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Confocal Fiber Displacement Sensor ZW Series
The 24×24×64-mm Sensor Head redefines the meaning of ultra-compact
New
Right-angle type
Standard Feature
» Robust Sensor Head Structure
» Ultra-compact and Ultra-lightweight
» Stable Measurements for Any Material
2
Goes beyond traditional displacement sensor
concepts with a new confocal principle.
Displacement Sensors are indispensable
in non-contact measurement of heights,
thicknesses, and other dimensions in
machine operation control. However,
building them into the system has always
presented problems. The Confocal Fiber
Displacement ZW Series Sensor solves
these problems in ways that were not
possible with traditional triangulation.
The ZW-series Sensors provide the
compact size, light weight, immunity to
electrical/magnetic noise, and other
features to make them ideal for solving
installation space problems.
And OMRON’s new confocal principle
provides the measurement resolution
that is needed for operation control.
The ZW Series solves the problems that
came with laser triangulation, such as
deviations between different materials
and inclination tolerance.
Two Types of Sensor Heads
Straight type
Expanded
Communications
Right-angle type
Standard-feature
EtherCAT
P.10
Standard-feature EtherNet/IP ™
ZW
ZW-S40
ZW
ZW-S30
ZW-SR40
ZW
ZW-S20
Measurin
Measuring
center dist
distance
ZW
ZW-S07
ZW-S
ZW
SR20
ZW-SR20
ZW-SR07
ZWZW-SR07
ZW-SR
SR07
77
(mm)
40
30
20
7
0
-EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.
-EtherNet/IP™ are the trademarks of ODVA.
-ATI™, Radeon™ are trademarks of Advanced Micro Devices, Inc. in USA.
-Sysmac is a trademark or registered trademark of OMRON Corporation in Japan and other countries for OMRON factory automation products.
-Microsoft, Visual Basic, and Windows are either registered trademark of Microsoft Corporation in the United States and other countries.
-Other company names and product names in this document are the trademarks or registered trademarks of their respective companies.
3
The Three Benefits of OMRON’s White Light Confocal Principle
Ultra-compact and
Ultra-lightweight
The slim design measures only 24 × 24 mm.
It weighs only 105 g. This incredibly compact
size could not be achieved with traditional
triangulation. Any objects can be measured
with the Sensor mounted perpendicular to
them to save even more space.
P.4
Stable Measurements for
Any Material
ss
s
Sub
ror
Mir
S
SU
e
trat
Gla
ic
am
cer
ite
Wh
You can measure objects of any material or
color at the same position. A wide angle
characteristic of ±8° enables high-resolution
measurement of the position even for large
objects with mirror-like surfaces without
being affected by warping.
P.6
Robust Sensor
Head Structure
No electronic
parts.
The sensor head design maintains reliable
operation in installations with electronic and
magnetic noise. Devices in close proximity
will not be affected by noise or heat from the
sensor head or fiber cables due to their
advanced design.
P.8
4
Ultra-compact and Ultra-lightweight
Utilize Narrow Spaces in Machines
The 24 × 24-mm Sensor Head fits easily into essentially any machine.
Height Con
Control
ntr
trol
ol o
off a
Dispenser
Dispense
serr Nozzle
No
Triangulation sensor
Volu
Volume
rat
ratio
1/8 *
Weig
Weight
rat
ratio
1/8
/ *
64mm
*In-house comparisons.
24mm
24mm
Mounting area Reduced to 1/7*
*In-house comparison.
With traditional triangulation, it was necessary to use either diffuse reflection or regular reflection depending on the material. However, the confocal principle used for the ZW Series eliminates the need to change the
Sensor installation even if the material changes.
Traditional Triangulation Model
Diffuse-reflective
Sensor
Regular-reflective
Sensor
ZW Series
The Sensor can be installed
perpendicular to the object
regardless of the material.
Thickness
s Measurement
Me
Tube
of a Metal Tub
be
Substrate
Glass
Substrate
Glass
Thickness Inspection of
Small Electronic Parts
Installation in Tight Spaces
Space restrictions, heat generation, and mutual interference often prevent side-by-side installation of
many traditional triangulation sensors. The compact, non-heat generating ZW-series Sensor Head
ad
eliminates these problem. Furthermore, the right-angle type Sensor Head can be installed in a limited
space over workpieces without a turning mirror.
The traditional sensors generally measure the thickness of a workpiece by calculating the difference
between the heights of the stage and the top surface of the workpiece. The ZW-series Sensor Head
can be installed in the small space under the stage to directly measure the height from the top and
bottom surfaces of the workpiece, which enables more accurate thickness inspection.
Minimum pitch
24 mm
5
Smooth Movement and Stopping
Using power cylinders to move sensors to measurement positions
only when necessary so that the sensors do not interfere with machine
motion resulting in delays in measurements while waiting for settling
time
sensors
ti
ime if the sens
nsor
orss are
are heavy.
heav
he
avy.
y. A ZW-series
ZWW series Sensor
Sen
e sor Head, however,
howe
ever,
weighs only 105 g so that
tha
hatt measurements
meas
me
asur
u em
men
ents
ts can
can be
be made
m de as
ma
as soon
so as the
cylinder
cylind
der operation
ope
peration stops.
ZW Series
Time
Degree of
oscillation
Moved.
Degree of
oscillation
Stopped.
Bonding Height Inspe
Inspection
Traditional Triangulation Model
Time
Flexible
Flexib
le Fiber Cable for Easy Installation
The Controller
The
Cont
Co
ntro
rollller
er connects
c
to the
Sensor
S
Se
ens
nsor
ns
o Head
or
Hea
e d with
wit a 2-mm-diameter Flexible
Flexiibl
ble
e Fiber
Fib
Fi
b Cable. The
Cable has
ha
as cleared
clea
cl
eare
re a bending test
repeticonsisting
g of
of 2,000,000*
2,0
2,
0
tions
reliable
tition
onss for
for re
reli
liab
able
le application on
moving parts.
wit OMRON’s bending
*Cable was tested with
2,00
test consisting of 2,000,000
bends to a 70-mm
1
bending radius and 1,000,000
bends to a
radiu
20-mm bending radius.
Ultrathin
Cable
Cable diameter: 2 mm
Minimum bending radius: 20 mm
R
Installation in a
Cable Carrier
Cable Extendable
Exten
to 32 m
An Extension Fiber
F
Cable can be used between the Sensor Head and Controller to extend the distance to up to
32 m. Attach the Sensor Head to a moving part and place the Controller in the control panel or other convenient
location to achieve a flexible system design.
Standard Fiber Cable
0.3 or 2 m
Extension Fiber Cable
30 m max.
Connecting adapter
Sensor Head
Controllerr
6
Stable Measurements for Any Material
with Superior Angle Characteristic
There is no need to change or tune the Sensor for each
material. Even if the material changes, you can continue to
achieve stable measurements with the same Sensor from the
same mounting position.
Stable Measurements from the Same
Mounting Position Even for Different Materials
Regular-reflective workpiece
Mirror
Diffuse-reflective workpiece
Glass
SUS
White ceramic
Substrate
ZW Series
Linearity
±2 μm or less
Stable Measurements
for Any Material to
±2 μm (with the ZW-S20)
±3 μm or less
±4 μm or less
Traditional Triangulation Model
±5 μm or less
Large discrepancy between materials.
Linearity for Various Materials
Stable Measurements
across Boundaries
between Materials
ZW Series
Traditional Triangulation Model
(in the case of form ZW-S20)
20
Installation for Diffuse Reflection
10
0
-10
-20
30
Displacement(μm)
Displacement(μm)
30
Substrate
(Comparisons for Sensor with a
measuring center distance of 20 mm.)
