PART NUMBER: ± 10g Tri-Axis Accelerometer Specifications Rev. A Dec 08 APPROVED BY 36 Thornwood Drive KXD94-2802 DATE J. Bergstrom 10/05/09 CUST. MGR. S. Patel 10/05/09 Fax: 607-257-1146 TEST MGR. J. Chong 12/22/08 www.kionix.com VP ENG. T. Davis 12/22/08 Ithaca, New York 14850 PROD. MGR. Tel: 607-257-1080 ECN # PCN # REV PG # A REVISION DESCRIPTION Initial Release Updated approval list. Corrected Table 4 pin description for AUX In. DATE REV'D BY 12/22/08 10/05/09 J. Bergstrom "Kionix" is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. No license is granted by implication or otherwise under any patent or other rights of Kionix. The information contained herein is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution. Kionix also reserves the right to change product specifications or discontinue this product at any time without prior notice. This publication supersedes and replaces all information previously supplied. © 2008 Kionix, Inc. – All rights reserved Page 1 of 9 PART NUMBER: ± 10g Tri-Axis Accelerometer KXD94-2802 Specifications Rev. A Dec 08 Product Description The KXD94-2802 is a silicon micromachined accelerometer with a full-scale output range of ±10g (±98 m/s2). The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and self-test. The accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package operating from a 2.5 – 5.25V DC supply. Figure 1. Functional Diagram X Sensor Charge Amplifier Self 10 Test Z Sensor C2 Charge Amplifier 32K 1kHz LPF Output Y 13 C3 Charge Amplifier 32K Output Z 14 C4 Oscillator GND 12 Mux 4 Aux In Logic GND 3 Page 2 of 9 Output X 2 Temp Sensor Y Sensor Vdd 8 32K 9 11 Enable NC 6 7 5 S0 S1 Vmux PART NUMBER: ± 10g Tri-Axis Accelerometer KXD94-2802 Specifications Rev. A Dec 08 Product Specifications Table 1. Mechanical (specifications are for operation at Vdd = 5.0 V and T = 25ºC unless stated otherwise) Parameters Operating Temperature Range Zero-g Offset Zero-g Offset Variation from RT over Temp. Sensitivity Sensitivity Variation from RT over Temp. ! ! Units Min Typical Max ºC V mg/ºC mV/g %/ºC -40 2.45 2.50 ±1.0 200 ±0.01 ±0.2 (xy) ±0.1 (z) ±1.6 (xy) ±0.2 (z) 0.1 2.0 6.5 (xy) 3.6 (z) 800 100 85 2.55 Offset Ratiometric Error (Vdd = 5.0V ± 5%) % Sensitivity Ratiometric Error (Vdd = 5.0± 5%) % Non-Linearity Cross Axis Sensitivity 193 % of FS % Self Test Output change on Activation g 1 Bandwidth (-3dB) Noise Density (on filter pins) Hz µg / √Hz 207 Notes: 1. Internal 1 kHz low pass filter. Lower frequencies are user definable with external capacitors. Table 2. Electrical (specifications are for operation at Vdd = 5.0 V and T = 25ºC unless stated otherwise) Parameters Supply Voltage (Vdd) Operating Operating Current Consumption Standby 1 Input Voltage for Logic Low 1 Input Voltage for Logic High Analog Output Resistance(Rout) ! Units Min Typical Max V mA 2.5 0.90 0.8 * Vdd 24 5.0 1.20 32 5.25 1.50 5 0.2 * Vdd 40 µA V V kΩ Notes: 1. The voltage level required for enabling or disabling self-test function or selecting multiplexer output. 2. Special Characteristics are designated with ‘ ! ‘. Page 3 of 9 PART NUMBER: ± 10g Tri-Axis Accelerometer KXD94-2802 Specifications Rev. A Dec 08 Table 3. Environmental Units Min Target Max Supply Voltage (Vdd) Absolute Limits Maximum Operating Temperature Range Storage Temperature Range Mech. Shock (powered and unpowered) Parameters V ºC ºC g -0.3 -40 -55 - - 7.0 125 150 5000 for 0.5ms ESD V - - 3000 HBM Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling can cause permanent damage to the device. The QFN plastic package conforms to European Union Directive 2002/95/EC on the restriction of the use of certain hazardous substances in electrical and electronic equipment (RoHS). Soldering Soldering recommendations available upon request or from www.kionix.com. Page 4 of 9 PART NUMBER: ± 10g Tri-Axis Accelerometer KXD94-2802 Specifications Rev. A Dec 08 Application Schematic X C2 Aux In Vmux S0 S1 1 14 2 13 3 12 4 11 KXD94 5 10 6 9 7 8 Z Y C3 C4 ST Enable Vdd C1 Table 4. KXD94 Pad Descriptions Pad 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Name Description NC X output GND Aux In VMUX S0 S1 Vdd Enable ST NC GND Y output Z output Center pad Not Connected Internally (can be connected to Vdd or Gnd) Analog output of the x-channel. Optionally, a capacitor (C2) placed