Pressure Freescale Semiconductor MPXV2050 Rev 0, 10/2010 50 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors MPXV2050 Series 0 to 50 kPa (0 to 7.25 psi) 40 mV Full Scale (Typical) The MPXV2050 series devices are silicon piezoresistive pressure sensors that provide a highly accurate and linear voltage output directly proportional to the applied pressure. A single, monolithic silicon diaphragm with the strain gauge and an integrated thin-film resistor network. Precise span and offset calibration with temperature compensation are achieved by laser trimming. Application Examples Features • • • • • • • Temperature Compensated Over 0°C to +85°C • Ratiometric to Supply Voltage Pump/Motor Control Robotics Level Detectors Medical Diagnostics Pressure Switching Blood Pressure Measurement ORDERING INFORMATION Device Name Package Options # of Ports Pressure Type Case No. Device Marking None Single Dual Gauge Differential Absolute Small Outline Package (MPXV2050 Series) MPXV2050GP Tray 1369 • SMALL OUTLINE PACKAGE MPXV2050GP CASE 1369 © Freescale Semiconductor, Inc., 2010. All rights reserved. • MPXV2050GP Pressure Operating Characteristics Table 1. Operating Characteristics (VS = 10 VDC, TA = 25°C unless otherwise noted, P1 > P2) Characteristic Symbol Min Typ Max Units POP 0 — 50 kPa VS — 10 16 VDC IO — 6.0 — mAdc VFS 38.5 40 41.5 mV — –1.0 — 1.0 mV ΔV/ΔP — 0.8 — mV/kPa Non-Linearity — –0.3 — 0.3 %VFS Pressure Hysteresis (0 to 50 kPa) — — ±0.1 — %VFS Temperature Hysteresis (-40° to 125°C) — — ±0.5 — %VFS Temperature Coefficient of Full Scale TCVFS –1.0 — 1.0 %VFS Temperature Coefficient of Offset TCVOFF –1.0 — 1.0 mV ZIN 1000 — 2500 Ω ZOUT 1400 — 3000 Ω Response Time(5) (10% to 90%) tR — 1.0 — ms Warm-Up Time — — 20 — ms Offset Stability(6) — — ±0.5 — %VFS Pressure Range(1) (2) Supply Voltage Supply Current Full Scale Span (3) Offset(4) Sensitivity Input Impedance Output Impedance 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 6. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. Maximum Ratings Table 2. Maximum Ratings(1) Rating Max Value Unit Supply Voltage 16 V Pressure (P1 > P2) 200 kPa Storage Temperature –40 to +125 °C Operating Temperature Range –40 to +125 °C 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. MPXV2050 2 Sensors Freescale Semiconductor Pressure Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. VS 3 Thin Film Temperature Compensation and Calibration X-ducer Sensing Element 2 4 Vout+ Vout- 1 GND Figure 1. Temperature Compensated Pressure Sensor Schematic Voltage Output vs. Applied Differential Pressure The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum side relative to the pressure side. On-Chip Temperature Compensation and Calibration Figure 2 shows the minimum, maximum and typical output characteristics of the MPXV2050 series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line. 40 VS = 10 Vdc TA = 25°C 35 Output (mVdc) A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. TYP 30 25 20 SPAN RANGE (TYP) MAX 15 10 MIN 5 kPa PSI 0 -5 0 12.5 1.8 25 3.6 37.5 5.4 50 7.25 OFFSET (TYP) Figure 2. Output vs. Pressure Differential MPXV2050 Sensors Freescale Semiconductor 3 Pressure LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 3) or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. The specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. Least Square Deviation Least Squares Fit Exaggerated Performance Relative Voltage Output Straight Line End Point Straight Line Fit OFFSET 0 50 100 Pressure (% Full scale) Figure 3. Linearity Specification Comparison Figure 4 illustrates the differential or gauge configuration in the basic chip carrier. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPXV2050 series pressure sensor operating characteristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application. Refer to application note AN3728, for more information regarding media compatibility. Silicone Gel Die Coat Die Stainless Steel Cap P1 Thermoplastic Case Wire Bond Lead Frame P2 Differential Sensing Element Die Bond Figure 4. SOP Package — Cross-Sectional Diagram (Not to Scale) MPXV2050 4 Sensors Freescale Semiconductor Pressure PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 1369-01 ISSUE B SOP PACKAGE MPXV2050 Sensors Freescale Semiconductor 5 Pressure PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1369A-01 ISSUE B SOP PACKAGE MPXV2050 6 Sensors Freescale Semiconductor How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. 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