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Data Sets Discussed in the Paper “Min-Log Approach to
Modeling Dielectric Breakdown Data” (IRPS-2012)
Emmanuel Yashchin(2), Baozhen Li(1), James Stathis(2), Ernest Wu(1)
IBM Systems and Technology Group(1), IBM Research Division (2)
The paper will appear in the Proceedings of the 2012 International Reliability Physics Symposium (IRPS)
Data Sets for PFET, NFET
PFET (Left part): Areas corresponding to 4 columns are APFET = 0.33E-7, 0.33E-8, 3.33E-9, 9.98E-10 (307 rows)
NFET (Right): Areas corresponding to 5 columns are ANFET = 0.33E-8, 9.98E-9, 3.33E-9, 9.98E-10, 3.33E-10 (244 rows)
All specimens were observed until the failure time (no censoring). For example, the PFET test for the area 9.98E-10 included 23
specimens. The table contains their lifetimes. Zero entries should be ignored. The measurement units are omitted for reasons of
confidentiality.
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0.2
0.2
0.2
0.22
0.384
0.384
0.439
0.439
0.494
0.494
0.659
0.659
0.714
0.714
0.879
0.879
0.879
0.879
0.879
0.879
0.989
0.989
1.208
1.208
1.318
1.428
1.428
1.648
1.648
1.758
1.867
1.867
1.977
1.977
2.087
2.197
2.197
2.252
2.307
2.472
2.527
0.2
1.208
1.538
1.648
3.2
4.483
4.538
4.867
5.197
5.636
7.373
10.428
10.483
10.813
11.746
11.966
12.2
12.2
12.879
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13
13
13.318
15.296
19.153
20.417
24.2
25
25.593
26.746
27.955
28.01
30.824
36.756
39.2
39.659
41.691
42.296
42.46
42.68
44.163
5.856
23.712
36.152
57.887
66.2
82.423
195.465
198.541
258.348
284.437
302.665
332.27
366.042
371.205
381.146
500.877
600.881
626.641
642.57
666.792
737.466
869.822
1154.83
1183.282
1221.895
1313.034
1520.982
1575.249
1595.315
1924.208
2031.386
2085.159
2119.157
2160.461
2589.92
3054.59
3501.735
4242.387
4758.283
4932.123
4943.218
43.943
396.855
498.405
1230.646
1374.166
1379
1683.086
1871.59
2471.285
2518.246
3147.63
3193.877
5139.906
6684.832
11209.814
14905.952
19837.455
25395.275
29762.218
38144.397
46423.098
73988.519
92792.665
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0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
1
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3
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31
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35
36
37
38
39
40
41
4.538
4.593
5.472
6.2
6.2
6.46
7.593
7.593
7.703
7.977
8.032
8.197
8.746
9.2
9.296
9.35
10.593
10.593
10.977
11.032
11.417
11.472
11.527
11.911
12.2
12.2
12.2
14.417
14.581
15.2
15.296
15.35
16.318
16.593
16.648
17.032
18.2
18.2
18.2
18.2
18.405
3.2
7.867
8.362
9.2
11.307
11.801
12.2
13
13.318
15.186
15.2
16.318
16.318
17.307
18.2
19.153
19.428
20.417
22.01
22.614
24.989
25.044
25.208
26.527
28.339
31
31
32.307
32.746
32.746
33.405
33.955
34.119
34.229
34.449
34.779
35.987
36.042
36.097
36.426
36.701
3.2
5.801
9.2
10.373
13.922
18.405
20.252
20.856
24.371
25.483
31.483
36.756
39.2
42.845
42.955
46.799
48.2
49.867
51.79
54.316
57.887
62.94
67.813
68.581
68.746
69.405
71.493
73.25
73.36
73.415
73.635
74.184
77.534
83.356
84.29
89.163
89.438
94.546
95.864
98.006
100.533
4.044
4.208
9.2
9.2
14.362
18.2
21.57
21.68
33.186
39.063
39.2
53.602
71.383
71.602
71.767
74.513
75.887
76.106
84.2
98.665
99.764
103.114
106.519
112.342
112.396
114.2
116.966
119.987
121.195
128.061
132.345
135.091
137.453
137.783
144.2
146.636
147.79
166.739
173.22
178.493
183.162
9.879
70.174
111.243
141.902
365.712
407.565
488.024
600.826
612.58
618.897
762.622
827.105
1004.829
1071.728
1116.438
1119.678
1217.391
1513.018
1589.328
1684.184
1734.716
1934.644
2092.628
2113.006
2462.716
2510.062
2523.955
