00002104

AN2104
Piezoelectric Micropump Driver Reference Design
Author:
Microfluidics Technology Introduction
Zhang Feng
Fu-Ho Lee
Microchip Technology Incorporated
Microfluidics deals with miniature devices which can
pump, process and control small volumes of fluids. It is
an essential part of precision control systems for
biomedical analysis and drug delivery. In the drug
delivery system, a flow-controlled piezoelectric
micropump can provide the actuation source to transfer
the drug (liquid or gas) from the drug reservoir to the
body with accuracy and reliability.
Overview
In medical devices for precision controlled drug
delivery, such as infusion pumps, insulin pumps or
nebulizers, piezoelectric micropumps offer an
attractive alternative to standard pumps. Piezoelectric
micropumps are small, lightweight, low power, low
cost, and accurate.
Basics of Piezoelectric Micropumps
A Piezoelectric micropump is a miniaturized
mechanical pumping device employing a piezoelectric
actuator in combination with passive check valves.
When voltage is applied, a piezoelectric actuator
expands or contracts, which causes the liquid or gas to
be sucked into or expelled from the pump chamber.
The check valves on both sides of the pump chamber
govern the flow in one direction.
This application note describes the implementation of a
basic driver circuit for driving a piezoelectric
micropump with flow control in an example of fluid
delivery. The described system includes a control
board, a high voltage driver board, and an mp6
Piezoelectric Diaphragm Micropump.
FIGURE 1:
BLOCK DIAGRAM FOR THE PIEZOELECTRIC MICROPUMP DRIVER DEMO
Control Board
GND
LiPo Rechargeable
Battery 3.7V
LDO
MCP1711
3.3V
3.7V
Charge Pump
MCP1252
High Voltage Driver Board
5V
USB
GND
LiPo Battery
Charge Controller
MCP73834
3.7V
Microcontroller
PIC16F1719
I/O
OPA1
UNI/O® Serial
EEPROM 11AA010
I/Os
5V
HV_EN
HV_VREF
DAC
Step Up DC/DC
Controller HV9150
Boost Converter
Push Buttons
NCO
OLED Display
HV_LE
HV_DIN
I/Os
Liquid Flow Meter
I2C
HV_CLK
HVOUT1
ADC
HVOUT2
Thermistor IC
MCP9700
Low Voltage Serial to
High Voltage Parallel
Converter HV513
Clamping Circuit
 2016 Microchip Technology Inc.
P1P1+
P2+
P2-
PiezoĞůĞĐƚƌŝĐ
Micropump
DS00002104A-page 1
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
One of the challenges in designing a piezoelectric
micropump driver is the requirement for high supply
voltage to be applied to the piezoelectric actuator. The
following sections demonstrate how to use the Core
Independent Peripherals (CIPs) and the intelligent
analog peripherals featured in Microchip's 8-bit
microcontrollers, along with Microchip's high voltage
device family to generate reliable high voltage signals
at a specific frequency for driving a piezoelectric
diaphragm micropump.
PIEZOELECTRIC MICROPUMP
DRIVER DEMO SYSTEM
Microchip's piezoelectric micropump demo (see
Figure 12) is comprised of the following components:
• Piezoelectric Micropump
• Control Board
• High Voltage Driver Board
The control board provides the power, the adjustable
voltage and frequency control signals to the high
voltage driver board. The high voltage driver board
delivers the boosted signals in specific waveform on
multiple output channels with adjustable peak-to-peak
voltage (VPP) and frequency to the piezoelectric
micropump. The demo can supply a maximum of 250
V of VPP and a maximum frequency of 300 Hz. This
adjustability allows the basic driver to drive different
types of piezoelectric micropumps on the market. The
Bartels mp6 Piezoelectric Diaphragm Micropump was
selected for use in this particular demo.
Control Board
The control board provides the power, the adjustable
voltage, and frequency control signals to the high
voltage driver board. The demo system is powered by
a 3.7V 700mAh Li-Polymer rechargeable battery. The
MCP73834 Li-Polymer charge controller manages the
battery charging via USB. Through the MCP1711 LDO
and the MCP1252 charge pump, the battery supplies
3.3V, 3.7V and 5V voltage sources to different portions
of circuitry in the demo. An MCP9700 Linear Active
Thermistor IC is used for general purpose temperature
measurement. A 11AA010 1K UNI/O® serial EEPROM
is used for data storage. An OLED displays the demo's
information, such as voltage and frequency settings for
the pump. Onboard push buttons are used to change
the pump's settings.
In the heart of the control board is a PIC16F1719 8-bit
microcontroller. The PIC16F1719 monitors the push
buttons' status, as well as the MCP73834's status,
utilizing the Interrupt-On-Change (IOC) interfaces. The
PIC16F1719 reads the temperature data sent from the
MCP9700 utilizing the Analog-to-Digital Converter
(ADC) module. The PIC16F1719 can store data, like
the pump's settings, to the 11AA010 using a single
General Purpose I/O (GPIO) pin. The PIC16F1719 can
communicate with a flow meter via an I2C interface for
closed-loop flow control. Figure 5 shows the flowchart
of the firmware.
CONTROL SIGNALS SENT TO THE HIGH
VOLTAGE BOARD
mp6 Piezoelectric Micropump
The PIC16F1719 sends five critical control signals to
the high voltage driver board:
The mp6 Piezoelectric Diaphragm Micropump is
designed and manufactured by Bartels Mikrotechnik
GmbH (www.bartels-mikrotechnik.de), and is supplied
by Servoflo Corporation (www.servoflo.com) in North
America.
•
•
•
•
•
The Bartels mp6 micropump operates on the basic
principle of piezoelectric micropump as introduced in
the previous section. According to its data sheet, the
mp6 combines two piezoelectric actuators, each with
two passive check valves, inside a single housing.
Hence, the mp6 has an increased priming capability
and higher bubble tolerance, and can handle greater
back pressure. In the entire pump, the
polyphenylsulfone (PPSU) is the only material which
contacts the medium.
