Pressure sensors Pressure transmitters without casing (voltage output) Series/Type: Ordering code: CAU-T series Date: Version: 2009-08-03 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF. Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it! Identification/Classification 1 (header 1 + top left bar): Pressure sensors Identification/Classification 2 (header 2 + bottom left header bar): Pressure transmitters without casing (voltage output) Ordering code: (top right header bar) Series/Type: (top right header bar) CAU-T series Preliminary data (optional): (if necessary) Department: AS SEN PD Date: 2009-08-03 Version: 3 EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited Pressure sensors Pressure transmitters without casing (voltage output) CAU-T series Description The transmitters are based on piezoresistive silicon pressure sensors from our own clean room. The T-series electronic compensates nonlinearity and temperature errors and supplies a precise calibrated output signal with a high immunity against electromagnetic influences (EMI). Features Piezoresistive MEMS technology Measured media (absolute pressure): Air, non-aggressive gases (gas humidity 0 ... 85% r.h., without dew) Unsuitable for substances which react with glass, silicon, gold, aluminum, stainless steel, silicone glue or silicone gel. Measured media (gauge pressure): Air, non-aggressive gases (gas humidity 0 ... 100% r.h.) and non-aggressive fluids. Unsuitable for substances which react with glass, silicon, stainless steel, silicone glue (pr ≤ 10 bar) or epoxy glue (pr > 10 bar). Voltage output proportional to pressure: 0.5 ... 4.5 V Reverse supply voltage protection RoHS-compatible, halogen-free Without casing (protection IP00) Dimensional drawings Type KC for gauge pressure (M5 thread connection) Type TH for absolute pressure (M5 thread connection) All dimensions in mm AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. 2009-08-03 Page 2 of 8 Pressure sensors Pressure transmitters without casing (voltage output) CAU-T series Technical data Absolute maximum ratings Parameter Symbol Conditions Min. Tst 1) Ta 2) Compensated temperature range Tc 3) Soldering temperature Tsolder <5 s (no reflow soldering) pov 4), 5) 1.5 Supply voltage VCC 6) 4.75 Supply current ICC Signal output current IA Output signal at sensor failure VERR Typ. Max. Unit –40 +105 °C –25 +85 °C 0 +70 °C +240 °C Temperature ranges Storage temperature range Operating temperature range Pressure ranges Overpressure pr Supply voltage /-current 5.5 V IA = 0 7 mA 7) 2 mA 0.01 V DC break down voltage Vis 8) Parameter Symbol Conditions 500 V Min. Typ. Max. Unit Output signal @ Ta = 25 °C, VCC = 5 V, IA < 0.1 mA Offset Signal span (Full Scale) Nonlinearity VA0 VFS L Simple output AUA, AUR 9) 0.485 0.5 0.515 V Symmetrical output AUS 9) 2.485 2.5 2.515 V 3.985 4.0 4.015 V ±0.1 ±0.25 % FS ±0.25 ±0.5 % FS 10) Simple output 10), 11) Symmetrical output t10-90 12) Supply voltage rejection SVR 10), 13) Parameter Symbol Conditions Response time 10), 11) 1 Min. ms ±0.01 % FS/V Typ. Max. Unit ±0.1 ±0.5 % FS ±0.015 ±0.05 % FS/K ±0.015 ±0.03 % FS/K ±0.015 ±0.03 % FS/K Data in temperature range @ Ta = –25 ... 85 °C, VCC = 5 V, IA < 0.1 mA 14) Temperature hysteresis Data in temperature range @ Ta = 0 ... 70 °C, VCC = 5 V, IA < 0.1 mA Temperature coefficient of offset Temperature coefficient of span TCVA0 TCVFS pr < 0.25 bar 15) pr ≥ 0.25 bar 15) 16) AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. 2009-08-03 Page 3 of 8 Pressure sensors Pressure transmitters without casing (voltage output) CAU-T series Characteristics Simple output (AUA, AUR) Symmetrical output (AUS) VA0 + VFS VA0 + ½VFS VA0 VA0 VA0 - ½VFS 0 pr -pr 0 +pr Connection diagram Vcc p VA U GND Electrical connection (view to soldering side) AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. 2009-08-03 Page 4 of 8 Product type AUA 1.000 TH V4 TN L P AUA 2.500 TH V4 TN L P AUA 6.000 TH V4 TN L P AUA 10.00 TH V4 TN L P AUA 25.00 TH V4 TN L P AUR 0.100 KC V4 TN L P AUR 0.250 KC V4 TN L P AUR 0.400 KC V4 TN L P AUR 1.000 KC V4 TN L P AUR 2.500 KC V4 TN L P AUR 6.000 KC V4 TN L P AUR 10.00 KC V4 TN L P AUR 25.00 KC V4 TN L P AUS 0.100 KC V4 TN L P AUS 0.250 KC V4 TN L P AUS 0.400 KC V4 TN L P AUS 1.000 KC V4 TN L P Ordering code B58620T0510A001 B58620T0510A002 B58620T0510A003 B58620T0510A004 B58620T0510A005 B58621K0510A006 B58621K0510A007 B58621K0510A008 B58621K0510A009 B58621K0510A010 B58621K0510A011 B58621K0510A012 B58621K0510A013 B58623K0510A014 B58623K0510A015 B58623K0510A016 B58623K0510A017 Rated pressure pr bar Please read Cautions and warnings and Important notes at the end of this document. AS SEN PD Page 5 of 8 1.000 0.400 0.250 Gauge 0.100 25.00 10.00 6.000 2.500 Absolute 1.000 0.400 0.250 0.100 25.00 10.00 Pressure measurement 6.000 2.500 1.000 Pressure sensors Pressure transmitters without casing (voltage output) CAU-T series Rated pressures and ordering codes Gauge, symmetrical Other rated pressures upon request. 