FMA Series Mass flow sensors for gases FEATURES · Ranges 0...1000 sccm1 and 0...6 slpm2 · Actual mass flow sensing · 1...5 V output · Manifold mount/O-ring sealed · Sensortechnics PRO services MEDIA COMPATIBILITY To be used with dry gases only The FMA series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS ELECTRICAL CONNECTION Maximum ratings Supply voltage3 8 to 15 V typ. 10 ±0.01 V Power consumption FMAL001DU FMAL006DU 60 mW 75 mW Output load NPN (Sinking) PNP (Sourcing) 10 mA 20 mA P1 P2 1 2 3 Temperature limits Operating Storage -25 to 85°C -40 to 90°C Mechanical shock 100 g (5 drops, 6 axes) Pin 1: Vout Pin 2: +V s Pin 3: GND Note: 1 sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm 2 slpm denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH. 3 Output voltage is ratiometric to supply voltage E / 11724 / A 1/5 www.sensortechnics.com FMA Series Mass flow sensors for gases FLOW SENSOR CHARACTERISTICS4 (VS = 10 ±0.01 V, TA = 25°C) Part no. Flow range (full scale) Max. flow ch an g e5 Output voltage @ trim point FMAL001DU 1000 sccm1 5.0 l/sec 5 ±0.15 V @ 1000 sccm1 FMAL006DU 6 SLPM2 5.0 l/sec 5 ±0.15 V @ 6 SLPM2 PERFORMANCE CHARACTERISTICS (VS = 10 ±0.01 V, TA = 25°C) Characteristics Zero offset Min. Typ. Max. Unit 0.95 1.0 1.05 V Repeatability and hysteresis FMAL001DU ±0.5 (combined) FMAL006DU ±1.0 Ratiometricity error3 Temperature effects6 % reading ±0.3 Offset -25 to 85 °C Span -25 to 25 °C ±0.025 V FMAL001DU -5.0 FMAL006DU -6.0 FMAL001DU 6.0 FMAL006DU 6.0 % reading 25 to 85 °C Response time Common mode pressure 1.0 3.0 FMAL001DU 150 FMAL006DU 25 ms p si Notes: 1 sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm 2 SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH. 3 Output voltage is ratiometric to supply voltage 4 A 5 micron filter is recommended for all devices. 5 Maximum allowable rate of flow change to prevent damage. 6 Shift is relative to 25 °C. E / 11724 / A 2/5 www.sensortechnics.com FMA Series Mass flow sensors for gases FLOW SPECIFICATIONS (VS = 10 ±0.01 V, TA = 25°C) FMAL001DU FMAL006DU Press. (mbar) Flow (sccm)7 Nom. (VDC) Tol. (± VDC) Press. (mbar) Flow (slpm)7 2.23 1000 5.00 0.15 20.0 6 5.00 0.15 1.87 900 4.97 0.16 14.7 5 4.89 0.20 1.52 800 4.89 0.17 9.07 4 4.70 0.25 1.16 700 4.78 0.18 6.40 3 4.40 0.35 0.94 600 4.63 0.19 3.35 2 3.80 0.30 0.71 500 4.43 0.20 1.17 1 3.10 0.30 0.50 400 4.15 0.21 0.00 0 1.00 0.05 0.33 300 3.76 0.19 0.19 200 3.23 0.17 0.08 100 2.49 0.14 0.00 0 1.00 0.05 Nom. (VDC) Tol. (± VDC) Note: 7 Devices are calibrated in mass flow. Tolerance values apply to calibration type only. OUTPUT VS. FLOW CURVES FMAL001DU FMAL006DU E / 11724 / A 3/5 www.sensortechnics.com FMA Series Mass flow sensors for gases OUTLINE DRAWING 30.5 (1.20) 27.7 (1.09) 14.0 (0.55) 32.2 (1.19) 3 2 1 7.62 (0.30) 2.5 (0.10) 0.64 (0.025) 34.0 (1.34) 17.3 (0.68) 3.0 (0.12) 4.8 (0.19) 10.9 8.4 (0.43) (0.33) Ø 6.2 (Ø 0.24) Ø 3.0 (Ø 0.12) Ø 3.51 (Ø 0.138) 2.54 (0.10) 7.9 (0.31) 12.7 (0.50) P2 P1 Ø 2.0 (Ø 0.08) 1 2 3 Pin 1: Vout Pin 2: +V s Pin 3: GND third angle projection mass: approx. 11 g dimensions in mm (inches) Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output. E / 11724 / A 4/5 www.sensortechnics.com FMA Series Mass flow sensors for gases GAS CORRECTION FACTORS8 Gas type Correction factor (approx.) 0.59 0.79,10 0.95 1.0 1.0 1.0 1.0 1.0 1.1 1.1 1.35 1.35 1.35 Helium (He) Hydrogen (H2) Argon (Ar) Nitrogen (N2) Oxygen (O2) Ai r Nitric oxide (NO) Carbon monoxide (CO) Methane (CH4) Ammonia (NH3) Nitrous oxide (N2O) Nitrogen dioxide (NO2) Carbon dioxide (CO2) Notes: 8 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 9 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 10 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. ORDERING INFORMATION - AVAILABLE LISTINGS Note: Preferred listings are highlighted in grey Flow range Dry gas Hydrogen gas10 1 0 0 0 sccm FMAL001DU FMAL001HU 6 S LP M FMAL006DU --- Sensortechnics PRO services: · Extended guarantee period of 2 years · Improved performance characteristics · Custom product modifications and adaptations even for small quantities · Advanced logistics models for supply inventory and short delivery times · Technical support through application engineers on the phone or at your site · Fastest possible technical response for design and QA engineers ... plus other services on request Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. E / 11724 / A 5/5 www.sensortechnics.com