2524.284
2543.288
2663.026
3171.962
3181.574
3444.557
4203.499
4233.928
4342.461
5991.562
6433.548
9950.098
13024.094
42
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89
90
91
92
93
94
95
96
97
98
99
100
101
102
103
104
105
106
107
108
109
2.527
2.636
2.691
2.691
2.746
2.801
2.966
3.076
3.076
3.076
3.186
3.2
3.2
3.2
3.2
3.2
3.2
3.2
3.22
3.22
3.275
3.275
3.296
3.384
3.384
3.405
3.439
3.494
3.515
3.515
3.549
3.549
3.604
3.769
3.879
3.879
3.879
3.989
3.989
3.989
3.989
4
4
4.044
4.044
4.099
4.153
4.208
4.208
4.263
4.318
4.318
4.428
4.538
4.703
4.758
4.867
4.867
4.977
4.977
5.032
5.087
5.087
5.142
5.142
5.252
5.362
5.362
45.646
46.854
47.788
52.339
52.559
57.557
57.777
61.017
61.127
63.544
67.867
68.252
69.021
70.943
71.987
75.227
77.479
78.743
85.483
92.019
96.413
102.016
107.618
108.936
110.584
114.33
116.417
122.239
124.71
137.124
139.485
151.58
151.744
159.873
170.09
183.107
217.648
223.744
228.139
235.553
240.332
248.296
279.384
283.943
286.03
311.014
350.67
352.757
364.888
416.958
466.988
502.744
543.938
688.268
884.707
0
0
0
0
0
0
0
0
0
0
0
0
0
5265.667
5524.201
6308.867
7468.966
7670.543
8222.013
8654.002
8748.035
9368.308
10625.461
12196.495
12379.727
0
0
0
0
0
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0
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42
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93
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100
101
102
103
104
105
106
107
108
109
19.373
19.977
20.087
20.527
20.966
21.186
21.405
22.119
23.383
23.657
24.2
24.2
24.934
24.989
25
25.153
25.153
25.538
25.538
26.142
26.197
26.911
26.911
27.735
28.229
28.449
29.218
30.152
30.152
30.2
30.2
31.153
31.263
31.593
31.813
32.032
32.197
32.252
33.296
35.328
35.602
36.152
37.909
38.349
38.404
39.2
39.2
39.2
39.2
39.337
39.824
40.428
41.087
41.581
41.911
44.053
45.152
45.481
45.591
46.25
46.525
48.2
48.2
48.2
48.2
49.373
50.856
51.35
39.2
40.153
40.208
42.186
42.68
44.383
45.097
46.854
47.898
48.2
48.227
50.856
51.296
51.68
51.845
53.602
54.262
54.976
55.69
55.744
56.129
56.953
57.502
61.512
65.411
66.29
68.307
70.119
71.877
73.25
73.47
75.557
76.381
77.644
78.523
83.247
83.631
84.2
84.2
84.659
84.714
86.032
87.57
90.152
91.085
91.195
91.25
93.502
93.887
94.82
96.193
97.182
97.457
98.5
100.313
102.455
107.014
107.233
107.508
109.431
111.078
111.902
114.2
114.2
114.714
115.099
115.208
115.483
102.565
104.048
104.597
106.08
106.465
106.684
111.023
112.671
114.2
115.483
120.426
122.129
122.678
122.843
123.667
125.205
131.411
131.631
134.213
135.311
139.705
139.98
140.09
141.902
143.934
146.691
148.339
149.328
150.262
150.646
151.744
152.019
153.063
155.205
158.555
159.214
162.4
163.718
164.213
167.069
170.913
173.879
181.844
194.257
195.41
197.223
200.738
204.198
206.945
207.823
208.922
211.998
226.271
226.546
231.764
235.224
237.531
240.991
243.463
246.209
249.505
250.438
252.855
252.965
254.063
258.952
259.776
262.467
185.084
185.524
192.554
201.123
210.789
224.623
231.379
250.219
251.482
254.393
277.187
279.384
288.2
288.2
296.184
296.349
305.411
324.525
345.507
365.218
369.173
369.777
376.203
385.101
387.518
394.328
395.647
398.008
403.062
403.776
407.181
415.31
419.649
423.439
424.428
425.911
428.163
432.2
432.604
441.063
442.161
453.86
457.211
461.989
472.315
479.126
500.822
506.479
518.508
527.57
542.345
550.419
562.448
562.558
580.888
583.14
585.227
588.303
590.336
590.94
593.192
599.783
608.022
611.097
615.217
654.983
657.949
665.419
110
111
112
113
114
115
116
117
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120
121
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128
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159