2009-08-03 Pressure sensors Pressure transmitters without casing (voltage output) CAU-T series Symbols and terms 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) Storage temperature range Tst A storage of the pressure sensor within the temperature range Tst,min up to Tst,max and without applied pressure and supply voltage will not affect the performance of the pressure sensor. Operating temperature range Ta An operation of the pressure sensor within the temperature range Ta,min up to Ta,max will not affect the performance of the pressure sensor. Compensated temperature range Tc While operating the pressure sensor within the temperature range Tc,min up to Tc,max, the deviation of the output signal from the values at 25 °C will not exceed the temperature coefficients. Out of the compensated temperature range, the deviations may increase. Rated pressure pr Within the rated pressure range 0 up to pr (symmetrical output: –pr up to +pr) the signal output characteristic corresponds to this specification. Overpressure pOV Pressure cycles within the pressure range 0 up to pov will not affect the performance of the pressure sensor. Supply voltage VCC VCC,max is the maximum permissible supply voltage, which can be applied without damages. VCC,min is the minimum required supply voltage, which has to be applied for normal operation. Signal output current IA IA,max is the maximum permissible sink current of the signal output. Exceeding (e.g. short circuit) may cause irreparable damages. DC break down voltage Vis The pressure sensor withstands a high voltage between the stainless steel pressure connection and the electrical connection VCC, VA and GND (all short circuited) without damage. Offset VA0 The offset VA0 is the signal output VA(p = 0) at zero pressure. Signal span (Full Scale) Simple output: VFS = FS = VA(pr) – VA0 Symmetrical output: VFS = FS = VA(+pr) – VA(–pr) Nonlinearity L (including pressure hysteresis) The nonlinearity is the deviation of the real sensor characteristic VA = f(p) from the ideal straight line. It can be approximated by a polynomial of second order, with the maximum at px = pr / 2 . The equation to calculate the nonlinearity is: L= 12) 13) 14) 15) 16) VA (p x ) − VA 0 p x − VA (pr ) − VA 0 pr Response time t10-90 Delay between a pressure change (10 ... 90% pr) and the corresponding signal output change (10 ... 90% FS). Supply voltage rejection SVR While varying the supply voltage within the range VCC,min up to VCC,max at constant pressure and temperature, the signal output change will not exceed SVRmax. Temperature hysteresis The temperature hysteresis is the change of offset, starting from the value at 25 °C after a temperature change and return to 25 °C. Determined during temperature cycles in operating temperature range (cycles with 1 K/min). Temperature coefficient of offset TCVA0 Offset at temperature Tx: VA0(Tx) = VA0(25 °C) + VFS(25 °C) · (Tx – 25 °C) · TCVA0 Values are valid within the compensated temperature range Tc,min up to Tc,max Out of the compensated temperature range, the deviation may increase. Temperature coefficient of span TCVFS Span at temperature Tx: VFS(Tx) = VFS(25 °C) · [ 1 + (Tx – 25 °C) · TCVFS ] Values are valid within the compensated temperature range Tc,min up to Tc,max Out of the compensated temperature range, the deviation may increase. AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. 2009-08-03 Page 6 of 8 Pressure sensors Pressure transmitters without casing (voltage output) CAU-T series Cautions and warnings Storage (general) All pressure sensors should be stored in their original packaging. They should not be placed in harmful environments such as corrosive gases nor exposed to heat or direct sunlight, which may cause deformations. Similar effects may result from extreme storage temperatures and climatic conditions. Avoid storing the sensor dies in an environment where condensation may form or in a location exposed to corrosive gases, which will adversely affect their performance. Plastic materials should not be used for wrapping/packing when storing or transporting these dies, as they may become charged. Pressure sensor dies should be used soon after opening their seal and packaging. Operation (general) Media compatibility with the pressure sensors must be ensured to prevent their failure. The use of other media can cause damage and malfunction. Never use pressure sensors in atmospheres containing explosive liquids or gases. Ensure pressure equalization to the environment, if gauge pressure sensors are used. Avoid operating the pressure sensors in an environment where condensation may form or in a location exposed to corrosive gases. These environments adversely affect their performance. If the operating pressure is not within the rated pressure range, it may change the output characteristics. This may also happen with pressure sensor dies if an incorrect mounting method is used. Be sure that the applicable pressure does not exceed the overpressure, as it may damage the pressure sensor. Do not exceed the maximum rated supply voltage nor the rated storage temperature range, as it may damage the pressure sensor. Temperature variations in both the ambient conditions and the media (liquid or gas) can affect the accuracy of the output signal from the pressure sensors. Be sure to check the operating temperature range and thermal error specification of the pressure sensors to determine their suitability for the application. Connections must be wired in accordance with the terminal assignment specified in the data sheets. Care should be taken as reversed pin connections can damage the pressure transmitters or degrade their performance. Contact between the pressure sensor terminals and metals or other materials may cause errors in the output characteristics. Design notes (dies) This specification describes the mechanical, electrical and physical requirements of a piezoresistive sensor die for measuring