TEMIC TSC87251G2D

Qualpack TSC87251G2D
Qualification Package
TSC87251G2D / TSC83251G2D
0.5 µm SCMOS3 Technology
TSC87251G2D
0.5 µm SCMOS3
1999 October
TEMIC SEMICONDUCTORS IS AN ATMEL COMPANY
Rev. 0 – October 1999
1
Qualpack TSC87251G2D
1. General Information........................................................................................................................... 3
1.1 Product Description............................................................................................................................ 3
2. Technology Information..................................................................................................................... 4
2.1 Wafer Process Technology ................................................................................................................. 4
2.1.1 SCMOS3 0.5um ROM Process ................................................................................................... 4
2.1.2 SCMOS3 NV 0.5um EPROM Process ......................................................................................... 6
2.2 Product Design .................................................................................................................................. 6
2.3 Package Technology .......................................................................................................................... 6
2.3.1 Package description ................................................................................................................... 6
2.3.2 Other available packages ............................................................................................................ 7
2.4 Test .................................................................................................................................................. 7
2.5 Device Cross Section ......................................................................................................................... 8
2.6 Wafer Process Control........................................................................................................................ 9
3. Qualification .................................................................................................................................... 10
3.1 Change Procedure ........................................................................................................................... 11
3.2 Qualification Flow............................................................................................................................. 12
3.3 Wafer Process Qualification.............................................................................................................. 13
3.3.1 Process Module Reliability ........................................................................................................ 13
3.3.1.1 Hot carrier qualification.............................................................................................................................................. 13
3.3.1.2 Electromigration.......................................................................................................................................................... 15
3.3.1.3 Time Dependent Dielectric Breakdown .................................................................................................................. 16
3.3.2 Z92 Wafer Process Qualification Results ................................................................................... 18
3.3.3 Z94 Wafer Process Qualification Results ................................................................................... 19
3.4 Package Qualification....................................................................................................................... 20
3.5 Device Qualification.......................................................................................................................... 20
3.5.1 Failure Mechanisms and Corrective Actions ............................................................................... 21
3.5.2 Qualification status ................................................................................................................... 21
3.6 Outgoing Quality and Reliability ........................................................................................................ 22
3.6.1 AOQ (Average Outgoing Quality)............................................................................................... 22
3.6.2 EFR (Early Failure Rate) ........................................................................................................... 22