160
161
162
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166
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168
169
170
171
172
173
174
175
176
177
5.362
5.472
5.527
5.527
5.581
5.636
5.691
5.691
5.746
5.746
5.856
5.911
6.076
6.2
6.2
6.2
6.2
6.22
6.275
6.296
6.296
6.33
6.384
6.405
6.494
6.549
6.549
6.659
6.714
6.769
6.824
6.879
6.879
6.879
7
7
7
7
7.099
7.099
7.153
7.208
7.208
7.318
7.428
7.538
7.538
7.593
7.648
7.867
7.977
7.977
7.977
8.032
8.197
8.197
8.307
8.307
8.472
8.636
8.691
8.801
8.856
9.2
9.2
9.2
9.2
9.384
0
0
0
0
0
0
0
0
0
0
0
0
0
0
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0
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0
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110
111
112
113
114
115
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120
121
122
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126
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128
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160
161
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165
166
167
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169
170
171
172
173
174
175
176
177
52.064
52.779
53.547
54.591
54.866
55.085
56.239
58.051
58.491
62.336
62.72
63.599
64.478
64.697
66.235
66.934
66.934
67.208
67.813
68.087
68.142
68.362
68.581
69.076
70.119
71.053
71.218
73.415
75.227
75.282
76.216
77.699
77.754
78.029
81.434
81.819
83.302
84.2
84.659
85.922
86.527
86.746
88.064
88.064
88.779
89.218
89.712
90.207
90.481
91.14
91.525
93.557
95.809
95.974
96.688
97.072
97.622
97.731
100.587
103.663
104.927
105.036
105.256
107.069
107.508
109.65
110.254
111.957
115.813
115.867
116.527
117.405
121.47
123.118
124.271
124.656
128.885
130.148
131.247
134.322
136.465
139.156
139.321
140.859
141.902
142.012
142.177
144.165
144.2
144.384
146.362
147.405
147.46
147.79
152.019
152.678
155.534
156.798
157.017
159.05
160.368
160.478
161.411
162.894
165.531
165.641
166.739
169.98
170.035
172.232
172.506
175.417
175.802
180.361
180.361
180.525
184.151
191.565
191.84
192.444
195.191
198.541
201.287
206.34
211.119
211.339
213.865
222.866
232.752
237.146
237.75
237.805
240.277
240.277
243.353
248.406
267.191
288.2
296.294
296.788
297.722
297.832
302.61
305.576
309.476
310.465
312.881
314.804
326.777
327.491
341.772
353.306
356.602
360.879
361.099
364.174
366.207
366.591
370.326
375.269
377.741
379.883
381.915
383.233
384.332
389.825
393.395
397.679
399.382
416.628
419.869
423
423.494
425.526
432.2
433.538
433.977
436.229
437.822
438.152
440.568
443.809
446.226
447.05
455.728
458.529
459.847
471.162
476.27
486.651
494.231
494.395
496.702
509.006
517.849
519.112
523.616
525.813
530.207
534.546
538.336
551.683
570.083
579.076
686.51
687.059
702.988
713.588
720.33
722.527
723.9
724.943
753.834
758.448
774.706
775.365
781.626
785.361
795.687
796.511
797.39
814.966
855.062
872.788
875.04
880.203
886.959
890.749
900.91
907.995
930.57
932.547
934.305
959.241
964.459
977.201
981.815
985.166
985.935
1000.105
1008.179
1030.369
1041.299
1041.904
1054.866
1062.281
1066.95
1071.673
1074.474
1121.71
1149.942
1157.687
1162.3
1201.133
1221.18
1224.2
1240.038
1250.968
1257.01
1276.838
1294.305
1297.38
1313.089
1337.806
1354.778
1362.247
1428.048
1437.99
1448.645
1451.666
1458.257
1462.596
178
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202
203
204
205
206
207
208
209
210
211
212
213
214
215
216
217
218
219
220
221
222
223
224
225
226
227
228
229
230
231
232
233
234
235
236
237
238
239
240
241
242
243
244
245
9.384
9.384
9.494
9.604
9.879
9.989
10
10
10
10.044
10.099
10.208
10.373
10.428
10.758
10.813
10.867
10.867
10.867
10.922
10.977
11.032
