
Dimensions
Note:
All units are in millimeters unless otherwise indicated.
4.75
4.00
3
0.25±0.05
#1
φ3.80
φ0.62
6.15 5.40
9.85
A
3.20
4-R0.50
4
6
1.27
0.40
1.27 x 2 = 2.54
1.00
2.00
1.50
2.80
1.00
4.75
(1.10)
0.80
φ1.80
Pin Diagram
(Top Surface of Sensor)
φ2.60
Atmospheric pressure hole
1 Vout (+)
6 Icc
2 NC
5 N-sub
3 GND
6 Vout (-)
Markings
0.75
1.125
5.45
0.10
P P 0 2
0.90
4.05
1.125
0.45
5 6 7 8
(0.90)
1.65
1.65
3.30
Note:
(1.075)
Lot No.
Unless otherwise specified, the tolerance for all of the above drawings is ±0.3 mm.
5
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Safety Precautions
3. The protective anti-static electricity coating degrades over
time. Do not store the Sensor for more than 6 months. Also,
do not reuse the packaging.
Precautions for Correct Use
Handling the Sensor
(1)
Air is the only pressure medium that may be used directly
with the Sensor. Do not use corrosive gases (organic
solvent gases, sulfurous gases, hydrogen sulfide gas, etc.)
or pressure mediums containing water particles. These
pressure mediums may cause malfunctions.
(2) The Sensor is not drip-proof. Do not use the Sensor in any
environment where it may be subjected to water or other
liquids.
(3) Do not use the Sensor in any environment where
condensation may occur. If moisture freezes on the Sensor
chip, variations may occur in the Sensor output or the
Sensor may malfunction.
(4) Do not insert wires, pins, or any other foreign objects into
the connecting tube. Doing so could destroy the pressure
sensor chip inside the Sensor, or the foreign object may
become stuck inside the connecting tube and affect the
Sensor output.
(5) Always stay within the rated pressure range. Using a
pressure outside of this range may damage the Sensor.
(6) Do not use the Sensor in any environment subject to
vibration from ultrasonic or high-frequency waves.
(7) The Sensor output may be affected if the pressure sensor
chip is exposed to light. Do not expose the Sensor chip to
light.
(8) Static electricity may destroy the Sensor. Any charged
materials or surfaces, such as workbenches, floors, or
technicians, must be properly grounded to prevent static
electricity.
(9) Applying excessive force to the pins may deform them and
damage the soldering. Do not drop the Sensor and always
handle it with care. Do not use the Sensor in any
environment that is subject to excessive steam or dust.
(10) Refer to the connection diagrams when connecting the pins
on the Sensor.
(11) Do not connect to the pins on the Sensor in the wrong
direction. Doing so may cause variations in Sensor output or
malfunctions.
(12) External noise may effect the Sensor output. Take any
necessary measures to eliminate external noise.
Transportation and Storage
(1)
(2)
(3)
(4)
(5)
Do not store the Sensor in any environment that contains
corrosive gases (organic solvent gases, sulfurous gases,
hydrogen sulfide gas, etc.).
The Sensor is not drip-proof. Do not store the Sensor in any
environment where it may be subjected to water or other
liquids.
The cardboard packaging will deteriorate over time
depending on the humidity, number of boxes stacked on top,
and other factors. Follow the first in, first out rule for storage.
Do not drop or throw the Sensor. Handle it with care.
If the inner packaging is dropped, the stopper may be
dislodged from the tube causing the Sensor to fall out and
become damaged.
The surface of the tube containing the Sensor is coated in a
film to prevent static electricity. Observe the following items
regarding this protective coating:
1. Avoid exposure to water, which may wash away the protective coating.
2. The protective anti-static electricity coating may be sticky to
the touch in high-temperature, high-humidity environments.
6
(4)
Store the Sensor in an environment with suitable
temperature and humidity levels.
• Temperature: 5 to 30°C, Humidity: 40% to 60%
(5)
(6)
Leads are silver-plated and may change color over time
depending on the storage conditions. Discoloration after the
Sensor is delivered is not covered under warranty. Be sure
to store the Sensor under the proper conditions.
Do not store the Sensor in any environment with excessive
steam or dust.
Mounting Method
• Mount the Sensor on the land pattern of a printed circuit board.
• Solder pin 2 securely to the printed circuit board in order to maintain the mechanical strength of the mounted Sensor.
Soldering Method
• Due to its small size, the heat capacity of the Sensor is limited.
Therefore, measures must be taken to minimize the effects of
heating from external sources.
• Solder bath submersion: 260°C max. for 10 seconds max.
• Soldering iron: 260°C max. for 10 seconds max.
• Apply heat to the Sensor pins only, and not to the Sensor package.
• Do not use any flux that may release corrosive gases. Do not allow any flux to enter the inside of the case.
Cleaning
• Do not allow any cleaning liquid to enter the inside of the case.
• Do not use ultrasonic cleaning. Doing so may break connections.
• Do not use any cleaning liquids that contain silicone. Such cleaning liquids may remain on the surface of the Sensor.
Coating
• Do not apply any coating to the Sensor.
2SMPP-02
2SMPP-02
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.
Cat. No. A195-E1-02
In the interest of product improvement, specifications are subject to change without notice.
OMRON Corporation
Micro Devices Division
686-1 Ichimiyake, Yasu,
Shiga, 520-2362 JAPAN
Tel: (81)77-588-9200/Fax: (81)77-588-9909
0712
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