MS7801 PRESSURE SENSOR DIE (0-1 BAR) • 0 to 100 kPa range (1 bar or 14.5PSI) • Absolute/differential pressure sensors • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7801 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS7801A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7801D) has a hole in the Pyrex glass at the backside of the sensor. FEATURES • • • • • • Uncompensated pressure sensor die Output Span 150mV @ 5V Temperature Range -40°…+125°C Linearity 0.05% (typical) Small Die Size 1.98 x 1.84mm Low Cost, High reliability APPLICATION • • • For absolute or differential pressure sensor systems Barometers, Altimeters Variometers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out+ Out- Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground GND1 GND2 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE). DA7801_005.doc 00007801345 ECN 743 May 05th, 2005 1/4 PAD OUT Vs+ Epi OutImportant remarks: MS7801 As the sensing elements are diffused resistances, the voltage applied on the ground pads (GND1 and GND2) has to be lower than the voltage applied on supply voltage pad (Vs+). The epitaxial layer is connected to the Vs+ pin on the die Out+ GND1 GND2 LAYOUT MS7801A DA7801_005.doc 00007801345 ECN 743 MS7801D May 05th, 2005 2/4 FULL SCALE PRESSURE kPa bar mbar PSI atm mm Hg m H2O Inches H2O 100 1 1000 14.5 0.987 750 10.197 401 ABSOLUTE MAXIMUM RATINGS Parameter Supply voltage Storage temperature Pressure overload Symbol VS+ TS Conditions Min Max Unit -40 20 +150 5 V C Bar o Ta = 25 C o ELECTRICAL CHARACTERISTICS (Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C ) Parameter Operating Pressure Range Min Typ Max Unit 0 1 Bar Operating Temperature Range -40 125 °C Bridge Resistance 3.0 3.4 3.8 kΩ Full-scale span (FS) 120 150 180 Zero Pressure Offset -40 0 40 ± 0.05 ± 0.2 + 2800 - 1900 + 3300 - 2300 + 80 Pressure Hysteresis ± 0.05 Repeatability ± 0.05 Linearity Temperature Coefficient of Resistance Span Offset + 2400 - 1500 - 80 Temperature Hysteresis Notes mV mV % FS 1 ppm/°C ppm/°C µV/°C 2 ± 0.15 % FS 3 ± 0.15 % FS 4 0.3 % FS 5 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 1 bar). 2) Slope of the endpoint straight line from 25°C to 60°C. 3) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. 4) Same as 3) after 10 pressure cycles 5) Maximum difference in offset after one thermal cycle from -40°C to +125°C. DA7801_005.doc 00007801345 ECN 743 May 05th, 2005 3/4 PICKING TOOLS The MS7801 sensors have a sensitive membrane (0.9 x 0.9 mm) the sensor dice outer diameter is: 1.98 x 1.84 mm. The pick and place tool has to be of a soft material as rubber (Hardness 78-97 Shore A). Its external size must fit the sensor and the vacuum cavity must be as large as the membrane itself. Successful test where done with some tools of SPT , see SPT drawing and references bellow). SPT references External dimension Internal dimensions RTR-A1-060x060 TL & TW: 0.06 inch /1.52 mm ∅H: 0.035 inch / 0.89 mm CTR-A1-080 ∅F: 0.08 inch / 2.03 mm ∅H: 0.035 inch / 0.89 mm ORDERING INFORMATION Product Code Type Product Art.-Nr. MS7801-A Absolute 1 bar Pressure Sensors sawn on b/f 780125021 MS7801-A_0.2 Absolute 1 bar Pressure Sensors 0.2 mm Pyrex sawn on b/f 780125022 1 bar Pressure Sensors sawn on b/f 780125121 MS7801-D Differential The MS7801 dice are supplied sawn on blue foil, mounted on plastic rings FACTORY CONTACTS Intersema Sensoric SA Ch. Chapons-des-Prés 11 CH-2022 BEVAIX SWITZERLAND Tel. 032 847 9550 Tel. Int. +41 32 847 9550 Telefax +41 32 847 9569 e-mail: http://www.intersema.ch NOTICE Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such applications will be suitable for the use specified without further testing or modification. DA7801_005.doc 00007801345 ECN 743 May 05th, 2005 4/4