Intersema MS761-A Pressure sensor die (0-1 bar) Datasheet

MS761
PRESSURE SENSOR DIE (0-1 BAR)
• 0 to 100 kPa bar range (1 bar or 14.5 PSI)
• High Sensitivity
• ROHS-Compatible & Pb-free1
DESCRIPTION
The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted
under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor
(MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor
(S-761-D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
•
•
•
Uncompensated pressure sensor die
High Sensitivity: Output Span 240 mV @ 5V
Temperature Range -40°C …+ 125°C
•
•
•
Linearity 0.15 % (typical)
Small Die Size 2.00 X 1.86 mm
Low cost, High reliability
APPLICATION
•
•
•
For high resolution absolute sensor systems
Engine Controls
Barometers, Altimeters, Variometers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out-
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
GND2
1
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
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PAD OUT
Vs+
Epi
OutImportant remarks:
MS761
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin on the die
Out+
GND1
GND2
LAYOUT
MS761A
MS761D
Bondable area = 100 x 100 um
Bondable area = 100 x 100 um
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FULL SCALE PRESSURE
kPa
bar
mbar
PSI
atm
mm Hg
m H2O
Inches H2O
100
1
1000
14.5
0.987
750
10.197
401
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Pressure overload
Symbol
Conditions
Min
Max
Unit
-40
20
+125
5
V
C
Bar
o
VS+
TS
Ta = 25 C
o
ELECTRICAL CHARACTERISTICS
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C )
Parameter
Operating Pressure Range
Min
Typ
Max
Unit
0
-
1
Bar
125
°C
Operating Temperature Range
-40
Bridge Resistance
3.0
3.4
3.8
kΩ
Full-scale span (FS)
190
240
290
mV
Zero Pressure Offset
-40
0
40
mV
± 0.15
± 0.4
+ 2800
- 1900
Pressure Hysteresis
Repeatability
Linearity
Temperature Coefficient of Resistance
Span
Offset
+ 2400
- 1500
- 100
Temperature Hysteresis
Notes
% FS
1
+ 3300
- 2300
+ 100
ppm/°C
ppm/°C
µV/°C
2
0.05
± 0.15
% FS
3
0.05
± 0.15
% FS
4
0.3
% FS
5
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 1 bar).
2) Slope of the endpoint straight line from 25°C to 60°C.
3) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25 °C.
4) Same as 3) after 10 pressure cycles
5) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
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PICKING TOOLS
The MS761 sensors have a sensitive membrane (0.9 x 0.9 mm) the sensor dice outer diameter is:
1.93 x 1.76 mm. The pick and place tool has to be of a soft material as rubber (Hardness 78-97 Shore A). Its
external size must fit the sensor and the vacuum cavity must be as large as the membrane itself. Successful test
where done with some tools of SPT, see SPT drawing and references bellow).
SPT references
External dimension
Internal dimensions
RTR-A1-060x060
TL & TW: 0.06 inch /1.52 mm
∅H: 0.035 inch / 0.89 mm
CTR-A1-080
∅F: 0.08 inch / 2.03 mm
∅H: 0.035 inch / 0.89 mm
ORDERING INFORMATION
Product Code
Type
Product
Art.-Nr.
MS761-A
Absolute
1 bar Pressure Sensor Die sawn on b/f
76125021
MS761-A_0.2
Absolute
1 bar Pressure Sensor Die 0.2 mm Pyrex sawn on b/f
76125022
1 bar Pressure Sensor Die sawn on b/f
76125121
MS761-D
Differential
The MS761 dice are supplied sawn on blue foil, mounted on plastic rings
FACTORY CONTACTS
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 BEVAIX
SWITZERLAND
Tel. (032) 847 9550
Tel. Int. +41 32 847 9550
Telefax +41 32 847 9569
e-mail:
http://www.intersema.ch
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance
and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys
no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from
patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or
warranty that such applications will be suitable for the use specified without further testing or modification.
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