pressure. The specified parameters are valid for the pressure sensor die with pressure application either to the front or back side of the diaphragm as described in the data sheet. Pressure application to the other side may result in differing data. Most of the parameters are influenced by assembly conditions. Hence these parameters and the reliability have to be specified for each specific application and tested over its temperature range by the customer. Handling/Mounting (dies) Pressure sensor dies should be handled appropriately and not be touched with bare hands. They should only be picked up manually by the sides using tweezers. Their top surface should never be touched with tweezers. Latex gloves should not be used for handling them, as this will inhibit the curing of the adhesive used to bond the die to the carrier. When handling, be careful to avoid cuts caused by the sharp-edged terminals. The sensor die must not be contaminated during manufacturing processes (gluing, soldering, silk-screen process). The package of pressure sensor dies should not to be opened until the die is mounted and should be closed after use. The sensor die must not be cleaned. The sensor die must not be damaged during the assembly process (especially scratches on the diaphragm). Soldering (transducers, transmitters) The thermal capacity of pressure sensors is normally low, so steps should be taken to minimize the effects of external heat. High temperatures may lead to damage or changes in characteristics. A non-corrosive type of flux resin should normally be used and complete removal of the flux is recommended. Avoid rapid cooling due to dipping in solvent. Note that the output signal may change if pressure is applied to the terminals during soldering. This listing does not claim to be complete, but merely reflects the experience of EPCOS AG. AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. 2009-08-03 Page 7 of 8 Important notes The following applies to all products named in this publication: 1. Some parts of this publication contain statements about the suitability of our products for certain areas of application. These statements are based on our knowledge of typical requirements that are often placed on our products in the areas of application concerned. We nevertheless expressly point out that such statements cannot be regarded as binding statements about the suitability of our products for a particular customer application. As a rule, EPCOS is either unfamiliar with individual customer applications or less familiar with them than the customers themselves. For these reasons, it is always ultimately incumbent on the customer to check and decide whether an EPCOS product with the properties described in the product specification is suitable for use in a particular customer application. 2. We also point out that in individual cases, a malfunction of electronic components or failure before the end of their usual service life cannot be completely ruled out in the current state of the art, even if they are operated as specified. In customer applications requiring a very high level of operational safety and especially in customer applications in which the malfunction or failure of an electronic component could endanger human life or health (e.g. in accident prevention or life-saving systems), it must therefore be ensured by means of suitable design of the customer application or other action taken by the customer (e.g. installation of protective circuitry or redundancy) that no injury or damage is sustained by third parties in the event of malfunction or failure of an electronic component. 3. The warnings, cautions and product-specific notes must be observed. 4. In order to satisfy certain technical requirements, some of the products described in this publication may contain substances subject to restrictions in certain jurisdictions (e.g. because they are classed as hazardous). Useful information on this will be found in our Material Data Sheets on the Internet (www.epcos.com/material). Should you have any more detailed questions, please contact our sales offices. 5. We constantly strive to improve our products. Consequently, the products described in this publication may change from time to time. The same is true of the corresponding product specifications. Please check therefore to what extent product descriptions and specifications contained in this publication are still applicable before or when you place an order. We also reserve the right to discontinue production and delivery of products. Consequently, we cannot guarantee that all products named in this publication will always be available. The aforementioned does not apply in the case of individual agreements deviating from the foregoing for customer-specific products. 6. Unless otherwise agreed in individual contracts, all orders are subject to the current version of the “General Terms of Delivery for Products and Services in the Electrical Industry” published by the German Electrical and Electronics Industry Association (ZVEI). 7. The trade names EPCOS, BAOKE, Alu-X, CeraDiode, CSMP, CSSP, CTVS, DSSP, MiniBlue, MiniCell, MKK, MLSC, MotorCap, PCC, PhaseCap, PhaseCube, PhaseMod, PhiCap, SIFERRIT, SIFI, SIKOREL, SilverCap, SIMDAD, SIMID, SineFormer, SIOV, SIP5D, SIP5K, ThermoFuse, WindCap are trademarks registered or pending in Europe and in other countries. Further information will be found on the Internet at www.epcos.com/trademarks. Page 8 of 8