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2D CMOS Laser Type
High-precision Displacement Measurement Sensors Bringing Smart Sensors into New Fields.
ZS-HL Series
More P.6
Highly Advanced Sensing Fu
Very High-performance Sensors that Support Core Quality
from Very Long-range to Extremely Precise Measurements
Range of models with measuring center distance of 20 to 1,500 mm.
Achieves maximum resolution of 0.25 µm.
Maximum response speed of 110 µs.
Parallel output supported.
ZS-HLDS150
Measuring center distance
1500
See
ZS-HLDS5T
ZS-HLDS2T
ZS-LD10GT/LD15GT
ZS-HLDS2VT
100
25±2mm
20
15
10
20±1mm
02
600±350mm
1500±500mm
100±20mm
Data Storage Unit ZS-DSU ZS-DSU
Multi-Controller ZS-MDC
Enables onsite high-speed logging of data in external
memory (compact flash card) for the Sensor Controller or
Multi-Controller.
Effective for building traceability systems, statistical
process control (SPC), and much more.
ZS-HLDS10
50
Control
Ideal for ZS Series Data Logging
ZS-HLDS60
600
Record
50±5mm
15±0.75mm
10±0.5mm
High-speed sampling rate: 150 µs
Powerful support for logging data using various
trigger functions.
More P.18
Enables full application of Sensor
Controller information.
Transfers data between multi-connected Sensor
Controllers and performs high-speed
multiprocessing.
Connects to up to nine Sensor Controllers.
More P.17
Smart Sensor
nctions in a Compact Package
Business card size
+XX-XX-XXX-XXX
+XX-XX-XXX-XXX
ZS-L Series
High-performance Sensors
Advanced technology is carried
More P.14
USB
Standard Sensors
Standard Sensors Most Suitable for a Variety of High-precision
Displacement Measurements, Including Spot Detection,
Wide-range Detection, and Long-distance Detection.
Manipulate
Monitor
Sensor Controllers ZS-HLDC/LDC
SmartMonitor
Professional ZS-SW11E V3
Enable maximum sensing performance with fully digital
processing.
Culmination of OMRON's lead-edge digital technology. Enables easy
utilization of the ultimate in measurement performance.
Business card size
USB provided as a standard feature.
More P.12
350
Setting Software for the ZS Series
Meets a wide range of logging needs.
Supports high-speed simultaneous multichannel waveform
graphs.
Excel macros provided for simple analysis.
More P.19
Diffuse Reflective Sensors
ZS-LDC
Regular
Reflective Sensors
ZS-LD350S
Ratings and Specifications
Measuring
center distance
Expansion Units
Beam Shapes
Spot and line beam selection.
Wide Range of Products
Long-range, middle-range, and short-range models.
ZS-LD200
200
130
ZS-LD130
80
ZS-LD80
50
40
ZS-LD50/LD50S
20
ZS-LD40T
Spot beam
ZS-LD20T/LD20ST
Line beam
Line beam
Line beam
Line/spot beam
Line beam
Line/spot beam
03
Main Applications
High Performance
ZS-HL Series
Very High-performance Sensors that Support Core Quality from Very Long-range to
Extremely Precise Measurements
ZS-LD10GT/LD15GT
Sealer coating
ZS-L Series
ZS-HLDS2VT
ZS-HLDS5T
ZS-HLDS10
ZS-HLDS60
ZS-HLDS150
Ideal for measuring
the thickness of silicone or compound
semiconductor wafers
in polishing and testing
processes.
Ideal for measuring
the potting resin height
for electronic
components.
Ideal for measuring
liquid gasket (FPIG)
application amounts.
Prevents defects such
as insufficient seal.
Ideal for confirming
positioning and
repeatability accuracy
of XY stages.
Ideal for level
detection for liquid
crystal coaters and
PDP fluorescent
substances.
Protruding objects and
steps can be measured
from a distance for
measurement objects
that cannot be
accessed easily.
Glass substrate
Ideal for measuring
and controlling
dispenser nozzle gaps
when applying sealer.
Standard
ZS-HLDS2T
Standard Sensors Ideal for a Variety of High-precision Displacement Measurements,
Including Spot Detection, Wide-range Detection, and Long-distance Detection
ZS-LD20ST
ZS-LD40T
ZS-LD50/LD80
ZS-LD200
ZS-LD350S
Ideal for measuring glass
thickness and nozzle
gaps when coating glass
with resist or sealer.
Ideal for measuring the
warp of resin blades in
copy machine toners.
Ideal for checking the
precision of door
installations.
Ideal for checking the
flatness of robot arms
that transport wafers in
load ports.
3D shape measurement using
automatic X-Y stage
Ideal for measurements
requiring discrimination
between minute parts or
fine shape repeatability.
04
S ma rt Se nso r
Advanced technology is carried
Applications by Industry
Automobile and Automotive Parts
Measuring Car Bodies
Measuring Door Attachment Offsets
Electronic Components
Measuring Tire Exteriors
Inspecting Board Heights
Inspecting for Board Coplanarity
Measuring Shape for
Positioning Laminated Ceramics
1 axis scan
Capacitor
PCB
SmartMonitor graph screen
Spot beam
Line beam
Semiconductors
Measuring Electrode Thickness
on Compound Semiconductors
Household Appliances and Audio-visual
Measuring Wafer Warping
and Thickness
Measuring Arm Inclination
LCDs and PDPs
Measuring Glass Undulation
Simultaneous Measuring of Touch
Panel Film Thickness and Gap
DVD Chassis Flatness Inspections
Digital Camera Tube Lens Inspection
Rubber, Resin, and Film
Measuring Glass Surfaces
Inspecting Glass Heights (Autofocus)
Measuring Electrode
Thickness on Dielectrics
Moving Workpieces (Black Rubber)
Measuring Depth of O-Ring Insertion
05
High-performance Sensors
High grade
ZS-HL Series Product Lineup 2D CMOS High-end Displacement Sensors
High-performance Sensors
Advanced sensing technology packed into the best Sensor Head for the highest sensing precision
Wide lineup of products from 0.25 µm high-resolution models
to 1,500 mm long-range models.
Model
ZS-HLDS150
Measuring center distance 1500±500 mm
Resolution 500 µm
Linearity ±0.2%F.S.
Beam shape 1.5 mm × 40 mm
06
ZS-HLDS60
ZS-HLDS10
ZS-HLDS5T
ZS-HLDS2T
ZS-HLDS2VT
ZS-LD10GT/LD15GT
600±350 mm
8 µm
100±20 mm
1 µm
50±5 mm
0.25 µm
20±1 mm
0.25 µm
25±2 mm
0.6 µm
10±0.5 mm /15±0.75 mm
0.25 µm
±0.07%F.S.
±0.1%F.S.
±0.1%F.S.
±0.05%F.S.
±0.2%F.S.
±0.1%F.S.
0.3 mm × 16 mm
60 µm × 3.5 mm
30 µm × 1 mm
20 µm × 1 mm
45 µm × 2.2 mm
25 µm × 900 µm
S ma rt Sens or
Advanced technology is carried
2D CMOS Laser Image
Sensing Element
The three basics of sensing precision, speed, and sensitivity
- can be balanced because
ideal measurement settings can
be made for light reception
area.
Digital Sensing
Totally reliable measurements
with completely digital sensing.
Very high
resolution
±0.05 % FS Linearity
High-performance Sensors
All Models Are Class 2 Lasers.
High Resolution at 0.001 µm
(ZS-LD10GT)
OMRON's digital sensing technology
achieves unbelievably high
resolution.
(ZS-HLDS2T)
Unique OMRON algorithms reduce
Extreme
stability
detection error to improve workpiece
measurement accuracy.
Super-high-speed Sampling at
High
precision
Extremely Sensitive Lenses
High
speed
110 µs
(ZS-HLDS@@/LD@@)
You get exact sensing with superior
workpiece following performance.
CMOS high-speed data reading
accurately catches moving
Extreme Stability
Note: ZS-HLDS2T not applicable.
13.5 µm
0
1000
2000
3000
4000
5000
6000
−5
−10
10
Constant
distance
Travel distance
Moving resolution when measuring SUS ZS-HLDS5T
5
4.5 µm
0
−5 0
−10
500
1000
1500
2000
2500
3000
Travel distance
Sampling: 4 ms
Error (µm)
0
Moving resolution when measuring SUS
Previous OMRON models
5
Previous OMRON models
Cr
Glass
10 µmp-p
5
0
5
−10
−15
0
SUS
Error (µm)
10
With a CCD, the charge overflows to the next pixel when
excessive light is received. This phenomenon does not occur
with CMOS, so there are no effects from light fluctuations
from different materials or excessive light reception.