10
0
-10
-20
-30
-30
Measurement Area
20
Movement
Movement
Compact Sensor Heads Provide Stable
Measurements of Thin Transparent Glass
100
1099
Received light amount
2098 3097 4096
0.2
To stably measure transparent glass, the received light waveforms from the front and back surfaces of the glass must be
separated. With thin transparent glass, the influence of lens
aberration makes it difficult to achieve separation with compact
sensor heads. Even with its compact size that saves space, the
ZW-S07 stably measures transparent surface displacement on
glass as thin as 70 μm min., a feat not easily achieved by
previous compact sensor heads.
(All measurement graphs represent typical examples.)
0.1
Glass thickness:
70 μm min.*
P1
P2
0
* Reference values considering refractive index of glass
-0.1
ZW-S07
ZW-S40
ZW-S20
Model ZW-SR07 ZW-SR20 ZW-S30 ZW-SR40
Glass thickness min.
(μm)
max.
70
900
150
3,000
600
9,000
900
18,000
P1
P2
-0.2
Received Waveform for ZW-series Sensor
7
Positioning of
a Lens Module
Superior Angle Characteristic
When measuring an object that has a mirror-like
surface with traditional triangulation, performance is
greatly reduced depending on the angle of the Sensor.
When many Sensors are used for height control during
glass conveyance, the angles of the Sensors must be
adjusted with high precision during setup. The confocal
Sensor ZW series enables high-resolution measurements without strict angle adjustment. This results in
reduction of cost and space for the adjusting jig and
time for adjustment.
* This is not a guaranteed value.
Refer to Characteristic Data (P23)
for typical examples.
Height Control during
Glass Conveyance
Angle
characteristic
±8° *
Traditional Triangulation Model
ZW Series
With triangulation, even if the angle is adjusted with high precision during
ZW-series Sensors operate on the confocal principle, so high-
the setup of the Sensor, stable measurement results are difficult to obtain
resolution measurements are possible regardless of inclination and
when the measurement object is warped or inclined.
warping of the measurement object.
20
+4° Measurement is
not possible.
+2°
10
+1.5°
0°
0
-1.5°
-10
-2°
-4° Measurement is
not possible.
-20
-30
-1
-0.5
0
0.5
1
30
Error (μm)
Error (μm)
30
+4°
20
+2°
10
+1.5°
0°
0
-1.5°
-10
-2°
-20
-30
-1
-4°
-0.5
Distance (mm)
0
0.5
Distance (mm)
1
(Sensor: ZW-S20)
Further Benefits of Confocal Principle
No Discrepancy in the Measurement Point
Traditional Triangulation Model
ZW Series
With triangulation, the measurement position and spot size vary with
the height. This means there are times when the position cannot be
measured with high resolution due to warping and inclination. With
the confocal principle used for the ZW Series, the measurement point
remains the same at any position in the measuring range so that
precise measurements can always be made.
Measurement position varies
with the height
No discrepancy in the
measurement position
Failure to measure due to
obstruction of the reflected light
by the wall.
The reflected light is not
obstructed by the wall.
Measurement in Confined Spaces
When the triangulation sensor measures the inside of a narrow tube
or the height of a small depression, the wall often obstructs the
reflected light, and the orientation of the sensor and workpiece must
be adjusted many times. The ZW Series using the confocal principle
can measure the points in narrow spaces or small objects, without
changing its installation orientation, because the emitted light and
reflected light are positioned along the same axis.
8
Robust Sensor Head Structure
Reduced Work for
EMC Countermeasures
No Noise
Not Affected by Noise
To ensure high-resolution measurements with normal sensors, countermeasures must be implemented to protect the sensor from the electromagnetic noise that is emitted by any nearby devices.The ZW-series
Sensor Heads, however, contain no electronic parts to enable stable
measurements even near power sections. Also, the Fiber Cable that
connects the Sensor Head to the Controller can be placed near power
lines and other cables that emit noise without affecting operation.
Traditional Triangulation Model
Changes in Measurement
Values Caused by Noise
ZW Series
Measurements are not affected by
noise and remain stable.
Measurement
value
Measurement
value
Noise
waveform
Noise
waveform
Time
Time
No Noise Emission
No electronic parts are used in the ZW-series Sensor Heads or
Fiber Cables, so they give off no electromagnetic noise. You can
therefore use them reliably together with other devices.
Traditional Tr
Triangulation
riangulation Mode
Model
Electronic parts
ZW Series
Fiber Cable
Substrate Height Inspection
No electronic parts.
Electroma
omagne
m gneti
gnetic
gne
tic noise
no
n
oise
oise
is is
is emitted from
fro
om
Electromagnetic
the sensor and from cables.
No Noise Emitted.
9
No Heat Generation
Reduced Work in Thermal Design
In high-resolution machine control, the heat generated by a sensor head
can adversely affect nearby equipment and cause the error to increase.
The ZW-series Sensor Heads, however, generate no heat and therefore
do not affect nearby equipment. You can also install many Sensor Heads
side by side and still be sure of reliable operation.
Traditional Triangulation Model
ZW Series
+2℃
+0℃
No electronic
parts in the
Sensor Head.
Change in Temperature after 1.5 Hours of Operation
An LED is used in
place of a laser for
the light source to
eliminate the need
for safety measures.
No Electronic Parts
Reduced Maintenance Costs
Displacement sensors are often installed in moving applications and
other installations that are subject to vibration. It is important that they
can withstand this type of requirement. The ZW series Sensor Heads are
designed for this type of environment, they have no electronic parts or
PCB's that a standard triangulation sensor contains. The reduction of
parts to lenses and fiber cables reduces the maintenance requirements,
and the LED light source also eliminates the standard safety measures
required for lasers.
Traditional Triangulation Model
Electric circuits
and the light
source are
contained in the
Controller.
ZW Series
Laser diode
Electronic parts
Specia
Special set of
lenses that
require no drive
system.
system
No electronic
parts.
10
EtherCAT
Machine Control Network
The EtherCAT high-speed open network was optimized for machine control. The ZW-series Sensors are the first OMRON Displacement Sensors
with EtherCAT to provide a highly efficient design for high-precision machine control applications that use measurement results to control machine
operation.
Combining Height Information and Position Coordinates
EtherCAT can be used to connect to servo drives or encoder input
p slaves to quickly
q
y get
g the position
p
coordinates and ZW displacement.
p
The
height information and XY position coordinates can be easily
eassily linked so that the machine control applications can increase processing precision
pr
in respect to the height and the inspection applications benefit
benefit from maintenance,
maintenan
nce, such as helping to isolate errors or perform trend analysis.
ana
NJ/NX-Series Machine
Automation Controller
S
Servomotor/
Servo Drive
S
Measurement point
Measurement result Z
Servo/encoder X
Servo/encoder Y
Point 1
Z1
X1
Y1
Machine Controls
Inspection Applications
Point 2
Z2
X2
Y2
Increased
processing precision
Isolation of errors
Point 3
Z3
X3
Y3
No need for
constant-speed
control
Trend management
for specific positions
Results of Linking with the Position Coordinates
11
High-speed Digital Output
Shorter Machine Takt Times
With previous digital (serial) outputs through Ethernet or RS-232C, the response period for measurement commands was both inconsistent and slow, making them unsuitable for realtime control. With EtherCAT, a constant period as short as 500 μs enables continuous
digital (serial) outputs so that the overall workpiece height information can be mapped at high speed.
Previous Serial Output
EtherCAT Output for ZW-series Sensor
The outputs for command inputs required
5 ms or longer and were not consistent.
Measurement values are output continuously at
a fixed period that is as short as 500 μs.