DS00002104A-page 2
HV_EN
HV_VREF
HV_DIN
HV_CLK
HV_LE
These signals control the VPP and the frequency of the
final high voltage driving signals to the mp6
micropump.
 2016 Microchip Technology Inc.
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
HV_EN
HV_LE
The HV_EN signal (generated from a GPIO port) is
used to enable or disable the HV9150 Step-Up
Controller. This HV9150 is a high output voltage
hysteretic mode step-up DC/DC controller that is
located on the high voltage driver board.
The HV_LE signal is connected to the HV513's latch
enable (LE) pin. When the HV_LE signal goes high, the
data will transfer from the shift register to the latch and
appear on the HV513's 8 high voltage output channels.
The data in the latch is stored when the HV_LE is low.
Therefore, the HV_LE is used to define the frequency
of the final high voltage driving signals. The HV_LE
signal is generated by the PIC16F1719's Numerically
Controlled Oscillator (NCO) module. The NCO outputs
a pulse as the latch enable signal at a user-defined
frequency. With a 20-bit increment function, the NCO
can generate pulses with a frequency that is linearly
adjustable with fine resolution. When the user selects
the frequency adjustment menu from the OLED, the
frequency of the mp6 driving signals can be linearly
increased or decreased by pressing the push buttons
to change the NCO output frequency. This allows the
user to change the pump's speed while it is running.
HV_VREF
The HV_VREF is an adjustable voltage reference
signal generated by the PIC16F1719's internal Digitalto-Analog Converter (DAC) module. Due to the limited
current drive capability of the DAC, one of the
PIC16F1719's internal Operational Amplifier (OPA)
modules is used as a buffer on the DAC's voltage
reference output. The HV_VREF signal is connected to
the HV9150's external reference voltage input
(EXT_REF) port to control its boost converter output
level. This converter output level controls the VPP level
of the final mp6 driving signal.
When the user selects the voltage adjustment menu
from the OLED, the VPP of the mp6 driving signals can
be linearly increased or decreased by pressing the
push buttons to change the DAC voltage reference
output value. This allows the user to change the pump's
speed while it is running.
HV_DIN
The HV_DIN signal, which is generated from a GPIO
port carrying up to 8 bits of data, is connected to the
serial data input (DIN) port of the HV513 Parallel
Converter. The HV513 is an 8-channel serial-to-parallel
converter with high voltage push-pull outputs and is
located on the high voltage driver board. The HV513
converts the serial data received on the HV_DIN to
parallel data and then outputs them to corresponding
high voltage push-pull output channels. Therefore, the
HV_DIN defines the final output data used to turn on, or
off, up to 8 piezoelectric actuators simultaneously. In
this demo only two high voltage output channels
(HVOUT1 & HVOUT2) are needed and enabled,
because there are two piezoelectric actuators in the
mp6 micropump.
HV_CLK
The HV_CLK signal is generated from a GPIO port that
is connected to the HV513's clock (CLK) pin. The
HV_CLK provides the input clock signal to the HV513
for its 8-bit data shift register. The corresponding 8 bits
of data received on the HV_DIN will be shifted through
the shift register on the rising edge of the input clock.
 2016 Microchip Technology Inc.
In Operation
To turn on the micropump, the PIC16F1719
microcontroller first initializes the DAC & OPA to set
LE_VREF, and then enables the HV9150 to generate
the high output voltage. Next, the PIC16F1719 enables
the NCO's interrupt function. After the first NCO
interrupt occurs, the first NCO pulse appearing on the
HV_LE will clear the HV513 outputs with all 0s (zeros).
Then the PIC16F1719 sends out a data 0x01 on the
HV_DIN, along with the 4 bits of clock signal on the
HV_CLK. The data 0x01 will be clocked into the
HV513's shift register serially. When the next NCO
interrupt takes place, the second NCO pulse on the
HV_LE will latch the data 0x01, received by the
HV513's shift register, onto the HV513's parallel output
channels. Output channel-1 (HVOUT1) will then go
high to the preset high voltage level and the rest of the
output channels will remain 0 (zero). The HVOUT1 is
fed to a positive biased clamp circuit formed by the
components C17, D2, D4, and an RC filter formed by
the R15 and the mp6 micropump. The output of the RC
filter is connected to the positive terminal (P1+) of the
piezoelectric actuator P1 in the mp6. The negative
terminal (P1-) of P1 is grounded. During this cycle, P1
is engaged and P1+ will stay high for the period of the
NCO interrupt.
In the next cycle, the PIC16F1719 sends out a data
0x02 on the HV_DIN and repeats the rest of the
operation for the HV_CLK and the HV_LE (see
Figure 2). The output channel-2 (HVOUT2) will then go
high to the preset high voltage level and the rest of the
output channels will remain 0. The HVOUT2 is fed to a
positive biased clamp circuit formed by the
components C18, D3, D5 and an RC filter formed by
R16 and the mp6. The output of the RC filter is
connected to the positive terminal (P2+) of the
piezoelectric actuator P2 in the mp6 micropump. The
negative terminal (P2-) of P2 is grounded.
DS00002104A-page 3
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
During this cycle, P2 is engaged and P2+ will stay high
for the period of the NCO interrupt. By repeating the
above operations, the P1 and P2 piezoelectric
actuators are alternatively engaged at the NCO's
frequency and the mp6 micropump is turned on.
The high voltage driving signals presented on the
HVOUT1 & HVOUT2 are square waves from 0V to
preset VPP. The positive biased clamp circuit placed on
each HVOUT channel is designed to pull down the high
FIGURE 2:
voltage driving signal to -50V (see Figure 3) as
required by the mp6's specification. The RC filters
placed at the output of the clamp circuits round the
edges of the square waves (see Figure 4). With the
edges rounded off, the high voltage driving signals will
drive the piezoelectric actuators more gently than
square waves would and thus create less audible
noise.