3.6.3 LFR (Latent Failure Rate).......................................................................................................... 23
4. User Information .............................................................................................................................. 24
4.1 Soldering Recommendations ............................................................................................................ 24
4.2 DRY PACK Ordering rules ................................................................................................................ 24
4.3 ESD caution..................................................................................................................................... 24
5. Environmental Information .............................................................................................................. 25
6. Other Data........................................................................................................................................ 26
6.1 ISO9001 Approval Certificate............................................................................................................ 26
6.2 Databook Reference ........................................................................................................................ 27
6.3 Address Reference........................................................................................................................... 27
7. Revision History............................................................................................................................... 28
2
Rev 0 – October 1999
Qualpack TSC87251G2D
1. General Information
1.1 Product Description
Product Name:
TSC87251G2D / TSC83251G2D
Function:
8/16-bit Microcontrollers
32K EPROM / 32K ROM
Wafer process:
Z94 (SCMOS 3 NV) / Z92 (SCMOS 3)
Available plastic package types:
Wide range of packages including PLCC44,
PDIP40, PQFP44, TQFP44, VQFP44
Other forms
Multiple Hermetic Packages, Die, Wafer
Locations:
Process, product development
Wafer plant
QC responsibility
Assembly
Probe test
Final test
Shipment control
Quality Assurance
Reliability testing
Failure analysis
TEMIC Semiconductors Nantes, France
TEMIC Semiconductors Nantes, France
TEMIC Semiconductors Nantes, France
GATEWAY, Philippines - ASE, Taiwan
CHINTEIK, Thailand - ANAM, Korea and Philippines
CHIPPAC, China
TEMIC Semiconductors Nantes, France
GATEWAY, Philippines - ASE, Taiwan
ANAM, Korea and Philippines
GLOBAL LOGISTICS CENTER, Philippines
TEMIC Semiconductors Nantes, France
TEMIC Semiconductors Nantes, France
TEMIC Semiconductors Nantes, France
Product Quality Management Nantes
Signed :
Pascal LECUYER
Rev. 0 – October 1999
3
Qualpack TSC87251G2D
2. Technology Information
2.1 Wafer Process Technology
2.1.1 SCMOS3 0.5um ROM Process
Process type (Name):
CMOS (SCMOS3 - Z92)
Base material:
Wafer Thickness (final)
Wafer diameter
Bulk
475 µm
150 mm
Number of masks
16
Gate oxide
Material
Thickness
Silicon dioxide
110 A (optical - 120A electrical)
Polysilicon
Number of layers
Thickness
1
3000 A
Metal
Number of layers
Material
Layer 1 thickness
Layer 2 thickness
Layer 3 thickness
Passivation
Material
Thickness
4
3
Ti + TiN + AlCu
300A + 600A + 5000A + 250A TiN
300A + 600A + 5000A + 250A TiN
300A + 600A + 6500A + 250A TiN
SiO 2 / Si3N4
3000A / 7000 A
Rev 0 – October 1999
Qualpack TSC87251G2D
2.1.2 SCMOS3 NV 0.5um EPROM Process
Process type (Name):
CMOS (SCMOS3 NV - Z94)
Base material:
Wafer Thickness (final)
Wafer diameter
Bulk
475 µm
150 mm
Number of masks
22
Gate oxide
Material
Thickness
Silicon dioxide
110 A (optical - 120A electrical)
Polysilicon
Number of layers
Thickness Poly1
Thickness Poly2
2
2000 A (amorphous)
3000 A (polysilicon)
Metal
Number of layers
Material
Layer 1 thickness
Layer 2 thickness
Layer 3 thickness
Passivation
Material
Thickness
Rev. 0 – October 1999
3
Ti + TiN + AlCu + TiN
300A Ti + 600A TiN + 5000A AlCu+ 250A TiN
300A Ti + 600A TiN + 5000A AlCu+ 250A TiN
300A Ti + 600A TiN + 6500A AlCu+ 250A TiN
SiO 2 / Nitride Oxide
3000A /15000 A
5
Qualpack TSC87251G2D
2.2 Product Design
Pad size
Logic Effective channel length
For TSC87251G2D: 17.84 mm2 (4250 µm * 4400 µm)
For TSC83251G2D: 17.84 mm2 (4250 µm * 4400 µm)
84 µm * 84 µm
0.42 µm
Gate poly width
Gate poly spacing
0.5 µm
0.6 µm
Metal 1 width
Metal 1 spacing
Metal 2 width
Metal 2 spacing
Metal 3 width
Metal 3 spacing
0.6 µm
0.7 µm
0.8 µm
0.7 µm
0.8 µm
0.7 µm
Contact size
0.6 µm
Via 1 size
Via 2 size
0.6 µm
0.7 µm
Die size
2.3 Package Technology
2.3.1 Package description
Depending on the customer’s need. For information, the following data concern the PLCC 44.
