Intersema MS7812 Pressure sensor die (0-12 bar) Datasheet

MS7812
PRESSURE SENSOR DIE (0-12 BAR)
• 0 to 1200 kPa range (1 bar or 174 PSI)
• Absolute/differential pressure sensors
• RoHS-compatible & Pb-free1
DESCRIPTION
The sensor element of the MS7812 consists of a silicon micro-machined membrane with a Pyrex glass mounted
under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor
(MS7812-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor
(MS7812-D) has a whole in the Pyrex glass at the backside of the sensor.
FEATURES
•
•
•
•
•
•
Uncompensated pressure sensor die
Output Span 150mV @ 5V
Temperature Range -40°…+125°C
Linearity 0.05% (typical)
Small Die Size 2.00 x 1.86mm
Low Cost, High reliability
APPLICATION
•
•
•
For absolute or differential pressure sensor systems
Engine controls
Dive computers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out-
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
GND2
1
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7812_003.doc
00007812351
ECN 743
May 05th, 2005
1/4
PAD OUT
Vs+
Epi
OutImportant remarks:
MS7812
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin on the die
Out+
GND1
GND2
LAYOUT
MS7812A
MS7812D
Bondable area = 100 x 100 µm
Bondable area = 100 x 100 µm
DA7812_003.doc
00007812351
ECN 743
May 05th, 2005
2/4
FULL SCALE PRESSURE
kPa
bar
mbar
PSI
atm
mm Hg
m H2O
Inches H2O
1200
12
12000
174
11.8
9001
122
4818
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Pressure overload
Symbol
VS+
TS
Conditions
Min
Max
Unit
-40
20
+125
30
V
C
Bar
o
Ta = 25 C
o
ELECTRICAL CHARACTERISTICS
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 23°C )
Parameter
Min
Typ
Max
Unit
Notes
Operating Pressure Range
0
-
12
bar
Bridge Resistance
3.0
3.4
3.8
kΩ
Full-scale span (FS)
120
150
180
mV
Zero Pressure Offset
-40
0
40
mV
Linearity
-
± 0.05
± 0.3
% FS
1
0.05
± 0.15
% FS
2
+ 2800
- 1900
+ 3300
- 2300
+ 80
ppm/°C
ppm/°C
µV/°C
3
0.3
0.8
% FS
4
Hysteresis
Temperature Coefficient of Resistance
Span
Offset
+ 2400
- 1500
- 80
Temperature Hysteresis
NOTES
1)
2)
3)
4)
Deviation from endpoint straight line from 0 bar to 12 bar at one half full-scale pressure.
Maximum difference in output at any pressure within the operating pressure range.
Slope of the endpoint straight line from 25°C to 60°C.
Maximum difference in offset after one thermal cycle from -40°C to +125°C.
DA7812_003.doc
00007812351
ECN 743
May 05th, 2005
3/4
PICKING TOOLS
The MS7812 sensors have a sensitive membrane (0.5 x 0.5 mm) the top surface of the sensor dice has an outer
of diameter is: 1.62 x 1.48 mm. The pick and place tool has to be of a soft material as rubber (Hardness 78-97
Shore A). Its external size must fit the sensor and the vacuum cavity must be as large as the membrane itself.
Successful test where done with some tools of SPT, see SPT drawing and references bellow).
SPT references
External dimension
Internal dimensions
RTR-A1-060x060
TL & TW: 0.06 inch /1.52 mm
∅H: 0.035 inch / 0.89 mm
ORDERING INFORMATION
Product Code
Product
Art.-Nr.
MS7812-A
1200 kPa Absolute Pressure Sensor
781225021
MS7812-D
1200 kPa Differential Pressure Sensor
781225121
The MS7812 dice are supplied sawn on blue foil, mounted on plastic rings
FACTORY CONTACTS
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 BEVAIX
SWITZERLAND
Tel. 032 847 9550
Tel. Int. +41 32 847 9550
Telefax +41 32 847 9569
e-mail:
http://www.intersema.ch
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance
and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys
no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from
patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or
warranty that such applications will be suitable for the use specified without further testing or modification.
DA7812_003.doc
00007812351
ECN 743
May 05th, 2005
4/4
Similar pages