SIGNAL TIMING WAVEFORM FOR HV_DIN, HV_CLK, HV_LE
HV_CLK
HV_DIN
(0010)
HV_LE
DS00002104A-page 4
 2016 Microchip Technology Inc.
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
FIGURE 3:
SQUARE WAVE OF THE DRIVING SIGNALS
c_HV2
c_HV1
FIGURE 4:
ROUNDED SQUARE WAVE OF THE DRIVING SIGNALS
P2+
P1+
 2016 Microchip Technology Inc.
DS00002104A-page 5
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
FIGURE 5:
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DS00002104A-page 6
 2016 Microchip Technology Inc.
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
High Voltage Driver Board
DC/DC BOOST CONVERTER
The high voltage driver board delivers the boosted
signals in specific waveforms on dual output channels,
with adjustable peak-to-peak voltage and frequency, to
the piezoelectric micropump. Both pulse frequency and
the peak-to-peak voltage can be controlled by the
software.
Microchip's HV9150 boost controller IC is used to
convert the 3.7 volt battery supply to a 250V output to
power the driver IC (see Figure 7). The HV9150 boost
controller is a simple hysteretic converter which
operates in conjunction with an external power
MOSFET. It has a built-in 3X charge pump converter
and its output powers the internal gate driver to drive
the external power MOSFET. The charge pump
converter multiplies the low input supply voltage by
roughly three times with a two stage charge pump
circuit. The charge pump output voltage is high enough
to drive the gate of the external MOSFET. This
converter has a fixed duty cycle and a fixed switching
frequency, which improve the system stability. The
trade-off is larger ripple at the output voltage. Since the
required power to drive the piezoelectric micropump is
relatively small, a few microfarads of decoupling
capacitor at the high voltage output can reduce the
output ripple to an acceptable level.
The high voltage driver board (see Figure 6) consists of
two functional blocks:
• DC/DC Boost Converter
• High Voltage Push-Pull Driver
The DC/DC boost converter converts the low supply
voltage from the battery to 250V high supply voltage.
This high supply voltage is used to power the driver IC
to actuate the piezoelectric micropump. The driver IC
provides a high voltage unipolar push-pull output and a
series of pulses are generated from the controller IC to
drive the piezoelectric element.
FIGURE 6:
BLOCK DIAGRAM OF HIGH VOLTAGE DRIVER BOARD
 2016 Microchip Technology Inc.
DS00002104A-page 7
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
The gate driver sends the controlled pulses to the
external power FET in a classic boost converter
topology with an inductor, a high voltage rectifier diode,
and a storage capacitor. An intermediate voltage is
created at about half of the target 250V. There is a good
selection of high voltage MOSFETs at this voltage level
and many off-the-shelf alternatives can be easily found.
Subsequently, this intermediate voltage is further
enhanced to reach 250V with an external charge pump
doubler circuit. This charge pump circuit is formed with
two additional rectifier diodes and two storage
capacitors (see Figure 8). The 250V high voltage
output is monitored by the controller via the 7.5M
feedback resistor network. The high feedback resistor
value minimizes the idle power consumption for low
power application.
FIGURE 7:
The HV9150 Step-Up Controller has an option to use
an external reference voltage for a high-precision
output voltage. The user can program the output
voltage of the DAC in the PIC® microcontroller, and
connect the DAC output to the external reference pin of
the HV9150 so that the high voltage output can be
adjusted in the software. This will allow the same circuit
to accommodate a piezoelectric micropump actuator
that might have different characteristics and
requirements.
An enable function is also available to enable/disable
the boost controller IC for power sensitive applications.
The boost controller can be turned off by setting the EN
pin to 0 (zero).
BLOCK DIAGRAM OF THE HV9150 BOOST CONTROLLER
DS00002104A-page 8
 2016 Microchip Technology Inc.
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
HIGH VOLTAGE PUSH-PULL DRIVER
The HV513 is a low voltage serial to high voltage
parallel converter with a push-pull high voltage output
structure. This device has been designed to drive small
capacitive loads such as piezoelectric actuators. The
HV513 consists of an 8-bit shift register, 8 latches, and
control logic to perform the polar select and blanking of
the outputs (see Figure 9). Data is shifted through the
shift register on the low to high transition of the clock.
In this piezoelectric micropump application the blank,
polarity, high impedance, and short circuit pins are not
used. Only one data signal and two control signals,
Data In (DIN), Latch Enable (LE) and Clock (CLK), are
needed to send the data from the microcontroller to the
driver IC.
FIGURE 8:
TOPOLOGY OF TWO STAGE BOOST CONVERTER (EXTERNAL CIRCUIT)
FIGURE 9:
FUNCTIONAL BLOCK DIAGRAM OF HV513 HIGH VOLTAGE DRIVER
 2016 Microchip Technology Inc.
DS00002104A-page 9
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
This driver IC requires a 5V supply for its 5V logic input
signal, and a high voltage supply ranging from 50V to
250V for its high voltage output driver. The input serialto-parallel shift register receives the data through the
Data In and Clock pins. After the last data bit has been
successfully transmitted to the shift register, the user
must insert a single pulse at the Latch Enable pin to
load the new data to take affect at the high voltage
output (see Figure 10). Since only two channels among
the available eight channels are used in this
application, the HV513 driver can be treated and
operated as a 2-channel driver. The HV513 shift
register accepts serial data up to 8MHz and has plenty
of room for this piezoelectric micropump application
(that requires only a hundred Hertz of output
FIGURE 10:
switching). This driver can be seen as a simple high
voltage level translator and all output transitions are
controlled by the microcontroller. Hence, all output
pulse timing and transitions must be maintained and
tracked by the microcontroller.
With no load, the HV513's high voltage output can
swing between 0V and 250V at tens of kHz. When the
output is loaded with the piezoelectric actuator, the
output switching frequency will be limited by the rise/
fall time of the output pulses and the output power of
the DC/DC boost converter. The current design is
optimized to work with an 8.2nF load in 100Hz of
switching frequency.
ROUNDED SQUARE WAVE OF THE DRIVING SIGNALS
DS00002104A-page 10
 2016 Microchip Technology Inc.
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
Demo Application Example
Figure 13 shows an application example for testing and
evaluation of the piezoelectric micropump driver demo
board. An infusion bag and a medication syringe are
connected to the mp6 micropump via a 3-way
stopcock. The mp6 micropump is able to pump the
liquid out of either container in a controlled manner.