ZS-HL Series
ZS-HLDS2T ZS-HLDS5T/
HLDS10
Measurement value (µm)
ZS-HLDS60/HLDS150
2D CMOS
Moving resolution (error based on workpiece surface
position) has been reduced dramatically by optimizing
the optical system with increased sensitivity and
resolution of the light receiving lenses.
Measurement value (µm)
Complete sensing stability with optimum Sensor Head
size for best performance and holding mechanism
secured at 3 points. (See note.)
Reduced Error for Different Materials
Increased Lens Resolution
Previous OMRON models
Head Size
Superior Moving Resolution
ZS-HL Series
Ideal Size and Stability
workpieces inline.
20
40
Cr
5
Constant
distance
Cr
ZS-HLDS5T
10
Glass
Glass
0.7 µmp-p
0
−5
−10
Travel
distance
(mm)
0
20
40
Travel
distance
(mm)
Sampling: 4 ms
07
High-performance Sensors
High grade
ZS-HLDS5T/HLDS10
Reduced Variation in Linearity between Different Objects, and Linearity
Determines Measurement Accuracy.
Makes it easier to introduce a variety of detection objects.
High-performance Sensors
Detect Essentially Any Object
Measuring Car Body Widths
Linearity Characteristic
Model
Measuring center distance
Resolution
Linearity
Beam shape
±0.1%F.S.
30 µm × 1 mm
ZS-HLDS10
0.15
0.10
0.10
0.05
0.00
−0.05 40.0
100±20 mm
−0.10
1 µm
−0.15
±0.1%F.S.
60 µm × 3.5 mm
42.0
44.0
46.0
48.0
ZS-HLDS5T Regular reflection
0.05
0.00
−0.05
40
42
44
46
48
Specified range
Beam shape
0.25 µm
0.15
Linearity (% F.S.)
Linearity
Previous OMRON models Regular reflection
50±5 mm
Specified range
Resolution
ZS-HLDS5T
Linearity (% F.S.)
Model
Measuring center distance
(ZS-HLDS10)
−0.10
−0.15
Measuring range (mm)
Measuring range (mm)
No.1
Sample-A Sample-B Sample-C Sample-D Sample-E
No.2
No.3
No.4
No.5
Note: Typical examples
Manage trends by measuring
widths of each car model.
ZS-HLDS60/HLDS150
A Long Range That Handles Essentially Any Installation Site
First 1,500 mm long range sensing in the industry enables measurement of previously
impossible points.
Model
Measuring center distance
Resolution
Linearity
Beam shape
Model
Measuring center distance
Resolution
Linearity
Beam shape
ZS-HLDS60 Simple Long-distance Step Measurement
600±350 mm
8 µm
Peak
±0.07%F.S.
Bottom
0.3 mm × 16 mm
ZS-HLDS150
Peak
Bottom
1500±500 mm
500 µm
±0.2%F.S.
1.5 mm × 40 mm
Peak/bottom measurement
08
Note: This function may not be
applicable in bright surrounds.
Sm ar t S ens or
Advanced technology is carried
ZS-HLDS2VT
High-performance Sensors
Ideal for Measuring the Height and Thickness
of Transparent Objects
Tilted and moving workpieces can also be stably measured.
Resolution
Linearity
Beam shape
ZS-HLDS2VT
25±2 mm
0.6 µm
±0.2%F.S.
45 µm × 2.2 mm
Aspherical lens (newly developed)
Angle Characteristics
6
Limit angle ( )
Model
Measuring center distance
A special aspherical lens was
developed for the ZS-HLDS2VT,
and the design of the optical
structure was optimized for
regular-reflective workpieces.
This has greatly increased the
allowable degree of tilt and
improved stability for measuring
transparent and regularreflective workpieces.
5
4
3
2
1
0
Previous OMRON model
Vertical + direction
Vertical - direction
ZS-HLDS2VT
Horizontal + direction
Vertical
direction
Horizontal
direction
Horizontal - direction
09
High-performance Sensors
High grade
ZS-HLDS2T/ZS-LD10GT/LD15GT
High-performance Sensors
The Only Way to Very High-precision Measurements
Superior Features for Semiconductor Wafer, Glass, and Other Measurements Requiring Precision
Slim
26.
4m
m
Measuring center distance
Resolution
Linearity
Beam shape
ZS-HLDS2T
20±1 mm
0.25 µm
Thickness
±0.05%F.S.
Film
Glass
20 µm × 1 mm
Gap
100
400
95
350
90
300
85
250
Gap [µm]
Model
Thickness [µm]
Simultaneous Measuring of Touch Panel Film Thickness and Gap
80
75
200
150
70
100
65
50
60
0
0.2
0.2
0.4
0.6
0.8
0
1
0
0.2
0.4
Travel distance (mm)
0.6
0.8
1
Travel distance (mm)
Simultaneous measurement of transparent object thickness and gap
An unbelievable stationary measurement precision of 0.25 µm, the highest in this product class.
Ideal for Measuring Nozzle Gaps!
Model
Measuring center distance
Resolution
Linearity
Beam shape
10
ZS-LD10GT/LD15GT
1
ZS-LD10GT/LD15GT
Sealant application
0.25 µm
25 × 900 µm
ZS-LD10GT
2
0
-1
-2
-3
-4
Nozzle
Emitter
Measurement
point
Inspection of Disk Play on HDD Motor Rotating Plate
Sealant supply nozzle
Nozzle Gap Sensor
10±0.5 mm/15±0.75 mm
±0.1%F.S.
Height Control of Sealant Dispensers
Displacement [µm]
Reduced pattern influence for moving
measurement, the best in the moving
resolution industry.
Possible to match nozzle drip point and
measurement point then measure.
Sensor Head with separate light emission
and reception in one unit to create nozzle
space.
Glass substrate
-5
1
251
501
Receiver
Measures amplitude undulations of 5 µm.
751
Number
of data
S ma rt Sens or
Advanced technology is carried
High-performance Sensors
Technology
With OMRON's sensing technology and newly developed algorithms, stable, high-precision measurement is possible of workpieces that were difficult
to measure using laser displacement meters due to laser light penetration, transmission, excessive reflection, or insufficient light.
Mechanisms for Stable Measurement Patent Pending
Mechanisms for Stable Measurement Patent Pending
Mechanisms for High Resolution
No more errors due to reflection
coefficients between glass gaps
No more errors due to workpiece
reflection coefficients.
No more resolution errors.
No more error due to penetration.
Stable measurement by adding received light
waveform in 2D image and digital zoom
processing.
Stable measurement using laser power algorithms
that can be adjusted to any value.
Digital processing technology between the
Sensor and Controller provides high resolution.
Stable measurements are achieved by correctly
recognizing the light reception distribution on the
2D CMOS.
Patent Pending
Digital communications
(2)
Mechanisms for Stable Measurement
(3)
(1)
(Near)
Received light amount
Adding and averaging
ZS Series
Removed
Position
Then with digital processing...
ZS-HL Series
Measurement cycle time 1/8 better than
previous models with addition of received light
waveform captured by 2D CMOS and
simultaneous measurement of front and back
glass surfaces with separate sensitivities.
Small
(Far)
10,000 levels min. (essentially infinite)
No measurement error
ZS Series
Laser Pulse Control
Light quantity adjustment to any level.
31 levels
80 ns min.
Measurement error
Previous products
Sensitivity
switching
Light quantity adjustment algorithms have
evolved for stable measurement of a variety of
measurement objects.
Even if the workpiece status changes
suddenly, the sensitivity can compensate at
any level so there is no measurement error
from sensitivity switching.
(1)
Received Light Signal Control
No clock offset.
(2)
Large
Previous
products
Error
between
clocks
Small
(3)
(Near)
Light quantity
fluctuation error
No error
ZS Series
Received light surface (Far)
Small
(Near)
High-speed digital communications (LVDS)
used between Sensor and Controller.
Image signal stabilizes because the clock
error between the control signal from the
Controller and the light reception device
disappears. Optimum light quantity
adjustment is possible with laser power
algorithms that can be adjusted to any level,
which facilitates super high resolution.
Real peak position on
surface
Large
Incorrect peak
calculation as a
result of laser light
penetration
Received light amount
Detects the measurement
position after adding the
received light lines.
