HPTA1000 High Temperature Pressure Sensor ● 0 to 1MPa pressure range ● high stability ● anti-high-temperature ● RoHS-compatible & Pb-free ● Provide the other gage pressure range sensor DESCRIPTION HPTA1000 is a kind of high temperature MEMS sensor based on SOI semiconductor materiel . Its operating temperature is -30~180°C. With advanced beam--diaphragm structure design and stress equipartition technology adopted, HPTA1000 sensor has the advantages of high temperature resistance, transient high temperature shock immunity, high measuring range and high overload which make it ideal for pressure self-control testing equipments used in aerospace / aviation, energy transportation, oil exploitation, heat process automation in Chemical industry, metallurgical automation, etc. HPT series sensors have been widely used for measuring diesel spray pressure in the self-control testing components of diesel engines in vehicles and vessels. HPT sensors still can operate normally even though the environment temperature exceeds 180 ℃. HPT sensors are produced first by ion implanting the four piezoresistors into silicon. The four resistors are connected in a Wheatstone bridge arrangement, whereby two resistors increase with positive pressure while the other two decrease in resistance. When pressure is applied to the device and two ports of the resistor bridge are supplied with power source, the other two ports will output an electric signal which is directly proportional to pressure. Stress equipartition technology is introduced into the design of die, making the device more robust against high overload. Furthermore, the resistors are isolated with insulating medium which guarantees the high steadiness of sensor device. Part number System Package Package: A: Absolute pressure sensor DIE HPTA 1000 Pressure type Tel: +86-755-82973805 Fax: +86-755-82973550 Pressure range E-mail: [email protected] http://www.hoperf.cn Characteristics Measurement media Non-aggressive fluids and gases Type Output AE2 signal Pressure compensated from Front/ back side Dimensions Chip size (mm2) 2.5×2.5 Total height (mm) 0.9 Glass thickness (mm) 0.5 Hole diameter (mm) 0.7 Maximum ratings Storage temperature Tst (C°) -40--250 Operating temperature Ta (C°) -30--180 Supply voltage (max.) VDD (V) 10 Temperature VDD=5V characteristics Temperature coefficients ofthe bridge resistance ( %/C°) 0.25---0.35 Temperature coefficientsof the Sensitivity ( %/C°) - 0.25---- 0.15 Temperature coefficients of the Zero ( %/C°) - 0.10---+0.10 Characteristics Ta =25°C VDD=5V Bridge resistance (min/max)Rs 4.0—6.0 (KΩ) Offset voltage (min/max)V0 -25---+25 (MV) Nonlinearity (typ)NL (％FS) ±0.2 Output span (typ)VSP (MV) 25------40 Tel: +86-755-82973805 Fax: +86-755-82973550 E-mail: [email protected] http://www.hoperf.cn WAFER ELECTRICAL CONNECTIONS Pad NO 1 Connection 2 Vc 3 Vout＋ 4 Vd 5 Vd Vout－ Chip dimensions：2.5×2.5×0.9mm This document may contain preliminary information and is subject to change by Hope Microelectronics without notice. Hope Microelectronics assumes no responsibility or liability for any use of the information contained herein. Nothing in this document shall operate as an express HOPE MICROELECTRONICS CO.,LTD or implied license or indemnity under the intellectual property rights of 4/F, Block B3, East Industrial Area, Hope Microelectronics or third parties. The products described in this Huaqiaocheng, Shenzhen, Guangdong, document are not intended for use in implantation or other direct life China support applications where malfunction may result in the direct physical Tel: harm or injury to persons. NO WARRANTIES OF ANY KIND, 86-755-82973805 Fax: Email: INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTIES OF 86-755-82973550 [email protected] MECHANTABILITY OR FITNESS FOR A ARTICULAR PURPOSE, ARE Website: http://www.hoperf.com OFFERED IN THIS DOCUMENT. http://www.hoperf.cn http://hoperf.en.alibaba.com Tel: +86-755-82973805 ©2006, HOPE MICROELECTRONICS CO.,LTD. All rights reserved. Fax: +86-755-82973550 E-mail: [email protected] http://www.hoperf.cn