The flow rate can be manually adjusted by using the
push buttons on the control board to change the
FIGURE 11:
voltage or frequency setting of the driving signal. A
Sensirion SLS-1500 liquid flow meter and associated
software GUI are used to measure the flow rate. While
pumping the test liquid (water) out of the infusion bag
the flow rate is measured at around 7 ml/min (see
Figure 11) with the driving signal set to 250VPP and
100Hz.
FLOW RATE MEASURED BY THE SENSIRION SLS-1500 LIQUID FLOW METER
 2016 Microchip Technology Inc.
DS00002104A-page 11
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
APPENDIX A:
PIEZOELECTRIC MICROPUMP DEMO IMAGE
Figure 12 shows the piezoelectric micropump demo control board and the high voltage driver board with the micropump.
FIGURE 12:
PIEZOELECTRIC MICROPUMP DEMO BOARD PICTURE
mp6 Micropump
High Voltage
Driver Board
Control Board
DS00002104A-page 12
 2016 Microchip Technology Inc.
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
APPENDIX B:
PIEZOELECTRIC MICROPUMP DEMO APPLICATION EXAMPLE
Figure 13 shows the piezoelectric micropump demo application example with infusion bag, medication syringe, and flow
sensor connected to the demo board.
FIGURE 13:
PIEZOELECTRIC MICROPUMP DEMO APPLICATION EXAMPLE
 2016 Microchip Technology Inc.
DS00002104A-page 13
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
PIEZOELECTRIC MICROPUMP DEMO HIGH VOLTAGE DRIVER BOARD SCHEMATIC
FIGURE 14:
PIEZOELECTRIC MICROPUMP DEMO APPLICATION EXAMPLE
APPENDIX C:
Figure 14 shows the schematic of the piezoelectric micropump demo high voltage driver board.
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VMAIN
0V
1
2
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Project Title
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Date: 10/22/2015
Sheet 1 of 1
Designed wi
Piezo Micropump High Voltage Driver Boa
Sch #:
Revision: Rev A
Piezo Micropump High Voltage Driver Board
Sheet Title
MPG-PMD-PCB-2
PartNumber:
Howard Lee
Engineer:
Howard Lee
Drawn By:
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 2016 Microchip Technology Inc.
DS00002104A-page 14
Clamping Circuit
HVOUT1
100V 0805
c_HV1
0V
c_HV2
4 3 2 1
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
Figure 15 shows the schematic of the piezoelectric micropump demo control board.
PIEZOELECTRIC MICROPUMP DEMO CONTROL BOARD SCHEMATIC
FIGURE 15:
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VBAT
VBAT
VSS
STAT1 THERM
STAT2
PROG
TE
NC
NC
NC
NC
VDD
VDD
12
13
33
34
28
7
29
6
GND
8
10
9
6
5
GND
R4
1
1
1
R5
10k
0805
5%
3
2
3
2
3
2
C8
DIN
4.7uF
16V
0805
GND
Q1
LE
MMBT2222
Q2
CLK
MMBT2222
Q3
MMBT2222
S5
J3
GND
D1
SS14
J2
Battery
C3
VBAT
R6
3.09M
U5B
+3.7V
DMG6601LVT-7
U5A
DMG6601LVT-7
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
OSC-2864HSWEG01
N.C._(GND)
C2P
C2N
C1P
C1N
VBAT
N.C.
VSS
VDD
BS0
BS1
BS2
CS#
RES#
D/C#
R/W#
/
E/RD#
D0
D1
D2
D3
D4
D5
D6
D7
IREF
VCOMH
VCC
VLSS
N.C._(GND)
OLED1
OLED Display
GND
GND
GND
GND
+3.3V
GND
GND
J5
HVboard_Interface
GND
+3.7V
+5.0V
DIN
LE
CLK
HV_EN
HV_VREF
OLED_CS
OLED_RES
OLED_DC
OLED_RW
OLED_ERD
OLED_D0
OLED_D1
OLED_D2
OLED_D3
OLED_D4
OLED_D5
OLED_D6
OLED_D7
1uF
C5
C4
3.7V_EN
1uF
+3.3V
C1
1uF
2.2uF
GND
C6
GND
1
2
3
4
5
6
COMM
J4
2.2uF
RX
+3.3V
GND
FLOW_SDA
FLOW_SCL
TX
390k
R1
1uF
C2
+3.3V
GND
ICSP
MCLR
1
2
3
4
5
6
SLIDE SPDT
MCLR
+3.3V_MCU
GND
470R
R14
ICSPDAT
ICSPCLK
GND
0.1uF
C16
10k
R10
+3.3V_MCU
MCLR
S4
GND
GND
-t
HV_CLK
20k
R21
HV_LE
20k
R20
HV_DIN
20k
R19
1k
0603
1%
GND
+3.3V_MCU
+3.3V_MCU
+3.3V_MCU
0.1uF
C21
+3.3V_MCU
C11
BUTTON3
GND
0.1uF
R13
470R
0.1uF
C15
10k
R9
+3.3V_MCU
VSS
VSS
S3
GND
GND
MCP73834-FCI/UN
Components are not found in the Altium library:
U1 should be PIC16F1719-I/PT 44L TQFP.
U3 & U6 should be MCP1711T-33I/OT SOT-23-5.
R5 should be 10K NTC 0805, BC2733CT-ND.