Reflection coefficient
Small (Black rubber)
Received light amount
Detects the measurement position
for each received light line.
Laser power
Previous
products
Large
Light noise
Received light amount
One line at a time
Mirror (Large)
Received light
waveform
disruption due to
penetration
Received light surface
(Far)
Real surface displacement detected by
eliminating penetration effects for PCBs,
plastic, and other workpieces penetrated by
laser light.
11
High-performance Sensors
High grade
High-performance Sensors
Sensor Controllers ZS-HLDC (Multitasking)
Enables maximum sensing performance with fully digital processing and multitasking functions.
A controller the size of a business card filled with OMRON's leading-edge digital technology.
Enables easy utilization of the ultimate in measurement performance.
High-performance Sensing
(Multitasking)
Simultaneous Measurement and Output of Up to 4 Features
For detection of small
recesses and protrusions in
measurement location
When simultaneous
measurement of distance to
glass, glass thickness, gap, etc.,
required in glass measurement
applications
Enlarged
Setting example
■Task 1: Step
Setting example
■Task 1: Average
■Task 2: Thickness
For measurement of steps in
different locations with
moving Sensor or workpiece
For simultaneous measurement
of HDD surface deflection and
distance to HDD surface
Setting example
■Task 1: Average
Self-down trigger
Average hold
With delay
■Task 2: Average
Average hold
With delay
■Task 3: Calculation (Task 2 - Task 1)
Setting example
■Task 1: Average, Average hold
■Task 2: Average, Point-to-point hold
Trigger level
Delay time 1
Delay time 2
Simultaneous Control in 2 Systems of Data Confirmation and Analysis and
Data Collection, Control, and Changeovers
ZS-HLDC
Multitask Mode
Sensing TASK1 TASK2 TASK3 TASK4 I/O Settings
Measurement
point
Filter Output
Control Using No-protocol
Communications
Control Using CompoWay/F*
Outline of Functions
ZS-LDC
Top Operation Menu
Single Task Mode (Standard Mode)
Sensing TASK1 I/O Settings
Filter Output
Data Confirmation and
Analysis
Data collection, control,
and changeovers
• Checks sensing screen.
• Checks measurement values.
• Logs measurement values.
* OMRON's unique communications protocol.
USB
RS-232C
• Gets measurement results.
• Resets to zero.
• Switches banks.
Improved Total Cycle Time with 1-second High-speed Bank Switching
12
S ma rt Sens or
High-performance Sensors
Advanced technology is carried
Easy Sensing with an HMI That Couldn't Be Easier to Use
(Common Functions)
Information at the Touch of a Button
Set Sensing Directly
In RUN (measurement) Mode, measured values and information are displayed using
2 rows of 8-segment LEDs. The large LED display improves visibility. Measurement
information includes the threshold, current, resolution, and received light amount
and is available with simple key operations. LCD screens can be customized to
change the display of desired information to easier-to-understand terminology.
In FUN (setting) Mode, setting menus are displayed on the 2 rows of
the LCD. Easy-to-understand guidance simplifies setting the many
display capabilities of the LCD. Function keys correspond to
displayed menu items for intuitive setting of measurement conditions
and other parameters. You can also easily switch between Japanese
and English displays. Communication with the operator is better than
ever before.
RUN
(measurement mode)
Measured value displayed.
Example of
Display Customization
Threshold, current, resolution,
received light amount, etc.
Device:
OMRON #1
MAIN:MEASURE
SUB :THRESH
Patent Pending
FUN (setting mode)
Switch measurement information
at the touch of a button.
Direct setting with
function keys.
MAIN:MEASURE
SUB :THRESH
Threshold
MAIN:MEASURE
SUB :CURRENT
Current
MAIN:MEASURE
SUB :RESOLU
Resolution
ZS-LDC
LD POWER 80.0%
SUB:BRIGHT
Received light
amount
Mount to DIN Track or
directly to control
panels.
Patent Pending
Single Task Controller
Connect directly to a PC using USB.
USB 2.0 and RS-232C provided as standard features.
LVDS, a new-generation digital high-speed
communications interface, is used between the Sensor
Head and Controller, an industry first. If USB is used to
connect to the computer, high-speed all digital
measurement data transfer is possible.
Firmware can be updated easily using the
SmartMonitor WarpEngine.
Simple Operation
Reasonable Price
USB Connection
Panel Mounting Adapter (Option, Sold Separately)
13
Standard Sensors
Standard
ZS-L Series Product Lineup 2D CMOS Low-end Displacement Sensors
Advanced sensing technology packed into the smallest Sensor Heads in this class.
Smallest size in this class (65 × 65 mm)
Uniform Sensor Head size
Line/spot beam type
Detects black rubber, mirror, and transparent workpieces
Standard Sensors
ZS-LD50/LD80/LD130/LD200/LD350S
2D CMOS
image sensor
Laser Class 2
Degree of Protection: IP67
(Models with 2 m cable)
Super Sensitive Lens
Note: The ZS-LD50 uses
high-precision
ganged lenses.
ZS-LD20T/LD40T
ZS-LD20ST/LD50S
Spot Beam Sensors
Measurement range: 10 mm
ZS-LD50
Measuring center: 50 mm
Measurement range: 30 mm
2D CMOS
image sensing
element
ZS-LD80
Measuring center: 80 mm
High-precision
ganged lenses
Measurement range: 30 mm
ZS-LD130
Measuring center: 130 mm
ZS-LD200
Measuring center: 200 mm
Laser Class 2
Degree of Protection: IP67
(Models with 2 m cable)
Measurement range: 100 mm
ZS-LD20T
Measuring center: 20 mm
Resolution: 0.25 μm
More than
sufficient
range
ZS-LD350S ∗1
Measuring center: 350 mm
∗1. Spot Beam Sensors.
Note: Sensor Head can be installed to for either
diffuse reflection or regular reflection.
(except ZS-LD350S)
Correctly compensates measurement values
to suit different applications.
14
Measurement range: 270 mm
ZS-LD40T
Measuring center: 40 mm
Resolution: 0.4 μm
Line beam
(900 × 25 μm)
Measurement range:
2 mm
Measurement range:
10 mm
Line beam
(2000 × 35 μm)
Diffuse Reflection Sensors
ZS-LD50S
Measuring center: 50 mm
Measurement range:
5 mm
Spot beam
(50 μm dia.)
Measurement range: 2 mm
Diffuse Reflection Sensor
Regular Reflection
Sensors
Regular reflection
Sensors
ZS-LD20ST
Measuring center: 20 mm
Spot beam
(25 μm dia.)
S ma rt Sens or
Advanced technology is carried
All you need to do is select the proper mode to achieve stable sensing of PCBs, resins, black
rubber, and other light-penetrating workpieces (these could not be easily handled with
previous reflective laser displacement meters.)
ZS-LD80
Measuring the Shape of Black Resin Workpieces
15.000
Gain setting: 5
0
Height (mm)
10.000
Line Beam Sensors for Emphasis
on Stable Measurement
Spot Beam Sensors Ideal for Minute
Workpieces and Shape Measurement
Line beams produce an averaging affect that is
less likely to be affected by surface irregularities,
creating stable measurements.
Ideal for stable measurements that do not rely on
the surface of the target workpiece.
Ideal for measurements requiring minute
shape repeatability while matching laser
beam position with a minute target
measurement area.
Standard Sensors
Stable Measurements for PCBs, Black Resin, and Metal
10
5.000
20
0.000
Travel
30
−5.000
Travel
40
−10.000
−15.000
Number of data
Travel
distance
Complete measurement data will be obtained at angles of up to 40°.
Beam width
ZS-LD50
Measuring the Shape PCB Surfaces
Height (mm)
1.75
Response: 8 ms, High-precision mode,
Black gain: 0, Red gain: 5 (max.)
Line Beam
sensors
Amount of
displacement
Beam
diameter
Travel
distance
Amount of
displacement
Beam diameter
ZSZSZSLD20T LD40T LD50
35 μm
60 μm
ZSLD80
ZSZSLD130 LD200
1.73
Beam diameter 25 μm
1.71
Beam width 0.9 mm 2 mm 0.9 mm 0.9 mm 0.6 mm 0.9 mm
60 μm 70 μm 100 μm
Spot Beam sensors
ZS-LD20ST
ZS-LD50S
ZS-LD350S
Beam width
25 μm dia.
50 μm dia.
240 μm dia.
1.69
1.67
1.65
Penetration mode and gain settings used.
PCB shapes can be measured without burs or waveform disruptions.
