HP N9201A Array structure parametric test option Datasheet

Agilent N9201A
Array Structure Parametric Test Option
Technical Overview
Introduction
The decreasing size of features on
integrated circuits (45 nm and smaller)
is driving the need for new parametric
test capabilities. These capabilities
must accommodate the advanced test
structures developed for fast yield
ramp up in process integration as well
as process monitoring in semiconductor manufacturing.
High-throughput measurement of highvolume parametric data is required to
shorten the time for ramping up the
process yield. This is accomplished by
statistically analyzing and correcting
the cause of wide range of process
performance variations across a 300
mm wafer. Advanced test structures,
addressable array test structures that
contain address decoder circuitry, and
a large number of test array elements
with fewer probing pads and silicon
area have been developed by major
semiconductor manufacturers for this
purpose.
The Agilent N9201A Parametric Test
Option offers high throughput parametric measurement capability for
a variety of addressable array test
structures (e.g. passive array, active
array and clocked latched active array)
with synchronized mixed operation of
DC SMUs and digital outputs. Digital
outputs (parallel, serial, or clock signals) are used for the address decoder
that is built into addressable array test
structures. This allows the selection
of the specific array element to be
measured. DC SMUs measure the DC
voltage and current parameters of
selected array elements.
The DC power source is used for
applying the power supply voltage (Vdd)
to the address decoder logic circuitry
that is built-in the addressable array
test structures.
The N9201A is able to provide a
maximum of 48 signal lines using the
extended path ports of the 4070/4080
test head. This can be any combination of available SMUs, digital outputs,
and DC power source outputs. The
signals pass through the 4070/4080
test head down to the probe card.
The N9201A is controlled by SPECS
(Semiconductor Process Evaluation
Core Software), a test shell environment for the 4070 Series and 4080
Series. The N9201A can be provided
as an upgrade for existing 4070 Series
and 4080 Series users.
Measurement functions
DC current, DC voltage, and digital
output
DC measurement
Spot and sweep
Measurement unit:* High speed
medium power SMU (MPSMU);
8 SMU minimum configuration;
SMUs may be added in increments
of one up to a maximum of 40 SMUs
*Note: High Speed MPSMU specification is specified
at the connectors of the equipment’s front panel
Range of operation: -42 V to 42 V;
-200 mA to 200 mA
Minimum resolution: 100 µV; 5 pA
Maximum voltage between common
and ground: ± 42 V
Ground unit (GNDU) specification
Output voltage: 0 V ± 100 µV
Maximum sink current: 0.5 A
Output terminal/connection:
Triaxial connector, Kelvin
(remote sensing)
Voltage range, resolution and accuracy
Voltage
range
±2 V
±20 V
±40 V
±100 V
Force
resolution
100 µV
1 mV
2 mV
5 mV
Measure
resolution
100 µV
1 mV
2 mV
5 mV
Force accuracy 1
Measure accuracy 2
±(0.03%
±(0.03%
±(0.03%
±(0.04%
±(0.03%
±(0.03%
±(0.03%
±(0.03%
+ 900 µV)
+ 4 mV)
+ 7 mV)
+ 15 mV)
+ 700 µV)
+ 4 mV)
+ 8 mV)
+ 20 mV)
Maximum
current
200 mA
200 mA
2
3
1
± (% of output/measurement value + offset voltage)
2
200 mA (Vout ≤ 20 V), 50 mA (20 V <Vout ≤40 V), Vout is the output voltage in volts.
3
200 mA (Vout ≤ 20 V), 50mA (20 V <Vout ≤40 V), 20 mA (40 V <Vout ≤42 V). Vout is the output voltage in volts.
