MEMS Mass Flow Sensor D6F-P A Compact, High-performance Flow Sensor with Dust Segregation Structure. • Built in Dust Segregation System (DSS) with cyclone flow structure, diverts particulates from sensor element. • High resolution and repeatability, even at low flow rates. • Barbed ports with connector or PCB terminals, or manifold mount with connector versions. • Built in voltage regulator, temperature compensation and amplified output. Measure up to 200 LPM with a bypass setup. • Alternative to differential pressure sensing. • RoHS Compliant Ordering Information Description Flow Sensor Cable Connector Assembly Case PBT --- Calibration Gas (See note 1.) Air (See note 2.) --- Flow Range 0-0.1 LPM 0-1 LPM --- Mounting Method Flange mount Connection Model PCB terminals Manifold mount --- Connector Connector --- D6F-P0001A1 D6F-P0010A1 D6F-P0010A2 D6F-P0010AM2 D6F-CABLE2 Note: 1. Can be calibrated for different gas types. Consult your Omron representative. 2. Dry gas must not contain large particles, eg dust, oil, mist. 3. Cable Assembly “D6F-CABLE2”, used with D6F-P0010A2 and D6F-P0010AM2, is sold separately. Specifications ■ Characteristics Models Flow Range (See note 1.) Calibration Gas (See note 2.) Flow Port Type Electrical Connection Power Supply Current Consumption Operating Output Voltage Output Voltage Limits (Min and Max.) Accuracy and Temperature Characteristics Repeatability (Reference (typical)) Case Material Degree of Protection Withstand Pressure Pressure Drop (Reference (typical)) Operating Temperature Operating Humidity Insulation Resistance Dielectric Strength Weight Response Time (Reference (typical)) D6F-P0001A1 D6F-P0010A1 D6F-P0010A2 D6F-P0010AM2 0 to 0.1 L/min. 0 to 1 L/min. Air barbed fitting maximum outside dia. 4.9 mm manifold mount Lead terminal Connector (3 wire) 4.75 to 9.45 VDC Max. 15 mA (no load, Vcc = 5 VDC) 0.5 to 2.5 VDC 0 VDC min. and 3.1 VDC max. (Lead resistance 10 kΩ) ± 5% F.S. max. of detected characteristics at 25 °C, within -10 to 60 °C (typical test results within ±2% F.S.) ± 1.0% F.S. ± 0.4% F.S. PBT IP40 50 kPa (7 psi) 0.19 kPa 0.48 kPa -10 to 60°C (1 LPM versions) and -33 to 75°C (0.1 LPM version) with no icing or condensation (Storage: -40 to 80°C with no icing or condensation) 35 to 85% RH with no icing or condensation (Storage: 35 to 85% RH with no icing or condensation) 20 MΩ (500 VDC between lead terminal and the case) 500 VAC, 50/60 Hz for 1 minute. (Leakage current typ. Max. 1mA) between lead terminals and case. 8.5 g 8.0 g 150 msec Note: 1. Mass flow converted into volumetric flow rate, SLM (standard liters per minute) at 0°C, 1 atmosphere. 2. Dry gas. (must not contain large particles, dust, oil, mist) MEMS Mass Flow Sensor D6F-P 7 ■ Absolute Maximum Rating Symbol Rating Unit Power supply voltage Item Vcc 10 VDC Output voltage Vout 4.0 VDC ■ Output Voltage Characteristics D6F-P0001A@ D6F-P0010A@ 3.0 Output Voltage (V) Output Voltage (V) 3.0 2.5 2.0 1.5 1.0 0.5 2.5 2.0 1.5 1.0 0.5 0.0 0.0 0 0.02 0.04 0.06 0.08 0.10 0 0.25 Flow Rate (L/min) 0.5 0.75 1 Flow Rate (L/min) D6F-P0001A@ Flow Rate (LPM) Output Voltage (VDC) 0.00 0.02 0.04 0.06 0.08 0.10 0.50 ± 0.10 0.90 ± 0.10 1.30 ± 0.10 1.70 ± 0.10 2.10 ± 0.10 2.50 ± 0.10 D6F-P0010A@ Flow Rate (LPM) Output Voltage (VDC) 0.00 0.25 0.50 0.75 1.00 0.50 ± 0.10 1.60 ± 0.10 2.10 ± 0.10 2.31 ± 0.10 2.50 ± 0.10 Note: 1. Mass flow converted into volumetric flow rate, SLM (standard liters per minute) at 0°C, 1 atmosphere. 2. 0 to 0.5 VDC output indicates a negative flow direction. 