Package weight
Chip separation method
Lead frame
Material
Thickness
2.34g
Sawing
Size
Lead plating
Die attach
Material
Type
Wire bonding
Material
Diameter
270*270 mils 2
Electroplated Sn/Pb 85/15
6
Cu
10 mils
Silver epoxy
Ablestick 84-1 LMIS
Gold
33um
Rev 0 – October 1999
Qualpack TSC87251G2D
Method
Molding
Material
Flammability rating
Marking
Method
Coding example
Dry packing
Tube packed
Primary
Material
Number per unit
Secondary
Material
Number per unit
Labeling (minimum)
Bar coding
Thermosonic
Sumitomo EME 6300HS
UL94V-0
Printed ink
T
optional special customer marking
TSC83C51RB2-MCA
© INTEL 80,82
Date-code Lot nbr
No
Tube
Antistatic PVC
27
Box
Cardboard
972
Device type, Quantity, Date Code, Production code
Code 39 to EIA-556-A
2.3.2 Other available packages
PQFP, PDIP, CQFP, CERDIP
TQFP, VQFP
No dry pack required
Dry pack required
2.4 Test
Probe equipment
SCHLUMBERGER ITS9000 / S15
Probe temperature
85°C
Test equipment
SENTRY 15
Test temperature
Commercial range
Industrial range
Automotive range
25°C
25°C and optional 85°C
25°C, 125°c and optional -40°c
Rev. 0 – October 1999
7
Qualpack TSC87251G2D
2.5
Device Cross Section
2
Final Z92 Cross Section
8
Rev 0 – October 1999
Qualpack TSC87251G2D
2.6 Wafer Process Control
All the inspections and controls are defined as a process step in the production management software,
and are led by using a centralized SPC software. PC system could be summarized as follows:
Engineering Database
Wafer Fab
Probe
Assembly
Final Test
die-sort
Process
parameters
- NANTES:
hermetic packages
- NANTES :
hermetic packages
- Subcontractors :
plastic packages
- Subcontractors :
plastic packages
Electrical
Test
Physical
Electrical
Physical measurement
Attribute
SPC (xbar / R)
SPC (xbar / s)
Attribute
SPC (xbar / R)
Measurement
Cpk tracking
Cpk tracking
Cpk tracking
Critical process parameters are identified by using F.M.E.A. and other advanced tools.
Those parameters are followed in real time with the SPC methodology and their capability is measured
and monthly reported in the Operation Review.
For end 1999, the Cpk target is the following:
% of all parameters per Cpk categories
100%
80%
60%
>1.67
<1.67
40%
20%
0%
1995
Rev. 0 – October 1999
1996
1997
1998
Obj. 99
9
Qualpack TSC87251G2D
3. Qualification
Product
Qualification
Wafer Process
Package
Device Type
(Design)
Qualification
Qualification
Qualification
All product qualifications are split into three distinct steps as shown above. This same procedure is also
used to qualify a change. Before a product is released for use, it must have been manufactured using a
qualified wafer and package process. Before a device is released for production processing, it must also
have successfully completed its required specific qualification.
The standard tests which are used for this procedure are shown in the section "Qualification Flow" .
10
Rev 0 – October 1999
Qualpack TSC87251G2D
3.1 Change Procedure
All changes are controlled by PCN (Product Change Notice). All major changes are notified to the
customers affected by the change.
A major change is defined as a change that requires evidence of no electrical, mechanical impact on the
product, or a change in the specification or marking of the product or packing. The list of changes usually
considered as major is detailed hereafter:
1
1-1
1-2
1-3
1-4
1-5
1-6
General Major Changes
Manufacturing line
Sequence of fabrication process cycle
Material type
Electrical parameter
External physical dimension
Die size
2
2-1
2-2
2-3
2-4
2-5