Just select High-precision Mode to stably measure black rubber.
Just select Penetration Mode to stably measure PCBs or black resin.
Stable Measurements for Glass
Stably measure height and undulations in transparent, coated, or colored glass on work tables.
Stable detection at 40 mm with a line beam of 2 mm.
A 2-mm line beam reduces the influence of black and white patterns on granite work tables to achieve
stable measurements.
ZS-LD40T
Measuring Glass Surfaces
Easy Sensing with an HMI That Couldn't Be Easier to Use
Set Sensing Directly
FUN (setting mode)
Measurements for Moving Glass
[μm]
4
3
2
1
0
−1
−2
−3
−4
Response for glass 8 ms
Direct setting with
function keys.
0.2 μm
Ideal for measuring glass thickness and slit nozzle gaps when coating glass with resist or sealer.
15
Expansion Units
Enhancing unit
System Configuration
Sensors
Controllers
ZS-HL Series
Peripheral Devices
Parallel I/O
Sensor Controllers
Expansion I/O Units
PLC
Multi-Controllers
Data Storage
Units
High-speed Input Boards (PC)
USB
Expansion Units
ZG-RPD
ZS-L Series
SmartMonitor (PC)
ZS-SW11V3E
RS-232C
ZS-MDC
ZS-DSU
Calculating measurement
results for each sensor.
Log measurement Values.
PLCs etc.
CompoNet
PLCs etc.
ZS-CRT Sensor Communications Unit
Connection Cable
ZS-XC02D
ZS-HL-series Long-distance Extension Cable
Analog
25 m max.
Data logger etc.
Flexible Long-distance Extension Cable
ZS-XC15CR/XC25CR
Sensor Head
ZS-HLDS@
16
Controller
ZS-HLDC@
Sm a r t S enso r
Advanced technology is carried
Multi-Controller ZS-MDC
Centralized Controller Information Calculations
Transfers data between multi-connected Controllers and performs high-speed multiprocessing.
High-speed Connections for Up To 9 Controllers
See the difference in applications requiring multipoint measurement, such as thickness, steps, and flatness
measurements. Connect up to 9 Controllers with the fastest high-speed bus in the industry. Digital processing
prevents data dropouts to provide the capability to measure exactly what is seen.
Sampling speed with 3 Controllers connected: 110 μs, Sampling speed with 9 Controllers connected: 380 μs
Note: When using communications commands.
SmartMonitor
Expansion Units
Multi-Controllers
Sensor Head
Monitor connected Controllers
together
USB
Multipoint measurement
(flatness of resins or metals)
ZS-MDC
Processing results
Processing Enabled by the Multi-Controller
Flatness Calculations
Reference Step Calculations
Relative Step Calculations
Twisting Calculations
Calculating the difference between the
maximum and minimum values.
Calculating the difference between a
reference point (A) and other points.
Calculating the difference between all points.
Calculating twisting between opposing sides.
C
A
B
Number of Sensor
Controllers: 3 to 9
A
C
B
Number of Sensor
Controllers: 3 to 9
Calculation:
A
C
Number of Sensor
Controllers: 3 to 9
Calculation:
B
TASK1 = A − B
TASK2 = B − C
TASK3 = C − A
TASK1 = A − B
TASK2 = A − C
···
Calculation:
Task 1 = Max. (A, B, ···) − Min. (A, B, ···)
Individual judgments
Individual judgments
A
B
D
C
Number of Sensor
Controllers: 4
Calculation: TASK1 = (A − B) − (D − C)
Multipoint Thickness Calculations
Average Height Calculations
Warp Calculations
User-set Calculations
Calculating the difference between pairs of points.
Calculating the average surface height.
Calculating warping of selected sides
Formulas can be flexibly set.
A
B
C
D
E
F
Number of Sensor
Controllers: 2, 4, 6, or 8
Calculation:
TASK1 = K − (A + B)
TASK2 = K − (C + D)
TASK3 = K − (E + F)
Individual judgments
A
C
B
Number of Sensor
Controllers: 2 to 9
Calculation: Task 1 = Average (A, B, C, ···)
A
B
C
Number of Sensor
Controllers: 3
Calculation: Task 1 = B − (A + C)/2
[K + mX + nY]
Multi-calculations of Data
Multipoint measurement
High-speed data transfer
17
Expansion Units
Enhancing unit
Data Storage Unit ZS-DSU
Logging Software for Onsite Installed
Efficiently stores sensing data using a variety of logging functions.
High-speed, long term logging settings can be used to precisely process the required sensing
data, which can be reliably and completely collected using USB and an all-digital bus.
Sensor setting data can also be stored.
Data for up to 128 banks can be stored and transferred to the Master Unit for changeovers.
Expansion Units
High-speed sampling rate: 150 μs max.
Powerful support for logging data using various trigger functions.
Configuration
Number of
connectable Controllers
10 max. (ZS-MDC: 1, ZS-HLDC/LDC: 9 max.)
Connectable Controllers
ZS-HLDC@, ZS-LDC@, ZS-MDC@
Data resolution
32 bits
Sampling rate
• Shortest high-speed logging mode (One-shot Mode) ∗1
• Long-term logging mode (Repeat Mode) ∗2
• Sampling period: 10 ms to 1 h (at 1-ms intervals)
Performance
Trigger functions
Functions
Other functions
Software (included)
Multipoint data collection
Traceability
Changeover Unit
18
Start and end triggers can be set separately.
External trigger/data trigger (self-trigger)
Time triggers
1
2
4
9
Min. sampling interval
150 μs
200 μs
350 μs
650 μs
Sensor Controller
(ZS-LDC)
Sensor Controller
(ZS-LDC)
CF Card
• External bank function
• Alarm output function
• Saved data format customization function
• Time function (timestamps)
• CSV file generation Software
• Excel macros for simple analysis
(Equivalent to software provided with SmartMonitor Professional.)
∗1) For One-shot Mode
• Connected to ZS-LDC
Number of
channels
Data Storage Unit
(ZS-DSU)
∗2) For Repeat Mode (Logging time depends on capacity of Memory Card.)
• Example for 64-MB Memory Card
Longest logging time
10 min
6.5 min
5.5 min
4.5 min
Typical examples
Number of Min. sampling interval
channels
1
2
4
9
10 ms
10 ms
10 ms
10 ms
Longest logging time
20 h
10 h
5h
2h
Typical examples
Data Storage Unit
ZS-DSU
• Connected to ZS-MDC
Number of Min. sampling interval
channels
1
2
4
9
350 μs
400 μs
500 μs
700 μs
Longest logging time
20 min
12 min
8 min
5 min
Typical examples
Smart Sensor
Advanced technology is carried
Setting Software for ZS Series SmartMonitor V3 Professional ZS-SW11V3E
Use a Computer for Everything from Ideal ZS Settings to Powerful Support of Data Collection and Analysis.
Easy Settings Using USB.
More Powerful Setting Support
Meets a wide range of logging needs.
The CMOS light reception image and the received light
waveform can be displayed. The real power of the
SmartMonitor is seen when measuring transparent objects and
other workpieces that create multiple received light waveforms.
Log measurement results at various times to leave judgment
and inspection results.
The fastest sampling interval is 500 μs (see note).
●Received Light Monitor
Note: Data may be skipped, depending on the computer system.
Use a computer that meets the recommended system requirements.
Expansion Units
●Logging
Light reception image
Received light
waveform
(Light Brightness)
High-speed simultaneous multichannel waveform graphs.
Excel macro provided for simple analysis.
High-speed display: 2-ms interval at max. speed (see note);
Simultaneous multichannel waveform display: Up to 9
waveforms can be displayed.
Data collected by logging can be processed with an Excel
macro using filters, slope compensation, filter median transitions,
differentiation, integration, and arithmetic functions and then
used for nominal judgments and other determinations.
Note: Data may be skipped, depending on the computer system. Use a computer
that meets the recommended system requirements.
●Multi-channel Waveform Display
●Analysis
Recommended System Requirements
SmartMonitor Professional
OS: Windows 7 (32-bit/64-bit version)
Windows XP (Service Pack3 or higher, 32-bit version)
CPU: Intel Pentium III 1 GHz or faster (2 GHz min. recommended.)
Memory: 1 GB min.
Available hard disk space: 50 MB min.
Display screen: 1,024 × 768 dots min., 16 million colors min.
Note: If the recommended system requirements are not met, data
may be interrupted and waveforms not displayed correctly
when using the logging, high-speed graph drawing, and multichannel waveform drawing functions.
