Sensortechnics FBAL001DB Mass flow sensors for gas Datasheet

FBA Series
Mass flow sensors for gases
FEATURES
· Ranges 0...30 to 0...±1000 sccm1
· 1...5 V or 1...3.75 V output
· Actual mass flow sensing
· Sensortechnics PRO services
MEDIA COMPATIBILITY
To be used with dry gases only
The FBA series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
ELECTRICAL CONNECTION
Maximum ratings
Supply voltage2
Power consumption
FBAL001DB
all others
8 to 15 V
typ. 10 ±0.01 V
P2
typ. 100 mW
typ. 50 mW, max. 60 mW
Temperature limits
Operating
Storage
-25 to 85°C
-40 to 90°C
Mechanical shock
100 g (5 drops, 6 axes)
Note:
1
sccm denotes standard cubic centimeters per minute
2
Output voltage is ratiometric to supply voltage
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P1
1 2 3
Pin 1: Vout
Pin 2: +V s
Pin 3: GND
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FBA Series
Mass flow sensors for gases
FLOW SENSOR CHARACTERISTICS3
(VS = 10 ±0.01 V, TA = 25°C)
Output voltage
@ trim point
Part no.
Flow range
(full scale)
Max. flow change4
FBAM200DU
2 0 0 sccm
5.0 l/sec
FBAM030DU
3 0 sccm
5.0 l/sec
F B A L001D U
1 0 0 0 sccm
5.0 l/sec
5 V @ 1 0 0 0 sccm
F B A L001D B
±1000 sccm
5.0 l/sec
5 ±0.15 V
5 V @ 2 0 0 sccm
3.4 V @ 25 sccm
PERFORMANCE CHARACTERISTICS
(VS = 10 ±0.01 V, TA = 25°C)
Characteristics
Zero offset
Repeatability and hysteresis
Min.
Typ.
Max.
FBAM200DU
0.95
1.0
1.05
FBAM030DU
0.90
1.0
1.10
F B A L001D U
0.90
1.0
1.10
F B A L001D B
2.95
3.0
3.05
FBAM200DU
±0.5
all others
±1.0
(combined)
Temperature effects
Offset
Span
-25 to 85 °C5
-25 to 25 °C
25 to 85 °C
Response time
FBAM030DU
±100
F B A L001D B
±50
all others
±25
-4.0
FBAM030DU
±5.0
FBAL001...
-5.0
FBAM200DU
4.0
FBAM030DU
±5.0
FBAL001...
5.0
Common mode pressure
1.0
V
% reading
mV
FBAM200DU
6
Unit
% reading
3.0
ms
25
p si
Notes:
3
A 5 micron filter is recommended for all devices.
4
Maximum allowable rate of flow change to prevent damage.
5
Shift is relative to 25 °C.
6
Initial warm-up time for signal conditioned circuitry is 1 minute max.
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FBA Series
Mass flow sensors for gases
FLOW SPECIFICATIONS
(VS = 10 ±0.01 V, TA = 25°C)
FBAM200DU
Press.
(mbar)
Flow
(sccm)7
0.49
200
0.42
175
0.35
150
0.28
125
FBAM030DU
FBAL001DU
Tol.
(± VDC)
Press.
(mbar)
Flow
(sccm)7
Nom.
(VDC)
Tol.
(± VDC)
5.00
0.15
2.50
30
3.75
4.80
0.16
1.70
20
2.90
4.50
0.17
0.84
10
1.95
4.17
0.18
0.42
5
1.50
Nom.
(VDC)
Press.
(mbar)
Flow
(sccm)7
0.70
3.40
1000
5.00
0.45
2.90
900
4.90
0.20
2.40
800
4.80
0.10
2.00
700
4.66
Nom.
(VDC)
FBAL001DB
Press.
(mbar)
Flow
(sccm)7
0.15
3.49
1000
5.00
0.15
0.16
2.42
800
4.82
0.18
0.17
1.59
650
4.67
0.20
0.18
0.83
400
4.42
0.20
Tol.
(± VDC)
Nom.
(VDC)
Tol.
(± VDC)
0.21
100
3.75
0.19
0.34
4
1.40
0.08
1.60
600
4.42
0.19
0.31
200
3.96
0.15
0.14
75
3.27
0.19
0.26
3
1.30
0.08
1.20
500
4.18
0.20
0.00
0
3.00
0.05
0.09
50
2.67
0.17
0.17
2
1.20
0.07
0.80
400
3.82
0.21
-0.31
-200
2.03
0.18
0.04
25
1.90
0.13
0.08
1
1.10
0.06
0.54
300
3.41
0.19
-1.59
-600
1.35
0.25
0.00
0
1.00
0.05
0.00
0
1.00
0.05
0.31
200
2.96
0.17
-2.42
-800
1.15
0.30
0.12
100
2.30
0.14
-3.44
-1000
1.00
0.35
0.00
0
1.00
0.10
Note:
7
Devices are calibrated in mass flow. Tolerance values apply to calibration type only.
OUTPUT VS. FLOW CURVES
FBAM200DU
FBAM030DU
FBAL001DU
FBAL001DB
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FBA Series
Mass flow sensors for gases
OUTLINE DRAWING
7.60
(0.30)
6.3
(0.25)
2.8
(0.11)
1.40
(0.055)
2.9
(0.114)
1.8
(0.07)
5.1
(0.20)
8.3
(0.325)
54.4
(2.14)
P1
8.4
(0.33)
P2
31.5
(1.24)
23.6
(0.93)
2.8
(0.11)
1.0
(0.04)
1 2 3
0.6
(0.025)
1.52
(0.06)
2.5
(0.10)
5.1
(0.20)
4.1
(0.16)
7.4
(0.29)
23.9
(0.94)
30.5
(1.20)
12.7
(0.50)
15.5
(0.61)
third angle projection
mass: approx. 10.8 g
dimensions in mm (inches)
Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and
results in positive output.
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FBA Series
Mass flow sensors for gases
GAS CORRECTION FACTORS8
Gas type
Correction factor (approx.)
Helium (He)
Hydrogen (H2)
Argon (Ar)
Nitrogen (N2)
Oxygen (O2)
Ai r
Nitric oxide (NO)
Carbon monoxide (CO)
Methane (CH4)
Ammonia (NH3)
Nitrous oxide (N2O)
Nitrogen dioxide (NO2)
Carbon dioxide (CO2)
0.59
0.79,10
0.95
1.0
1.0
1.0
1.0
1.0
1.1
1.1
1.35
1.35
1.35
Notes:
8
Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
9
When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:
Hydrogen typ. 12 V, Helium typ. 15 V
10
Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
ORDERING INFORMATION - AVAILABLE LISTINGS
Note:
Preferred listings are highlighted in grey
Flow range
Dry gas
0...30 sccm
FBAM030DU
0...200 sccm
FBAM200DU
0...1000 sccm
F B A L001D U
0...±1000 sccm
F B A L001D B
Sensortechnics PRO services:
· Extended guarantee period of 2 years
· Improved performance characteristics
· Custom product modifications and adaptations even for small quantities
· Advanced logistics models for supply inventory and short delivery times
· Technical support through application engineers on the phone or at your site
· Fastest possible technical response for design and QA engineers
... plus other services on request
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
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