Changes specific to wafer fabrication area
Doping method
Gate oxide formation method
Equipment change
Layer Thickness
Module dimensions
3
3-1
3-2
3-3
3-4
3-5
Changes specific to to assembly process area
Sawing method
Die attach
Wire interconnect tools
Molding process
Tinning method
4
4-1
4-2
4-2
4-3
Changes specific to test area
Specification limit
Test coverage reduction
Product identification
Final conditioning
Rev. 0 – October 1999
11
Qualpack TSC87251G2D
3.2 Qualification Flow
General Requirements for Plastic packaged CMOS IC
Standard
Test Description
Qualification type
(acceptance)
MIL-STD 883D
Method 1005
Electrical Life Test (Early Failure Rate)
12 hours 150°C (Tj) 5.75V
Device
(1/2000 12h)
MIL-STD 883D
Method 1005
Electrical Life Test (Latent Failure Rate)
1000 hours 150°C 5.75V Dynamic or Static
Device
(0/100 500h)
MIL-STD 883D
Method 3015.7
Electrostatic Discharge HBM
+/-2000v 1.5kOhm/100pF/3 pulses
Device
(0/3 per level)
JEDEC 78
Latch up
50mW power injection 125°C
Device
(0/10)
MHS
PAQA0046
NV Memory Dataretention
High Temperature Storage 165°C
Device
(0/50 500c)
MIL-STD 883D
Method 1010
Temperature Cycling
1000 cycles -65°C/150°C air/air
Die and Package
(0/50 500c)
MHS
PAQA0184
Pressure Pot after Mounting Stress
168 hours 130°C/85%RH
Die and Package
(0/50 168h)
EIA
JESD22-A101
85/85 Humidity Test
1000 hours 85°C/85%RH
Die and Package
(0/50 500h)
EIA
JESD22-A110
HAST
336 hours 130°C/85%RH/5.5V
Die and Package
(0/50 168h)
EIA
JEDEC J-20-STD
Moisture Sensitivity Ranking
Infra Red Stress 220°C/235°c/3 times
Package
(0/10 per class)
MIL-STD 883D
Method 2003
Solderability
Package
(0/3)
MIL-STD 883D
Method 2015
Marking Permanency
Package
(0/5)
12
Rev 0 – October 1999
Qualpack TSC87251G2D
3.3 Wafer Process Qualification
3.3.1 Process Module Reliability
This chapter contains all the information relative to the reliability of the SCMOS3 technology. Results
presented in the following sections concern the reliability of the basic process steps that build up the
technology.
3.3.1.1 Hot carrier qualification
STATIC NMOS DEGRADATION
Channel length in µm
Process corner
Substrate current in µA/µm
VD=5.5v, VG=2.25v
Substrate current in µA/µm
VD=3.6v, VG=1.6v
Lifetime in seconds for 10% shift of
Gm at VD=5.5v
Lifetime in seconds for 10% shift of
Gm at VD=3.6v
0.5
Fast
17
0.55
Fast
15
0.6
Fast
13.4
0.65
Fast
12.1
0.7
Fast
11.1
0.5
Typical
14.7
0.35
0.3
0.25
0.22
0.2
0.3
3.2e3
3.7e3
4.2e3
4.7e3
5.2e3
3.8e3
8e7
10e7
12e7
14e7
16e7
10e7
STATIC PMOS DEGRADATION
Channel length in µm
Process corner
Substrate current in µA/µm
VD=5.5v, VG=2.25v
Substrate current in µA/µm
VD=3.6v, VG=1.25v
Lifetime in seconds for 10% shift of
Gm at VD=5.5v
Lifetime in seconds for 10% shift of
Gm at VD=3.6v
0.5
Fast
0.31
0.55
Fast
0.28
0.6
Fast
0.25
0.65
Fast
0.22
0.7
Fast
0.21
0.5
Typical
0.24
2.3e-3
1.9e-3
1.6e-3
1.4e-3
1.1e-3
1.6e-3
2.7e4
3.1e4
3.5e4
3.9e4
4.3e4
3.5e4
2e7
2.5e7
3e7
3.8e7
4.6e7
3.2e7
EXPERIMENTAL RESULTS IN DYNAMIC MODE: hot carrier degradation effects on inverter
propagation time have been measured on oscillators running at 75 MHz at 7v and 6.5v. Accelerator
factor in voltage is then carried out and expected degradation laws at 5v and 3.3v derived. The following
graphs show the frequency degradation of oscillators running at 5v and 3.3v.
Rev. 0 – October 1999
13
Qualpack TSC87251G2D
SCMOS3 Frequency degradation
VCC = 5 Volts.
DFreq/freq in %
20
15
200 MHz
100 MHz
10
50 MHz
25 MHz
5
0
0
5
10
15
20
25
30
Years
SCMOS3 Frequency degradation
VCC = 3.3 Volts.
