COMMERCIAL LASERS High-Power Q-Switched Diode-Pumped UV Laser Q Series Key Features • Highest commercially available pulse energy and peak power • Tighter process control due to superior energy stability enabled by unique intracavity harmonic generation • Capable of processing widest range of materials due to wide range of pulse energies and repetition rates • High reliability due to low fluence in harmonic crystals and no cavity optic coatings exposed to UV • 355 or 532 nm outputs available Applications • Solar cell processing • Wafer scribing • Full-cut thin wafer dicing • Low-k dielectric grooving • Micro via drilling • Micromachining of silicon and metals NORTH AMERICA : 800 498-JDSU (5378) The JDSU Q Series lasers lead the market for high-power Q-switched diode-pumped UV lasers used for a wide variety of micromachining and solar cell processing applications. Whether for high pulse-energy processing of refractory materials such as silicon; high repetition rate processing of packaging materials such as Kapton; or patterning thin-film solar cells, the Q Series lasers deliver unsurpassed performance combined with industry-leading uptime. Due to the self-stabilizing characteristics of intracavity UV harmonic generation, all Q Series lasers exhibit inherently high pulse-to-pulse energy and long-term output power stability. In addition, the excellent thermal stability of the unique Nd:YAG-based direct-coupled pump (DCP) architecture maintains exceptionally stable beam position and profile, which is important for processes requiring accurate feature placement. These advantages enable Q series lasers to achieve the tightest possible process tolerances for micromachining and other materials processing applications. WORLDWIDE : +800 5378-JDSU WEBSITE : www.jdsu.com HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER 2 Q Series 355 nm Laser Head (Specifications in inches [mm] unless otherwise noted. Dimensions include mounting pads.) LOCATION POINT, 3X .25 [6.4] 8.75 [222.3] 10.00 [254.0] 9.84 [250.0] 5.00 [127.0] 4.92 [125.0] 4.92 [125.0] 5.00 [127.0] 3X, .266 WIDE X .346 LONG SLOT [3X, 6.8 WIDE X 8.8 LONG SLOT] .90 [22.9] COOLING WATER CONNECTION, 2X 5.50 [139.7] 2.75 [69.8] 3.39 [86.1] A .040 [1.0] 2.19 [55.6] 1.987 [50.47] 1.06 [26.9] 3X MOUNTING PADS 4.82 [122.4] 32.00 [812.8] Laser Center 1.050 [26.65] .94 [23.9] UMBILICAL CABLE PORT .100 [2.54] Detail A Scale 1:2 .669 [17.00] Power Supply and Chiller (Specifications in inches [mm] unless otherwise noted. ) 17.3 [440] WATER FILL PORT 16.80 [426.7] VOLTAGE SELECTION ACCESS 14.34 [364.2] 21.0 [533] WATER HOSE FITTINGS 10.4 [264] 13.00 [329] ELECTRICAL INTERFACE PANEL 4X, .218 X .375 3.48 [88.4] 3.00 [76.2] .24 [6.1] .35 [8.9] 18.30 [464.8] HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER 3 Q30X 355nm Models Typical Performance Typical Performance 300 Q301 Q304 250 10 200 Q302 150 Q303 5 100 Pulse Widths (ns) 355-nm Average Power (W) 15 50 0 0 0 20 40 60 80 100 120 140 Pulse Repetition Rate (kHz) Q33X Lower Coast 355nm Models Typical Performance Typical Performance 200 Q331 Q332 Q333 8 160 6 120 4 80 2 40 0 0 0 20 40 60 80 100 120 140 Pulse Repetition Rate (kHz) Pulse Widths (ns) 355-nm Average Power (W) 10 HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER 4 Q Series Laser Head Specifications Parameter Q301-HD Q302-HD Q303-HD Q304-HD Wavelength Spatial mode