Measurement Commands
Communications
Processing
Communications
Output
Output
Output
Output
4 ms or longer
Continuous outputs at a period
Communications
Processing
Communications
Output
that is as short as
500 μs .
4 ms or longer
Communications
Processing
Communications
8 Times Faster
Than OMRON’s
Previous Models
Output
4 ms or longer
Tracing Machine Movement
Fewer Steps in System Commissioning
You can develop, test, and adjust devices that are connected via EtherCAT with just one Support Software package. The Automation
Software Sysmac Studio allows you to creatively design your controls. You can see the entire range from sensing to motion control to
reduce the number of steps required to commission the system or to aid in troubleshooting. There are also plenty of offline features to
debug signal control programming. You can also simulate machine operation before actual application onsite.
Data Trace
Debugging Control Programming
Note: Sysmac Studio version 1.05 or higher is required for these software interface features described.
Long-distance Wiring: 100 m
Flexible Wiring for Machines
You can use EtherCAT to connect slaves that are up to 100 m apart. With digital communications, error does not occur due to the
influences of ambient noise. This solves the previous problems with analog output methods, such as the inability to support long-distance
transmissions and noise countermeasures, and enables reliable installation in previously difficult large-scale machines.
-Sysmac is a trademark or registered trademark of OMRON Corporation in Japan and other countries for OMRON factory automation products.
-Windows is registered trademarks of Microsoft Corporation in the USA and other countries.
-Other company names and product names in this document are the trademarks or registered trademarks of their respective companies.
-Microsoft product screen shot(s) reprinted with permission from Microsoft Corporation.
12
Multipoint Measurement with
EtherCAT Concurrency
EtherCAT communications provide both high speed and time-consistent performance so that integrated controls
for Sensors and other slaves can be achieved in realtime. Even for multipoint measurements for Displacement
Sensor applications, the following advantages are provided.
Reduced Wiring: Only Two Cables
Less Wiring for Many Sensors
With previous parallel I/O, manual wiring was required for dozens of points, and it
was necessary to take sufficient caution to avoid sources of noise. This required
extensive time to use many Displacement Sensors in a row. With EtherCAT, all
you have to do is connect two lines for each Controller.
Previously
Dozens
of
Cables
Servomotor/
Servo Drive
ZW Series
Only
Two
Cables
NJ/NX-Series Machine
Automation Controller
One Software
Fewer Steps in System Design
You can set up all of the slaves that are connected via EtherCAT with just the Automation Software Sysmac
Studio. Even when you combine many Sensors, you can copy setup data to effectively integrate setup work or
you can easily program calculations between the Sensors.
Sysmac Studio
Sensor 1
Increased efficiency in
copying setups
Sensor 2
Efficient Setup of Measurement
Conditions for Many Sensors
Easy Programming of Thickness Calculations
13
Synchronous Measurements
Fewer Thickness Errors due
to Vibration
The highly precise synchronization performance of EtherCAT reduces the time error in
measurements between different Sensors to 1 μs or less. Synchronous measurement is useful
when measurements must be made with more than one Sensor at the same time, such as
measurements from both sides of a sheet or inclination control of a substrate.
Previously Not Synchronized
The thickness
includes error.
Vibration that occurs duringg
measurements taken at different
nt
time causes the output thickness
to be larger than normal.
ZW
Measurements taken
at different times.
Synchronized with
EtherCAT
Thickness
Thickness measurements of
sheets for lithium ion batteries.
T he correc t thick ness iss
me asured wi thout being
g
influenced by vibration.
Synchronized
Continuous Measurements of Sheets without Position Offset
When Sensors are installed in a row to continuously log sheet height, nonsynchronous measurements can cause offsets in the lateral measurement positions. With
synchronous measurements using EtherCAT, you can continuously log sheet height
with all of the Sensors at the same lateral position.
Previously: Not Synchronized
ZW: Synchronized with EtherCAT
14
Robust Sensor Head Structure
To achieve a compact Sensor Head and high-resolution measurements,
the ZW Series uses a white light confocal principle to detect objects.
This principle is described below.
Confocal principle
Confocal Light Emission and Reception
Based on the confocal principle, the emitted light and received light are positioned along the
same axis. Light is received only when it is focused on the measurement object, allowing the
height to be calculated. Unlike triangulation, the received light waveform is not disrupted by
the material or inclination of the measurement object. The received light waveform is always
stable, which enables high-resolution measurements.
Object Located at Focal Point
The reflected light is focused at the same
point as the emitted light.The reflected
light becomes the received light signal.
Object Not Located
at Focal Point
Inclination and
Differences in Materials
Reflected light is not received
because the reflected light is
not focused at the light emission point.
Even if the measurement object
is inclined or contains different
materials, the reflected light will
be focused at the light emission
point as long as the measurement object is at the focal point.
Light
emission
point
Light
emission
point
=
=
Light emission point
Focal point
White light
Emitted light
Reflected light
Focal
point
Confocal point
Focal point
The height is calculated from the
position at which the reflected light
was received.
White
OCFL Module
The OCFL module contains a special
lens set developed by OMRON that
changes the focal point for each color
(i.e., wavelength) of white light.The spot
diameter is the same at any position
within the measuring range. It does not
change the way it does for a triangulation. High-precision lens manufacturing
technology has allowed us to achieve a
is extremely small
lens structure that
t
not require a drive
and that also does
d
mechanism.
Light is not
received.
White Light Separation into Colors
with Different Wavelengths at Emission
Patent Pending
The white light from the LED is focused at different points for each color (i.e., wavelength) due to a special
set of lenses in the OCFL module in the Sensor Head. As a result, only the color of light that is focused on
the measurement object is returned, allowing the distance from the Sensor Head to the measurement
object to be calculated based on the color of the reflected light. The Sensor Head contains the special set
of lenses that separates white light into different colors and the Controller contains the white LED light
source, and the spectroscope and processor that convert the color of the reflected light to a distance. There
is no needs for a lens drive mechanism or electronic parts in the Sensor Head, even though they were
considered to be standard in previous confocal models. This achieves a much more compact design and
much greater immunity to noise than triangulation models and or previous confocal models.
The height is detected based on
the wavelength.
Fiber Cable
White light
High
Pass
White LED
light source
Low
100.300
100.250
ZERO
ENABLE
spectroscope
OCFL Module
The reflected light of the wavelength that was
focused on the surface of the measurement
object passes through the fiber and the spectroscope in the Controller converts the wavelength to a distance.
Receiver
Distance
USB
Processor
RS232C
PARALLEL
*OCFL : Omron Ch
Chromatic Focus Lens
Focal point
ROM
HEAD
NEAR
Colors are separated
along the height direction.
FAR
Amount of
received light
15
Problems with Previous Models
Triangulation
Laser diode
FAR
Reciever
NEAR
Triangulation measures the height of an object based on the
position of the spot on a receiver (CCD or CMOS). The peak,
center of gravity, and other features are calculated from the
received light waveform to reduce error, but in principle, the
received waveform is offset or disrupted due to differences in
materials or inclination. This results in measurement error.
Light Reception for Different Materials
Emission lens
Receiver
Reception lens
Ideal
waveform
Waveform
disrupted
NEAR
FAR
Different materials have different
reflection factors. This disrupts the
waveform that is received on the
receiver.The peak in the waveform
or the center of gravity are used to
calculate the height, but error will
remain in the measurement results.
Light Reception for Inclination
Receiver
Waveform
disrupted
NEAR
Ideal
waveform
If the measurement object is inclined, the received waveform is
offset or disrupted due to the effects of aberration. This results in
measurement error.