+3.3V_MCU
R8
10k
C14
0.1uF
GND
R12
RD0/OPA3IN+
RD1/A21/C1IN4-/C2IN4-/C3IN4-/C4IN4-/OPA3OUT
RD2/OPA3IN-/DAC4OUT1
RD3/PSMC4A
RD4/PSMC3F
RD5/PSMC3E
RD6/C3OUT/PSMC3D
RD7/C4OUT/PSMC3C
S2
RE0/AN5/PSMC4B/CCP3
RE1/AN6/PSMC3B
RE2/AN7/PSMC3A
RE3/VPP/MCLR
PIC16F1719-I/PT
BUTTON1
GND
BUTTON2
RB0/INT/AN12/C2IN+/PSMC1IN/PSMC2IN/PSMC3IN/PSMCIN/CCP1
RB1/AN10/C1IN3-/C2IN3-/C3IN3-/C4IN3-/OPA2OUT
RB2/AN8/OPA2IN-/DAC3OUT1/CLKR
RB3/AN9/C1IN2-/C2IN2-/C3IN2-/OPA2IN+/CCP2
RB4/AN11/C3IN1+/SS
RB5/AN13/C4IN2-/T1G/CCP3/SDO
RB6/C4IN1+/TX/CK/SDA/SDI/ICSPCLK
RB7/DAC1OUT2/DAC2OUT2-/DAC3OUT2-/DAC4OUT2/RX/DT/SCL/SCK/ICSPDAT
RA0/AN0/SS/C1IN0-/C2IN0-/C3IN0-/C4IN0RA1/AN1/C1IN1-/C2IN1-/C3IN1-/C4IN1-/OPA1OUT
RA2/AN2/DAC1Vref-/Vref-/C1IN0+/C2IN0+/C3IN0+/C4IN0+/DAC1OUT1
RA3/AN3/ Vref+/DAC1Vref+/DAC2Vref+/DAC3Vref+/DAC4Vref+/ C1IN1+
RA4/C1OUT/OPA1IN+/T0CKI
RA5/AN4/C2OUT/OPA1IN-/DAC2OUT/SS/
RA6/C2OUT/Vcap/CLKOUT/OSC2
RA7/PSMC1CLK/PSMC2CLK/PSMC3CLK/PSMC4CLK/OSC1/CLKIN
U1
Microcontroller
GND
4.7uF
16V
0805
C7
Power Circuit
D-
VBUS
V
D+
ID
GND
USB MINI-B Female
TEMP_VOUT
HV_VREF
HV_DIN
HV_LE
HV_CLK
HV_EN
CHARGE_STAT2
CHARGE_TE
OLED_ERD
OLED_RW
OLED_DC
OLED_RES
OLED_CS
3.3V_EN
ICSPCLK
ICSPDAT
CHARGE_STAT1
BUTTON2
BUTTON3
FLOW_SCL
FLOW_SDA
BUTTON1
TX
RX
OLED_D0
OLED_D1
OLED_D2
OLED_D3
OLED_D4
OLED_D5
OLED_D6
OLED_D7
3.7V_EN
5V_EN
SCIO
MCLR
GND
0.1uF
C13
10k
R7
+3.3V_MCU
User I/O
S1
GND
R18
VBAT
C23
100k
C24
10uF
10V
0805
GND
3.3V_EN
10uF
10V
0805
+5.0V
C9
VBAT
1uF
25V
0805
GND
VBAT
C19
1uF
25V
0805
GND
+3.3V
1
2
3
4
1
3
4
1
3
4
1
C12
2
0.1uF
GND
+3.3V
C22
0.1uF
U7
PGOOD
SHDN
SELECT
C+
VOUT
VIN
C-
2
5
GND
VOUT
GND
8
7
6
5
GND
5
GND
2
GND
5V_EN
C25
1uF
25V
0805
C10
+3.3V
1uF
25V
0805
GND
+3.3V_MCU
C20
1uF
25V
0805
GND
SCIO
TEMP_VOUT
20k
R17
GND
3
2
MCP1252-33X50I/MS
VIN
U3
SHDN
NC
GND
VOUT
MCP1711T-33I/OT
U6
VIN
SHDN
NC
VOUT
GND
1
MCP1711T-33I/OT
U4
VDD
MCP9700T-E/TT
U8
GND
11AA010T-I/TT
VCC SCIO
VSS
SS
3
DS00002104A-page 15
 2016 Microchip Technology Inc.
8 7 6 5 4 3 2 1
1 2
0
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
APPENDIX D:
LAYOUTS
Figure 16 shows the top side and the bottom side layouts of the piezoelectric micropump demo's control board.
FIGURE 16:
PIEZOELECTRIC MICROPUMP CONTROL BOARD TOP AND BOTTOM LAYOUTS
Top Sides
DS00002104A-page 16
Bottom Sides
 2016 Microchip Technology Inc.
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
Figure 17 shows the top & bottom side layouts of the piezoelectric micropump demo high voltage driver board.
FIGURE 17:
PIEZOELECTRIC MICROPUMP HIGH VOLTAGE DRIVER BOARD BOTTOM LAYOUTS
Top Sides
 2016 Microchip Technology Inc.
Bottom Side
DS00002104A-page 17
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
APPENDIX E:
BILL OF MATERIALS
Table 1 shows the bill of materials (BOM) of the piezoelectric micropump demo's control board.
TABLE 1:
PIEZOELECTRIC MICROPUMP CONTROL BOARD BOM
Designator
Value
C1, C2, C3, C4
1 µF
Description
Supplier
Supplier Part
Number
Quan.