M-squared1 Waist location1 (internal, from beam exit) Waist diameter1, 1/e2 Beam divergence1, full angle Beam pointing drift, full angle Pointing drift, over 8 hours, full angle2 Beam position accuracy, unit to unit Beam pointing accuracy, unit to unit Repetition rate Internally triggered Externally triggered Constant pulse energy range Average output power3 At 10, 20, and 30 kHz At 30, 50, and 70 kHz At 70, 100, and 130 kHz At 40, 60, and 90 kHz Pulse width4 At 10, 20, and 30 kHz At 30, 50, and 70 kHz At 70, 100, and 130 kHz At 40, 60, and 90 kHz Pulse energy fluctuations5 At 10, 20, and 30 kHz At 30, 50, and 70 kHz At 70, 100, and 130 kHz At 40, 60, and 90 kHz Power drift over 8 hours2, 6 Beam roundness Polarization Warm-up time From cold start From standby Operating ambient temperature Relative humidity, non-condensing Weight 355 nm TEM00 <1.2 42±0.4 cm 0.26 mm nominal 1.8±0.35 mrad <10 µrad/°C <50 µrad <2.5 mm from nominal <1° from nominal 355 nm TEM00 <1.2 42±0.4 cm 0.26 mm nominal 1.8±0.35 mrad <10 µrad/°C <50 µrad <2.5 mm from nominal <1° from nominal 355 nm TEM00 <1.2 42±0.4 cm 0.26 mm nominal 1.8±0.35 mrad <10 µrad/°C <50 µrad <2.5 mm from nominal <1° from nominal 355 nm TEM00 <1.2 42±0.4 cm 0.25 mm nominal 2.0±0.35 mrad <10 µrad/°C <50 µrad <2.5 mm from nominal <1° from nominal 5 to 250 kHz 0 to 250 kHz <10 kHz 5 to 250 kHz 0 to 250 kHz <30 kHz 5 to 250 kHz 0 to 250 kHz <50 kHz 5 to 250 kHz 0 to 250 kHz <40 kHz ≥10.0, 8.0 and 6.0 W - ≥8.0, 6.8, and 5.0 W - ≥6.5, 4.5, and 2.9 W ≥11.0, 9.5, 6.3 W 34±10,52±15,69±15 ns - 78±20,107±20,135±30 ns - 135±35,180±45,225±60 ns 95±30,130±35,180±50 ns <1.0%, 10 – 30 kHz <±2% >85% circular >100:1, horizontal <1.5%, 30 – 50 kHz <±2% >85% circular >100:1, horizontal <1.5%, <2.0%, <2.5% <±2% >85% circular >100:1, horizontal <1.5%, 40 – 90 kHz <±2% >85% circular >100:1, horizontal <20 minutes <10 minutes 15 to 35°C 10 to 80% 14.5 kg <20 minutes <10 minutes 15 to 35°C 10 to 80% 14.5 kg <20 minutes <10 minutes 15 to 35°C 10 to 80% 14.5 kg <20 minutes <10 minutes 15 to 35°C 10 to 80% 14.5 kg 1. Specifications hold over different repetition rate ranges, depending on the laser model, as follows: Q301 from 10 to 30 kHz, for Q302 from 30 to 70 kHz, for Q303 from 70 to 130 kHz, and Q304 from 40 to 90 kHz. 2. Ambient temperature constant ±2°C. 3. Averaged for 1 hour after >80 minutes of continuous operation. 4. Pulse duration measured according to method detailed in JDSU application note titled “Optical Pulse Width Measurement Techniques for Q-Series Lasers.” 5. Pulse Energy Fluctuations = σ / μ x 100%, σ = standard deviation, μ = average pulse energy. 6. Measured after more than 80 minutes of continuous operation. HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER 5 Q Series Laser Head Specifications Continued Parameter Q331-HD Q332-HD Q333-HD Wavelength Spatial mode M-squared1 Waist location1 (internal, from beam exit) Waist diameter1, 1/e2 Beam divergence1, full angle Beam pointing drift, full angle Pointing drift, over 8 hours, full angle2 Beam position accuracy, unit to unit Beam pointing accuracy, unit to unit Repetition rate Internally triggered Externally triggered Constant pulse energy range Average output power3 At 10, 20, and 30 kHz At 30, 50, and 70 kHz At 70, 100, and 130 kHz Pulse width4 At 10, 20, and 30 kHz At 30, 50, and 70 kHz At 70, 100, and 130 kHz Pulse energy fluctuations5 