SmartAnalyzer Macro Edition
For Microsoft Excel Macro Programming
Microsoft Excel 2000 or later required.
- Window is registered trademarks of Microsoft Corporation in the
USA and other countries.
- Other company names and product names in this document are the
trademarks or registered trademarks or their respective companies.
19
Ratings and Specifications
S p e c i fi c a t i o n
Ordering Information
Smart Sensor
ZS-HL-series Sensor Heads
Optical system Sensing distance
Regular
Reflective
Models
Diffuse
Reflective
Models
Note :
ZS-HL-series Sensor Controllers
Beam shape
Beam diameter
20±1 mm
Line beam
1.0 mm × 20 μm
0.25 μm
25±2 mm
Line beam
2.2 mm × 45 μm
0.6 μm
50±5 mm
Line beam
1.0 mm × 30 μm
0.25 μm
100±20 mm
Line beam
3.5 mm × 60 μm
1 μm
600±350 mm
Line beam
16 mm × 0.3 mm
8 μm
1500±500 mm
Line beam
40 mm × 1.5 mm
500 μm
Resolution (see note) Cable length
2m
0.5 m
2m
0.5 m
2m
0.5 m
2m
0.5 m
2m
0.5 m
2m
0.5 m
Model
ZS-HLDS2T 2M
ZS-HLDS2T 0.5M
ZS-HLDS2VT 2M
ZS-HLDS2VT 0.5M
ZS-HLDS5T 2M
ZS-HLDS5T 0.5M
ZS-HLDS10 2M
ZS-HLDS10 0.5M
ZS-HLDS60 2M
ZS-HLDS60 0.5M
ZS-HLDS150 2M
ZS-HLDS150 0.5M
Shape
Supply voltage
Control outputs
Model
NPN outputs
ZS-HLDC11
PNP outputs
ZS-HLDC41
Control outputs
Model
NPN outputs
ZS-LDC11
PNP outputs
ZS-LDC41
Control outputs
Model
NPN outputs
ZS-MDC11
PNP outputs
ZS-MDC41
Control outputs
Model
24 VDC
ZS-L-series Sensor Controllers
Shape
Supply voltage
24 VDC
Refer to the table of ratings and specifications for details.
ZS-HL-series Sensor Heads (For Nozzle Gaps)
Optical system Sensing distance
Ratings and Specifications
Regular
Reflective
Models
Note :
Beam shape
Beam diameter
10±0.5 mm
Line beam
900 × 25 μm
0.25 μm
15±0.75 mm
Line beam
900 × 25 μm
0.25 μm
Resolution (see note) Cable length
2m
0.5 m
2m
0.5 m
Model
ZS-LD10GT 2M
ZS-LD10GT 0.5M
ZS-LD15GT 2M
ZS-LD15GT 0.5M
Multi-Controllers
Shape
Refer to the table of ratings and specifications for details.
Supply voltage
24 VDC
ZS-L-series Sensor Heads
Optical system Sensing distance
Regular
Reflective
Models
Beam shape
Beam diameter
Line beam
900 × 25 μm
0.25 μm
Spot beam
25 μm dia.
0.25 μm
Line beam
2000 × 35 μm
0.4 μm
Line beam
900 × 60 μm
0.8 μm
Spot beam
50 μm dia.
0.8 μm
80±15 mm
Line beam
900 × 60 μm
2 μm
130±15 mm
Line beam
600 × 70 μm
3 μm
200±50 mm
Line beam
900 × 100 μm
5 μm
350±135 mm
Spot beam
240 μm dia.
20 μm
Resolution (see note) Cable length
20±1 mm
40±2.5 mm
50±5 mm
Diffuse
Reflective
Models
Note :
20
No. of samples to average: 128 when set to High-precision Mode.
2m
0.5 m
2m
0.5 m
4m
2m
0.5 m
2m
0.5 m
2m
0.5 m
2m
1m
0.5 m
2m
0.5 m
2m
0.5 m
2m
0.5 m
Model
ZS-LD20T 2M
ZS-LD20T 0.5M
ZS-LD20ST 2M
ZS-LD20ST 0.5M
ZS-LD40T 4M
ZS-LD40T 2M
ZS-LD40T 0.5M
ZS-LD50 2M
ZS-LD50 0.5M
ZS-LD50S 2M
ZS-LD50S 0.5M
ZS-LD80 2M
ZS-LD80 1M
ZS-LD80 0.5M
ZS-LD130 2M
ZS-LD130 0.5M
ZS-LD200 2M
ZS-LD200 0.5M
ZS-LD350S 2M
ZS-LD350S 0.5M
Data Storage Units
Shape
Supply voltage
NPN outputs
ZS-DSU11
PNP outputs
ZS-DSU41
24 VDC
Smart Sensor
Advanced technology is carried
Accessories (Sold Separately)
Controller Link Unit
Extension Cables for Sensor Heads
Shape
Cable length
Model
ZS-XCN
Panel Mount Adapter
Shape
Model
ZS-XPM1
For 1st Controller
ZS-XPM2
For expansion
(from 2nd Controller on)
Model
Personal computer
(2 m)
Qty
ZS-XRS2
Shape
Qty
1m
ZS-XC1A
1
4m
ZS-XC4A
1
5m
ZS-XC5B (∗1, ∗2)
1
8m
ZS-XC8A
1
10 m
ZS-XC10B (∗1)
1
Shape
Long Extension Cables for Sensor Heads
(Used with a Digital Equalizer for ZS-HL Series)
Name
Control outputs
Model
NPN outputs
ZG-RPD11
PNP outputs
ZG-RPD41
CompoNet-compatible Sensor Communications Unit.
∗1. Up to two [email protected] Cables can be connected. (22 m max.)
∗2. A Robot Cable (ZS-XC5BR) is also available.
RS-232C Cables
Connected to
Realtime Parallel Output Unit (for ZS-HL Series)
Model
Model
ZS-CRT
Model
Qty
Memory Cards
Digital Equalizer (Relay)
ZS-XEQ
1
Extension Cable (long distance, flexible 15 m cable)
ZS-XC15CR
1
Model
Capacity
Extension Cable (long distance, flexible 25 m cable)
ZS-XC25CR
1
Digital Equalizer Connection Cable (0.2 m)
ZS-XC02D
1
HMC-EF283
HMC-EF583
256 MB
512 MB
1
Logging Software
ZS-XPT2
Name
1
Model
SmartMonitor Professional
Ratings and Specifications
PLC/PT
(2 m)
ZS-SW11V3E
Quick Reference for Extension Cable Connections
Extension Cable
Model
Length
ZS-XC1A
1m
ZS-XC4A
4m
ZS-XC8A
8m
ZS-XC5B
5m
ZS-XC10B
10m
ZS-XC5BR
5m
ZS-XC15CR
15m
ZS-XC25CR
25m
Bend resistant
Sensor Head
ZS-LD@
ZS-HLDS2V
ZS-HLDS2/
-HLDS5/-HLDS10/
-HLDS60/-HLDS150
Controller
ZS-LDC@
ZS-HLDC@
Remarks
Only one Extension Cable can be used.
Up to two Extension Cables can be used.
(The maximum length is 22 m.)
A ZS-XEQ Digital Equalizar and ZS-XC02D
Digital Equalizar Connecting Cable are requied.
21
Ratings and Specifications
ZS-HL/L-series Sensor Controllers
Item
Model
ZS-HLDC11/LDC11
ZS-HLDC41/LDC41
No. of samples to average
1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096
Number of mounted Sensors
1 per Sensor Controller
Connection method
Serial I/O
Serial I/O: connector, Other: pre-wired (Standard cable length: 2 m)
USB 2.0
Judgment
output
External interface
Output
Ratings and Specifications
Inputs
Linear
output
Laser OFF, ZERO reset timing,
RESET
Status indicators
PNP open collector, 50 mA max., residual voltage 1.2 V max.
Selectable from 2 types of output, voltage or current (selected by slide switch on bottom).
• Voltage output: −10 to 10 V, output impedance: 40 Ω
• Current output: 4 to 20 mA, maximum load resistance: 300 Ω
ON: Short-circuited with 0 V terminal or 1.5 V or less
ON: Short-circuited to supply voltage or within 1.5 V of supply voltage.
OFF: Open (leakage current: 0.1 mA max.)
OFF: Open (leakage current: 0.1 mA max.)
HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (orange), and ENABLE (green)
8-segment red LED, 6 digits
Sub-digital
8-segment green LEDs, 6 digits
16 digits x 2 rows, Color of characters: green, Resolution per character: 5 x 8 pixel matrix
Setting keys
Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Slide switch
Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
Power supply voltage
21.6 V to 26.4 VDC (including ripple)
Current consumption
0.5 A max. (when Sensor Head is connected)
Ambient temperature
Operating: 0 to 50°C, Storage: −15 to +60°C (with no icing or condensation)
Ambient humidity
Degree of protection
Materials
Cable length
Weight
Accessories
∗1. Can be used with [email protected] when Multitask Mode selected.
∗2. Terminal block output is a function of the [email protected]
22
HIGH/PASS/LOW: 3 outputs
NPN open collector, 30 VDC, 50 mA max., residual voltage 1.2 V max.
Main digital
LCD
Setting inputs
1 port, 115,200 bps max.
HIGH/PASS/LOW 3 outputs
Display:
Measured value, threshold value, voltage/current, received light amount, and resolution/terminal block output ∗2
Sensing:
Mode, gain, measurement object, head installation
Measurement point ∗1: Average, peak, bottom, thickness, step, and calculations
Filter:
Smooth, average, and differentiation
Outputs:
Scaling, various hold values, and zero reset
I/O settings:
Linear (focus/correction), judgments (hysteresis and timer), non-measurement, and bank (switching and clear) ∗2
System:
Save, initialization, measurement information display, communications settings, key lock, language, and data load
Task:
[email protected]: Single task or multitask (up to 4)
[email protected]: Single task
Functions
Segment display
1 port, Full Speed (12 Mbps max.), MINI-B
RS-232C
Operating and storage: 35% to 85% (with no condensation)
IP20 (IEC60529)
Case: Polycarbonate (PC)
2m
Approx. 280 g (excluding packing materials and accessories)
Ferrite core (1), instruction sheet
Smart Sensor
Advanced technology is carried
Ratings and Specifications
ZS-HL-series Sensor Heads
Item
ZS-HLDS2T
Model
ZS-HLDS2VT
ZS-HLDS5T
ZS-HLDS10
Optical system
ZS-HLDS60
ZS-HLDS150
Diffuse reflection
ZS-HLDC series
Applicable Controllers
Regular reflection
Diffuse reflection
Regular reflection
Diffuse reflection
Regular reflection
Diffuse reflection
Measuring center distance
20 mm
5.2 mm
Regular reflection Diffuse reflection
25 mm
50 mm
44 mm
100 mm
94 mm
600 mm
1500 mm
Measuring range
±1 mm
±1 mm
±2 mm
±5 mm
±4 mm
±20 mm
±16 mm
±350 mm
±500 mm
Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Light source
Beam shape
Visible semiconductor laser (wavelength: 658 nm, 1 mW max., JIS Class 2)
Line beam
Beam diameter ∗1
Linearity ∗2
Resolution ∗3
1.0 mm × 20 μm
2.2 mm × 45 μm
±0.05%F.S.
±0.2%F.S.
0.25 μm (No. of samples to average: 256)
Temperature characteristic ∗4
0.01%F.S./°C
0.6 μm
(No. of samples to average: 128)
1.0 mm × 30 μm
3.5 mm × 60 μm
16 × 0.3 mm (at 500 mm)
±0.1%F.S.
0.25 μm (No. of samples to average: 512)
1 μm (No. of samples to average: 64)
0.1%F.S./°C
40 × 1.5 mm (at 1,500 mm)
±0.07%F.S. (250 to 750 mm), ±0.1%F.S. (750 to 950 mm)
8 μm (No. of samples to average: 64 at 250 mm),
40 μm (No. of samples to average: 64 at 600 mm)
±0.2%F.S.
500 μm (No. of samples to average: 64)
0.01%F.S./°C
110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 μs (High-precision Mode), 4.4 μs (High-sensitivity Mode)
Sampling cycle
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
LED Indicators
Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
FAR indicator
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Illumination on received light surface:
1000 lx or less (incandescent light)
Illumination on received light surface: 3000 lx or less (incandescent light)
Operating ambient illumination
Illumination on received light surface:
500 lx or less (incandescent light)
Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation)
Ambient temperature
Operating and storage: 35% to 85% (with no condensation)
Ambient humidity
Degree of protection ∗5
IP64
IP67
IP66 ∗6
Cable length 0.5 m: IP66, cable length 2 m: IP67
Case: Aluminum die-cast, Front cover: Glass
Materials
0.5 m, 2 m
Cable length
2m
0.5 m, 2 m
Approx. 350 g
Weight
Accessories
Ratings and Specifications
Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
NEAR indicator
Laser labels (1 each for JIS/EN, 3 for FDA),
ferrite cores (4), insure locks (2), instruction sheet
Approx. 600 g
Laser labels (1 each for JIS/EN),
ferrite cores (2), insure locks (2),
instruction sheet
Approx. 800 g
Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (4), insure locks (2), instruction sheet
∗1. Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.
∗2. This is the error in the measured value with respect to an ideal straight line.
∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center
∗4. This is the value obtained at the measuring center distance
Linearity may change according to the workpiece.
distance in high-precision mode when the number of samples to average is set to within the graph.
when the Sensor and workpiece are fixed by an aluminum jig.
The following options are available.
The maximum resolution at 250 mm is also shown for the ZS-HLDS60. The following options are available.
(typical example)
∗5.
Protection
structure of connector area is IP40.
Model
Diffuse reflection
Mirror reflection
Model
Diffuse reflection
Mirror reflection
∗6. Ask your OMRON representative about Sensor Heads with
ZS-HLDS2T
SUS block
Glass
ZS-HLDS2T
SUS block
Glass
IP67 protection.
ZS-HLDS2VT
--Glass
ZS-HLDS2VT
--Glass
ZS-HLDS5T
ZS-HLDS10
ZS-HLDS60/HLDS150
White alumina ceramic
Glass
White alumina ceramic
White alumina ceramic
---
ZS-HLDS5T
ZS-HLDS10
ZS-HLDS60/HLDS150
White alumina ceramic
Glass
White alumina ceramic
White alumina ceramic
---
23
Ratings and Specifications
ZS-L-series Sensor Heads
Item
ZS-LD20T
Model
ZS-LD20ST
ZS-LD40T
Applicable Controllers
Optical system
ZS-LD15GT
Regular reflection
Diffuse reflection
Regular reflection
Diffuse reflection
Regular reflection
Diffuse reflection
Measuring center distance
20 mm
6.3 mm
20 mm
6.3 mm
40 mm
30 mm
10 mm
15 mm
Measuring range
±1 mm
±1 mm
±1 mm
±1 mm
±2.5 mm
±2 mm
±0.5 mm
±0.75 mm
Light source
Regular reflection
Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape
Beam diameter ∗1
Line beam
Spot beam
900 × 25 μm
25 μm dia.
Line beam
2000 × 35 μm
Linearity ∗2
Approx. 25 × 900 μm
±0.1% FS
Resolution ∗3
0.25 μm
Temperature characteristic ∗4
0.04% FS/°C
0.25 μm
0.4 μm
0.04% FS/°C
0.02% FS/°C
0.25 μm
0.25 μm
0.04% FS/°C
110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode)
Sampling cycle
Ratings and Specifications
ZS-LD10GT
ZS-HLDC/LDC Series
Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
NEAR indicator
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
LED Indicators
Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
FAR indicator
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation)
Ambient temperature
Ambient humidity
Degree of protection ∗5
Operating and storage: 35% to 85% (with no condensation)
Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials
Cable length
Weight
Accessories
IP40
Case: Aluminum die-cast, Front cover: Glass
0.5 m, 2 m
Approx. 350 g
Approx. 400 g
Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet
Laser safety labels (1 each for JIS/EN), ferrite cores (2), insure locks (2)
∗1. Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.
∗2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the regular reflection mode. Linearity may change according to the workpiece.
∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode.
The standard workpiece is white aluminum ceramics and glass in the regular reflection mode.
∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig. (typical example)
∗5. Protection structure of connector area is IP40.
