HAMAMATSU L10366-12

HIGH BRIGHTNESS
NEW VUV LIGHT SOURCE UNIT
L10366 SERIES
OVERVIEW
The L10366 series are newly developed VUV (vacuum UV) light source units.
This product uses a "high-brightness deuterium lamp
with MgF2 window" that produces a high radiant intensity 4 times higher than conventional model.
This product is now a lot easier to handle due to use
of an air-cooled structure and vacuum flange mount.
Left: Power supply, Right: Light source
FEATURES
APPLICATIONS
●High Radiant Intensity: 4 Times
(compared to conventional model)
●High VUV Intensity Down to 115 nm
●Air Cooling (needs no cooling water)
●External Control
(lamp ON/OFF, lamp ON status signal)
●No Optical Axis Alignment Required
ARC DISTRIBUTION (at 230 nm)
L10366 series
(Aperture size: 0.5 mm)
TLSOF0184
●Spectrophotometer, Fluorophotometer
●Electrostatic Removal of Semiconductor
Wafer, LCD Panel, etc.
●Photoionization Detector (PID)
●UV Resistance Testing of Various Material
●Optical Chemical Vapor Deposition
(optical CVD)
●Excitation Light Source
Conventional type
High Radiant Intensity
x4
(compared to conventional model)
(Aperture size: 1 mm)
PACKAGE CONTENTS
Type No.
L10366
L10366-10
L10366-11
L10366-12
Vacuum Flange 1
—
(E3444)
(E3444-01)
(E3444-02)
Light Source
Power Supply Light Source to Power Supply Cable
AC Cable
1 The vacuum flange E3444 series can be sold separately from the unit L10366 series.
SPECIFICATIONS
●GENERAL RATINGS
Parameter
Spectral Distribution
Window Material
Aperture Size (Arc Point)
Cooling Method
Operating Temperature Range
Operating Humidity Range
Description/Value
115 to 400
MgF2
0.5
Air-cooled
+10 to +35
Below 80 % (No Condensation)
Unit
nm
—
mm
—
°C
—
●RECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C)
Parameter
Warm-up Time
Fluctuation (p-p)
Drift (Max.)
at 230 nm
at 160 nm
Output Stability
Light Source Life 2
Input Voltage (AC)
Power Consumption
Description/Value
25 ± 5
0.05
±0.3
2000 (Guaranteed)
500 (Expected)
100 V to 240 V (100 V / 200 V Auto Switching), Single Phase 50 Hz to 60 Hz
140
Unit
s
%
%/h
h
—
VA
2 The life end is defined as the time when the radiant output falls to 50 % of its initial value. Operating life depends on environmental conditions
(vacuum atmosphere).
●VACUUM FLANGE
Parameter
Seeling Method
Flange
Mount Flange
Seeling Force Retention
E3444
Regular
—
1.33 × 10-4
SPECTRAL DISTRIBUTION
E3444-01
E3444-02
O-Ring
JIS VF50
ICF114
JIS VG50
ICF114
Pa L/s or Less (1 × 10-6 Torr L/s)
REPLACE LAMP SOURCE
(VUV region; for reference only)
RELATIVE OUTPUT (%)
100
Type No.
L10388
L10388-10
L10388-11
L10388-12
TLSOB0079EB
80
60
40
20
0
100
120
140
160
180
200
WAVELENGTH (nm)
220
240
400
Light Source
Vacuum Flange
—
(E3444)
(E3444-01)
(E3444-02)
DIMENSIONAL OUTLINES (Unit: mm)
LIGHT SOURCE
(Weight: Approx. 1 kg)
122
77
COOLING FAN
TOP VIEW
VACUUM
FLANGE
MOUNT *
ARC POINT
0.3 A
81.5 ± 0.5
ARC POINT
30
62
115
48 h7
A
77
94
METAL CONNECTOR
(CONNECTION TO
POWER SUPPLY)
FRONT VIEW
METAL CONNECTOR
(CONNECTION TO
POWER SUPPLY)
SIDE VIEW
* Sealing Force Retention 1.33 × 10-4 Pa L/S or Less (1 × 10-6 Torr L/S)
POWER SUPPLY
TLSOA0094EB
(Weight: Approx. 2.8 kg)
EXTERNAL
CONTROL TERMINALS
(D-SUB CONNECTOR)
LAMP STATUS SIGNAL +
LAMP STATUS SIGNAL –
+5 V dc(+)
+5 V dc RETURN(–)
TOP VIEW
CONT
145
POWER
LINE INPUT
OUTPUT
110
310
FRONT VIEW
SIDE VIEW
METAL CONNECTOR
(CONNECTION TO LIGHT SOURCE)
REAR VIEW
CABLE LENGTH: 2000 ± 50
TLSOA0095EB
DIMENSIONAL OUTLINES (Unit: mm)
VACUUM FLANGE
E3444
40
4- 8.4
10
O-RING
70.0 ± 0.3
P.C.D. 106
40
120
7
20
TLSOA0097EA
E3444-01
40
4- 10
10
O-RING
70.0 ± 0.3
P.C.D. 100
40
120
7
20
TLSOA0098EA
E3444-02
47.5
17.5
8- 8.4
O-RING
70 ± 0.3
114
P.C.D. 92.2
40
7
20
TLSOA0053EB
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are
subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2006 Hamamatsu Photonics K.K.
WEB SITE www.hamamatsu.com
HAMAMATSU PHOTONICS K.K., Electron Tube Division
314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P. O. Box 6910, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected]
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected]
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected]
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road Welwyn Garden City Hertfordshire AL7 1BW, United Kingdom, Telephone: 44-(0)1707-294888, Fax: 44(0)1707-325777 E-mail: [email protected]
North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171-41 SOLNA, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected]
TLSO1060E02
Italy: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741 E-mail: [email protected]
NOV. 2006 IP