PerkinElmer HSH3500PILO Lamps for photolithography Datasheet

Imaging
D A T A S H E E T
Lighting
Telecom
Mercury Short Arc Lamps
HSH3500PILO
Lamps for Photolithography
Description
PerkinElmer Optoelectronics is a leading
manufacturer of mercury short arc lamps
ranging in output power from 1000 to
8000 watts. These lamps are used in the
production of printed circuit boards, liquid
crystal displays and semiconductors. The
HSH Series lamps are used worldwide in
microlithography systems manufactured
by ASML, Canon, GCA, Nikon, Karl
Suss, Ultratech Stepper, and SVG. With
extremely high stability, uniform output
distribution and extended lamp lifetimes,
the HSH Series has become the lamp
choice of many of the world’s leading
semiconductor manufacturers.
Applications
hours to more than two thousand hours.
The HSH Series provides longer lifetimes,
outstanding uniformity, and excellent
spectral quality which results in increased
throughput, reduced downtime and an
overall reduction in the cost of ownership.
PerkinElmer has been a leading manufacturer of high intensity arc lamps for more
than 30 years and is a premier lamp supplier for solid state lasers, medical equipment, NASA space systems and
microlithography. PerkinElmer has
steadily advanced lamp performance from
1000 watts to 8000 watts. With the introduction of new materials and proprietary
manufacturing processes, we have extended lamp lifetimes form several hundred
• Microlithography
.
www.perkinelmer.com/opto
HSH3500PILO
Physical Specifications
Operational Specifications
Description
Nominal
Power
3500 watts
Range
Current
152 amps (DC)
135-175 amps (DC)
Voltage
23 volts (DC)
20-26 volts (DC)
Current Ripple
3%
Temperature (at base)
220ºC (max)
Lifetime
1500 hours
Specification
4.5 mm (max)
40 mm Dia (M6)
32.5 mm Dia (M12)
Description
Arc Gap
Anode Base
Cathode Base
Spectral Output
100
90
Dimensions
Relative Intensity (%)
80
ANODE (+)
END UP
70
60
50
40
30
20
10
0
250
300
350
400
450
500
550
600
650
700
750
Wavelength (nm)
324
Max
Typical Performance Graph
100
Relative Intensity (%)
90
155.5
CATHODE (-)
END DOWN
80
70
60
50
40
30
20
10
0
Ø81.5
0
All dimensions are in millimeters.
200
400
600
800
1000
1200
1400
Hours of Operation
Notes
Part Number References
1. Lamp must be operated with anode end up and
cathode end down. Inclination of lamp axis to vertical must not exceed 10º.
Used In
ASML 5500 / 200B, /250C
Replaces
SUV-3500-PIL
HBO-3500-W/PI
PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of
designing a lamp specifically suited to your needs.
For more information e-mail us at [email protected] or visit our web site at www.perkinelmer.com/opto.
All values are nominal; specifications subject to change without notice.
USA:
PerkinElmer Optoelectronics
44370 Christy St.
Fremont, CA 94538
Phone: (510) 979-6500
Fax: (510) 687-1140
Europe:
PerkinElmer Optoelectronics GmbH
Wenzel-Jaksch-Str. 31
65199 Wiesbaden
Germany
Phone: +49 611 492 0
Fax: +49 611 492 177
Asia:
PerkinElmer Optoelectronics
47 Ayer Rajah Crescent #06-12
Singapore 139947
Phone: +65 775 2022
Fax: +65 775 1008
© 2000 PerkinElmer inc. All rights reserved.
.
DS-193 Rev C 1101
www.perkinelmer.com/opto
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