CAP CER 1UF 16V X7R 0603
Digi-Key®
587-1241-1-ND
4
C5, C6
2.2 µF
CAP CER 2.2UF 16V X5R 0603
Digi-Key
445-5157-1-ND
2
C7, C8
4.7 µF
CAP CER 4.7UF 16V Y5V 0805
Digi-Key
PCC2232TR-ND
2
C9, C10
1 µF
CAP CER 1UF 25V X7R 0805
Digi-Key
478-6357-2-ND
2
CAP CER 0.1UF 16V X7R 0603
Digi-Key
478-1239-1-ND
8
C11, C12, C13,
C14, C15, C16,
C21, C22
0.1 µF
C19, C20, C25
1 µF
CAP CER 1UF 25V X7R 0805
Digi-Key
478-6357-2-ND
3
C23, C24
10 µF
CAP CER 10UF 10V X7R 0805
Digi-Key
445-6857-1-ND
2
D1
SS14
DIODE SCHOTTKY 40V 1A SMA
Digi-Key
SS14CT-ND
1
Digi-Key
H2959CT-ND
1
J1
UX60-MB-5ST
Connector Receptacle USB - mini B 2.0 5
Position SMD RA
J2
S2B-PH-SM4TB(LF)(SN)
CONN HEADER PH SIDE 2POS 2MM SMD Digi-Key
455-1749-1-ND
1
J3, J4
HDR-2.54 Male 1x6
CONN HEADER 6POS .100 STR 30AU
Digi-Key
609-3272-ND
2
J5
HDR-2.54 Male 1x8
CONN HEADER .100 SINGL R/A 8POS
Digi-Key
S1111E-08-ND
1
OSD Displays
OSC-2864HSWEG01
1
Digi-Key
MMBT2222ATPMSCT-ND
3
1
OLED1
Q1, Q2, Q3
OSC-2864HSWEG01 OLED Display 128x64 3V
MMBT2222A
TRANS NPN 40V 0.6A SOT23
R1
390k
RES SMD 390K OHM 1% 1/10W 0603
Digi-Key
P390KHCT-ND
R2, R3
2.2k
RES SMD 2.2K OHM 1% 1/10W 0603
Digi-Key
P2.20KHCT-ND
2
RES SMD 1K OHM 1% 1/10W 0603
Digi-Key
P1.00KHCT-ND
1
R4
1k
R5
10k
R6
3.09M
Thermistor NTC 10K OHM SMD 0805
Digi-Key
BC2733CT-ND
1
RES SMD 3.09M OHM 1% 1/10W 0603
Digi-Key
541-3.09MHCT-ND
1
R7, R8, R9, R10
10k
RES SMD 10K OHM 1% 1/10W 0603
Digi-Key
P10.0KHCT-ND
4
R11, R12, R13,
R14
470R
RES SMD 470 OHM 1% 1/10W 0603
Digi-Key
311-470HRCT-ND
4
R17, R19, R20,
R21
20k
RES SMD 20K OHM 1% 1/10W 0603
Digi-Key
P20.0KHCT-ND
4
R18
100k
RES SMD 100K OHM 1% 1/8W 0603
Digi-Key
MCT0603-100KCFTR-ND
1
S1, S2, S3, S4
147873-1
Pushbutton Switches SW TACT SMT JLEAD 5.0MM
Mouser
506-147873-1
4
S5
EG1271
SWITCH SLIDE SPDT 300MA 30V
Digi-Key
EG1918-ND
1
U1
PIC16F1719
Cost Effective 8-Bit Intelligent Analog Flash
MCU 44L TQFP
Microchip
PIC16F1719-I/PT
1
U2
MCP73834
Stand-Alone Linear Li-Ion / Li-Polymer
Charge Management Controller 10L MSOP
Microchip
MCP73834-FCI/UN
1
U3, U6
MCP1711
LDO Regulator 3.3V SOT23-5
Microchip
MCP1711T-33I/
OTCT
2
U4
MCP9700
Linear Active Thermistor IC SOT23-3
Microchip
MCP9700T-E/TT
1
Digi-Key
DMG6601LVT7DICT-ND
1
U5
DMG6601LVT-7
U7
MCP1252
Inductorless, Positive-Regulated, Low-Noise
Microchip
Charge Pump 5.0V 8L MSOP
MCP1252-33X50I/
MS
1
U8
11AA010
1K UNI/O® Serial EEPROM SOT23-3
11AA010T-I/TTCT
1
DS00002104A-page 18
MOSFET N/P-CH 30V 26TSOT
Microchip
 2016 Microchip Technology Inc.
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
Table 2 shows the BOM of the piezoelectric micropump demo's high voltage driver board.
TABLE 2:
Designator
PIEZOELECTRIC MICROPUMP HIGH VOLTAGE DRIVER BOARD BOM
Value
Description
Supplier
0.22 µF
CAP CER 0.22UF 100V X7R 0805
C101, C102
0.22 µF
CAP CER 0.22UF 16V X7R 0603
Digi-Key
445-1318-1-ND
2
C103, C108
0.01 µF
CAP CER 10000PF 250V X7R 0805
Digi-Key
445-2280-1-ND
2
C104, C112
10 µF
CAP CER 10UF 25V X5R 0603
Digi-Key
490-7202-1-ND
2
C105, C106,
C109, C111
1 µF
CAP CER 1UF 16V X7R 0603
Digi-Key
587-1241-1-ND
4
CAP CER 0.47UF 250V X7R 1812
Digi-Key
490-3549-6-ND
1
CAP CER 82PF 50V NP0 0603
Digi-Key
490-1425-1-ND
1
0.47 µF
C110
82 pF
D2, D3
BAS521
D4, D5
BZX384-B47
D101, D102,
D103
CMAD4448 TR
399-6946-1-ND
Quan.
C17, C18
C107
Digi-Key
Supplier Part
Number
2
DIODE GEN PURP 300V 250MA SOD523
Digi-Key
568-6009-1-ND
2
DIODE ZENER 47V 300MW SOD323
Digi-Key
568-3830-1-ND
2
DIODE GEN PURP 120V 250MA SOD923
Digi-Key
CMAD4448 CT-ND
3
D104
DZ2705100L
DIODE ZENER 5.1V 120MW SSSMINI2
Digi-Key
DZ2705100LTR-ND
1
J7, J8
HDR-2.54
Female 1x4
Connector Receptacle 4 Position 0.100"
(2.54mm) Gold TH RA
Digi-Key
SAM1225-04-ND
2
J9
HDR-2.54
Female 1x8
Connector Header 8 Position 0.100"
