Order this document by MPX906/D SEMICONDUCTOR TECHNICAL DATA " " !" !!# ! ! The MPX906D series device is a silicon piezoresistive pressure sensor providing a very accurate and linear voltage output — directly proportional to the applied pressure. This standard, low cost, uncompensated pressure sensor permits manufacturers to design and add their own external temperature compensating and signal conditioning networks. Compensation techniques are simplified because of the predictability of Motorola’s single element strain gauge design. It is designed for applications exposing the pressure (P2) side of the device to water, water vapor and soapy water vapor. 0 to 6 kPa (0 to 24 in. H2O) WATER VAPOR COMPATIBLE 20 mV FULL SCALE SPAN (TYPICAL) Features • Low Cost • Patented Silicon Shear Stress Strain Gauge Design • Ratiometric to Supply Voltage BASIC CHIP CARRIER ELEMENT CASE 867–08, STYLE 2 • Durable Epoxy Unibody Element • Water Vapor Compatible — 0 to 600 mmH20 Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure sensor chip. PIN 4 + VS PIN 5 + Vout X–ducer PIN 3 – Vout PORT OPTION CASE 867H–03, STYLE 2 PIN 2 NOTE: Pin 1 is the notched pin. Figure 1. MPX906 Pressure Sensor Schematic PIN NUMBER VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the X–ducer is directly proportional to the differential pressure applied. The output voltage of the sensor increases with increasing pressure applied to the (P2) side relative to the pressure side (P1). 1 N/C 4 VS 2 Gnd 5 3 –Vout 6 +Vout N/C MAXIMUM RATINGS (TC = 25°C unless otherwise noted) Rating Symbol Value Unit Overpressure(8) (P1 > P2) Pmax1 10 kPa Overpressure(8) (P2 > P1) Pmax2 100 kPa Tstg – 40 to +125 °C TA – 40 to +125 °C Storage Temperature Operating Temperature Senseon and X–ducer are trademarks of Motorola, Inc. REV 2 Motorola Sensor Device Data Motorola, Inc. 1997 1 OPERATING CHARACTERISTICS (VS = 3.0 Vdc, TA = 25°C unless otherwise noted) Symbol Min Typ Max Unit Pressure Range(1) POP 0 — 6.0 kPa Supply Voltage(2) VS — 3.0 6.0 Vdc Supply Current Io — 6.0 — mAdc 32 mV Characteristic Full Scale Span(3) VFSS 9.0 20 Offset(4) Voff – 40 –20 0 mV Sensitivity V/P — 3.3 — mV/kPa Linearity(5) — –0.5 — 2.0 %VFSS Pressure Hysteresis (0 to 6 kPa) (5) — — 0.1 — %VFSS Temperature Hysteresis (0°C to +85°C) (5) — — ± 0.5 — %VFSS TCVFSS – 0.22 — – 0.16 %VFSS/°C Temperature Coefficient of Full Scale Span(5) Temperature Coefficient of Offset(5) Temperature Coefficient of Resistance(5) Input Impedance TCVoff — – 18 — µV/°C TCR 0.25 0.30 0.35 %Zin/°C Zin 400 — 550 Ω Zout 750 — 1875 Ω Response Time (10% to 90%) (6) tR — 1.0 — ms Warm–Up — — 20 — ms Offset Stability(9) — — ± 0.5 — %VFSS Symbol Min Typ Max Unit — — 4.0 — Grams Output Impedance MECHANICAL CHARACTERISTICS Characteristic Weight (Basic Element, Case 867–08) NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self–heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. • TCR: Zin deviation with minimum rated pressure applied, over the temperature range of – 40°C to +125°C, relative to 25°C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface. 8. Exposure beyond these limits may cause permanent damage or degradation to the device. 9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 2 Motorola Sensor Device Data TEMPERATURE COMPENSATION Figure 2 shows the output characteristics of the MPX906D series at 25°C. The X–ducer piezoresistive pressure sensor element is a semiconductor device which gives an electrical output signal proportional to the pressure applied to the device. This device uses a unique transverse voltage diffused semiconductor strain gauge which is sensitive to stresses produced in a thin silicon diaphragm by the applied pressure. Because this strain gauge is an integral part of the silicon diaphragm, there are no temperature effects due to differences in the thermal expansion of the strain gauge and the diaphragm, as are