1
DFreq/freq in %
0,8
200 MHz
0,6
100 MHz
50 MHz
0,4
25 MHz
0,2
0
0
5
10
15
20
25
30
Years
14
Rev 0 – October 1999
Qualpack TSC87251G2D
3.3.1.2 Electromigration
Characterization
Stresses of electromigration are achieved for 1000 hours on 32 packaged metal line running on flat with
a current density of 2x106 A/cm2 at a temperature of 200°C. Lines are declared to be failed for a shift of
the initial resistance by 20%. Results are summarized in the table below.
Level
Metal1
Metal2
Metal3
W/L/T(1)
2/2000/0.50
2/2000/0.50
2/2000/0.70
Structure
Ti/TiN/AlCu/TiN
Ti/TiN/AlCu/TiN
Ti/TiN/AlCu/TiN
Failures
No
No
No
(1)W/L/T=Width/Length/Thickness of the metal line in microns
Lifetime projection
The objective of reliability is to reach less than 10FIT on metal line within 10 years at a temperature of
150°C. As no failures have been found at 1000 hours in the above stress conditions a lifetime projection
in FIT is meaningless.
However, assuming for AlCu metalization an activation energy in temperature Ea of 0.60eV and an
activation in current with a power-law coefficient n of 2, the current density which guarantees no failures
within 10 years at 150°C can be extrapolated.
With these assumptions the projected current density for no failures at 150°C within 10 years is
calculated as 5x105A/cm2 which is much higher than the current density of 2x105 A/cm2 specified in the
design rules.
Rev. 0 – October 1999
15
Qualpack TSC87251G2D
3.3.1.3 Time Dependent Dielectric Breackdown
QBD MEASUREMENT:
The critical charge, supported by the thin oxide and related to the extrinsic and intrinsic defects, is
measured on TOX/P- and TOX/N- capacitors. The tested capacitor areas are varying from 4e-4 to 5e-2
cm2. Two types of capacitors with poly overlaping the field oxide (DEC) and poly non overlaping the
field oxide (INC) are measured. The distributions have been obtained from 750 measurements for each
area and type of capacitors on 10 different lots.
Extrinsic defects:
The two graphs here after represent the % of failures vs area for Qbd below or equal to 0.1 Cb/cm2. The
law of Poisson is used to determine the D0 defect density of the extrinsic defects:
Y=1-exp(-Area * DO)
Poly overlaping the Field oxide on Tox/P- and Tox/N-:
The DO is found to be 1.1 def/cm2. This result is in agreement with the goal for D0 of 1 def/cm2.
Qbd < 0.1Cb/cm²
CAPA WITH POLY OVERLAPING THE FIELD OXIDE
0
-0,02
Ln(1-Y)
DEC PDEC NPoisson
-0,04
-0,06
0
0,02
0,04
0,06
Area in cm²
DO=1.1 def/cm²
16
Rev 0 – October 1999
Qualpack TSC87251G2D
Poly non overlaping the Field oxide on Tox/P- and Tox/N-:
The DO is found to be 0.9def/cm2. This result is in agreement with the goal for D0 of 1 def/cm2.
Qbd < 0.1Cb/cm²
CAPA WITH POLY NON OVERLAPING THE FIELD OXIDE
0
Ln(1-Y)
-0,01
-0,02
INC PINC N-
-0,03
Poisson
-0,04
-0,05
0
0,02
0,04
0,06
Area in cm²
DO=0.9 def/cm²
Intrinsic defects :
The graph here after represents the percentage of failure for a Qbd > 10 Cb/cm² vs the area. The worst
case given by the bigest capacitors shows that 67% of the total distribution has a Qbd > 10 Cb/cm². This
result guarantees a good reliability behaviour. The critical charge, supported by thin oxide and related to
the extrinsic defects, is measured on TOX/P- capacitors of 42570um2 and TOX/N- capacitors of
85140um2. Following are the average results obtained on recent lots from a distribution of about 60 sites
per wafer. The minimum specification limit is 10C/cm2.
