TECHNICAL INFORMATION IONIZATION TECHNOLOGY THAT WORKS IN A VACUUM — VUV IONIZER — This unique system eliminates static charges by using vacuum ultraviolet light (VUV). Conventional ionizers cannot neutralize static electricity in a depressurized (vacuum) state because of their mechanism. However, our VUV ionizer works by directly ionizing residual molecules with vacuum ultraviolet light and so can eliminate static charges even in a depressurized environment. Moreover, this VUV ionizer is also effective in removing electrostatic charges from inert gas environments. Features of this VUV ionizer include no need for air flow and zero residual voltage potential, and so it delivers a clean and completely static-free environment. ■APPLICATIONS ●Dechucking of electrostatic chucks ●Devices utilizing electron beams (SEM, etc.) ●LCD manufacturing equipment ●Organic EL manufacturing equipment ●Hard disk manufacturing equipment ●Film manufacturing equipment ■SEM IMAGE: COMPARISON OF ELECTROSTATIC CHARGE REMOVAL EFFECT Before irradiation After irradiation ■INSTALLATION EXAMPLE (APPLICATION TO SEM) L11798 ICF-70 ROTATING FLANGE L10706 VACUUM FLANGE MgF2 LENS VACUUM CHAMBER VACUUM CHAMBER LIGHT SOURCE HEAD HOLDER SAMPLE VUV MIRROR SAMPLE TLSZC0012EB ■ELECTROSTATIC CHARGE REMOVAL EFFECT Neutralization time vs. distance 0.7 Measurement conditions Charged plate: 25 mm Charged voltage: 1 kV / 100 V Vacuum level: 1 × 10-2 Pa Light source: L12542 4.5 NEUTRALIZATION TIME (s) Neutralization time vs. vacuum level TLSZB0113EA 4 3.5 3 Positive charged Negative charged 2.5 TLSZB0114EA Measurement conditions Charged plate: 25 mm Charged voltage: 1 kV / 100 V Distance between light source output window and charged plate: 300 mm Light source: L12542 0.6 NEUTRALIZATION TIME (s) 5 2 1.5 1 0.5 0.4 Positive charged Negative charged 0.3 0.2 0.1 0.5 0 0 200 400 600 800 1000 1200 0 0.0001 1400 0.001 DISTANCE BETWEEN LIGHT SOURCE OUTPUT WINDOW AND CHARGED PLATE (mm) 0.01 0.1 1 10 VACUUM LEVEL (Pa) ■PRODUCT LINEUP L12542 L11798 Wide angle irradiation type L10706 High output type Close irradiation type ●SPECIFICATIONS ●SPECTRAL DISTRIBUTION TLSOB0079EB L12542 L11798 L10706 Approx. 110 W Approx. 6 W Approx. 35 W 20 times 10 times 1 Light intensity (compared to L10706) (compared to L10706) Cooling method Air cooling by cooling fan Air cooling by cooling fan High-pressure air cooling Guaranteed life* 2000 hours 1000 hours 1000 hours Installation In the air In the air In vacuum (in the air) environment 100 RELATIVE IRRADIANCE (%) Items Lamp rating 80 60 40 20 * End of service life is defined as the time when light intensity at 230 nm falls bellow 50 % of its initial value. 0 100 120 140 160 ●DIRECTIVITY (LIGHT DISTRIBUTION) L12542 L11798 RELATIVE IRRADIANCE (%) L10706 RELATIVE IRADIANCE (%) 100 80 80 80 60 60 30° 10° 0 0° -20 -40 -60 40 20° 20 ANGLE -20° 0° 20 ANGLE -10° TLSZB0150EA HAMAMATSU PHOTONICS K.K. -100 0 -20 -20° -40 -30° 240 400 20° 10° 0° ANGLE -10° -20° -60 -80 -80 -80 -100 0 -60 40 20° 10° -40 -30° 220 60 30° 20 -20 -10° 200 RELATIVE IRADIANCE (%) 100 100 40 180 WAVELENGTH (nm) TLSZB0099EB -100 TLSZB0097EB www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected] Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected] France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected] United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: [email protected] North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 SE-164 40 Kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected] TLSZ9001E02 Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93581733, Fax: (39)02-93581741 E-mail: [email protected] China: Hamamatsu Photonics (China) Co., Ltd.: B1201 Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: [email protected] NOV. 2014 IP