Intersema MS5401-BPF Miniature smd pressure sensor Datasheet

MS54xx
MINIATURE SMD PRESSURE SENSOR
•
•
•
•
•
•
•
1, 7, 12, and 70 bar absolute pressure range
Uncompensated
Piezoresistive silicon micromachined sensor
Miniature surface mount
Ceramic or PCB carrier
Low noise, high sensitivity, high linearity
RoHS-compatible & Pb-free*
DESCRIPTION
The MS54xx SMD pressure sensor series is designed for pressure sensor systems with highest demands on
resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a
6.2 x 6.4 mm ceramic carrier or a 6.1 x 6.3 mm PCB protected by a metal or plastic cap. The MS54xx can be
delivered in a high sensitivity version giving a maximal output voltage or in a high linearity version. Both versions
provide an output voltage directly proportional to the applied pressure.
Carrier
Ceramic
PCB
Full Scale
Pressure
High Sensitivity Versions
High Linearity Versions
Product
Code
Full Scale Span /
Linearity
Product
Code
Full Scale Span /
Linearity
1 bar
MS5401-AM
240 mV / ±0.2% FS
MS5401-BM
150 mV / ±0.05% FS
7 bar
MS5407-AM
392 mV / ±0.2% FS
MS5412-BM
150 mV / ±0.05% FS
MS5401-BPF
150 mV / ±0.05% FS
12 bar
70 bar
MS5470-AM
310 mV / ±0.25% FS
1 bar
MS5401-APF
240 mV / ±0.2% FS
FEATURES
• Low cost SMD package
• Small size
• High reliability, low drift
• -40°C to +125 °C operation range
• Gel protection against humidity and water
APPLICATIONS
• Brake systems
• High resolution altimeters, variometers
• Barometers
• Engine management
• Water proof watches and diving computers
• Tire pressure monitoring systems (TPMS)
*
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
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PIN CONFIGURATION
3: VS+
4: OUT+
1: OUT-
2: GND
PIN DESCRIPTION
Pin Name
Pin No.
OUTGND
VS+
OUT+
1
2
3
4
Function
Negative output voltage of Wheatstone bridge
Ground
Supply voltage of Wheatstone bridge
Positive output voltage of Wheatstone bridge
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Overpressure MS5401-AM
MS5401-APF
MS5401-BPF
MS5401-BM
MS5407-AM
MS5412-BM
MS5470-AM
Symbol
VS+
TS
P
Conditions
o
Ta = 25 C
Ta = 25 oC
Min
Max
Unit
-40
20
+125
V
o
C
-
5
5
5
10
21
30
180
bar
Notes
(1)
(2)
-
NOTES
1) The MS5401-BM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 11 bar in
salt water or 100 m water respectively.
2) The MS5407-AM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of
21 bar in salt water or 200 m water respectively.
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ELECTRICAL CHARACTERISTICS
HIGH SENSITIVITY VERSIONS
(VS+ = 5 V; Ta = 25°C )
Parameter
Min
Typ
Max
Unit
0
-
1
bar
Full-scale span (FS)
190
240
290
mV
Sensitivity
190
240
290
mV/bar
Linearity
-
±0.15
±0.4
% FS
Operating pressure range
0
-
7
bar
Full-scale span (FS)
322
392
462
mV
Sensitivity
46
56
66
mV/bar
Linearity
-
±0.15
±0.4
% FS
Operating pressure range
0
-
70
bar
Full-scale span (FS)
250
310
370
mV
Sensitivity
3.6
4.4
5.3
mV/bar
Operating pressure range
MS5401-AM
MS5401-APF
MS5407-AM
MS5470-AM
Linearity
All Ranges
Notes
1, 6
1, 6
-
±0.25
±0.50
% FS
Operating temperature range
-40
-
125
°C
Zero pressure offset
-40
0
40
mV
Pressure hysteresis
-
-
±0.20
% FS
2, 6
Temperature hysteresis
-
0.3
0.8
% FS
3, 6
Repeatability
-
-
±0.20
% FS
4, 6
3.0
3.4
3.8
+2 400
2 900
+3 300
kΩ
ppm/°C
5, 6
-1 500
-80
-1 900
-
-2 300
+80
ppm/°C
µV/°C
5, 6
5, 6
Bridge resistance
Temperature coefficient of
resistance
Temperature coefficient of span
Temperature coefficient of offset
1, 6
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure
range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
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ELECTRICAL CHARACTERISTICS (CONT.)