Qbd > 10 Cb/cm²
SCMOS3 PROCESS
1
0,9
DEC P-
0,8
Yield
DEC NINC P-
0,7
INC N0,6
0,5
0
0,02
0,04
0,06
Area in cm²
Conclusion:
The QBD results demonstrate high reliability level of SCMOS3 thin oxide.
Rev. 0 – October 1999
17
Qualpack TSC87251G2D
3.3.2 Z92 Wafer Process Qualification Results
This section summarizes the cumulated reliability data of 0.5um microcontrollers ROM technology.
Lots
Device Type
Test Description
Z27746A
TSC251G2D
EFR Dynamic Life Test
LFR Life Test
Z27735A
Z29249
Z29683C
Z29936
TS80C32X2
Z27300A
Z27880A
Z28109A
TS83C51RC2
Z26274A
Z26407
Z27291A
TS83C51RX2
Global
All products
EFR Dynamic Life Test
LFR Life Test
EFR Dynamic Life Test
LFR Life Test
EFR Dynamic Life Test
LFR Life Test
EFR Dynamic Life Test
Commercial / Industrial
Step
Result
Comment
12h
3/2661
Poly particle
Metal3 defect
500h
1000h
0/100
0/100
12h
11/11712 Contacts alignment
500h
1000h
0/699
0/699
12h
5/7318
500h
1000h
0/200
0/200
12h
3/2238
500h
1000h
0/173
0/173
12h
Automotive (1)
24h
168h
LFR Life Test
500h
1000h
Passivation scratch
Poly particle
Silicon breakdown
22/23929 919 ppm
(828 ppm / 10 mm2)
0/3564 0ppm
0/1172
0/1172
0/1172
4.7 fit
(3.0 fit / 10mm2)
Note (1): The additional operations included in the automotive backend flow allow to reduce
significantly the Early Life Failure Rate. As long as needed to achieve the Automotive Quality
Assurance requirements, these operations may be any of those described hereafter:
18
Statistical wafer sort
Accelerated Dynamic Burn-in at probe
Probe critical parameters 3 sigma sort
Part Average Testing
Dynamic Burn-in of products
Other equivalent methods
Rev 0 – October 1999
Qualpack TSC87251G2D
3.3.3 Z94 Wafer Process Qualification Results
This section summarizes the cumulated reliability data of 0.5um microcontrollers EPROM technology.
Lots
Device Type
Test Description
Z27314A
Z27748
TSC87251G2D EFR Dynamic Life Test
LFR Life Test
Z28233C
TSC87C51RB2 EFR Dynamic Life Test
LFR Life Test
Z28090B
Z28987
Z29142
Z29311D
Z29568B
Z28303C
TSC87C51RC2 EFR Dynamic Life Test
LFR Life Test
TSC87C51RD2 EFR Dynamic Life Test
LFR Life Test
Z28430A
TSC87C52X2
EFR Dynamic Life Test
LFR Life Test
Global
All products
Rev. 0 – October 1999
EFR Dynamic Life Test
Commercial / Industrial
Step
Result
Comment
12h
24h
500h
4/3772
0/360
1/150
Poly bridging, Interlayer oxide
defect, functional not identified,
metal 2 photo etch bridging
12h
24h
500h
1000h
1/1663
0/323
0/100
0/97
Functional not identified
12h
24h
500h
1000h
8/11533
0/1284
0/500
0/500
Poly particle
Contact misalignment
Capacitor oxide defects
12h
24h
500h
1000h
2/953
0/324
0/100
0/100
12h
24h
500h
1000h
2/2333
0/297
0/100
0/100
12h
Automotive (1)
24h
168h
LFR Life Test
500h
1000h
Poly particle
Functional not identified
17/20254 839 ppm
(705 ppm / 10mm2)
0/2588 0ppm
0/950
1/950
0/797
14.2 fit
(11.6 fit / 10mm2)
19
Qualpack TSC87251G2D
3.4 Package Qualification
This section summarizes the initial package qualification data of TSC87251G2D and TSC87251G2D
products in PLCC44.