11.417
11.581
11.636
11.801
11.911
11.966
12.076
12.076
12.076
12.076
12.2
12.2
12.275
12.439
12.659
12.659
12.714
12.879
12.989
13.263
13.373
13.373
13.813
13.977
14.087
14.197
14.252
14.417
14.691
14.746
14.856
14.856
14.911
15.2
15.22
15.241
15.494
15.549
16.153
16.538
18.076
18.2
18.2
18.22
18.549
18.769
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
178
179
180
181
182
183
184
185
186
187
188
189
190
191
192
193
194
195
196
197
198
199
200
201
202
203
204
205
206
207
208
209
210
211
212
213
214
215
216
217
218
219
220
221
222
223
224
225
226
227
228
229
230
231
232
233
234
235
236
237
238
239
240
241
242
243
244
114.2
114.384
114.384
117.296
117.46
117.57
117.9
121.909
122.294
122.678
124.051
124.436
125.864
125.974
127.127
133.389
134.432
137.233
139.266
139.595
139.815
140.145
140.254
142.891
143.715
144.2
144.494
146.252
146.801
149.053
152.733
154.106
158.116
164.542
166.465
168.002
183.382
185.688
198.321
198.651
201.068
215.074
215.952
217.044
217.263
218.032
218.636
225.612
226.656
227.534
229.347
231.105
246.044
247.912
276.748
293.218
298.765
305.302
370.491
374.171
380.048
381.586
404.325
447.928
470.393
478.082
480.005
251.097
252.635
256.645
261.753
263.181
263.346
264.005
267.3
280.977
282.46
286.03
288.2
294.316
296.074
303.819
305.137
313.046
313.925
316.506
324.69
340.124
344.244
350.725
357.096
375.983
387.518
389.934
392.791
394.219
394.823
398.942
404.764
416.628
425.636
425.636
425.691
435.845
439.03
444.303
455.508
455.838
465.12
469.349
490.825
500.108
504.941
524.769
578.691
580.01
598.135
604.232
673.493
761.688
820.129
841.221
842.099
898.438
904.37
937.216
1037.29
1114.076
1147.745
1177.57
1204.538
1271.785
1552.29
1944.769
580.559
589.512
594.4
600.332
600.826
606.923
608.516
660.695
675.031
680.743
693.65
734.5
736.368
738.675
751.472
796.127
802.608
807.112
822.93
825.018
832.817
849.24
870.152
871.635
875.37
876.248
880.313
880.313
894.099
898.768
921.232
939.413
958.472
963.855
975.718
1103.915
1108.528
1118.635
1125.885
1165.761
1225.099
1228.943
1229.273
1245.421
1277.772
1284.583
1287.274
1327.589
1376.253
1418.326
1501.154
1547.017
1571.953
1680.175
1716.645
1761.629
1776.459
1790.63
1811.446
1903.666
2119.487
2235.27
2602.553
3108.248
3592.581
3597.525
4547.37
1463.585
1467.649
1473.087
1478.964
1523.454
1537.57
1569.481
1570.36
1591.415
1597.182
1601.082
1625.963
1626.952
1649.142
1689.292
1755.532
1765.364
1785.357
1785.796
1821.882
1906.907
1930.25
1946.581
1960.423
1992.225
2024.85
2030.288
2040.339
2081.918
2091.42
2124.375
2151.179
2193.966
2207.697
2214.673
2355.996
2366.762
2401.474
2495.891
2526.701
2550.209
2632.872
2708.779
2729.101
2784.686
2788.091
2791.112
2886.792
2933.973
3042.012
3163.284
3468.944
3538.864
3582.969
3654.977
3839.343
3979.788
4108.808
4273.09
4485.212
4990.893
5010.721
5483.117
5972.283
6562.183
6729.34
9537.424
246
247
248
249
250
251
252
253
254
255
256
257
258
259
260
261
262
263
264
265
266
267
268
269
270
271
272
273
274
275
276
277
278
279
280
281
282
283
284
285
286
287
288
289
290
291
292
293
294
295
296
297
298
299
300
301
302
303
304
305
306
307
18.824
18.879
18.989
18.989
19.099
19.758
19.922
20.087
20.142
20.252
20.472
20.966
21.515
21.68
21.735
21.845
22.064
22.559
22.888
23.987
24.097
24.33
24.439
25.208
25.318
25.428
25.922
26.032
26.362
26.417
26.581
26.966
27.46
27.46
27.955
28.119
29.273
29.383
29.657
30.097
31.867
32.527
32.636
33.79
33.845
36.866
38.074
38.898
39.22
39.604
40.758
40.813
41.417
42.845
43.614
45.042
47.788
50.197
54.536
70.284
80.83
117.79
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
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