FAR
Normal Confocal Principle
Laser diode
Processor
Pinhole
Receiver
Drive processor
Lens
+
Lens drive
circuit
Move the stage
and lens vertically.
Stage
In a normal confocal model, a stage and lens are driven vertically
to change the focal point. This requires a more complex structure, and the large number of parts interferes with downsizing.
The use of a laser beam increases the chances of interference,
and the received light waveform can be disrupted by the surface
conditions within the small spot on the measurement object.
16
System Configuration
EtherCAT connections
Basic Configuration
Controller
ZW-CE1@
Other
EtherCAT
Slaves
Sensor Head
ZW-S@@@
EtherCAT Cable
(RJ45/RJ45)
Calibration ROM
(included with Sensor Head)
EtherCAT Cable
(Select the cable that matches
the Slave's connector.)
EtherCAT Cable
(RJ45/RJ45)
EtherCAT Cable
(RJ45/RJ45)
EtherCAT Master
Setting Software
Ethernet *2
/USB
Machine Automation Controller
NJ/NX series
Sysmac Studio
Standard Edition
SYSMAC-SE20@@
Analog, EtherNet/IP, Ethernet, RS-232C and Parallel connections
Basic Configuration
Controller *1
ZW-CE1@
Sensor Head
ZW-S@@@
Calibration ROM
(included with Sensor Head)
Analog, RS-232C and Parallel
Switching
Hubs
Control PLC
EtherNet/IP *2, Ethernet *2
Setting Software
or
Sysmac Studio
Measurement Sensor Edition
[email protected]
Smart Monitor ZW
ZW-SW101
*1 Controllers with binary outputs are also available (ZW-C10T/-C15T).
Please contact your OMRON sales representative for details.
*2 Prepare commercially available Ethernet cable satisfying the following requirements:
• Category 5e or more, 30 m or less
• RJ45 connector (8-pin modular jack)
• For direct connection: Select cross cable.
• For connection through an industrial switching hub: Select straight cable.
17
Order Information
Sensor Head
Right-angle type
Straight type
40±6mm
40±6mm
40
30
20
7
0
30±3mm
20±1mm
20±1mm
7±0.3mm
7±0.3mm
Measuring range
Spot diameter
Static resolution
Model
7±0.3mm
18µm dia.
0.25µm
ZW-S07 2M
ZW-S07 0.3M
20±1mm
40µm dia.
0.25µm
ZW-S20 2M
ZW-S20 0.3M
30±3mm
60µm dia.
0.25µm
ZW-S30 2M
ZW-S30 0.3M
7±0.3mm
18µm dia.
0.25µm
ZW-SR07 2M
ZW-SR07 0.3M
40±6mm
80µm dia.
0.25µm
ZW-S40 2M
ZW-S40 0.3M
40±6mm
80µm dia.
0.25µm
ZW-SR40 2M
ZW-SR40 0.3M
20±1mm
40µm dia.
0.25µm
ZW-SR20 2M
ZW-SR20 0.3M
●Controller with EtherCAT
Appearance
Power supply
Output type
DC24V
Model
NPN
ZW-CE10T
PNP
ZW-CE15T
Note: Controllers with binary outputs are also available (ZW-C10T/-C15T). Please contact your OMRON sales representative for details.
●Cable
Appearance
Item
Sensor Head - Controller Extension
Fiber Cable (flexible cable) (Fiber
Adapter ZW-XFC provided)
Cable length
2m
5m
10m
20m
30m
Model
ZW-XF02R
ZW-XF05R
ZW-XF10R
ZW-XF20R
ZW-XF30R
Fiber Adapter (between Sensor Head
pre-wired cable and Extension Fiber
Cable)
⎯
ZW-XFC
Parallel cable for [email protected] 32-pole*
(included with Controller [email protected])
2m
ZW-XCP2E
RS-232C Cable for personal computer
2m
ZW-XRS2
RS-232C Cable for PLC/programmable
terminal
2m
ZW-XPT2
* A parallel cable for Controllers with binary outputs is also available (ZW-XCP2). Please contact your OMRON sales representative for details.
●Automation Software Sysmac Studio
Please purchase a DVD and required number of licenses the first time you purchase the Sysmac Studio. DVDs and
licenses are available individually.
Each model of licenses does not include any DVD.
Product name
Specifications
The Sysmac Studio is the software that provides an integrated environment for
setting, programming, debugging and maintenance of machine automation
controllers including the NJ Series, EtherCat Slave, and the HMI.
Sysmac Studio
Standard
Edition
Ver.1.@@ *2
Sysmac Studio runs on the following OS.
Windows XP (Service Pack 3 or higher, 32-bit version)/Windows Vista (32-bit
version)/Windows 7 (32-bit/64-bit version)/Windows 8 (32-bit/64-bit version)/
Windows 8.1 (32-bit/64-bit version)/Windows 10 (32-bit/64-bit version)
Model
Standards
DVD
SYSMAC-SE200D
⎯
⎯
SYSMAC-SE201L
⎯
Number of licenses
Media
⎯
(Media only)
1 license*1
This software provides functions of the Measurement Sensor Edition. Refer to
Sysmac Catalog (P072) for details such as supported models and functions.
Sysmac Studio Measurement Sensor Edition is a limited license that provides
Sysmac Studio
SYSMAC-ME001L
1 license
⎯
selected functions required for ZW-series
Measurement
Displacement Sensor settings.
Sensor Edition
Because this product is a license only, you need the Sysmac Standard Edition DVD
SYSMAC-ME003L
3 license
⎯
Ver.1.@@ *3
media to install it.
*1. Multi licenses are available for the Sysmac Studio (3, 10, 30, or 50 licenses).
*2. ZW-series is supported by Sysmac Studio version 1.05 or higher.
*3. The Setting Software Smart Monitor ZW is also available (ZW-SW101). Please contact your OMRON sales representative for details.
●Accessories
Item
Model
Fiber Connector Cleaner
ZW-XCL
Note: Place orders in units of boxes (contacting 10 units).
⎯
⎯
18
●Recommended EtherCAT Communications Cables
Use Straight STP (shielded twisted-pair) cable of category 5 or higher with double shielding (braiding and aluminum foil
tape) for EtherCAT.
●Cabel with Connectors
Item
Standard type
Cable with Connectors on Both Ends
(RJ45/RJ45)
Wire Gauge and Number of Pairs:
AWG27, 4-pair Cable
Cable Sheath material: LSZH *2
Cable color: Yellow *3
Appearance
Recommended manufacturer
OMRON
Rugged type
Cable with Connectors on Both Ends
(RJ45/RJ45)
Wire Gauge and Number of Pairs:
AWG22, 2-pair Cable
OMRON
Rugged type
Cable with Connectors on Both Ends
(M12 Straight/RJ45)
Wire Gauge and Number of Pairs:
AWG22, 2-pair Cable
OMRON
Rugged type
Cable with Connectors on Both Ends
(M12 Right-angle/RJ45)
Wire Gauge and Number of Pairs:
AWG22, 2-pair Cable
OMRON
Cable length(m) *1
0.3
0.5
1
2
3
5
0.3
0.5
1
2
5
10
0.3
0.5
1
2
5
10
0.3
0.5
1
2
5
10
Model
XS6W-6LSZH8SS30CM-Y
XS6W-6LSZH8SS50CM-Y
XS6W-6LSZH8SS100CM-Y
XS6W-6LSZH8SS200CM-Y
XS6W-6LSZH8SS300CM-Y
XS6W-6LSZH8SS500CM-Y
XS5W-T421-AMD-K
XS5W-T421-BMD-K
XS5W-T421-CMD-K
XS5W-T421-DMD-K
XS5W-T421-GMD-K
XS5W-T421-JMD-K
XS5W-T421-AMC-K
XS5W-T421-BMC-K
XS5W-T421-CMC-K
XS5W-T421-DMC-K
XS5W-T421-GMC-K
XS5W-T421-JMC-K
XS5W-T422-AMC-K
XS5W-T422-BMC-K
XS5W-T422-CMC-K
XS5W-T422-DMC-K
XS5W-T422-GMC-K
XS5W-T422-JMC-K
Note: For details, refer to Cat.No.G019.
