Silicon Piezoresistive Relative Pressure Sensor KPY 51-RK KPY 57-RK Features • • • • Low pressure and temperature hysteresis Fast response High sensitivity and linearity Fatigue free monocrystaline silicon diaphragm giving high load cycle stability • High long term stability • Built in silicon temperature sensor • Provided for further fabrication, protection cap TO-8-6 Type and Marking Symbol Pressure Range Unit Ordering Code KPY 51 RK P0 … PN 0 … 0.25 bar Q62705-K189 KPY 52 RK 0 … 0.6 Q62705-K190 KPY 53 RK 0 … 1.6 Q62705-K191 KPY 54 RK 0…4 Q62705-K193 KPY 55 RK 0 … 10 Q62705-K195 KPY 56 RK 0 … 25 Q62705-K197 KPY 57 RK 0 … 60 Q62705-K199 Pin Configuration 1 Capillary tube 2 + VIN 3 − VOUT 4 Temperature sensor (typ. R25 = 2 kΩ) 5 Temperature sensor 6 − VIN 7 + VOUT 8 Not connected Semiconductor Group 1 02.97 KPY 51-RK KPY 57-RK Absolute Maximum Ratings Parameter Limit Values1) Symbol Unit Frontside Rearside PMAX Pressure overload KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Operating temperature range Storage temperature range Supply voltage bar 2 6 10 16 30 40 70 2 6 10 16 30 75 100 TA Tstg VIN − 40 … + 125 ˚C − 50 … + 150 ˚C 12 V 1) Frontside coupling applies pressure onto chip face. Rearside coupling applies pressure through Kovar centre tube. Electrical Characteristics at TA = 25 ˚C and VIN = 5 V, unless otherwise specified. Parameter Symbol Bridge resistance RB Sensitivity s KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK min. typ. max. 4 − 8 16.8 11.0 5.6 4.0 1.8 0.88 0.47 24.0 15.0 8.8 6.0 2.6 1.2 0.67 32.0 24.0 12.5 9.0 4.0 2.0 1.0 Vfin Output voltage KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Semiconductor Group Limit Values kΩ mV/ Vbar mV 21 33 45 80 90 110 140 2 Unit 30 45 70 120 130 150 200 40 72 100 180 200 250 300 KPY 51-RK KPY 57-RK Electrical Characteristics (cont’d) at TA = 25 ˚C and VIN = 5 V, unless otherwise specified. Parameter Symbol Offset voltage P = P0 V0 Linearity error (Best fit straight line) P0 = P0 … PN FL KPY 51 … 55 RK KPY 56/57 RK Limit Values min. typ. max. − 25 − + 25 mV % Vfin − − Pressure hysteresis PH P1 = P0, P2 = PN, P3 = P0 KPY 51 … 57 RK Unit ± 0.15 ± 0.35 ± 0.15 − − ± 0.1 − % Vfin Electrical Characteristics at T1 = 25 ˚C, T2 = 125 ˚C, T3 = 25 ˚C and VIN = 5 V, unless otherwise specified. Parameter Symbol Limit Values min. Temperature coefficient of Vfin − 0.13 − 0.15 − 0.16 − 0.17 − 0.17 − 0.17 − 0.17 − 0.09 − 0.12 − 0.13 − 0.14 − 0.14 − 0.15 − 0.15 TCV0 %/K − 0.05 − 0.05 − 0.03 − 0.03 − 0.03 − 0.03 − 0.01 − − − − − − − + 0.05 + 0.05 + 0.03 + 0.03 + 0.03 + 0.03 + 0.01 TCRB KPY 51 … 57 RK Semiconductor Group %/K − 0.19 − 0.19 − 0.19 − 0.19 − 0.19 − 0.19 − 0.19 KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Temperature coefficient of RB max. TCVfin KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Temperature coefficient of V0 typ. %/K − 3 Unit + 0.095 − KPY 51-RK KPY 57-RK Electrical Characteristics (cont’d) at T1 = 25 ˚C, T2 = 125 ˚C, T3 = 25 ˚C and VIN = 5 V, unless otherwise specified. Parameter Symbol Limit Values min. Temperature hysteresis of V0; Vfin typ. Unit max. % v. TH Vfin − 0.7 − 0.5 − 0.3 KPY 51 RK KPY 52 RK KPY 53 … 57 RK − − − + 0.7 + 0.5 + 0.3 Package Outline TO-8-6 Dimension in mm Weight approx. 4.5 g Exterior Packaging I.e. tubes, trays, boxes are shown in our Data Book “Package Information”. Semiconductor Group 4