Lots
Device Type
Z27314A
TSC87251G2D 85/85 Humidity
PLCC44
Moisture Sensitivity
Ranking
HAST after Soldering
Stress
TSC83251G2D Thermal Cycles
PLCC44
HAST after Soldering
Stress
Z27746A
Test Description
Step
Result Comment
500h
1000h
L1
0/50
0/50
0/10
15c
168h
500c
1000c
15c
168h
0/50
0/50
0/50
0/50
0/50
0/50
Pass level 1 of J-20-STD
3.5 Device Qualification
This section presents the qualification results of TSC87251G2D/TSC83251G2D devices.
Lots
Device Type
Test Description
Z27314A
TSC87251G2D EFR Dynamic Life Test
PLCC44
LFR Life Test
High Temp. Retention
Z27746A
TSC83251G2D EFR Dynamic Life Test
PLCC44
LFR Life Test
Lots
Device Type
Test Description
Z26629
TSC87251G2D ESD HBM
Z27746
Latch up
Overvoltage
Power injection
TSC83251G2D ESD HBM
Latch up
Overvoltage
Power injection
20
Step
12h
24h
168h
500h
1000h
500h
1000h
12h
24h
168h
500h
1000h
Step
Result Comment
2/1978 Interlayer oxide defect
0/360 Polysilicide particle
0/150
1/150 Metal 2 photo etch bridging
0/50
0/50
3/2661 Polysilicide particle
0/211 Metal 3 defect
0/100
0/100
0/100
Result Comment
2000V
3/3
Class 1 of MIL883
10V
50mW
2000V
3000V
0/5
0/5
0/3
0/3
Latch-up free
10V
50mW
0/5
0/5
Latch-up free
Class 2 of MIL883
Rev 0 – October 1999
Qualpack TSC87251G2D
Comments:
No reject observed during package qualification tests.
One reject in LFR, but physical analysis demonstrated the failure was wafer process dependant and not
related to the device itself. As a consequence it was not charged for device qualification.
3.5.1 Failure Mechanisms and Corrective Actions
As part of TEMIC continuous improvement policy, all defects are analysed. For all failure mechanisms
identified, root causes ranked regards number of occurencies and criticity are investigated and
addressed by corrective actions.
Failure
Mechanism
Root Cause
Corrective Action
Date
Effect
Check of
Efficiency
56% Contacts
misalignment
RTA drift
Upgrade of RTA
equipment
06/99
reduce alignment
scattering
Visual inspection,
yield - 07/99
26% Poly defects
Defect
density at
Poly level
# Hard mask :
replacement of PR
Titane mask by masking
buffers during Ti
deposition for
# polysilicideBARC
(Bottom Anti-Reflective
Coating)
# PR strip optimization
10/98
Reduction of
defect density at
Poly level
Yield
EFR - 12/98
Improve Poly
dimension control
Yield
EFR - 12/98
03/99
Defect density
reduction
EFR - 05/99
# PR strip method
optimized
# Equipment upgrade
(Semitool)
03/99
Reduction of the
defect density
Yield – EFR 05/99
6% Metal particles
PR strip
process
6% Passivation
Marginal
6% Silicon
breakdown
Marginal
07/99
3.5.2 Qualification status
The 0.5um logic wafer process was qualified on 1997 September. The qualification was extended to
OTP microcontrollers (SCMOS3 NV) process on 1999 April.
The TSC83251G2D was qualified on 1999 January, and OTP version TSC87251G2D was full qualified
on 1999 April.
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Qualpack TSC87251G2D
3.6 Outgoing Quality and Reliability
3.6.1 AOQ (Average Outgoing Quality)
The AOQ is measured following 100% test by sampling outgoing product. The results of this inspection
are recorded in ppm (parts per million) using the method defined in JEDEC 16. The figures below cover
the last years for both the subject and structurally similar products.