24
Sm ar t Senso r
Advanced technology is carried
Ratings and Specifications
ZS-L-series Sensor Heads
Item
ZS-LD50
Model
ZS-LD50S
ZS-LD80
Applicable Controllers
Optical system
ZS-LD130
ZS-LD200
ZS-LD350S
ZS-HLDC/LDC Series
Diffuse reflection
Regular reflection
Diffuse reflection
Regular reflection
Diffuse reflection
Regular reflection
Diffuse reflection
Measuring center distance
Diffuse reflection Regular reflection
50 mm
47 mm
50 mm
47 mm
80 mm
78 mm
130 mm
130 mm
200 mm
200 mm
350 mm
Measuring range
±5 mm
±4 mm
±5 mm
±4 mm
±15 mm
±14 mm
±15 mm
±12 mm
±50 mm
±48 mm
±135 mm
Light source
Diffuse reflection Regular reflection
Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape
Beam diameter ∗1
Line beam
Spot beam
900 × 60 μm
50 μm dia.
Linearity ∗2 ±0.1% FS
Resolution ∗3
Line beam
900 × 60 μm
600 × 70 μm
±0.1% FS
0.8 μm
Temperature characteristic ∗4
Line beam
0.02% FS/°C
±0.25% FS
Line beam
Spot beam
900 × 100 μm
240 μm dia.
±0.1% FS
±0.25% FS
±0.1% FS
0.8 μm
2 μm
3 μm
5 μm
20 μm
0.02% FS/°C
0.01% FS/°C
0.02% FS/°C
0.02% FS/°C
0.04% FS/°C
Ratings and Specifications
110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode)
Sampling cycle
Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
NEAR indicator
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
LED Indicators
Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
FAR indicator
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient illumination
Ambient temperature
Ambient humidity
Degree of protection ∗5
Materials
Illumination on received light surface:
2000 lx or less (incandescent light)
Illumination on received light surface: 3000 lx or less (incandescent light)
Illumination on received light surface: 3000 lx or less (incandescent light)
Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation)
Operating and storage: 35% to 85% (with no condensation)
Cable length 0.5 m: IP66, cable length 2 m: IP67
Case: Aluminum die-cast, Front cover: Glass
Cable length
0.5 m, 2 m
Weight
Approx. 350g
Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet
Accessories
∗1. Defined as 1/e (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.
∗2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode. Linearity may change according to the workpiece.
∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode.
The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode.
∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
∗5. Protection structure of connector area is IP40.
2
25
Ratings and Specifications
[email protected] Multi-Controllers
Controller Link Units
Basic specifications are the same as those for the [email protected] Sensor Controllers. The following points, however, are different.
1. Sensor Heads cannot be connected.
2. Control Link Units are required to connect up to 9 Controllers.
Control Link Units are required to connect Controllers.
3. Processing functions between Controllers: Arithmetic functions
Connection Using the ZS-XCN
Controller Link Units
Data Storage Unit
Multi-Controller
Sensor Controllers
[email protected] Data Storage Unit
Model
Item
Number of connectable Controllers
10 max. (ZS-MDC: 1, ZS-HLDC/LDC: 9 max.) ∗1
ZS-HLDC@@, ZS-LDC@@, ZS-MDC@@
Serial I/O: connector, Other: pre-wired (standard cable length: 2 m)
Connection method
External interface
Ratings and Specifications
ZS-DSU41
Cannot be connected
Connectable Controllers
Serial I/O
USB 2.0
RS-232C
Functions
1 port, 115,200 bps max.
3 outputs: HIGH, PASS, and LOW; NPN open-collector, 30 VDC, 50 mA max., residual voltage: 1.2 V max.
3 outputs: HIGH, PASS, and LOW; PNP open-collector, 50 mA max., residual voltage: 1.2 V max.
Inputs
ON: Short-circuited with 0 V terminal or 1.5 V or less; OFF: Open (leakage current: 0.1 mA max.)
ON: Short-circuited to supply voltage or within 1.5 V of supply voltage; OFF: Open (leakage current: 0.1 mA max.)
32 bits
Logging trigger functions
Start and stop triggers can be set separately; external triggers, data triggers (self-triggers), and time triggers
External banks, alarm outputs, saved data format customization, and clock
Other functions
OUT (orange), PWR (green), ACCESS (orange), and ERR (red)
Status indicators
8-segment green LEDs, 6 digits
Segment display
16 digits x 2 rows, Color of characters: green, Resolution per character: 5 × 8 pixel matrix
LCD
Setting inputs
1 port, Full Speed (12 Mbps max.), MINI-B
Output
Data resolution
Setting keys
Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Slide switch
Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
Power supply voltage
21.6 V to 26.4 VDC (including ripple)
Current consumption
0.5 A max.
Ambient temperature
Operating: 0 to 50°C, Storage: 0 to 60°C (with no icing or condensation)
Ambient humidity
Degree of protection
Materials
Weight
Accessories
∗1. Control Link Units are required to connect Controllers.
26
ZS-DSU11
Number of mounted Sensor Heads
Operating and storage: 35% to 85% (with no condensation)
IP20 (IEC60529)
Case: Polycarbonate (PC)
Approx. 280 g (excluding packing materials and accessories)
Ferrite core (1), instruction sheet for Data Storage Unit: CSV File Converter for Data Storage Unit/Smart Analyzer Macro Edition
Sm ar t S ens or
Advanced technology is carried
Dimensions
Multi-Controllers
Data Storage Units
[email protected][email protected]
[email protected]
[email protected]
23.20
Sensor Controllers
60
5.2
52.50
59.85
52.50
4.7
60
4.8
.7
11
18
32.90
24.20
18
32.90
a.
.7
11
10.80
Heat-resistive vinyl chloride, 5.2 mm dia.
Standard length: 2 m
13 10
di
Ratings and Specifications
3.90
4.30
10.80
Heat-resistive vinyl chloride, 5.2 mm dia.
Standard length: 2 m
13 10
24.20
a.
di
3.90
90
Heat-resistive vinyl chloride, 5.2 mm dia.
Standard length: 2 m
18
32.90
24.20
.7
10.80
4.30
3.90
90
4.30
13 10
11
90
11
4.61
60
52.50
a.
di
27
Dimensions
Sensor Heads
ZS-HLDS5T/HLDS10
Reference surface
18
Sensor Heads
ZS-HLDS2T
Two, 4.5 mm dia.
mounting holes
92.1
46
6.5
65
20
Receiver
(15)
8
Reception
axis
A° (See note.)
Reference surface
Three, 4.5 mm dia.
mounting holes
20
16.9
Ratings and Specifications
42
Note: L = 50 and A = 30° for the ZS-HLDS5T.
L = 100 and A = 25° for the ZS-HLDS10.
42
Sensor Heads
ZS-HLDS60/HLDS150
Optical axis
19
38
(Unit: mm)
Reference surface
L (See note.)
75
22.7
Operation indicators
65
5
8
47
9.5
28
65±0.1
88.75
120
45
115.06
Measuring
center
Emission axis
Vinyl insulated round cable, 6.8 mm dia.
Standard length: 0.5 m and 2 m
Note: L = 600 and A = 7° for the ZS-HLDS60.
L = 1500 and A = 3° for the ZS-HLDS150.
28
Mounting hole dimensions
2
30.1
57
(5)
16.4
A° (See note.)
25
Reference
surface
Emitter
Three, M4
102
46
Reception axis
42
45±0.1
Receiver
Mounting hole dimensions
Vinyl insulated round cable, 6.8 mm dia.
Standard length: 0.5 m and 2 m
30.1
Vinyl insulated round cable, 6.8 mm dia.
Standard length: 0.5 m and 2 m
45.1
30.1
18.1
Reference surface
13 dia.
Three, M4
(5)
Emission axis
Emitter
70±0.1
9.5±0.1
69±0.1
20
32
25°
Emitter
Operation indicators
9.5
Measuring
center
13 dia.
Mounting hole dimensions
70
4
Emission axis
22.7
9.5
Two, M4
25
57±0.1
4
25°
56.5
80
72
4
Measuring
center
L (See note.)
Operation indicators
57
100
4
82
65
(Unit: mm)
69
20
25
Reception
axis
12
Optical
axis
16.4
26.4
Reference
surface
36
(Unit: mm)
Receiver
Smart Sensor
Advanced technology is carried
Dimensions
105±0.3
115
ZS-LD15GT
8.5
(Unit: mm)
Connector
30
Vinyl insulated round cable, 6.2 mm dia.