3. Measurement condition: Power supply voltage 5 ± 0.1VDC, ambient temperature 25 ± 5 °C and ambient humidity 25 to 75% RH. ■ Repeatability. (Typical test results) (5 Samples, D6F-P0010A@, repeated 10 times each) 1.0 0.8 Repeatability (%F.S.) 0.6 0.4 0.2 0.0 -0.2 -0.4 -0.6 -0.8 -1.0 0.0 0.3 0.5 Flow Rate(lpm) 8 MEMS Mass Flow Sensor D6F-P 0.8 1.0 Dimensions Note: All units are in millimeters unless otherwise indicated. PCB terminals with Flange Mount D6F-P0001A1 / D6F-P0010A1 23.3 Label: Gives model and lot numbers. 11.7 2.6 dia. Two, 4.9 dia. 10 MADE IN JAPAN D6F 27.2 7.3 Two, 1.1 dia. 7.6±0.2 14 Two 3-dia. through holes XG8V-0344 Connector Made by OMRON 7.2 GND Label 16.2 6 2.54 1.7 6 1.2 9.8 A 17.2 13.5 Two, R1.4 Vcc 5.08 Detailed View of A 2.8 dia. Three lands, Dia.: 1.3 4.76 Three through holes Dia.: 0.8 2.54 Vout 1.5 13.2 13.5 5.08 Recommended Dimensions for Connector Mounting Holes 7.2 4.76 Connector with Flange Mount D6F-P0010A2 7.3 11.7 23.3 10 MADE IN JAPAN A 8.5 7.6±0.2 14 16.2 6 8.5 Label: Gives model and lot numbers. Label D6F 27.2 Two, 4.9 dia. Two, 1.1 dia. 2.6 dia. Note: 1. Use M3 or M2.6 pan screw or tapping screw with an equal diameter for installation. And bind tight with 0.59N·m or less torque. 1.2 1.7 17.2 Two, R: 1.4 13.5 1.5 3.Vcc 2.8 dia. 2. Use an attached connector. Manufactured by JST Mfg Co., Ltd. (Japan) for A2 and AM2 types. • Pressure welding connector Socket: 03SR-3S Wire: AWG#30 • Crimp type connector Contact: SSH-003T-P0.2| Wire: AWG#32 to #28 • Housing: SHR-03V-S 2.Vout 13.2 1.GND Detailed View of A Connector with Manifold Mount D6F-P0010AM2 22 18 6.7±0.1 *1 8 2 0 Two, 4 -0.05 dia. 3. O-rings are not attached. 4mm ID tube recommended for D6F-P0010A1 and D6F-P0010A2 types. B 27.2 1+0.1 0 14±0.05 A D6F 22 MADE IN JAPAN 3.5 dia. 6.4 9.6 2-C0.3 1. GND 2.7±0.1 2. Vout 0.3±0.1 3. Vcc 0.3±0.1 Detailed View of A Antirotain groove Detailed View of B Label Connector Applicable Cable for D6F-P0010A@2 (Optional - sold separately) part number: D6F-CABLE2 Black wire White wire 1. GND 2. Vout 15±3 Red wire (5) 180±10 3. Vcc MEMS Mass Flow Sensor D6F-P 9 Packaging TYPE D6F-P 3 1 No. 1 2 3 Material CCNB Polyethylene CCNB 95 2 Item Sock liner Tray (25pcs) Box (100 pcs) Display seal 240 218 Application Information and Examples ■ Bidirectional Dust Segregation System The D6F-P series has a patented dust segregation design. The flow path incorporates dual centrifugal chambers, in which particulate matter follows in the outer path, away from the MEMS sensor chip regardless of the flow direction. Note, standard products are calibrated for unidirectional flow, as indicated in note 3 of the “Output Characteristics” table, above. Contact Omron for bidirectional calibration options. sensing element Bypass Setup HVAC Application When used in a bypass set-up, as illustrated below, the D6F-P mass flow sensors can measure flow rates far beyond the 1 LPM in-line rating. The pressure differential required to pull airflow through the sensor can be accomplished by installing a flow restrictor between the two ports or through the use of a flow cross in large ducts, as shown in the HVAC application. The D6F-P mass flow sensor is ideal for damper control in variable air volume systems, where low flow rates are difficult to measure with differential pressure sensors. Note: Be sure to read the precautions and information common to all D6F sensors, contained in the Technical User’s Guide, “D6F Technical Information” for correct use. 10 MEMS Mass Flow Sensor D6F-P MEMO MEMS Mass Flow Sensor D6F-P All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527. OMRON ON-LINE OMRON ELECTRONIC COMPONENTS LLC Global - http://www.omron.com USA - http://www.components.omron.com 55 E. Commerce Drive, Suite B Schaumburg, IL 60173 847-882-2288 Cat. No. X305-E-1 10/10 MEMS Mass Flow Sensor Specifications subject to change without notice D6F-P Printed in USA