Sensortechnics AWM3300V Mass flow sensor for gas Datasheet

AWM3000 Series
Mass flow sensor for gases
FEATURES
· Ranges 0...30 to 0...±1000 sccm1
or 0...0.5 to 0...2 "H2O (0...1.25 to 0...5 mbar)
· 1...5 V, 1...3.75 V, 4...20 mA output
· Actual mass flow sensing
· Low differential pressure sensing
SERVICE
To be used with dry gases only
The AWM series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
ELECTRICAL CONNECTION
Maximum ratings
Supply voltage2
Power consumption
AWM3303V
AWM3...CR
all others
8 to 15 V
typ. 10 ±0.01 V
P2
typ. 100 mW
typ. 50 mW
typ. 50 mW, max. 60 mW
Temperature limits
Operating
Storage
-25 to 85°C
-40 to 90°C
Mechanical shock
100 g (5 drops, 6 axes)
1 2 3
Note:
1
sccm denotes standard cubic centimeters per minute
2
Output voltage is ratiometric to supply voltage
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P1
Pin 1: Vout
Pin 2: +V s
Pin 3: GND
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AWM3000 Series
Mass flow sensor for gases
FLOW SENSOR CHARACTERISTICS3
VS = 10 ±0.01 V, TA = 25°C
Pressure
range
Output voltage
@ trim point
Part no.
Flow range
(full scale)
AWM3100V
2 0 0 sccm
5.0 l/sec
AWM3150V
3 0 sccm
5.0 l/sec
3.4 V @ 25 sccm
5.0 l/sec
5 V @ 2 "H2O
Max. flow change4
2 "H2O
AWM3200V
5 V @ 2 0 0 sccm
AWM3300V
1 0 0 0 sccm
5.0 l/sec
5 V @ 1 0 0 0 sccm
AWM3303V
±1000 sccm
5.0 l/sec
5 ±0.15 V
AWM3200CR
2 "H2O
5.0 l/sec
20 ±1 mA @ 2 "H2O
AWM3201CR
0.5 "H2O
5.0 l/sec
20 ±1 mA @ 0.5 "H2O
PERFORMANCE CHARACTERISTICS
VOLTAGE OUTPUT VERSIONS (VS = 10 ±0.01 V, TA = 25°C)
Characteristics
Zero offset
Repeatability and hysteresis
Offset
Span
Typ.
Max.
AWM3100V
0.95
1.0
1.05
AWM3150V
0.90
1.0
1.10
AWM3200V
0.92
1.0
1.08
AWM3300V
0.90
1.0
1.10
AWM3303V
2.95
3.0
3.05
AWM3100V, AWM3200V
±0.5
all others
±1.0
(combined)
Temperature effects5
Min.
-25 to 85 °C6
-25 to 25 °C
25 to 85 °C
AWM3150V
±100
AWM3303V
±50
all others
±25
Response time
Common mode pressure
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V
% reading
mV
AWM3100V
-4.0
AWM3150V
±5.0
AWM3200V
24.05
AWM33...
-5.0
AWM3100V
4.0
AWM3150V
±5.0
AWM3200V
-24.05
AWM33...
7
Unit
% reading
5.0
1.0
3.0
ms
25
p si
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AWM3000 Series
Mass flow sensor for gases
PERFORMANCE CHARACTERISTICS
CURRENT OUTPUT VERSIONS (VS = 10 ±0.01 V, TA = 25°C)
Characteristics
Zero offset
Min.
Typ.
Max.
AWM3200CR
3.7
4.0
4.3
AWM3201CR
3.6
4.0
4.4
Repeatability and hysteresis (combined)
±0.5
Non-linearity
5
Temperature effects5
Offset
Span
-25 to 85 °C6
-25 to 25 °C
25 to 85 °C
±2.0
24
AWM3201CR
325
AWM3200CR
-315
AWM3201CR
-325
External output load
60
8
100 to 300
mA
% reading
mA
5
AWM3200CR
Response time7
Unit
% reading
ms
Ohm
GAS CORRECTION FACTORS9
Gas type
Helium (He)
Hydrogen (H2)
Argon (Ar)
Nitrogen (N2)
Oxygen (O2)
Ai r
Nitric oxide (NO)
Carbon monoxide (CO)
Methane (CH4)
Ammonia (NH3)
Nitrous oxide (N2O)
Nitrogen dioxide (NO2)
Carbon dioxide (CO2)
Correction factor (approx.)
0.510
0.710,11
0.95
1.0
1.0
1.0
1.0
1.0
1.1
1.1
1.35
1.35
1.35
Notes:
3
A 5 micron filter is recommended for all devices.
4
Maximum allowable rate of flow change to prevent damage.
5
Temperature shifts in differential pressure devices are mostly due to the density change of the gas over temperature.
6
Shift is relative to 25 °C.
7
Initial warm-up time for signal conditioned circuitry is 1 minute max.
8
Output load connected from Vout to GND (current sinking).
9
Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
10
When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:
Hydrogen typ. 12 V, Helium typ. 15 V
11
Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
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AWM3000 Series
Mass flow sensor for gases
OUTPUT FLOW VS INTERCHANGEABILITY
VS = 10 ±0.01 V, TA = 25°C
13
12
13
OUTPUT CURVES
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AWM3000 Series
Mass flow sensor for gases
OUTPUT FLOW VS INTERCHANGEABILITY
VS = 10 ±0.01 V, TA = 25°C
13
13
12
13
OUTPUT CURVES
June 2006 / 582
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AWM3000 Series
Mass flow sensor for gases
6.3
(0.25)
OUTLINE DRAWING
2.8
(0.11)
7.60
(0.30)
1.40
(0.055)
2.9
(0.114)
1.8
(0.07)
5.1
(0.20)
54.4
(2.14)
P1
8.4
(0.33)
P2
31.5
(1.24)
Note:
Positiv flow direction
is defined as
proceeding from port
1 (P1) to port 2 (P2)
and results in positive
output.
mass: approx. 10.8 g
23.6
(0.93)
2.8
(0.11)
1.0
(0.04)
5.1
(0.20)
1 2 3
0.6
(0.025)
1.52
(0.06)
2.5
(0.10)
4.1
(0.16)
7.3
(0.287)
23.9
(0.94)
30.5
(1.20)
12.7
(0.50)
15.5
(0.61)
dimensions in mm (inches)
ORDERING INFORMATION
Flow range
Dry gas
0...30 sccm
AWM3150V
0...200 sccm
AWM3100V
0...1000 sccm
AWM3300V
0...±1000 sccm
AWM3303V
Dry gas
Pressure range
Voltage output
Current output
0...0.5 "H2O (0...1.25 mbar)
---
AWM3201CR
0...2 "H2O (0...5 mbar)
AWM3200V
AWM3200CR
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
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