At 10, 20, and 30 kHz At 30, 50, and 70 kHz At 70, 100, and 130 kHz Power drift over 8 hours2, 6 Beam roundness Polarization Warm-up time From cold start From standby Operating ambient temperature Relative humidity, non-condensing Weight 355 nm TEM00 <1.2 42±0.4 cm 0.26 mm nominal 1.8±0.35 mrad <10 µrad/°C <50 µrad <2.5 mm from nominal <1° from nominal 355 nm TEM00 <1.2 42±0.4 cm 0.26 mm nominal 1.8±0.35 mrad <10 µrad/°C <50 µrad <2.5 mm from nominal <1° from nominal 355 nm TEM00 <1.2 42±0.4 cm 0.26 mm nominal 1.8±0.35 mrad <10 µrad/°C <50 µrad <2.5 mm from nominal <1° from nominal 5 to 250 kHz 0 to 250 kHz <10 kHz 5 to 250 kHz 0 to 250 kHz <30 kHz 5 to 250 kHz 0 to 250 kHz <50 kHz ≥5.0, 4.0 and 3.0 W - ≥4.0, 3.4, and 2.5 W - ≥3.6, 2.5, and 1.6 W 34±10, 52±15, 69±15 ns - 78±20, 107±20, 135±30 ns - 132±30, 168±40, 204±55 ns <2.0%, 10 – 30 kHz <±2% >85% circular >100:1, horizontal <3%, 30 – 50 kHz <±2% >85% circular >100:1, horizontal <3%, <2.0%, <2.5% <±2% >85% circular >100:1, horizontal <20 minutes <10 minutes 15 to 35°C 10 to 80% 14.5 kg <20 minutes <10 minutes 15 to 35°C 10 to 80% 14.5 kg <20 minutes <10 minutes 15 to 35°C 10 to 80% 14.5 kg 1. Specification holds over different repetition rate ranges, depending on the laser model, as follows: Q331 from 10 to 30 kHz, for Q332 from 30 to 70 kHz, for Q333 from 70 to 130 kHz. 2. Ambient temperature constant ±2°C. 3. Averaged for 1 hour after >80 minutes of continuous operation. 4. Pulse duration measured according to method detailed in JDSU application note titled “Optical Pulse Width Measurement Techniques for Q-Series Lasers.” 5. Pulse Energy Fluctuations = σ / μ x 100%, σ = standard deviation, μ = average pulse energy. 6. Measured after more than 80 minutes of continuous operation. HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER 6 Q-PS-1000R Power Supply Parameter Specification Front panel/display Power on/off key Shutter open/closed switch (Status LED) Status Display (4 line x 20 character vacuum fluorescent) RS232 Serial Port Connector (9-pin D-sub) RS232 Serial Port Connector (Identical to front panel) Interlock connector (2-pin, 0.1” spacing) Q switch RF connector (SMA connector) Umbilical connector (multi-pin D-shaped) Chiller communication port (9-pin D-sub) Emission indicator connector (2-pin, 0.1” spacing) External control port (10-pin 3M-style) Slot for optional standard or custom interface board (standard with 3 BNC connectors) Ground pin Fuse holder Power Switch Power cord connector 20.5 lbs (9.3 kg) Standard: 10 ft. (3.0 m); optional: 16.4 ft. (5.0 m) 100 to 240 V AC, 50 – 60 Hz <550 W (400 W typical) Rear panel Weight Umbilical cable length Frequency Power Input and Ambient Voltage, frequency Power Operating ambient temperature Relative humidity, non-condensing Storage temperature 100 to 240 V AC, 50 – 60 Hz <550 W (400 W typical) 15 to 35°C 10 – 80% -20 to 55°C QA-CH Chiller Parameter Specification Cooling capacity Refrigerant Coolant Reservoir volume Coolant flow rate Weight, reservoir empty Hose length Control cable length Input and Ambient Voltage, frequency1 >300 W R134a Distilled or tap water <1 gal (3.8 l) <0.4 gpm at 6 psi (1.5 lpm at 0.4 atm) 121 lbs (55 kg) Standard: 9.5 ft (2.9 m); optional: 16 ft (4.9 m) 10 ft (3.0 m) Power Operating ambient temperature Relative humidity, non-condensing Storage temperature Orientation 1. For 200/230 VAC