*1. Standard type cables length 0.2, 0.3, 0.5, 1, 1.5, 2, 3, 5, 7.5, 10, 15 and 20m are available.
Rugged type cables length 0.3, 0.5, 1, 2, 3, 5, 10 and 15m are available.
*2. The lineup features Low Smoke Zero Halogen cables for in-cabinet use and PUR cables for out-of-cabinet use.
*3. Cables colors are available in blue, yellow, or Green
●Cables / Connectors
Wire Gauge and Number of Pairs: AWG24, 4-pair Cable
Item
Appearance
⎯
Cables
⎯
⎯
RJ45 Connectors
⎯
* We recommend you to use above cable and connector together.
Recommended manufacturer
Hitachi Metals, Ltd.
Kuramo Electric Co.
SWCC Showa Cable Systems Co.
Panduit Corporation
Model
NETSTAR-C5E SAB 0.5 × 4P *
KETH-SB *
FAE-5004 *
MPS588-C *
Recommended manufacturer
Kuramo Electric Co.
JMACS Japan Co.,Ltd.
Model
KETH-PSB-OMR *
PNET/B *
OMRON
XS6G-T421-1 *
Wire Gauge and Number of Pairs: AWG22, 2-pair Cable
Item
Appearance
⎯
⎯
Cables
RJ45 Assembly Connector
Note: Connect both ends of cable shielded wires to the connector hoods.
* We recommend you to use above cable and connector together.
●Industrial switching hubs for Ethernet
Appearance
Number of ports
Failure detection
Current consumption
3
None
0.22A
5
None
Supported
0.22A
Model
W4S1-03B
W4S1-05B
W4S1-05C
Note: Industrial switching hubs are cannot be used for EtherCAT.
●EtherCAT junction slaves
Appearance
Number of ports
Power supply voltage
3
Current consumption
Model
0.08A
GX-JC03
0.17A
GX-JC06
20.4 to 28.8 VDC
(24 VDC -15 to 20%)
6
Note: 1. Please do not connect EtherCAT junction slave with OMRON position control unit, Model [email protected][email protected]
2. EtherCAT junction slaves cannot be used for EtherNet/IPTM and Ethernet.
19
Specifications
●Sensor Head
Item
Measuring center distance
Measuring range
Static resolution *1
Linearity *2
Spot diameter *3
Near
Center
Far
Measuring cycle
Applicable sensor controller
Operating ambient illumination
Ambient temperature range
Ambient humidity range
Degree of protection
Vibration resistance (destructive)
Shock resistance (destructive)
Temperature characteristic *4
Materials
Fiber cable length
Fiber cable minimum bending radius
Insulation resistance (Calibration ROM)
Dielectric strength (Calibration ROM)
Weight
Accessories included with sensor head
ZW-S07
ZW-S20
ZW-S30
ZW-S40
ZW-SR07
ZW-SR20
7 mm
20 mm
30 mm
40 mm
7 mm
20 mm
±0.3 mm
±1 mm
±3 mm
±6 mm
±0.3 mm
±1 mm
0.25 μm
0.25 μm
0.25 μm
0.25 μm
0.25 μm
0.25 μm
±0.8 μm
±1.2 μm
±4.5 μm
±7.0 μm
±1.1 μm
±1.6 μm
20 μm dia.
45 μm dia.
70 μm dia.
90 μm dia.
20 μm dia.
45 μm dia.
18 μm dia.
40 μm dia.
60 μm dia.
80 μm dia
18 μm dia.
40 μm dia.
20 μm dia.
45 μm dia.
70 μm dia.
90 μm dia
20 μm dia.
45 μm dia.
500 μs to 10 ms
ZW-C1@@@/-CE1@@
Illumination on object surface 10,000 lx or less: incandescent light
Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation)
Operating and storage: 35% to 85% (with no condensation)
IP40 (IEC60529)
10 to 150 Hz, 0.35 mm single amplitude, 80 min each in X, Y, and Z directions
150 m/s2 3 times each in six directions (up/down, left/right, forward/backward)
0.6 μm/ °C
1.5 μm/ °C
2.8 μm/ °C
4.8 μm/ °C
0.6 μm/ °C
1.5 μm/ °C
Case:
aluminum die-cast
Fiber cable sheat: PVC
Calibration ROM: PC
0.3 m, 2 m (Flex-resistant cable)
20 mm
Between case and all terminals: 20 MΩ (by 250 V megger)
Between case and all terminals: 1,000 VAC, 50/60 Hz, 1 min
Approx. 105 g (Chassis, fiber cable total)
Instruction sheet, Fixing screw (M2) for Calibration ROM, Precautions for correct use
ZW-SR40
40 mm
±6 mm
0.25 μm
±9.3 μm
90 μm dia.
80 μm dia
90 μm dia
4.8 μm/ °C
*1. Capacity value when Omron standard mirror surface target is measured at the measurement center distance as the average of 4,096 times.
*2. Material setting for the Omron standard mirror surface target: Error from an ideal straight line when measuring on mirror surface.
The reference values for linearity when targets to measure other than the above are as in the table below.
Item
Glass
SUS BA
White ceramic
ZW-S07
±1.0 μm
±1.2 μm
±1.6 μm
ZW-S20
±1.2 μm
±1.4 μm
±1.7 μm
ZW-S30
±4.5 μm
±5.5 μm
±6.4 μm
ZW-S40
±7.0 μm
±8.5 μm
±9.5 μm
ZW-SR07
±1.1 μm
±1.2 μm
±1.6 μm
ZW-SR20
±1.6 μm
±1.8 μm
±1.9 μm
ZW-SR40
±9.3 μm
±9.3 μm
±11.0 μm
*3. Capacity value defined by 1/e2 (13.5%) of the center optical intensity in the measured area.
*4. Temperature characteristic at the measurement center distance when the Sensor Head and the target are fastened with an aluminum jig and the Sensor Head and
the Controller are set in the same temperature environment.
●Automation Software Sysmac Studio
System Requirements
Item
Operating system (OS) *1 *2
CPU
Main memory
Recommended videomemory /
video card for using 3D motion trace
Hard disk
Display
Disk drive
Communications ports
Supported languages
Requirement
Windows XP (Service Pack 3 or higher, 32-bit version)/Windows Vista (32-bit version)/
Windows 7 (32-bit/64-bit version)/Windows 8 (32-bit/64-bit version)/Windows 8.1 (32-bit/64-bit version)/
Windows 10 (32-bit/64-bit version)
Windows computers with Celeron 540 (1.8 GHz) or faster CPU.
Core i5 M520 (2.4 GHz) or equivalent or faster recommended
2 GB min.
Video memory: 512 MB min.
Video card: Either of the following video cards:
• NVIDIAR GeForceR 200 Series or higher
• ATI RadeonHD5000 Series or higher
At least 1.6 GB of available space
XGA 1024 × 768, 16 million colors.
WXGA 1280 × 800 min. recommended
DVD-ROM drive
USB port corresponded to USB 2.0, or Ethernet port *3
Japanese, English, German, French, Italian, Spanish, simplified Chinese, traditional Chinese, Korean
*1. Sysmac Studio Operating System Precaution: System requirements and hard disk space may vary with the system environment.