Current range, resolution and accuracy
Current
range
±100 nA
±1 µA
±10 µA
±100 µA
±1 mA
±10 mA
±100 mA
±200 mA
1
2
3
Force
resolution
5 pA
50 pA
500 ppA
5 nA
50 nA
500 nA
5 µA
10 µA
Measure
resolution
5 pA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
10 µA
Force accuracy 1
Measure accuracy 2
±(0.12% + 50 pA + 200 fA x Vo)
±(0.12% + 400 pA + 2 pA x Vo)
±(0.12% + 5 nA + 20 pA x Vo)
±(0.12% + 40 nA + 200 pA x Vo)
±(0.12% + 500 nA + 2 nA x Vo)
±(0.12% + 4 µA + 20 nA x Vo)
±(0.12% + 50 µA + 200 nA x Vo)
±(0.12% +100 µA + 400 nA x Vo)
±(0.1% + 30 pA + 200 fA x Vo)
±(0.1% + 200 pA + 2 pA x Vo)
±(0.1% + 3 nA + 20 pA x Vo)
±(0.1% + 20 nA + 200 pA x Vo)
±(0.1% + 300 nA + 2 nA x Vo)
±(0.1% + 2 µA + 20 nA x Vo)
±(0.1% + 30 µA + 200 nA x Vo)
±(0.1% + 60 µA + 400 nA x Vo)
2
3
±(% of output/measurement value + offset current A (fixed part determined by the output/measurement range + the proportional part that is multiplied by Vo))
42 V (Io ≤ 20 mA), 40 V (20 mA <Io ≤50 mA), 20 V (50 mA <Io ≤100 mA), Io is the output current in Amps.
42 V (Io ≤20 mA), 40 V (20 mA <Io ≤50 mA), 20 V (50 mA <Io ≤200 mA), Io is the output current in Amps.
Digital output
DC power source**
Digital output characteristics:
16 digital output lines maximum
when the N9201A has 8 or less
SMUs; 32 digital output lines
maximum when the N9201A has
more than 8 SMUs
Output voltage:
High voltage: 0.3 V to 8.0 V
Low voltage: 0.0 V
Maximum output current: ± 64 mA
Minimum state transition time: 20 µs
1 channel and GND
Output rating: 0.03 V to + 10.25 V
Programming accuracy:
Voltage: 0.1% ± 20 mV
Current limit: 0.15% ± 20 mA
2
Maximum
voltage
42 V
42 V
42 V
42 V
42 V
42 V
**Note: DC power source specification is specified
at the connectors of the equipment’s front panel
General specifications
Accuracy is specified at
Temperature: 23°C ± 5°C
Humidity: 5% to 70% RH
Warm up time: at least 40 minutes.
Self-calibration: Within one hour
after calibration
Integration time: Medium or long
Operation and storage
Operating temperature range:
5°C to 30°C
Operating humidity range:
5% to 70% (noncondensing)
Storage temperature
-20°C to 50°C
(< 80% RH, noncondensing)
Power requirements
Allowable voltage range at maximum
current:
100 Vac – 120 Vac @ 20 A
200 Vac – 240 Vac @10 A
Regulatory and standards compliance
EMC:
EMC Directive 89/336/EEC,
93/68/EEC
IEC/EN61326-1
ICES-001
AS/NZS 2064.1
Safety:
Low voltage directive
73/23/EEC, 93/68/EEC
IEC/EN61010-1
CSA C22.2 No. 61010-1
Certification marking:
CW, c CSA us, C-tick,
ICES/NMB-001
Dimensions
System cabinet: 600 mm (W) by
1050 mm (D) by 1818 mm (H)
Weight
System cabinet: Approximately 360 kg
(including 40 SMUs, 32 digital outputs,
1 DC power source, and required
cables)
Recommended probers and
probe cards*
Probers:
• ACCRETECH UF3000
• TEL P12XL
Probe cards:
• JEM (Japan electronic materials Co.)
• MJC (Micronics Japan Co.)
• K&S (Kulicke & Soffa Industries Inc.)
• FormFactor
* Please contact your local sales representative
regarding the latest information on recommended
probers and probe cards.
N9201A-to-4070/4080 Series connection capabilities
SMU1
SMU3
SMU5
SMU7
GNDU
SMU2
SMU4
SMU6
SMU8
SMUs
Digital outputs
DC power source
1
2
3
4
.
.
.
.
39
40
1
2
3
.
.
.
31
32
1
GND
1
2
3
4
5
6
.
.
.
.
.
.
.
.
.
.
.
.
.
Maximum 48 extended ports
N9201A measurement
hardware resources
4070/4080 Series
test head
45
46
47
48
1 2 3 4 5 . . . . . . . . . . . . 43 44 45 46 47 48
48 DUT pins
3
Web Resources
N9201A Web Site
Visit our N9201A web site for additional
product information and literature.
www.agilent.com/see/N9201A
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Revised: July 17, 2008
Product specifications and descriptions
in this document subject to change
without notice.
© Agilent Technologies, Inc. 2007, 2008
Printed in USA, August 8, 2008
5989-5747EN
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