Product family datasheet Other microlithography lamps above 3,000 W __ May 25, 2016, 17:16:10 Other microlithography lamps above 3,000 W © 2016, OSRAM GmbH. All rights reserved. Page 1 of 5 Product family datasheet Product line drawing Product line drawing Product line drawing Product line drawing Product line drawing Product line drawing __ Product line drawing May 25, 2016, 17:16:10 Other microlithography lamps above 3,000 W © 2016, OSRAM GmbH. All rights reserved. Page 2 of 5 Product family datasheet Technical data Electrical data Length with base excl. base pins/connection Light center length (LCL) Burning position HBO 3500 W/MR 56.0 A 62.0 V 70.0 mm 1000 h Vertical 2) 63.0 A 55.0 V 70.0 mm 1500 h Vertical 3) 100 A 50.0 V DC 80.0 mm 318.00 mm 143.5 mm 7.5 mm 1500 h Vertical 3) HBO 5000 W/S 1) 100 A 50.0 V DC 80.0 mm 360.00 mm 143.5 mm 7.5 mm 2250 h Vertical 3) HBO 5000 W/TA 1) 100 A 50.0 V DC 80.0 mm 329.50 mm 148.5 mm 7.5 mm 1000 h Vertical 3) HBO 5001 W/F 80.0 A 62.0 V DC 85.0 mm 430.00 mm 216.0 mm 7.9 mm 850 h Vertical 2) HBO 5000 W/HK 72.0 A 70.0 V DC 82.0 mm 302.00 mm 152.5 mm 7.5 mm 1500 h Vertical 2) 4) 4) 4) 4) 4) Electrode gap cold Lifespan Nominal voltage HBO 5000 W/MF Diameter Capabilities Nominal current 1) Type of current Lifespan Product description HBO 3500 W/HK __ Dimensions & weight Additional product data Product description Cooling Base anode (standard designation) Base cathode (standard designation) HBO 3500 W/MR HBO 3500 W/HK HBO 5000 W/MF 1) Forced 6) SFa33.5-9.4/50 5) SFa33.5-7.85/50 HBO 5000 W/S 1) Forced 6) SFa33.5-9.4/50 5) SFa33.5-7.85/50 Forced 6) SFa33.5-12/50 5) SFa33.5-12/50 Forced 6) SFa38-14/65 Forced 6) SFYa29-10/42 HBO 5000 W/TA HBO 5001 W/F HBO 5000 W/HK 1) 5) 8) 7) SFXa38-14/65 SFc29-20-12/42 1) Lamp contains overpressure even in cold status - additional safety regulations, supplied with the lamps, have to be fulfilled. Please read Technical bulletin DO-SEM TB 004 carefully 2) Anode underneath May 25, 2016, 17:16:10 Other microlithography lamps above 3,000 W © 2016, OSRAM GmbH. All rights reserved. Page 3 of 5 Product family datasheet 3) Anode on top 4) Distance from end of base to tip of anode or cathode (cold) 5) With cable connection (M 10) 6) Maximum permissible base temperature: 200 °C 7) With cable connection (M12) 8) With cable connection (M 6) __ May 25, 2016, 17:16:10 Other microlithography lamps above 3,000 W © 2016, OSRAM GmbH. All rights reserved. Page 4 of 5 Product family datasheet Safety advice Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions. Application advice For more detailed application information and graphics please see product datasheet. Disclaimer Subject to change without notice. Errors and omission excepted. Always make sure to use the most recent release. __ May 25, 2016, 17:16:10 Other microlithography lamps above 3,000 W © 2016, OSRAM GmbH. All rights reserved. Page 5 of 5