*2. The following restrictions apply when Sysmac Studio is used with Microsoft Windows Vista or Windows 7.
Some Help files cannot be accessed.
The Help files can be accessed if the Help program distributed by Microsoft for Windows (WinHlp32.exe) is installed. Refer to the Microsoft homepage listed below or
contact Microsoft for details on installing the file. (The download page is automatically displayed if the Help files are opened while the user is connected to the Internet.)
http://support.microsoft.com/kb/917607/en-us
*3. Refer to the hardware manual for your Controller for hardware connection methods and cables to connect the computer and Controller.
●Setting Software Smart Monitor ZW ZW-SW101
System Requirements
Item
Operating System(OS)
CPU
Main memory
Hard disk
Display
Supported languages
Communication port
Condition
Windows 7 (32 or 64-bit version)
Windows XP (Service Pack3 or more, 32-bit version)
Intel Pentium III, 850 MHz or more (2 GHz or more is recommended.)
1 GB or more
50 MB or more
1024 × 768 dots or more, 16 million colors or more
Japanese/English
Ethernet port
20
●Controller
Item
Input/Output type
Number of connected Sensor Heads
Applicable sensor head
Light source for measurement
Main display
Segment
display
Sub-display
Analog voltage output (OUT1V)
ZW-CE10T
ZW-CE15T
NPN
PNP
1 per Controller
ZW-S@@/-SR@@
White LED
11-segment red display, 6 digits
11-segment green display, 6 digits
HIGH (orange), PASS (green), LOW (orange), STABILITY (green), ZERO (green),
ENABLE (green), THRESHOLD-H (orange), THRESHOLD-L (orange), RUN (green)
L/A IN(Link Activity IN)(green), L/O OUT(Link Activity OUT)(green), ECAT RUN(green), ECAT
ERR(red)
100BASE-TX, 10BASE-T, No-protocol Communications (TCP/UDP), EtherNet/IPTM
EtherCAT-specific protocol 100BASE-TX
115,200 bps max.
-10 V to +10 V, output impedance: 100 Ω
Analog current output (OUT1A)
4 mA to 20 mA, maximum load resistance: 300Ω
Judgment output
(HIGH1/PASS1/LOW1)
BUSY output (BUSY1)
ALARM output (ALARM1)
ENABLE output (ENABLE)
LED OFF input (LED OFF1)
ZERO RESET input (ZERO)
TIMING output (TIMING1)
Transistor output system
Output voltage: 21.6 to 30 VDC
Load current: 50 mA or less
Residual voltage when turning ON: 1.2 V or less
Leakage voltage when turning OFF: 0.1 mA or les
Status indicators
LED display
EtherCAT indicators
Ethernet
EtherCAT
RS-232C
Analog
output
terminal
block
External
interface
DC input system
Input voltage: 24 VDC ⋅10% (21.6 to 26.4 VDC)
Input current: 7 mA Typ. (24 VDC)
Voltage/Current when turning ON: 19 V/3 mA or more
32-pole
RESET output (RESET1)
Voltage/Current when turning OFF:5 V/1 mA or less
extension
Transistor output system
connector
Output voltage: 21.6 to 30 VDC
Selected bank output
Load current: 50 mA or less
(BANK_OUT 1 to 3)
Residual voltage when turning ON: 1.2 V or less
Leakage voltage when turning OFF: 0.1 mA or less
Bank
DC input system
Input voltage: 21.6 to 26 VDC
Selected bank input
Input current: 7 mA Typ. (24 VDC)
(BANK_SEL 1 to 3)
Voltage/Current when turning ON: 19 V/3 mA or more
Voltage/Current when turning OFF:5 V/1 mA or less
Exposure time
Auto/Manual
Measuring cycle
500 μs to 10 ms
Material setting
Standard/Mirror/Diffusion surfaces
Measurement Item
Height/Thickness/Calculation
Filtering
Median/Average/Differentiation/High pass/Low pass/Band pass
Outputs
Scaling/Different holds/Zero reset/Logging for a measured value
Main functions
Measured value/Threshold value/Analog output voltage or current value/Judgment result/
Display
Resolution/Exposure time
Number of configurable banks
Max. 8 banks
Task process
Multi-task (up to 4 tasks per bank)
Save/Initialization/Display measurement information/Communication settings/Sensor Head
System
calibration/Key-lock/Trigger-key input
Power supply voltage
21.6 to 26.4 VDC (including ripple)
Current consumption
600 mA max.
Ratings
Insulation resistance
Across all lead wires and controller case: 20 MΩ(by 250 V megger)
Dialectic strength
Across all lead wires and controller case: 1,000 VAC, 50/60 Hz, 1 min.
Degree of protection
IP20(IEC60529)
Vibration resistance (destructive)
10 to 55 Hz, 0.35-mm single amplitude, 50 min each in X, Y, and Z directions
Shock resistance (destructive)
150 m/s2, 3 times each in six directions (up/down, left/right, forward/backward)
Environmental
Operating: 0 to 40°C
Ambient temperature
Storage:-15 to 60°C (with no icing or condensation)
Ambient humidity
Operating and storage: 35% to 85% (with no condensation)
D-type grounding (Grounding resistance of 100 Ω or less)
Grounding
Note: For conventional Class D grounding
Materials
Case: PC
Weight
Approx. 750 g (main unit only), Approx. 150 g (Parallel Cable)
Accessories included with controller
Instruction sheet,Member registration sheet, Parallel cable ZW-XCP2E
Note: Controllers with binary outputs are also available (ZW-C10T/-C15T). Please contact your OMRON sales representative for details.
●ZW Series EtherCAT Communications Specifications
Item
Communications standard
Physical layer
Connectors
Communications media
Communications distance
Process data
Mailbox (CoE)
Distributed clock
LED display
Specification
IEC61158 Type12
100BASE-TX(IEEE802.3)
RJ45 × 2
ECAT IN: EtherCAT input
ECAT OUT: EtherCAT output
Category 5 or higher (cable with double, aluminum tape and braided shielding) is recommended.
Distance between nodes: 100 m max.
Variable PDO mapping
Emergency messages, SDO requests, SDO responses, and SDO information
Synchronization in DC mode.