(2.54mm) Gold TH RA
Digi-Key
S5483-ND
1
J101
0039532044
CONN FFC FPC TOP 4POS 1.25MM R/A
Digi-Key
WM2850-ND
1
L101
6.8 µH
Inductor-6.8uH Wurth WE LHMI SMD Low
Profile High Current Molded Inductor
Digi-Key
732-3335-1-ND
1
M101
BSZ900N15NS3 G
MOSFET N-CH 150V 13A TDSON-8
Digi-Key
BSZ900N15NS3
GTR-ND
1
100k
RES SMD 100K OHM 1% 1/4W 1206
Digi-Key
P100KFCT-ND
2
R101
37.4k
RES SMD 37.4K OHM 1% 1/10W 0603
Digi-Key
P37.4KHTR-ND
1
R102
7.5 M
RES SMD 7.5M OHM 1% 1/4W 1206
Digi-Key
RHM 7.5M AICT-ND
1
3
R15, R16
R103, R104,
R105
100k
RES SMD 100K OHM 1% 1/8W 0603
Digi-Key
MCT0603-100KCFTR-ND
R106
61.9k
RES SMD 61.9K OHM 1% 1/10W 0603
Digi-Key
P61.9KHCT-ND
1
R107, R108,
R109
2k
RES SMD 2K OHM 1% 1/10W 0603
Digi-Key
P2.00KHTR-ND
3
R110, R111
10k
RES SMD 10K OHM 1% 1/16W 0603
Digi-Key
A102203CT-ND
2
RES SMD 100K OHM 1% 1/8W 0603
Digi-Key
MCT0603-100KCFTR-ND
3
R112, R113,
R114
100k
U101
HV9150
High Voltage Output Hysteretic Mode Stepup DC/DC Controller 16L VQFN
Microchip
HV9150K6-G
1
U102
HV513
Low Voltage Serial to High Voltage Parallel
Converter 32L WQFN
Microchip
HV513K7-G
1
 2016 Microchip Technology Inc.
DS00002104A-page 19
PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN
APPENDIX F:
WARNINGS,
RESTRICTIONS AND
DISCLAIMER
This demo is intended solely for evaluation and
development purposes. It is NOT intended for medical,
diagnostic, or treatment use. Use of Microchip devices
in life support and/or safety applications is entirely at
the buyer's risk, and the buyer agrees to defend,
indemnify and hold harmless Microchip from any and
all damages, claims, suits, or expenses resulting from
such use.
APPENDIX G:
REFERENCES
Microchip, PIC16(L)F1717/8/9 Cost Effective 8-Bit
Intelligent Analog Flash Microcontrollers data sheet
(DS40001740)
Microchip, HV9150 HV Output Hysteretic Mode StepUp DC/DC Controller data sheet
Microchip, HV513 Low Voltage Serial to High Voltage
Parallel Converter with 8 High Voltage Push-pull
Outputs data sheet
Servoflo, mp6 Micropump Datasheet
Sensirion, SLS-1500 Liquid Flow Meter Datasheet
DS00002104A-page 20
 2016 Microchip Technology Inc.
Note the following details of the code protection feature on Microchip devices:
•
Microchip products meet the specification contained in their particular Microchip Data Sheet.
•
Microchip believes that its family of products is one of the most secure families of its kind on the market today, when used in the
intended manner and under normal conditions.
•
There are dishonest and possibly illegal methods used to breach the code protection feature. All of these methods, to our
knowledge, require using the Microchip products in a manner outside the operating specifications contained in Microchip’s Data
Sheets. Most likely, the person doing so is engaged in theft of intellectual property.
•
Microchip is willing to work with the customer who is concerned about the integrity of their code.
•
Neither Microchip nor any other semiconductor manufacturer can guarantee the security of their code. Code protection does not
mean that we are guaranteeing the product as “unbreakable.”
Code protection is constantly evolving. We at Microchip are committed to continuously improving the code protection features of our
products. Attempts to break Microchip’s code protection feature may be a violation of the Digital Millennium Copyright Act. If such acts
allow unauthorized access to your software or other copyrighted work, you may have a right to sue for relief under that Act.
Information contained in this publication regarding device
applications and the like is provided only for your convenience
and may be superseded by updates. It is your responsibility to
ensure that your application meets with your specifications.
MICROCHIP MAKES NO REPRESENTATIONS OR
WARRANTIES OF ANY KIND WHETHER EXPRESS OR
IMPLIED, WRITTEN OR ORAL, STATUTORY OR
OTHERWISE, RELATED TO THE INFORMATION,
INCLUDING BUT NOT LIMITED TO ITS CONDITION,
QUALITY, PERFORMANCE, MERCHANTABILITY OR
FITNESS FOR PURPOSE. Microchip disclaims all liability
arising from this information and its use. Use of Microchip
devices in life support and/or safety applications is entirely at
the buyer’s risk, and the buyer agrees to defend, indemnify and
hold harmless Microchip from any and all damages, claims,
suits, or expenses resulting from such use. No licenses are
conveyed, implicitly or otherwise, under any Microchip
intellectual property rights unless otherwise stated.
Microchip received ISO/TS-16949:2009 certification for its worldwide
headquarters, design and wafer fabrication facilities in Chandler and
Tempe, Arizona; Gresham, Oregon and design centers in California
and India. The Company’s quality system processes and procedures
are for its PIC® MCUs and dsPIC® DSCs, KEELOQ® code hopping
devices, Serial EEPROMs, microperipherals, nonvolatile memory and
analog products. In addition, Microchip’s quality system for the design
and manufacture of development systems is ISO 9001:2000 certified.
QUALITYMANAGEMENTSYSTEM
CERTIFIEDBYDNV
== ISO/TS16949==
 2016 Microchip Technology Inc.
Trademarks
The Microchip name and logo, the Microchip logo, AnyRate,
dsPIC, FlashFlex, flexPWR, Heldo, JukeBlox, KEELOQ,
KEELOQ logo, Kleer, LANCheck, LINK MD, MediaLB, MOST,
MOST logo, MPLAB, OptoLyzer, PIC, PICSTART, PIC32 logo,
RightTouch, SpyNIC, SST, SST Logo, SuperFlash and UNI/O
are registered trademarks of Microchip Technology
Incorporated in the U.S.A. and other countries.
ClockWorks, The Embedded Control Solutions Company,
ETHERSYNCH, Hyper Speed Control, HyperLight Load,
IntelliMOS, mTouch, Precision Edge, and QUIET-WIRE are
registered trademarks of Microchip Technology Incorporated
in the U.S.A.