between this pin and ground will form a low pass filter. Ground Auxillary input- ground if not used VMUX output – buffered analog output for X channel MUX selector 0 (See Output Select Table). Connect to Vdd or Ground if not used. MUX selector 1 (See Output Select Table). Connect to Vdd or Ground if not used. The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C1). Enable: High - Normal operation; Low - Device is in standby, power down mode Self Test. The output of a properly functioning part will increase when Vdd is applied to the self-test pin. (See Table 2) Not Connected Internally (can be connected to Vdd or Gnd) Ground Analog output of the y-channel. Optionally, a capacitor (C3) placed between this pin and ground will form a low pass filter. Analog output of the z-channel. Optionally, a capacitor (C4) placed between this pin and ground will form a low pass filter. Ground Page 5 of 9 PART NUMBER: ± 10g Tri-Axis Accelerometer Specifications KXD94-2802 Rev. A Dec 08 Application Design Equations 1. The internal 1kHz low pass filter determines the bandwidth. The user can lower the bandwidth by placing filter capacitors connected from pin 2, 13, and 14 to ground. The response is single pole. Given a desired bandwidth, fBW, the filter capacitors are determined by: C2 = C3 = C4 = 4.97 x10 −6 f BW 2. The response time (RT) is determined by the equation: RT = 5 × Rint × Cext Rint is the 32KΩ internal resistor and Cext is the external resistor C2, C3, or C4. Using the Multiplexed Output of the KXD94 Multiplexer Data Select The KXD94 features an integrated 4-channel multiplexer. This feature reduces system MCU requirements to only 1 ADC and 2 digital I/O’s. The KXD94 uses two select inputs (S0, S1) to control the data flow from Vmux. When a microprocessor toggles the select inputs, the desired output is attained based on the select table. See Table 2 for Logic 0 and Logic 1 voltage levels. Table 5. Output Select Table S1 0 0 1 1 Page 6 of 9 S0 0 1 0 1 Vmux X Output Z Output Y Output Aux. In PART NUMBER: ± 10g Tri-Axis Accelerometer KXD94-2802 Specifications Rev. A Dec 08 Data Sampling Rate When operating in its multiplexed mode, the KXD94 has the ability to achieve very high data sampling rates. Internally, the sensor elements (X, Y, and Z) are sequentially sampled in a “round robin” fashion at a rate of 32KHz per axis. Note that this is a differential capacitance sampling of each sensor element, which stores an analog voltage on the filter cap for each axis. Combine this high sensor element sampling rate with the short 5µS settling time of the integrated multiplexer, and the user can achieve a performance very close to that of the 3 separate analog outputs. This is more than sufficient to eliminate any aliasing in the final application since the KXD94 will be operating with a typical bandwidth of ~50Hz and a maximum of 1000Hz. Test Specifications ! Special Characteristics: These characteristics have been identified as being critical to the customer. Every part is tested to verify its conformance to specification prior to shipment. Table 6. Test Specifications Parameter Zero-g Offset @ RT Sensitivity @ RT Current Consumption Operating Page 7 of 9 Specification Test Conditions 2.50 ± 0.05 V 25ºC, Vdd = 5.0V 200 ± 7 mV/g 0.9 <= Idd <= 1.5 mA 25ºC, Vdd = 5.0V 25ºC, Vdd = 5.0V PART NUMBER: ± 10g Tri-Axis Accelerometer Specifications Rev. A Dec 08 Package Dimensions and Orientation: 5 x 5 x 1.2mm 14 pin DFN +Y +X +Z +Z +X All dimensions and tolerances conform to ASME Y14.5M-1994 Dimension A B C D E F G H Page 8 of 9 Min 1.10 0.18 0.35 3.50 4.20 mm Nom 5.00 5.00 1.20 0.23 0.50 0.40 3.60 4.30 Max Min 1.30 0.28 0.043 0.007 0.45 3.70 4.40 0.014 0.138 0.165 KXD94-2802 inch Nom 0.197 0.197 0.047 0.009 0.020 0.016 0.142 0.169 Max 0.051 0.011 0.018 0.146 0.173 PART NUMBER: ± 10g Tri-Axis Accelerometer KXD94-2802 Specifications Rev. A Dec 08 When device is accelerated in +X, +Y, or +Z direction, the output will increase. Static X/Y/Z Output Response versus Orientation to Earth’s surface (1g): Position Diagram 1 2 3 4 6 Bottom Bottom Top X Y Z 2.50 V 2.70 V 2.50 V 2.70 V 2.50 V 2.50 V 2.50 V 2.30 V 2.50 V 2.30 V 2.50 V 2.50 V 2.50 V 2.50 V 2.70 V 2.50 V 2.50 V 2.30 V X-Polarity Y-Polarity Z-Polarity 0 + 0 + 0 0 0 0 0 0 0 0 + 0 0 - (1g) Earth’s Surface Page 9 of 9 5 Top