Intersema MS763-S Pressure sensor die (0-300 mmhg) Datasheet

MS763
PRESSURE SENSOR DIE (0-300 mmHg)
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0 to 300 mmHg range (0.4 bar or 5.8 PSI)
Absolute or differential pressure sensors
Medical applications
RoHS-compatible & Pb-free1
DESCRIPTION
The MS763 is a biomedical sensor. It has been designed as an implantable sensor where all the connections are
on one side. The bonding pads are large in order to glue or solder wires on.
The sensor element of the MS763 consists of a silicon micro-machined membrane. Implanted resistors sense
the deformation of the membrane by using of the piezo-resistive effect. The MS763 is available as a differential
sensor (MS763-S) without base Pyrex or as an absolute sensor with a 0.2 mm thick Pyrex (MS763-A).
FEATURES
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•
•
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Uncompensated pressure sensor die
Small size, made for implantable sensor
Connections on one side
Sensitivity: 0.075 mV / mmHg@ 5V
•
Temperature Range -40°…+125°C
Linearity 0.15% (typical)
2
Die Size 1.3 x 2.2 mm
High reliability
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Differential pressure sensor systems.
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APPLICATION
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Medical applications
Blood pressure measurement.
Designed for implantable devices
ELECTRICAL CONNECTIONS
Vs+
Positive output for pressure applied topside
Vs+ : Supply voltage of Wheatstone bridge
Out- : Negative output
Out+ : Positive output
Out+
Out-
GND : Ground
GND
1
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
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PAD OUT
MS763
Important remarks:
There is no pad to connect the epitaxial layer to the Vs+ pin.
Out+
GND
Out-
Vs+
LAYOUT
MS763-A
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FULL SCALE PRESSURE
kPa
bar
mbar
PSI
atm
mm Hg
m H2O
Inches H2O
40
0.4
400
5.8
0.4
300
4.1
161
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Pressure overload
Symbol
VS+
TS
Conditions
Min
Max
Unit
-40
20
+150
20
V
C
Bar
o
Ta = 25 C
o
ELECTRICAL CHARACTERISTICS
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C )
Parameter
Operating Pressure Range
Min
Typ
Max
Unit
0
0.4
Bar
Operating Temperature Range
-40
125
°C
Bridge Resistance
3.0
3.4
3.8
kΩ
Full-scale span (FS)
18
22.5
27
mV
Zero Pressure Offset
-40
0
40
mV
± 0.15
± 0.2
+ 2800
- 1900
Pressure Hysteresis
Repeatability
Linearity
Temperature Coefficient of Resistance
Span
Offset
+ 2400
- 1500
- 80
Temperature Hysteresis
Notes
% FS
1
+ 3300
- 2300
+ 80
ppm/°C
ppm/°C
µV/°C
2
± 0.05
± 0.15
% FS
3
± 0.05
± 0.15
% FS
4
0.3
% FS
5
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 0.4 bar).
2) Slope of the endpoint straight line from 25°C to 60°C.
3) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
4) Same as 3) after 10 pressure cycles
5) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
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PICKING TOOLS
The MS763 sensors have a membrane size of 0.5 x 0.5 mm and outer dimensions of 1,3 x 2.2 mm. The pick
and place tool has to be of a soft material as rubber (Hardness 78-97 Shore A). Its external size must fit the
sensor and the vacuum cavity must be as large as the membrane itself. Successful tests were done with some
tools of SPT (see SPT drawing and references below).
SPT references
External dimension
Internal dimensions
RTR-A1-060x060
TL & TW: 0.06 inch /1.52 mm
∅H: 0.035 inch / 0.89 mm
ORDERING INFORMATION
Product Code
type
MS763-A
Absolute
MS763-S
Differential
Product
Art.-Nr.
300 mmHg Pressure Sensor 0.2 mm Pyrex sawn on b/f
76325022
300 mmHg Pressure Sensor sawn on b/f
76325221
The MS763 dice are supplied sawn on blue foil, mounted on plastic rings
FACTORY CONTACTS
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 BEVAIX
SWITZERLAND
Tel. 032 847 9550
Tel. Int. +41 32 847 9550
Telefax +41 32 847 9569
e-mail:
http://www.intersema.ch
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance
and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys
no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from
patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or
warranty that such applications will be suitable for the use specified without further testing or modification.
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