SM5108 SILICON MICROSTRUCTURES INCORPORATED • • Ultra-Small, Low-Cost, OEM Pressure Die For Extremely High-Volume Applications Ultra-Small, Low Cost OEM Pressure Die DESCRIPTION The SM5108 is a extremely small (0.65 mm x 0.65 mm) silicon micromachined piezoresistive pressure sensing chip that has been optimized to provide the highest possible accuracy for a die of this size. This performance is achieved through careful resistor placement and mechanical configuration. The small die results in a significant cost saving when compared to larger sensor die. Over 24,000 die come on a 150 mm wafer. This sensor is intended for high volume applications where cost is a critical factor, such as consumer tire pressure gauges or disposable pressure gauges. The SM5108 is available as an absolute pressure sensor in full-scale ranges of 15 PSI, 30 PSI, 60 PSI, and 150 PSI. It is designed to be mounted on ceramic or PC board substrates by highvolume OEM manufacturers. Die are probed, diced, and visually inspected and shipped on tape in rings. Custom pressure ranges are available in high-volume applications. FEATURES • • • • • Available in 15 PSI, 30 PSI, 60 PSI, and 150 PSI ranges Extremely Low Cost Small size (0.65 mm square) Constant Current or Constant Voltage Drive High Millivolt Output Minimum order quantities apply to this product. APPLICATIONS • • • • • • Automotive Tire Pressure Monitoring Engine Control Barometric Sensing Pneumatic Gages Hand-held Meters Home Appliances Rev 1.3 6_05 2003 - 2004 Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ [email protected] ♦ www.si-micro.com SM5108 CHARACTERISTICS FOR SM5108 - SPECIFICATIONS All parameters are measured at 5.000V supply at room temperature, unless otherwise specified. Excitation Voltage Excitation Current Span (FS Range) 15 PSI 30 PSI 60 PSI 150 PSI Offset TC Span TC Offset TC Resistance Linearity Bridge Impedance Input Capacitance Proof Pressure Burst Pressure Operating Temperature Storage Temperature Min. Typ. Max. Units Notes 0 0 5.0 1.5 15 2.5 V mA 1 1 2 65 65 65 100 -35 -24 -7 +24 -0.2 4 100 100 100 150 135 135 135 200 35 -15.5 +7 +33 +0.2 6 mV mV mV mV mV %FS/100°C %FS/100°C %/100°C %FS kΩ pF Rated FS Rated FS °C °C -19 -1 +27.5 -0.07 5 <2 3X 5X -40 -55 +125 +150 3 3 3 4 Notes: 1. Bridge may be driven with positive or negative excitation; positive output for positive pressure applied to circuit side of die when bridge is driven with positive voltage. 2. Measured at 5V constant voltage excitation. + Sig +Vexc 3. Measured from 0 to 70 C 4. Defined as best straight line. ORDERING INFORMATION: Pressure Ranges PSI 5108 15 015 30 030 60 060 150 150 A: Absolute (only) - Vexc - Vexc - Sig Top-View of SM5108 (0.65 mm square as sawn) Total thickness = 0.65 mm Notice: Covered under USA Mask-Copyright Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this publication has been checked, no responsibility, however, is assumed for inaccuracies. Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications. Rev 1.3 6_05 2003 - 2004 Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ [email protected] ♦ www.si-micro.com