L/A IN (Link/Activity IN) × 1, AL/A OUT (Link/Activity OUT) × 1, AECAT RUN × 1, AECAT ERR × 1
21
Characteristic data (typical examples)
Linearity Characteristic by Materials
Straight type
Measuring center
distance 0
ZW-S07
Material setting: Mirror surface
Material setting: Normal
5
Mirror
SUS BA
Glass
White ceramic
Mirror
SUS BA
Glass
4
3
1
0
-1
2
1
0
-1
1
0
-1
-2
-2
-2
-3
-3
-3
-4
-4
-5
-0.3
-0.2
-0.1
0
0.1
0.2
-4
-5
-0.3
0.3
White ceramic
4
3
2
Error [µm]
2
5
Error [µm]
4
3
Error [µm]
Material setting: Diffusion surface
5
Distance [mm]
-0.2
-0.1
0
0.1
0.2
-5
-0.3
0.3
Distance [mm]
-0.2
-0.1
0
0.1
0.2
0.3
Distance [mm]
ZW-S20
Material setting: Mirror surface
Material setting: Normal
10
Mirror
SUS BA
Glass
White ceramic
6
8
6
2
0
-2
6
4
2
0
-2
2
0
-2
-4
-4
-4
-6
-6
-6
-8
-8
-8
-10
-10
-10
-1 -0.8 -0.6 -0.4 -0.2
0
0.2 0.4 0.6 0.8
White ceramic
8
4
Error [µm]
4
Mirror
SUS BA
Glass
Error [µm]
8
Error [µm]
Material setting: Diffusion surface
10
10
1
-1 -0.8 -0.6 -0.4 -0.2
Distance [mm]
0
0.2 0.4 0.6 0.8
1
-1 -0.8 -0.6 -0.4 -0.2
Distance [mm]
0
0.2 0.4 0.6 0.8
1
Distance [mm]
ZW-S30
Material setting: Normal
Material setting: Mirror surface
20
Mirror
SUS BA
Glass
White ceramic
12
12
4
0
-4
White ceramic
16
12
8
8
Error [µm]
8
Mirror
SUS BA
Glass
16
Error [µm]
16
Error [µm]
Material setting: Diffusion surface
20
20
4
0
-4
4
0
-4
-8
-8
-8
-12
-12
-12
-16
-16
-20
-16
-20
-20
-3 -2.5 -2 -1.5 -1 -0.5 0 0.5 1 1.5 2 2.5 3
-3 -2.5 -2 -1.5 -1 -0.5 0 0.5 1 1.5 2 2.5 3
-3 -2.5 -2 -1.5 -1 -0.5 0 0.5 1 1.5 2 2.5 3
Distance [mm]
Distance [mm]
Distance [mm]
ZW-S40
Material setting: Mirror surface
Material setting: Normal
30
Error [µm]
15
10
25
20
15
Mirror
SUS BA
Glass
25
15
10
10
5
0
-5
-10
5
0
-5
-10
5
0
-5
-10
-15
-15
-15
-20
-20
-20
-25
-25
-30
-25
-30
-30
-6 -5 -4 -3 -2 -1
0
1
2
Distance [mm]
3
4
5
6
White ceramic
20
Error [µm]
20
Error [µm]
25
Material setting: Diffusion surface
30
30
Mirror
SUS BA
Glass
White ceramic
-6 -5 -4 -3 -2 -1
0
1
2
Distance [mm]
3
4
5
6
-6 -5 -4 -3 -2 -1
0
1
2
Distance [mm]
3
4
5
6
22
Right-angle type
+
Measuring center
distance 0
−
ZW-SR07
Material setting: Mirror surface
Material setting: Normal
5
Mirror
SUS BA
Glass
White ceramic
3
Mirror
SUS BA
Glass
4
3
1
0
-1
3
2
1
0
-1
1
0
-1
-2
-2
-2
-3
-3
-3
-4
-4
-4
-5
-0.3
-5
-0.3
-0.2
-0.1
0
0.1
0.2
0.3
White ceramic
4
2
Error [µm]
2
5
Error [µm]
4
Error [µm]
Material setting: Diffusion surface
5
Distance [mm]
-0.2
-0.1
0
0.1
0.2
-5
-0.3
0.3
Distance [mm]
-0.2
-0.1
0
0.1
0.2
0.3
Distance [mm]
ZW-SR20
Material setting: Mirror surface
Material setting: Normal
10
Mirror
SUS BA
Glass
White ceramic
6
Mirror
SUS BA
Glass
8
6
8
2
0
-2
4
2
0
-2
2
0
-2
-4
-4
-4
-6
-6
-6
-8
-8
-10
-1 -0.8 -0.6 -0.4 -0.2
0
0.2 0.4 0.6 0.8
-8
-10
-1 -0.8 -0.6 -0.4 -0.2
1
White ceramic
6
4
Error [µm]
4
10
Error [µm]
8
Error [µm]
Material setting: Diffusion surface
10
Distance [mm]
0
0.2 0.4 0.6 0.8
-10
-1 -0.8 -0.6 -0.4 -0.2
1
Distance [mm]
0
0.2 0.4 0.6 0.8
1
Distance [mm]
ZW-SR40
Material setting: Mirror surface
Material setting: Normal
20
25
20
15
10
Error [µm]
Error [µm]
15
Mirror
SUS BA
Glass
White ceramic
5
0
-5
Mirror
SUS BA
Glass
25
15
10
5
0
-5
10
5
0
-5
-10
-10
-10
-15
-15
-15
-20
-20
-20
-25
-25
-30
-6
-5 -4 -3 -2 -1
0
1
2
Distance [mm]
3
4
5
6
-30
-6
White ceramic
20
Error [µm]
25
Material setting: Diffusion surface
30
30
30
-25
-5 -4 -3 -2 -1
0
1
2
Distance [mm]
3
4
5
6
-30
-6
-5 -4 -3 -2 -1
0
1
2
Distance [mm]
3
4
5
6
23
●Angle Characteristic *
Straight type
α direction
β direction
Model nameplate
Slope angle +
Slope angle +
Slope angle −
Slope angle −
* The above show the results after executing scaling.
ZW-S07
Mirror α direction
5
3
1
0
-1
2
4
3
1
0
-1
4
3
2
1
0
-1
2
1
0
-1
-2
-2
-2
-2
-3
-3
-3
-3
-4
-4
-4
-5
-0.3
-0.15
0
0.15
-5
-0.3
0.3
-0.15
Distance [mm]
0
0.15
-4
-5
-0.3
0.3
Slope angle
+50°
0°
−50°
5
Error [µm]
2
Error [µm]
3
Slope angle
+8°
0°
−8°
4
β direction
White ceramic
Slope angle
+50°
0°
−50°
5
Error [µm]
Slope angle
+8°
0°
−8°
4
Error [µm]
White ceramic α direction
Mirror β direction
5
-0.15
Distance [mm]
0
0.15
-5
-0.3
0.3
-0.15
Distance [mm]
0
0.15
0.3
Distance [mm]
ZW-S20
Mirror α direction
10
2
6
4
0
-2
10
Slope angle
+50°
0°
−50°
8
6
4
2
0
-2
2
6
4
0
-2
2
0
-2
-4
-4
-4
-4
-6
-6
-6
-6
-8
-8
-8
-8
-10
-10
-10
-10
-1
-0.5
0
-0.5
1
-1
-0.5
Distance [mm]
0
-0.5
1
-1
-0.5
Distance [mm]
0
-0.5
Slope angle
+50°
0°
−50°
8
Error [µm]
4
Slope angle
+8°
0°
−8°
8
Error [µm]
6
β direction
White ceramic
10
Error [µm]
Slope angle
+8°
0°
−8°
8
Error [µm]
White ceramic α direction
Mirror β direction
10
1
-1
-0.5
Distance [mm]
0
-0.5
1
Distance [mm]
ZW-S30
5
Slope angle
+6°
0°
−6°
15
Error [µm]
10
0
White ceramic
20
10
5
20
Slope angle
+50°
0°
−50°
15
Error [µm]
Slope angle
+6°
0°
−6°
15
Error [µm]
White ceramic α direction
Mirror β direction
20
0
10
5
0
10
5
0
-5
-5
-5
-5
-10
-10
-10
-10
-15
-15
-15
-15
-20
-20
-20
-3
-2
-1
0
1
2
3
-3
-2
Distance [mm]
-1
0
1
2
3
β direction
Slope angle
+50°
0°
−50°
15
Error [µm]
Mirror α direction
20
-20
-3
-2
Distance [mm]
-1
0
1
2
3
-3
-2
Distance [mm]
-1
0
1
2
3
Distance [mm]
ZW-S40
Slope angle
+5°
0°
−5°
20
Error [µm]
10
0
-10
30
10
0
-10
-20
-20
-30
-30
-6
-4
-2
0
2
Distance [mm]
4
6
White ceramic
30
Slope angle
+50°
0°
−50°
20
Error [µm]
Slope angle
+5°
0°
−5°
20
Error [µm]
White ceramic α direction
Mirror β direction
30
10
0
-4
-2
0
2
Distance [mm]
4
6
10
0
-10
-10
-20
-20
-30
-6
β direction
Slope angle
+50°
0°
−50°
20
Error [µm]
Mirror α direction
30
-30
-6
-4
-2
0
2
Distance [mm]
4
6
-6
-4
-2
0
2
Distance [mm]
4
6
24
Right-angle type
α direction
β direction
Slope angle +
Slope angle +
Slope angle −
Slope angle −
* The above show the results after executing scaling.