Analog-for-the-Digital Age, Any Capacitor, AnyIn, AnyOut,
BodyCom, chipKIT, chipKIT logo, CodeGuard, dsPICDEM,
dsPICDEM.net, Dynamic Average Matching, DAM, ECAN,
EtherGREEN, In-Circuit Serial Programming, ICSP, Inter-Chip
Connectivity, JitterBlocker, KleerNet, KleerNet logo, MiWi,
motorBench, MPASM, MPF, MPLAB Certified logo, MPLIB,
MPLINK, MultiTRAK, NetDetach, Omniscient Code
Generation, PICDEM, PICDEM.net, PICkit, PICtail,
PureSilicon, RightTouch logo, REAL ICE, Ripple Blocker,
Serial Quad I/O, SQI, SuperSwitcher, SuperSwitcher II, Total
Endurance, TSHARC, USBCheck, VariSense, ViewSpan,
WiperLock, Wireless DNA, and ZENA are trademarks of
Microchip Technology Incorporated in the U.S.A. and other
countries.
SQTP is a service mark of Microchip Technology Incorporated
in the U.S.A.
Silicon Storage Technology is a registered trademark of
Microchip Technology Inc. in other countries.
GestIC is a registered trademarks of Microchip Technology
Germany II GmbH & Co. KG, a subsidiary of Microchip
Technology Inc., in other countries.
All other trademarks mentioned herein are property of their
respective companies.
© 2016, Microchip Technology Incorporated, Printed in the
U.S.A., All Rights Reserved.
ISBN: 978-1-5224-0308-1
DS00002104A-page 21
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France - Paris
Tel: 33-1-69-53-63-20
Fax: 33-1-69-30-90-79
India - New Delhi
Tel: 91-11-4160-8631
Fax: 91-11-4160-8632
Germany - Dusseldorf
Tel: 49-2129-3766400
Atlanta
Duluth, GA
Tel: 678-957-9614
Fax: 678-957-1455
Hong Kong
Tel: 852-2943-5100
Fax: 852-2401-3431
Australia - Sydney
Tel: 61-2-9868-6733
Fax: 61-2-9868-6755
China - Beijing
Tel: 86-10-8569-7000
Fax: 86-10-8528-2104
Austin, TX
Tel: 512-257-3370
China - Chengdu
Tel: 86-28-8665-5511
Fax: 86-28-8665-7889
Boston
Westborough, MA
Tel: 774-760-0087
Fax: 774-760-0088
China - Chongqing
Tel: 86-23-8980-9588
Fax: 86-23-8980-9500
Chicago
Itasca, IL
Tel: 630-285-0071
Fax: 630-285-0075
Cleveland
Independence, OH
Tel: 216-447-0464
Fax: 216-447-0643
Dallas
Addison, TX
Tel: 972-818-7423
Fax: 972-818-2924
Detroit
Novi, MI
Tel: 248-848-4000
Houston, TX
Tel: 281-894-5983
Indianapolis
Noblesville, IN
Tel: 317-773-8323
Fax: 317-773-5453
Los Angeles
Mission Viejo, CA
Tel: 949-462-9523
Fax: 949-462-9608
New York, NY
Tel: 631-435-6000
San Jose, CA
Tel: 408-735-9110
Canada - Toronto
Tel: 905-673-0699
Fax: 905-673-6509
China - Dongguan
Tel: 86-769-8702-9880
China - Hangzhou
Tel: 86-571-8792-8115
Fax: 86-571-8792-8116
India - Pune
Tel: 91-20-3019-1500
Japan - Osaka
Tel: 81-6-6152-7160
Fax: 81-6-6152-9310
Japan - Tokyo
Tel: 81-3-6880- 3770
Fax: 81-3-6880-3771
Korea - Daegu
Tel: 82-53-744-4301
Fax: 82-53-744-4302
China - Hong Kong SAR
Tel: 852-2943-5100
Fax: 852-2401-3431
Korea - Seoul
Tel: 82-2-554-7200
Fax: 82-2-558-5932 or
82-2-558-5934
China - Nanjing
Tel: 86-25-8473-2460
Fax: 86-25-8473-2470
Malaysia - Kuala Lumpur
Tel: 60-3-6201-9857
Fax: 60-3-6201-9859
China - Qingdao
Tel: 86-532-8502-7355
Fax: 86-532-8502-7205
Malaysia - Penang
Tel: 60-4-227-8870
Fax: 60-4-227-4068
China - Shanghai
Tel: 86-21-5407-5533
Fax: 86-21-5407-5066
Philippines - Manila
Tel: 63-2-634-9065
Fax: 63-2-634-9069
China - Shenyang
Tel: 86-24-2334-2829
Fax: 86-24-2334-2393
Singapore
Tel: 65-6334-8870
Fax: 65-6334-8850
China - Shenzhen
Tel: 86-755-8864-2200
Fax: 86-755-8203-1760
Taiwan - Hsin Chu
Tel: 886-3-5778-366
Fax: 886-3-5770-955
China - Wuhan
Tel: 86-27-5980-5300
Fax: 86-27-5980-5118
Taiwan - Kaohsiung
Tel: 886-7-213-7828
China - Xian
Tel: 86-29-8833-7252
Fax: 86-29-8833-7256
Germany - Karlsruhe
Tel: 49-721-625370
Germany - Munich
Tel: 49-89-627-144-0
Fax: 49-89-627-144-44
Italy - Milan
Tel: 39-0331-742611
Fax: 39-0331-466781
Italy - Venice
Tel: 39-049-7625286
Netherlands - Drunen
Tel: 31-416-690399
Fax: 31-416-690340
Poland - Warsaw
Tel: 48-22-3325737
Spain - Madrid
Tel: 34-91-708-08-90
Fax: 34-91-708-08-91
Sweden - Stockholm
Tel: 46-8-5090-4654
UK - Wokingham
Tel: 44-118-921-5800
Fax: 44-118-921-5820
Taiwan - Taipei
Tel: 886-2-2508-8600
Fax: 886-2-2508-0102
Thailand - Bangkok
Tel: 66-2-694-1351
Fax: 66-2-694-1350
07/14/15
DS00002104A-page 22
 2016 Microchip Technology Inc.
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