version, the model number is QA-CH-E. 90 to 110 and 180 to 220 V AC, 50 Hz 105 to 125 and 210 to 250 V AC, 60 Hz <1000 W (700 W typical) 15 to 35°C 10 to 80% -20 to 55°C Upright position only HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER 7 Ordering Information For more information on this or other products and their availability, please contact your local JDSU account manager or JDSU directly at 1-800-498-JDSU (5378) in North America and +800-5378-JDSU worldwide, or via e-mail at [email protected]. Sample: Q331-HD (355 nm, 10 to 30 kHz laser head), Q-PS-1000R (power supply), Q-PS-A30R (3 meter flex umb cable set), QA-CH (standard voltage configuration chiller), and QA-CH-A11 (3 m hose, straight/straight couplings) Laser Head Product Code Q331-HD Q332-HD Q333-HD Q301-HD Q302-HD Q303-HD Q304-HD Description 355 nm, 5 W class, 10 to 30 kHz 355 nm, 5 W class, 30 to 70 kHz 355 nm, 5 W class, 70 to 130 kHz 355 nm, 10 W class, 10 to 30 kHz 355 nm, 10 W class, 30 to 70 kHz 355 nm, 10 W class, 70 to 130 kHz 355 nm, 11 W class, 40 to 90 kHz Power Supply Product Code Q-PS-1000R Description Standard power supply Umbilical Cable Product Code Q-PS-A30R Q-PS-A50R Q-PS-A70R Q-PS-A100R Description 3 meter flex umbilical cable set 5 meter flex umbilical cable set 7 meter flex umbilical cable set 10 meter molded umb cable set Chiller Product Code QA-CH QA-CH-E Description Chiller with standard voltage configuration Chiller with European voltage configuration Hose Kit Product Code QA-CH-A11 QA-CH-A12 QA-CH-A21 QA-CH-A22 QA-CH-A31 QA-CH-A32 Description Pair of 3 m hoses, straight/straight couplings Pair of 5 m hoses, straight/straight couplings Pair of 3 m hoses, right-angle/straight couplings Pair of 5 m hoses, right-angle/straight couplings Pair of 3 m hoses, right-angle/right-angle couplings Pair of 5 m hoses, right-angle/right-angle couplings HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER Compliance with Regulatory Requirements These laser sources are generic (non-OEM) versions of JDSU diode-pumped, Q-switched laser systems. The lasers are Class IV lasers as defined by the Federal Register 21 CFR 1040.10 Laser Safety Standard. The Standard requires that certain performance features and laser safety labels be provided on the product. The American National Standards Institute publishes a laser safety standard for users entitled American National Standard for the Safe Use of Lasers (ANSI Z136.1). JDSU recommends that laser users obtain and follow the procedures described in this ANSI Standard. Warranty JDSU diode-pumped Q Series laser systems are warranted to be free of defects in materials and workmanship for thirteen months from the date of shipment or for 5,000 operating hours, whichever occurs first. Patent Information The products described in this data sheet are based on JDSU Intellectual Property which includes more than 1,800 United States and foreign registered patents. These patents are relevant to an extensive set of products and/or technology applications including JDSU’s laser products and associated technologies. For further information contact the JDSU Legal Department. NORTH AMERICA : 800 498-JDSU (5378) WORLDWIDE : +800 5378-JDSU Product specifications and descriptions in this document subject to change without notice. © 2009 JDS Uniphase Corporation 10143146 006 WEBSITE : www.jdsu.com 0309 QSERIES.DS.CL.AE March 2009