Intersema MS7912A Pressure sensor die (0-12 bar) Datasheet

MS7912
PRESSURE SENSOR DIE (0-12 BAR)
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0 to 1200 kPa range (12 bar or 174 PSI)
Absolute/differential pressure sensors
High linearity, small size
RoHS-compatible & Pb-free1
DESCRIPTION
The sensor element of the MS7912 consists of a small silicon micro-machined membrane with a Pyrex glass
mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure
sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential
sensor (MS7912D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
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•
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Uncompensated pressure sensor die
Output Span 150mV @ 5V
Temperature Range -40°…+125°C
Linearity 0.05% (typical)
Small Die Size 1.72 x 1.58mm
Low Cost, High reliability
APPLICATION
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•
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For absolute or differential pressure sensor systems
Engine controls
Dive computers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out-
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
GND2
1
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
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PAD OUT
Vs+
Epi
OutImportant remarks:
MS7912
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin on the die
Out+
GND1
GND2
LAYOUT
MS7912A
MS7912D
Bondable area = 100 x 100 um
Bondable area = 100 x 100 um
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FULL SCALE PRESSURE
kPa
bar
mbar
PSI
atm
mm Hg
m H2O
Inches H2O
1200
12
12000
174
11.8
9001
122
4818
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Pressure overload
Symbol
VS+
TS
Conditions
Min
Max
Unit
-40
20
+150
30
V
C
Bar
o
Ta = 25 C
o
ELECTRICAL CHARACTERISTICS
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C )
Parameter
Operating Pressure Range
Min
Typ
Max
Unit
0
12
Bar
Operating Temperature Range
-40
125
°C
Bridge Resistance
3.0
3.4
3.8
kΩ
Full-scale span (FS)
120
150
180
mV
Zero Pressure Offset
-40
0
40
mV
± 0.05
± 0.15
Linearity
Temperature Coefficient of Resistance
Span
Offset
+ 2400
- 1500
- 80
Notes
% FS
1
ppm/°C
ppm/°C
µV/°C
2
+ 2800
- 1900
+ 3300
- 2300
+ 80
Pressure Hysteresis
± 0.05
± 0.15
% FS
3
Repeatability
± 0.1
± 0.2
% FS
4
0.3
% FS
5
Temperature Hysteresis
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 12 bar).
2) Slope of the endpoint straight line from 25°C to 60°C.
3) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
4) Same as 3) after 10 pressure cycles.
5) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
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PICKING TOOLS
The MS7912 sensors have a sensitive membrane (0.5 x 0.5 mm) the top surface of the sensor dice has an outer
of diameter is: 1.62 x 1.48 mm. The pick and place tool has to be of a soft material as rubber (Hardness 78-97
Shore A). Its external size must fit the sensor and the vacuum cavity must be as large as the membrane itself.
Successful test where done with some tools of SPT, see SPT drawing and references bellow).
SPT references
External dimension
Internal dimensions
RTR-A1-060x060
TL & TW: 0.06 inch /1.52 mm
∅H: 0.035 inch / 0.89 mm
ORDERING INFORMATION
Product Code
Product
Art.-Nr.
MS7912A
1200 kPa Absolute Pressure Sensor
791225021
MS7912D
1200 kPa Differential Pressure Sensor
791225121
The MS7912 dice are supplied sawn on blue foil, mounted on plastic rings
FACTORY CONTACTS
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 BEVAIX
SWITZERLAND
Tel. 032 847 9550
Tel. Int. +41 32 847 9550
Telefax +41 32 847 9569
e-mail:
http://www.intersema.ch
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance
and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys
no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from
patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or
warranty that such applications will be suitable for the use specified without further testing or modification.
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