often encountered in bonded strain gauge pressure sensors. However, the properties of the strain gauge itself are temperature dependent, requiring that the device be temperature compensated if it is to be used over an extensive temperature range. Temperature compensation and offset calibration can be achieved rather simply with additional resistive components. Several approaches to external temperature compensation over both – 40 to +125°C and 0 to + 80°C ranges are presented in Motorola Applications Note AN840. LINEARITY Linearity refers to how well a transducer’s output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range (Figure 3). There are two basic methods for calculating nonlinearity: (1) end point straight line fit or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola’s specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. 70 5 50 VS = 3 Vdc P2 > P1 –5 –10 OUTPUT (mVdc) OUTPUT (mVdc) 0 25°C –15 ACTUAL 40 SPAN (VFSS) 30 THEORETICAL 20 85°C –20 –25 LINEARITY 60 0°C 0 10 OFFSET (VOFF) 0 100 200 300 400 500 PRESSURE DIFFERENTIAL (mmH20) 0 600 Figure 2. Output versus Pressure Differential SILICONE DIE COAT WIRE BOND MAX POP PRESSURE (kPA) Figure 3. Linearity Specification Comparison AMBIENT (P1) SIDE STAINLESS STEEL METAL COVER P1 ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ DIE LEAD FRAME P2 EPOXY CASE RTV DIE BOND PRESSURE (P2) SIDE Figure 4. Cross–Sectional Diagram (not to scale) Motorola Sensor Device Data 3 evaluated to specification after completion of this vapor exposure. Contact factory for details on liquid exposure compatibility testing. SOAPY WATER VAPOR COMPATIBILITY The compatibility of this product to Soapy Water Vapor has been verified by the reliability sample test method shown in Figure 5. Samples were tested with bias for 504 hours and DUT TEST SYSTEM MANIFOLD Port VAPORS TA = 75°C MEDIA LIQUID Test Conditions: TA = 75°C Vsupply = 6 Volts Solution: 25 grams detergent and 50 milliliters bleach per liter of Phoenix tap water. Detergent and bleach brand names selected per UL specification #UL2157 Electric Clothes Washing Machines and Extractors Devices exposed to vapors 5 cm above liquid. Figure 5. Vapor Test Method ORDERING INFORMATION MPX906D series pressure sensors are available in basic element or ported configurations, which provide printed circuit board mounting ease and barbed hose pressure connections. MPX Series D i T Device Type O i Options C Case Type T Order Number Device Marking Basic Element Differential Case 867–08 MPX906D MPX906D Ported Element Gauge Axial Case 867H–03 MPX906GVW MPX906D 4 Motorola Sensor Device Data PACKAGE DIMENSIONS C R M B NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION –A– IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). POSITIVE PRESSURE (P1) –A– N PIN 1 SEATING PLANE 1 2 3 4 5 DIM A B C D F G J L M N R S L 6 –T– G J S F D 6 PL 0.136 (0.005) M T A M INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 STYLE 2: PIN 1. 2. 3. 4. 5. 6. CASE 867–08 ISSUE N MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66 OPEN GROUND –VOUT VSUPPLY +VOUT OPEN BASIC ELEMENT –T– NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH C A U E V –Q– Y N B R PIN 1 POSITIVE PRESSURE (P1) 1 2 3 4 5 6 –P– Z S 0.25 (0.010) M T Q M K X J 0.13 (0.005) M T P D 6 PL S Q S G F CASE 867H–03 ISSUE B Motorola Sensor Device Data DIM A B C D E F G J K N P Q R S U V X Y Z INCHES MIN MAX 1.080 1.120 0.740 0.760 0.800 0.830 0.027 0.033 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.206 0.226 0.370 0.390 0.240 0.260 0.106 0.126 STYLE 2: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 20.32 21.08 0.68 0.84 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 5.23 5.74 9.40 9.91 6.10 6.60 2.69 3.20 NO CONNECT GROUND MINUS V OUT VSUPPLY PLUS V OUT NO CONNECT 5 Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. 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