40
30
ppm
20
10
0
1995
1996
1997
1998
Obj.99
Year
3.6.2 EFR (Early Failure Rate)
The EFR is measured on a sample of devices by operating them at an elevated temperature and
measuring the number which fails to meet specification after 12 hours at 150°C. The figure is expressed
in terms of ppm.
800
600
ppm
400
200
0
1995
1996
1997
1998
Obj.99
Year
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Qualpack TSC87251G2D
3.6.3 LFR (Latent Failure Rate)
The LFR is measured by operating devices at elevated temperatures for 1000 hours and measuring the
failure rate. Using the Arrhenius law, the expected failure rate at a operating temperature of 55°C is
calculated using an activation Energy of 0.6 eV with a confidence level of 60%. This is expressed in units
per billion hours (FIT). The figures given are for the subject and structurally similar products.
40
30
FIT
20
10
0
1995
1996
1997
1998
Obj.99
Year
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Qualpack TSC87251G2D
4. User Information
4.1 Soldering Recommendations
For DRY PACKED products, TEMIC recommends to strictly follow the procedure described
hereunder:
- Dry packed products must not be stored more than 1 year at 40°c - 90%rh
(worst storage conditions assumed)
- A longer storage period is allowed taking into account the following conditions:
5 years max at 25°c (+/-5°c) - 50%rh
- From opening of the packs, the product must be assembled within 48 hours.
(worst in-process storage condition assumed: 30°c - 60%rh)
- If they cannot be soldered within this time period, then the pieces must be dryed at
125°c for 24 hours. Only one drying is allowed.
- Max relative humidity allowed in the bag is 20% (readable on the indicator inside
the bag). If this value is reached, then the parts must be dryed at 125°C for
24 hours before mounting.
- For high sensitive products, the delay between pack openning and assembly is
reduced to 6 hours (Level 6 of JEDEC 22-A112). In this case, a warning printed on
each pack advises the user of this restriction.
4.2 DRY PACK Ordering rules
TEMIC qualification procedure allows to classify products according to JEDEC 22-A112 and to
determine the convenient conditioning for safe customer use.
Nevertheless, even if the product is not classified as moisture sensitive, it is possible (for example if
storage conditions are not properly controlled) to order product with a Dry Pack.
4.3 ESD caution
The user must protect components against EOS and ESD damages by grounding personal and
workstations.
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Qualpack TSC87251G2D
5. Environmental Information
The TEMIC Environmental Policy aims are :
- Reducing the use of harmful chemicals in its processes
- Reducing the content of harmful materials in its products
- Using re-cyclable materials wherever possible
- Reducing the energy content of its products
As part of that plan, Ozone Depleting Chemicals are being replaced either by TEMIC MHS or its subcontractors' process.
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Qualpack TSC87251G2D
6. Other Data
6.1 ISO9001 Approval Certificate
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Qualpack TSC87251G2D
6.2 Databook Reference
The datasheet is available upon request to sales representative, or on TEMIC Semiconductors web site:
http://www.temic-semi.com
6.3 Address Reference
All inquiries relating to this document should be addressed to the following:
TEMIC Nantes
MHS S.A.
BP70602
44306 Nantes Cedex 3
France
Telephone (33) 2 40 18 18 18
Telefax
(33) 2 40 18 19 00
Or Direct contact
Pascal LECUYER
Quality Engineer
Telephone (33) 2 40 18 17 73
Telefax
(33) 2 40 18 19 00
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Qualpack TSC87251G2D
7. Revision History
Issue
0
Modification Notice
Initial Product Qualification Report
Application Date
1999 October
Remarks:
The information given in this document is believed to be accurate and reliable. However, no
responsability is assumed by TEMIC for its use. No specific guarantee or warranty is implied or given by
this data unless agreed in writing elsewhere.
TEMIC reserves the right to update or modify this information without notification, at any time, in the
interest of providing the latest information.
Parts of this publication may be reproduced without special permission on the condition that our author
and source are quoted and that two copies of such extracts are placed at our disposal after publication.
Before use of such reproduced material the user should check that the information is current.
Written permission must be obtained from the publisher for complete reprints or translations.
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