Datasheet

ULTRA THIN MCP ASSEMBLY
WITH CENTER HOLE
F6589
FEATURES
● Ultra Thin Type: 2.5 mm (Max.)
• Detection at closed distance from samples
● Flexible Lead Out (polymide film)
• Easy system design with a flexible wiring
• Low outguessing for high vacuum operation
● Light Weight
APPLICATIONS
● SEM
● FIB System
● Mask Aligner
TMCPF0083
● Electron Beam Measuring System
SPECIFICATIONS
Parameter
Value
Unit
28.0
11.0
2.5
12
2
1
4
-0.4 to +0.4
+2.4 (Max.)
mm
mm
mm
µm
stage
mm
mm
2.0
0.4
2.4
Less than 6.7 × 10 -4 (5 × 10 -6)
-50 to +70
200
8
Less than 6.7 × 10 -4 (5 × 10 -6)
kV
kV
kV
Pa (Torr)
°C
°C
hours
Pa (Torr)
1 × 10 6 Min.
50 to 200
7% of strip current under uniform input into
whole MCP effective area
1 × 10 -10
3
–
MΩ/MCP
GENERAL
Assembly Outer Diameter
Effective Diameter
Maximum Height
MCP Channel Diameter
MCP Stage Number
Centerpipe Inner Diameter
Dead Area around Center Hole
Electrical Potential
MCP-in
Anode
kV
MAXIMUM RATINGS
MCP Supply Voltage (In-Out)
MCP Out-Anode Voltage
Anode-Substrate Voltage
Operating Vacuum Condition
Ambient Temperature
Baking Temperature
Baking Time
Vacuum Condition for Baking
• Not allowed to be baked.
CHARACTERISTICS
Gain at 1.8kV
Plate Resistance
Maximum Linear Output
DC Dark Current at 2kV
Dark Count at 2kV
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. © 1997 Hamamatsu Photonics K. K.
µA
A
cps
ULTRA THIN MCP ASSEMBLY WITH CENTER HOLE F6589
Figure 1: Merit of Ultra Thin MCP Assembly with Center Hole
ULTRA THIN TYPE
CONVENTIONAL TYPE
Electron
Electron
MCP
Secondary Electrons
MCP
Secondary Electrons
Stage
Stage
Sample
Sample
Detection efficiency of secondary Electrons is improved with a closed distance from
sample.
TMCPC0039EA
Figure 2: Dimensional Outline (Unit: mm)
ANODE LEAD
MCP-OUT LEAD 8
ø2.2
ø4
ø6
MCP-IN LEAD
10
58
63
POLYIMIDE FILM (Less Than 0.1t)
ELECTRODE : COPPER
EFFECTIVE AREA
PROTECTION ELECTRODE
FOR CHARGING-UP
(SAME POTENTIAL AS SUBSTRATE)
,
ø1
ø11
ø18
ø28
,,
,
2.5 MAX.
SUBSTRATE
(TITANIUM)
MCP (2 STAGE)
SUBSTRATE
ANODE
(SUS-NM)
TMCPA0031EA
HAMAMATSU PHOTONICS K.K., Electron Tube Center
314-5, Shimokanzo, Toyooka-village, Iwata-gun, Shizuoka-ken, 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658
France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10
United Kingdom: Hamamatsu Photonics UK Limited: Lough Point, 2 Gladbeck Way, Windmill Hill, Enfield, Middlesex EN2 7JA, United Kingdom, Telephone: (44)181-367-3560, Fax: (44)181-367-6384
North Europe: Hamamatsu Photonics Norden AB: Färögatan 7, S-164-40 Kista, Sweden, Telephone: (46)8-703-29-50, Fax: (46)8-750-58-95
Italy: Hamamatsu Photonics Italia S.R.L.: Via Della Moia, 1/E 20020 Arese, (Milano), Italy, Telephone: (39)2-935 81 733, Fax: (39)2-935 81 741
TMCP1011E03
MAR. 1998. CR (9705)
Printed in Japan
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