Standard length: 0.5 m and 2 m
16.5
24
29
5
11.5
24
11.5 16.5
15
4.
ur
Emitter
8
Mounting hole dimensions
Ratings and Specifications
40
Fo
30
20
Receiver
Four, 4.5 mm dia. mounting holes
Four, 8 mm dia. countersunk, depth: 4
,M
29±0.1
36±0.3
16
4
4
M
26±0.3
e,
re
Emitter
Reception
axis
45
Measuring
center
20±0.1
Mounting hole dimensions
90°
Emission axis
50
40±0.25
4
30±0.1
C1
Reference
surface
Reception axis
44
84
74
55
44
12.50
17.50
25
55±0.3
45
25
17.50
12.50
10 10
Three, 4.5 mm dia. mounting holes
90°
Th
46±0.1
76±0.1
Reference
surface
Emission axis
Measuring
center
o,
26±0.1
Connector
Tw
96±0.1
(Unit: mm)
45
35
30
56
85±0.3
Vinyl insulated round cable, 6.2 mm dia.
Standard length: 0.5 m and 2 m
42
30
15
8.5
48
40
30
25
20
12
42
Sensor Heads
ZS-LD10GT
Receiver
Sensor Heads
56±0.1
8
Measuring
center
Reference
surface
8
Reception
axis
Receiver
8
4.5
A° (See note.)
30.1
42
Connector
Range
indicator
56±0.1
Emission
axis
4
Mounting hole dimensions
56
Note: L = 50 and A = 30° for the ZS-LD50/50S.
L = 80 and A = 15° for the ZS-LD80.
L = 130 and A = 12° for the ZS-LD130.
L = 200 and A = 8° for the ZS-LD200.
L = 350 and A = 5° for the ZS-LD350S.
56±0.1
56
65
Emitter
M
o,
Tw
8.5
30.1
(Unit: mm)
45
30
Two, 4.5 mm dia. mounting holes
4
65
4
M
o,
Tw
Mounting hole dimensions
56
8.5
8
8
4.5
56±0.1
56
65
Range
indicator
Reception
axis
Receiver
A (See note.)
L (See note.)
45
Emitter
Emission
axis
35
15.30
27.1
Reference
surface
(Unit: mm)
27.1
8
8
Measuring
center
ZS-HLDS2VT/LD20T/LD20ST/LD40T
Two, 4.5 mm dia. mounting holes
4
65
4.5
L (See note.)
4.5
35
11
15.3
8
ZS-LD50/LD50S/LD80/LD130/LD200/LD350S
42
Connector
Vinyl insulated round cable, 6.2 mm dia.
Standard length: 0.5 m and 2 m
Note: L = 25 and A = 34.5° for the ZS-HLDS2VT.
L = 20 and A = 45° for the ZS-LD20T/20ST.
L = 40 and A = 32° for the ZS-LD40T.
Vinyl insulated round cable, 6.2 mm dia.
Standard length: 0.5 m and 2 m
29
Dimensions
Realtime Parallel Output Unit
Panel Mount Adapter
[email protected]
ZS-XPM1/XPM2 (Dimensions for Panel Mounting)
10
28.40
Two mounting holes
(Unit: mm)
7
29.60
8
60 × n
(Unit: mm)
Panel cutout dimensions
3
Panel
10.25
21
30
13
(60 × n) + 12
15.85
15.65
66.50
80
9
DIN Track
9
116±1
(140)
(2.85)
70
11.5
13
90
98
(14.15)
122
89
(150)
32.90
55
Panel
(2)
Panel Mount Adapter
6
(See note.)
Ratings and Specifications
Digital Equalizer
n: Number of gang-mounted Controllers (1 to 11)
Mounting bracket
ZS-XEQ
25.5
3
(Unit: mm)
22
4.5
37
33
+1°
+1°
15° 0 15° 0
4.5
43
70
a.
0
3
di
4
M
.5
o,
10
Tw
37
Three, R2.25
°±
1°
5.5
37
90
4.5
22
+1°
+1°
15° 0 15° 0
16.50
33
11.50
21
5.5
54
43
4.5
30
(60 × n) + 8
Note: Dimensions are shown for a panel thickness of 2.0 mm.
35.20
30
(37.5)
Sm ar t S ens or
Advanced technology is carried
Safety Precautions for Using Laser Equipment
WARNING
Do not expose your eyes to the laser radiation
either directly or indirectly (i.e., after reflection
from a mirror or shiny surface).
The laser radiation has a high power density
and exposure may result in loss of sight.
Laser Label Indications
Attach the following warning
label to the side of the ZS series
Sensor Head.
READ AND UNDERSTAND THIS DOCUMENT
Please know and observe all prohibitions of use applicable to the products.
WARRANTY
NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT
ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON
PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR
SYSTEM.
Please read and understand this document before using the products. Please consult your OMRON representative if you have
any questions or comments.
OMRON's exclusive warranty is that the products are free from defects in materials and workmanship for a period of one year
(or other period if specified) from date of sale by OMRON.
OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NON-INFRINGEMENT,
MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER OR USER
ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY
MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR
IMPLIED.
PERFORMANCE DATA
Performance data given in this document is provided as a guide for the user in determining suitability and does not constitute a
warranty. It may represent the result of OMRON's test conditions, and the users must correlate it to actual application
requirements. Actual performance is subject to the OMRON Warranty and Limitations of Liability.
CHANGE IN SPECIFICATIONS
Product specifications and accessories may be changed at any time based on improvements and other reasons.
OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS
OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON
CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY.
It is our practice to change model numbers when published ratings or features are changed, or when significant construction
changes are made. However, some specifications of the product may be changed without any notice. When in doubt, special
model numbers may be assigned to fix or establish key specifications for your application on your request. Please consult with
your OMRON representative at any time to confirm actual specifications of purchased products.
Ratings and Specifications
LIMITATIONS OF LIABILITY
In no event shall responsibility of OMRON for any act exceed the individual price of the product on which liability is asserted.
IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE
PRODUCTS UNLESS OMRON's ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED, STORED,
INSTALLED, AND MAINTAINED AND NOT SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE
MODIFICATION OR REPAIR.
SUITABILITY FOR USE
THE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED OR RATED
FOR ENSURING SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY COMPONENT OR
PROTECTIVE DEVICE FOR SUCH PURPOSES. Please refer to separate catalogs for OMRON's safety rated products.
DIMENSIONS AND WEIGHTS
Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are shown.
ERRORS AND OMISSIONS
The information in this document has been carefully checked and is believed to be accurate; however, no responsibility is
assumed for clerical, typographical, or proofreading errors, or omissions.
PROGRAMMABLE PRODUCTS
OMRON shall not be responsible for the user's programming of a programmable product, or any consequence thereof.
OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of
products in the customer's application or use of the product.
COPYRIGHT AND COPY PERMISSION
At the customer's request, OMRON will provide applicable third party certification documents identifying ratings and limitations of
use that apply to the products. This information by itself is not sufficient for a complete determination of the suitability of the
products in combination with the end product, machine, system, or other application or use.
This document is protected by copyright and is intended solely for use in conjunction with the product. Please notify us before
copying or reproducing this document in any manner, for any other purpose. If copying or transmitting this document to another,
please copy or transmit it in its entirety.
This document shall not be copied for sales or promotions without permission.
The following are some examples of applications for which particular attention must be given. This is not intended to be an
exhaustive list of all possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the
products:
• Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not described in
this document.
• Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement
machines, vehicles, safety equipment, and installations subject to separate industry or government regulations.
• Systems, machines, and equipment that could present a risk to life or property.
31
This document provides information mainly for selecting suitable models. Please read the manual carefully for information that the user must
understand and accept before purchase, including information on warranty, limitations of liability, and precautions.
OMRON Corporation
Industrial Automation Company
Authorized Distributor:
Tokyo, JAPAN
Contact: www.ia.omron.com
Regional Headquarters
OMRON EUROPE B.V.
Sensor Business Unit
Carl-Benz-Str. 4, D-71154 Nufringen, Germany
Tel: (49) 7032-811-0/Fax: (49) 7032-811-199
OMRON ELECTRONICS LLC
One Commerce Drive Schaumburg,
IL 60173-5302 U.S.A.
Tel: (1) 847-843-7900/Fax: (1) 847-843-7787
OMRON ASIA PACIFIC PTE. LTD.
No. 438A Alexandra Road # 05-05/08 (Lobby 2),
Alexandra Technopark,
Singapore 119967
Tel: (65) 6835-3011/Fax: (65) 6835-2711
OMRON (CHINA) CO., LTD.
Room 2211, Bank of China Tower,
200 Yin Cheng Zhong Road,
PuDong New Area, Shanghai, 200120, China
Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200
© OMRON Corporation 2009 All Rights Reserved.
In the interest of product improvement,
specifications are subject to change without notice.
CSM_5_3_0216
Printed in Japan
Cat. No. E375-E1-02
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