HIGH LINEARITY VERSIONS
(VS+ = 5 V; Ta = 25°C )
Parameter
Min
Type
Max
Unit
Notes
0
-
1
bar
8
Full-scale span (FS)
120
150
180
mV
Sensitivity
120
150
180
mV/bar
Linearity
-
±0.05
±0.2
% FS
1, 6
Operating pressure range
0
-
12
bar
8
Full-scale span (FS)
120
150
180
mV
Sensitivity
10
12.5
15
mV/bar
±0.05
±0.15
% FS
Operating pressure range
MS5401-BM
MS5401-BPF
MS5412-BM
Linearity
All Ranges
1, 6
Operating temperature range
-40
-
125
°C
Zero pressure offset
-40
0
40
mV
Pressure hysteresis
-
-
±0.20
% FS
Temperature hysteresis
-
0.3
0.8
% FS
3, 6
Repeatability
-
-
±0.20
% FS
4, 6, 7
3.0
3.4
3.8
+2 400
2 900
+3 300
kΩ
ppm/°C
5, 6
-1 500
-80
-1 900
-
-2 300
+80
ppm/°C
µV/°C
5, 6
5, 6
Bridge resistance
Temperature coefficient of
resistance
Temperature coefficient of span
Temperature coefficient of offset
2, 6
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure
range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
7) MS5412-BM: Max. 0.3% FS
8) This sensor family is optimised for the linearity; it is suitable for applications with higher pressure where the
linearity requirement is less critical.
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APPLICATION INFORMATION
GENERAL
The MS54xx is a miniaturised absolute pressure sensor series which has been designed as a surface mount
device (SMD). Its main advantages are the high performance of the semiconductor sensor and a design which
makes it suitable for applications requiring small dimensions and cost efficiency.
The sensor element of the MS54xx consists of a micromachined silicone membrane with Pyrex glass
wafer-bonded under vacuum to the back side for reference pressure. Implanted resistors make use of the piezoresistive effect to sense pressure applied to the membrane. The sensor is mounted using a special process
allowing best offset stability making the device suitable for direct PCB assembly.
Typical applications for this miniaturised pressure sensor MS54xx are altitude measurements and the
measurement of atmospheric reference pressure in medical and industrial equipment as well as in automotive
and household applications, consumer electronics and pneumatics.
Full Scale
Pressure
High Sensitivity Versions
(MS54xx-Axx)
1 bar
Variometer, Altimeter, Barometer
7 bar
Divers Watch, Tire Pressure,
Electronic Scale
12 bar
70 bar
High Linearity Versions
(MS54xx-Bxx)
High End Altimeter,
Medical Instrumentation
High End Electronic Scale
Pneumatic Brake, Diving Computer
Engine Control, Diving Computer
HUMIDITY, WATER PROTECTION
MS54xx-xM with METAL CAP:
The MS54xx-AM / -BM has an anticorrosive and antimagnetic metallic protection cap filled with silicone gel for
enhanced protection against humidity. The properties of this gel ensure function of the sensor even when in
direct water contact. This feature can be useful for waterproof watches or other applications, where direct water
contact cannot be avoided. Nevertheless the user should avoid drying of hard materials like for example salt
particles on the silicone gel surface. In this case it is advisable to rinse with clean water afterwards. Special care
has to be taken not to mechanically damage the gel. Damaged gel may lead to air entrapment and
consequently to unstable sensor signal, especially if the damage is close to the sensor surface.
The metal cap is fabricated of special anticorrosive alloy in order to avoid any galvanic effects within the end
product. The MS5401-BM is qualified referring to the ISO Standard 2281 and can withstand a pressure of 11
bar in salt water. The concentration of the sea water used for the qualification is 41 g of sea salt per 1 litre of DI
water. The MS5407-AM satisfies salt-water testing with a pressure capability of 21 bar.
For underwater operations as specified in ISO Standard 2281 it is important to seal the sensor with a rubber Oring around the metal cap. Any salt water reaching the contact side (ceramic and pads) of the sensor could lead
to permanent damage. Especially for "water-resistant 100 m" watches and for diving computers, it is
recommended to provide a stable mechanical pusher from the backside of the sensor; otherwise the
overpressure may push the sensor backwards and even deform the electronic board on which the sensor is
mounted.
