Models 22, 23 Low Pressure PC Board Mountable Pressure Sensor þ Medical Instrumentation 0-10" H2O to 0-1 PSI þ HVAC þ Factory Automation þ Process Control þ Avionics þ Air Flow Management 0-100 mV Output Low Cost Temperature Compensated DESCRIPTION The Models 22 and 23 are temperature compensated, piezoresistive silicon pressure sensors packaged in TO-8 configurations. They provide excellent performance and longterm stability. Integral temperature compensation is provided over a range of 0-50°C using a laser-trimmed ceramic compensation board. An additional laser-trimmed resistor is included in the Model 23 which can be used to adjust the gain of an external differential amplifier and provide sensitivity interchangeability of ±1%. The sensing element used in low pressure Models 22 and 23 has a double bossed design that produces a high sensor output of 100 mV (typical) at 1 PSI. The Models 12 and 13 are also available in ranges up to 0250 PSI. For sensors in a dual-in-line package please refer to the FEATURES Models 1210 and 1220. For additional information regarding þ Solid State Reliability þ 100mV Output Span þ Interchangeable þ Temperature Compensated þ Low Power uncompensated sensors, please contact the factory. DIMENSIONS STANDARD RANGES Range psi 0 to 1 ● 0 to 10 1-24 in H2O ● TO-8 – Low Pressure Models 22, 23 Low Pressure PC Board Mountable Pressure Sensor PERFORMANCE SPECIFICATIONS Supply Current: 1.5mA Ambient Temperature: 25°C (Unless otherwise specified) PRESSURE RANGE 0 - 10 in H2O 0 - 1 psi PARAMETERS Full Scale Output Span MIN TYP MAX MIN TYP MAX UNITS NOTES 75 100 150 25 35 50 mV 1 2 ±mV 2 0.1 ±% Span 3 ±% Span Zero Pressure Output 2 Pressure Non-linearity 0.1 Pressure Hysteresis 0.25 0.01 0.05 4400 6000 Temperature Error – Span 0.5 Temperature Error – Zero 0.5 Input & Output Resistance 2500 Thermal Hysteresis – Zero 0.1 Supply Current 1.5 0.05 0.01 0.1 4400 6000 Ω 1.0 0.5 1.0 ±% Span 4, 5 1.0 1.0 3.0 ±% Span 4, 5 ±% Span 4 2.0 1.5 2500 0.2 2.0 mA Response Time (10% TO 90%) 1.0 1.0 mS 5 Output Noise 1.0 1.0 µV p-p 6 Output Load Resistance Insulation Resistance (50 VDC) 2 2 MΩ 50 50 MΩ Long Term Stability 0.2 Pressure Overload 0.5 20 Operating Temperature 8 ±% Span/yr 20 psi –40°C to +125°C Storage Temperature –50°C to +150°C Media Non-corrosive Gases Compatible with Wetted Materials Weight 3 Grams 9 Notes 1. Output span of unamplified sensor. 5. 2. For most models, compensation resistors are in an integral part of the sensor package; no additional external resistors are required. Test pins must be kept open. 6. 10 Hz to 1 kHz. 7. 0-10" Water column performance is based on testing at 1 psi full scale pressure. 3. Best Fit Straight Line. 8. Between case and sensing element. 4. Temperature range: 0-50°C in reference to 25°C. 9. Wetted materials are glass, ceramic, silicon, RTV, nickel, and aluminum. CONNECTIONS M od el 2 2 For a zero-to-full scale pressure step change. ORDERING INFORMATION 23A - 001 G Type (G = Gage) Pressure Range (001 or 10WC) (1 psi or 10" H2O) Model (23 or 22) (with or without gain set) APPLICATION SCHEMATIC Mo d el 2 3 April 2000 TO-8 – Low Pressure 1-25