ZW-SR07
2
Slope angle
+8°
0°
−8°
4
3
Error [µm]
3
1
0
-1
2
3
1
0
-1
5
Slope angle
+50°
0°
−50°
4
2
3
1
0
-1
2
1
0
-1
-2
-2
-2
-3
-3
-3
-3
-4
-4
-4
-0.15
0
0.15
-5
-0.3
0.3
-0.15
Distance [mm]
0
0.15
-4
-5
-0.3
0.3
Slope angle
+50°
0°
−50°
4
-2
-5
-0.3
β direction
White ceramic
5
Error [µm]
Slope angle
+8°
0°
−8°
4
Error [µm]
White ceramic α direction
Mirror β direction
5
Error [µm]
Mirror α direction
5
-0.15
Distance [mm]
0
0.15
-5
-0.3
0.3
-0.15
Distance [mm]
0
0.15
0.3
Distance [mm]
ZW-SR20
Mirror α direction
6
2
0
-2
4
Slope angle
−50°
0°
−50°
8
6
2
0
-2
4
6
2
0
-2
4
2
0
-2
-4
-4
-4
-6
-6
-6
-6
-8
-8
-8
-10
-1
-0.5
0
0.5
1
-8
-10
-1
-0.5
Distance [mm]
0
0.5
1
Slope angle
+50°
0°
−50°
8
-4
-10
β direction
10
Error [µm]
4
Slope angle
+8°
0°
−8°
8
Error [µm]
6
White ceramic
10
Error [µm]
Slope angle
+8°
0°
−8°
8
Error [µm]
White ceramic α direction
Mirror β direction
10
10
-10
-1
Distance [mm]
-0.5
0
0.5
Distance [mm]
1
-1
-0.5
0
0.5
Distance [mm]
1
ZW-SR40
Slope angle
+5°
0°
−5°
30
Slope angle
+5°
0°
−5°
20
Error [µm]
10
0
-10
10
0
-10
0
-10
-20
-20
-30
-30
-30
-4
-2
0
2
Distance [mm]
4
6
-6
-4
-2
0
2
Distance [mm]
4
6
β direction
Slope angle
+50°
0°
−50°
20
10
-20
-6
White ceramic
30
Slope angle
+50°
0°
−50°
20
Error [µm]
20
Error [µm]
White ceramic α direction
Mirror β direction
30
Error [µm]
Mirror α direction
30
10
0
-10
-20
-30
-6
-4
-2
0
2
Distance [mm]
4
6
-6
-4
-2
0
2
Distance [mm]
4
6
25
External Dimensions
(Unit: mm)
Sensor Head
Straight type
ZW-S07/-S20/-S30/-S40
Standard surface
Standard
surface
Four, M3
4±0.1
Four, 3.5 dia.
(Mounting holes)
4
16±0.1
Standard
surface
43±0.1
16±0.1
16
16
43
Mounting hole dimensions
M (See note)
M (See note)
Measurement
center
Connector
Standard fiber cable (2.0 dia.)
Measurement end
FAR
Note:
24
12
Model
L
M
X
ZW-S07
7
0.3
12
ZW-S20
20
1
11.8
ZW-S30
30
3
11.7
ZW-S40
40
6
11.7
Measurement
CENTER
(10 dia.)
Measurement end
NEAR
X(See note)
24
Caution
label
L (See note)
64
(50)
(40)
(42)
Lighting and
receiving axis
Right-angle type
ZW-SR07/-SR20/-SR40
Standard surface
(24)
(23.6)
(64)
Four, 3.5 dia.
(Mounting holes)
4±0.1
4
16±0.1
(24)
(12)
Standard
surface
Four, M3
43
43±0.1
16
Standard fiber cable (2.0 dia.)
16
16 ±0.1
Mounting hole dimensions
Note:
Connector
(24)
Model
L
M
ZW-SR07
7
0.3
ZW-SR20
20
1
ZW-SR40
40
6
24
64
(40)
24
(10 dia.)
32.5
12
Lighting and
receiving axis
8.5
L (See note)
(23.6)
Measurement end
NEAR
M (See note)
Standard
surface
Measurement
CENTER
Measurement end
FAR
M (See note)
(24)
24
23.6
Measurement
CENTER
12
12
Caution
label
(50)
(42)
26
Controller
ZW-CE10T/-CE15T
128
124
34.9
40.8
6
(10.2)
72
(21.4)
127.5
DIN track attachment hook
40
Four, 4.5 dia.
70
70±0.1
43±0.1
14.5
43
Installation holes
Four, M4 depth 6.0 MAX
Mounting hole dimensions
Extension Fiber Cable
ZW-XF02R/-XF05R/-XF10R/-XF20R/-XF30R
Note: The following table lists cable lengths
per models.
FC connector
Fiber Cable (2.0 dia.)
FC connector
(10 dia.)
(42)
(50)
L (See note)
(42)
Model
Cable length
L
ZW-XF02R
2m
2,000±20
ZW-XF05R
5m
5,000±50
ZW-XF10R
10 m
10,000±100
`ZW-XF20R
20 m
20,000±200
ZW-XF30R
30 m
30,000±300
Related Manuals
Man.No.
Model number
Manual
Z332
[email protected]
Displacement Measurement Sensor [email protected] Series User's Manual
Terms and Conditions Agreement
Read and understand this catalog.
Please read and understand this catalog before purchasing the products. Please consult your OMRON representative if you have
any questions or comments.
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assemblies or any other materials or substances or environments. Any advice, recommendations or information given orally or in
writing, are not to be construed as an amendment or addition to the above warranty.
See http://www.omron.com/global/ or contact your Omron representative for published information.
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Omron Companies shall not be responsible for conformity with any standards, codes or regulations which apply to the
combination of the Product in the Buyer’s application or use of the Product. At Buyer’s request, Omron will provide applicable
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not sufficient for a complete determination of the suitability of the Product in combination with the end product, machine, system,
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respect to Buyer’s application, product or system. Buyer shall take application responsibility in all cases.
NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY OR IN LARGE
QUANTITIES WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS,
AND THAT THE OMRON PRODUCT(S) IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE
OVERALL EQUIPMENT OR SYSTEM.
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Omron Companies shall not be responsible for the user’s programming of a programmable Product, or any consequence thereof.
Performance Data.
Data presented in Omron Company websites, catalogs and other materials is provided as a guide for the user in determining
suitability and does not constitute a warranty. It may represent the result of Omron’s test conditions, and the user must correlate it
to actual application requirements. Actual performance is subject to the Omron’s Warranty and Limitations of Liability.
Change in Specifications.
Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our practice
to change part numbers when published ratings or features are changed, or when significant construction changes are made.
However, some specifications of the Product may be changed without any notice. When in doubt, special part numbers may be
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Information presented by Omron Companies has been checked and is believed to be accurate; however, no responsibility is
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OMRON Corporation
Industrial Automation Company
Authorized Distributor:
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Contact: www.ia.omron.com
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PuDong New Area, Shanghai, 200120, China
Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200
© OMRON Corporation 2012-2014 All Rights Reserved.
In the interest of product improvement,
specifications are subject to change without notice.
CSM_11_3_0416
Printed in Japan
Cat. No. E421-E1-03
0714 (0312)
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