Datasheet

ELECTROSTATIC
REMOVER
L12542
ELECTROSTATIC CHARGE REMOVER
Ideal for eliminating electrostatic charges in a vacuum
OVERVIEW
The L12542 is a newly developed electrostatic charge remover that makes use of VUV (vacuum ultraviolet) light.
Due to its wide irradiation angle about 3 times larger than
our current VUV light source, the L12542 efficiently removes electrostatic charges over large areas in depressurized or vacuum environments.
Up until now two or more VUV light sources were needed
to neutralize electrostatic charges in large areas due to
their limited irradiation angle. The L12542 solves this problem and efficiently neutralizes large areas in a vacuum.
Left: Light source, Right: Power supply
FEATURES
●Large irradiation (neutralizing) area
●Highly efficient ion generation in a vacuum
●No air flow needed
●No overshoot (generates no opposite-polarity static charges)
●No dust and electromagnetic noise emissions
●Long life
Irradiating area
about 9 times
larger
VACUUM CHAMBER
WAFER
VACUUM FLANGE
ELECTROSTATIC
CHUCK
L12542
APPLICATIONS
●Dechucking of electrostatic chucks
●Semiconductor manufacturing equipment
(vacuum process)
●LCD manufacturing equipment
●Organic EL manufacturing equipment
●Hard disk manufacturing equipment
●Film manufacturing equipment
VACUUM CHAMBER
VACUUM FLANGE
WAFER
ELECTROSTATIC
CHUCK
CONVENTIONAL
TYPE
TLSZC0015EB
ELECTROSTATIC CHARGE REMOVAL EFFECT
Neutralization time vs. distance
0.7
Measurement conditions
Charged plate: 25 mm
Charged voltage: 1 kV / 100 V
Vacuum level: 1 × 10-2 Pa
4.5
NEUTRALIZATION TIME (s)
Neutralization time vs. vacuum level
TLSZB0113EA
4
3.5
3
Positive charged
Negative charged
2.5
TLSZB0114EA
Measurement conditions
Charged plate: 25 mm
Charged voltage: 1 kV / 100 V
Distance between light source output
window and charged plate: 300 mm
0.6
NEUTRALIZATION TIME (s)
5
2
1.5
1
0.5
Positive charged
Negative charged
0.4
0.3
0.2
0.1
0.5
0
0
200
400
600
800
1000
1200
1400
0
0.0001
0.001
0.01
0.1
1
10
VACUUM LEVEL (Pa)
DISTANCE BETWEEN LIGHT SOURCE OUTPUT WINDOW AND CHARGED PLATE (mm)
SPECIFICATIONS
●GENERAL RATINGS
Parameter
Spectral distribution 1
Window material
Cooling method
Operating temperature range
Storage temperature range
Operating humidity range
Storage humidity range
Unit
nm
—
—
°C
°C
—
—
Description / Value
115 to 400
MgF2
Air cooling by cooling fan
+10 to +40
0 to +60
Below 80 % (no condensation)
Below 85 % (no condensation)
1The ionizer internal lamp emits intense ultraviolet rays harmful to the eyes and skin. Do not look directly at the emitted light and do not expose skin to light emission.
●RECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C)
Description / Value
25 ± 5
2000 (guaranteed)
500 (expected)
100 V to 240 V (100 V/200 V auto switching), single phase 50 Hz / 60 Hz
90
Parameter
Warm-up time
Light source service life 2
230 nm
160 nm
Input voltage (AC)
Power consumption (Max.)
Unit
s
h
—
VA
2The life end is defined as the time when light output falls to 50% of its initial intensity value while operated under our measurement conditions. Note
that the light output attenuation depends greatly on the environment of the vacuum equipment.
* When ordering a replacement light source, please specify the type number "L12565".
SPECTRAL DISTRIBUTION
100
DIRECTIVITY (LIGHT DISTRIBUTION)
TLSOB0079EB
RELATIVE IRRADIANCE (%)
100
RELATIVE IRRADIANCE (%)
80
80
60
40
60
30°
20°
20
10°
0
0°
ANGLE
40
-20
-40
20
-60
0
100
-10°
-20°
-30°
-80
120
140
160
180
200
220
240
400
-100
WAVELENGTH (nm)
VUV IONIZER L12542
CONVENTIONAL TYPE
TLSZB0105EB
DIMENSIONAL OUTLINES (Unit: mm)
●LIGHT SOURCE (Weight: Approx. 530 g)
160 ± 4
42 ± 4
ARC POINT
78 ± 2
( 26)
48.0 ± 0.1
60
19
VACUUM FLANGE MOUNT
CONNECTOR
(CONNECTION TO POWER SUPPLY)
COOLING FAN
TLSZA0031EB
●POWER SUPPLY (Weight: Approx. 1.8 kg)
CONNECTOR
(CONNECTION TO
LIGHT SOURCE)
EXTERNAL CONTROL TERMINALS
TOP VIEW
DEUTERIUM LAMP STATUS SIGNAL
DEUTERIUM LAMP
ON/OFF CONTROL
COOLING FAN
POWER SWITCH
CONT
DEUTERIUM LAMP
POWER SUPPLY
POWER
POWER
90
OUTPUT
LAMP
LINE INPUT
F1 : T 2A. 250V
117
200
FRONT VIEW
SIDE VIEW
REAR VIEW
LIGHT SOURCE TO POWER SUPPLY CONNECTION CABLE LENGTH: 1800 ± 50
TLSZA0032EB
RELATED PRODUCTS
■VACUUM FLANGE
●OVERVIEW
Various vacuum flanges are available for the L12542 VUV ionizer. The E3444-02 mount flange meets ICF114 flange
specifications and so easily attaches to ports of most vacuum equipment. We also provide other vacuum flanges
including flanges made to JIS (Japanese Industrial Standards) specifications, so users can select the best flange that
matches their vacuum vessel.
●SPECIFICATIONS
Parameter
Sealing method
Flange
Mount flange
Seeling force retention
E3444
Regular
—
1.33 × 10-4
E3444-01
O-ring
JIS VF50
JIS VG50
Pa L/s or less (1 × 10-6 Torr L/s)
E3444-02
ICF114
ICF114
●DIMENSIONAL OUTLINE (Unit: mm)
40
E3444
4- 8.4
10
O-RING
70.0 ± 0.3
P.C.D. 106
40
120
7
20
TLSOA0097EB
40
E3444-01
4- 10
10
O-RING
70.0 ± 0.3
P.C.D. 100
40
120
7
20
TLSOA0098EB
47.5
E3444-02
17.5
8- 8.4
O-RING
70.0 ± 0.3
114
P.C.D. 92.2
40
7
20
TLSOA0053EC
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are
subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2014 Hamamatsu Photonics K.K.
HAMAMATSU PHOTONICS K.K.
www.hamamatsu.com
HAMAMATSU PHOTONICS K.K., Electron Tube Division
314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected]
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected]
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected]
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: [email protected]
North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 SE-164 40 Kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected]
TLSZ1018E03
Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93581733, Fax: (39)02-93581741 E-mail: [email protected]
China: Hamamatsu Photonics (China) Co., Ltd.: B1201 Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: [email protected]
NOV. 2014 IP
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