MS54xx-xPx with PLASTIC CAP:
The sensor die of the MS54xx-xPx is protected by a drop of silicone gel. The properties of this gel ensure
function of the sensor even in a humid environment.
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LIGHT SENSITIVITY
The MS54xx is sensitive to sunlight (visible and near-infrared spectrum). This is due to the strong photo effect of
silicon. As the effect is reversible there will be no damage, but the user has to take care that in the final product
the sensor cannot be exposed to direct light during operation as it effects the measurement. This can be
achieved for instance by placing mechanical parts with holes in such that light cannot pass.
CONNECTION TO PCB
The package outline of the module enables the use of a flexible PCB to connect it. This can be important for
applications in watches and other special devices, and will also reduce mechanical stress on the device.
For applications subjected to mechanical shock, it is recommended to enhance the mechanical reliability of the
solder junctions by covering the rim or the corners of MS54xx ceramic substrate with glue or globtop-like
material.
SOLDERING
Please refer to the application note AN808 for all soldering issues.
CLEANING
The MS54xx has been manufactured under clean-room conditions. Each device is inspected for homogeneity
and cleanness of the silicone gel. It is therefore recommended to assemble the sensor under class 10 000 or
better conditions. Should this not be possible, it is recommended to protect the sensor opening during assembly
from entering particles and dust. To avoid cleaning of the PCB, solder paste of type “no-clean” must be used.
Cleaning might damage the sensor.
RECOMMENDED PAD LAYOUT
Recommended pad layout for soldering of the MS54xx on a printed circuit board
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PACKAGE OUTLINES
VERSIONS WITH CERAMIC CARRIER AND METAL CAP
Device package outlines of MS54xx-AM and MS54xx-BM
(M = anticorrosive and antimagnetic stainless steel cap)
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VERSIONS WITH PCB CARRIER AND PLASTIC CAP
Device package outlines of MS54xx-APF and MS54xx-BPF
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PACKING
The MS54xx is packed in 51 cm (20-inch) antistatic plastic tubes with rubber end-plugs of different colours: one
green and one black. The dot on the carrier next to Pin 1 is facing the green end-plug. Each tube contains 80
sensors. The tubes are marked "ANTISTATIC" and have an information label.
See the drawings below for more details.
PACKING TUBE OUTLINES
4.4
Information label
8.2
510
All measures in mm
ORDERING INFORMATION
MS5401-AM
MS5401-APF
MS5401-BM
MS5401-BPF
MS5407-AM
MS5412-BM
MS5470-AM
Ax x
Bx x
x Mx
xPx
xx F
Miniature Pressure Sensor 1 bar, high sensitivity, ceramic carrier
Miniature Pressure Sensor 1 bar, high sensitivity, PCB carrier
Miniature Pressure Sensor 1 bar, high linearity, ceramic carrier
Miniature Pressure Sensor 1 bar, high linearity, PCB carrier
Miniature Pressure Sensor 7 bar, high sensitivity, ceramic carrier
Miniature Pressure Sensor 12 bar, high linearity, ceramic carrier
Miniature Pressure Sensor 70 bar, high sensitivity, ceramic carrier
Art.-Nr. 325401001
Art.-Nr. 325401004
Art.-Nr. 325401000
Art.-Nr. 325401005
Art.-Nr. 325407000
Art.-Nr. 325412000
Art.-Nr. 325470000
= high sensitivity
= high linearity
= anticorrosive and antimagnetic metallic cap
= plastic cap
= PCB carrier
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CONTACTS
Factory and European Sales office
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 Bevaix
Switzerland
Phone:
+41 32 847 9550
Fax:
+41 32 847 9569
e-mail:
Website: www.intersema.ch
USA
Measurement Specialties Inc.
1000 Lucas Way
Hampton, VA 23666
USA
Phone:
Fax:
e-mail:
Website:
+1 800 555 1551
+1 757 766 4297
[email protected]
www.meas-spec.com
Phone:
Fax:
e-mail:
Website:
+86 755 8330 1004
+86 755 8330 6797
[email protected]
www.meas-spec.com
ASIA
Measurement Specialties (China), Ltd.
F1.6-4D, Tian An Development
Compound
Shenzhen, China 518048
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance
and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys
no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from
patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty
that such applications will be suitable for the use specified without further testing or modification.
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